digital-brain/content/inproceedings/heertjes20_contr.md

+++
title = "Control of wafer scanners: methods and developments"
author = ["Thomas Dehaeze"]
draft = true
+++

Tags
:


Reference
: ([Heertjes et al. 2020](#org3f3475f))

Author(s)
: Heertjes, Marcel Fran\ccois, Butler, H., Dirkx, N., van der Meulen, S., Ahlawat, R., O'Brien, K., Simonelli, J., …

Year
: 2020


## Bibliography {#bibliography}

<a id="org3f3475f"></a>Heertjes, Marcel François, Hans Butler, NJ Dirkx, SH van der Meulen, R Ahlawat, K O’Brien, J Simonelli, KT Teng, and Y Zhao. 2020. “Control of Wafer Scanners: Methods and Developments.” In _2020 American Control Conference (ACC)_, 3686–3703. IEEE.
-												Update Content - 2021-09-09

											
										
										
											2021-09-09 16:00:10 +02:00
+								+++
 								title = "Control of wafer scanners: methods and developments"
 								author = ["Thomas Dehaeze"]
-												Update many files

PhDthesis were categorized as articles.
Add "fron matter" to specify zettels category

											
										
										
											2021-09-29 22:30:09 +02:00
+								draft = true
-												Update Content - 2021-09-09

											
										
										
											2021-09-09 16:00:10 +02:00
+								+++
 								Tags
 								:
 								Reference
-												Update many files

PhDthesis were categorized as articles.
Add "fron matter" to specify zettels category

											
										
										
											2021-09-29 22:30:09 +02:00
+								: ([Heertjes et al. 2020](#org3f3475f))
-												Update Content - 2021-09-09

											
										
										
											2021-09-09 16:00:10 +02:00
 								Author(s)
 								: Heertjes, Marcel Fran\ccois, Butler, H., Dirkx, N., van der Meulen, S., Ahlawat, R., O'Brien, K., Simonelli, J., …
 								Year
 								: 2020
 								## Bibliography {#bibliography}
-												Update many files

PhDthesis were categorized as articles.
Add "fron matter" to specify zettels category

											
										
										
											2021-09-29 22:30:09 +02:00
+								<a id="org3f3475f"></a>Heertjes, Marcel François, Hans Butler, NJ Dirkx, SH van der Meulen, R Ahlawat, K O’Brien, J Simonelli, KT Teng, and Y Zhao. 2020. “Control of Wafer Scanners: Methods and Developments.” In _2020 American Control Conference (ACC)_, 3686–3703. IEEE.