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content/article/steinbuch98_advan_motion_contr.md
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content/article/steinbuch98_advan_motion_contr.md
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title = "Advanced motion control: an industrial perspective"
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author = ["Thomas Dehaeze"]
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Reference
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: ([Steinbuch and Norg 1998](#org162af57))
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Author(s)
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: Steinbuch, M., & Norg, M.
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Year
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: 1998
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## Bibliography {#bibliography}
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<a id="org162af57"></a>Steinbuch, M., and M.L. Norg. 1998. “Advanced Motion Control: An Industrial Perspective.” _European Journal of Control_ 4 (4):278–93. <https://doi.org/10.1016/s0947-3580(98)70121-9>.
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content/inproceedings/heertjes20_contr.md
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content/inproceedings/heertjes20_contr.md
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title = "Control of wafer scanners: methods and developments"
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author = ["Thomas Dehaeze"]
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Reference
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: ([Heertjes et al. 2020](#org38a977c))
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Author(s)
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: Heertjes, Marcel Fran\ccois, Butler, H., Dirkx, N., van der Meulen, S., Ahlawat, R., O'Brien, K., Simonelli, J., …
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Year
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: 2020
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## Bibliography {#bibliography}
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<a id="org38a977c"></a>Heertjes, Marcel François, Hans Butler, NJ Dirkx, SH van der Meulen, R Ahlawat, K O’Brien, J Simonelli, KT Teng, and Y Zhao. 2020. “Control of Wafer Scanners: Methods and Developments.” In _2020 American Control Conference (ACC)_, 3686–3703. IEEE.
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