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Thomas Dehaeze
2020-09-18 11:43:07 +02:00
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content/zettels/position_sensors.md
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## Reviews of Relative Position Sensors {#reviews-of-relative-position-sensors}
- Fleming, A. J., A review of nanometer resolution position sensors: operation and performance ([Fleming 2013](#org1ee8f98)) ([Notes]({{< relref "fleming13_review_nanom_resol_posit_sensor" >}}))
- Fleming, A. J., A review of nanometer resolution position sensors: operation and performance ([Fleming 2013](#org81e91f9)) ([Notes]({{< relref "fleming13_review_nanom_resol_posit_sensor" >}}))
<a id="table--tab:characteristics-relative-sensor"></a>
<div class="table-caption">
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## Inductive Sensor (Eddy Current) {#inductive-sensor--eddy-current}
| Manufacturers | Links | |
| Manufacturers | Links | Country |
|----------------|-------------------------------------------------------------------------------------------|---------|
| Micro-Epsilon | [link](https://www.micro-epsilon.com/displacement-position-sensors/eddy-current-sensor/) | Germany |
| Lion Precision | [link](https://www.lionprecision.com/products/eddy-current-sensors) | USA |
@@ -117,9 +117,9 @@ Description:
| Renishaw | 0.2 | 1 | 6 | 1 |
| Picoscale | 0.2 | 2 | 2 | 1 |
([Jang and Kim 2017](#org3ee30b7))
([Jang and Kim 2017](#org64791e2))
<a id="org9edecbb"></a>
<a id="org75192f1"></a>
{{< figure src="/ox-hugo/position_sensor_interferometer_precision.png" caption="Figure 1: Expected precision of interferometer as a function of measured distance" >}}
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## Bibliography {#bibliography}
<a id="org1ee8f98"></a>Fleming, Andrew J. 2013. “A Review of Nanometer Resolution Position Sensors: Operation and Performance.” _Sensors and Actuators a: Physical_ 190 (nil):106–26. <https://doi.org/10.1016/j.sna.2012.10.016>.
<a id="org81e91f9"></a>Fleming, Andrew J. 2013. “A Review of Nanometer Resolution Position Sensors: Operation and Performance.” _Sensors and Actuators a: Physical_ 190 (nil):106–26. <https://doi.org/10.1016/j.sna.2012.10.016>.
<a id="org3ee30b7"></a>Jang, Yoon-Soo, and Seung-Woo Kim. 2017. “Compensation of the Refractive Index of Air in Laser Interferometer for Distance Measurement: A Review.” _International Journal of Precision Engineering and Manufacturing_ 18 (12):1881–90. <https://doi.org/10.1007/s12541-017-0217-y>.
<a id="org64791e2"></a>Jang, Yoon-Soo, and Seung-Woo Kim. 2017. “Compensation of the Refractive Index of Air in Laser Interferometer for Distance Measurement: A Review.” _International Journal of Precision Engineering and Manufacturing_ 18 (12):1881–90. <https://doi.org/10.1007/s12541-017-0217-y>.