24 lines
630 B
Markdown
24 lines
630 B
Markdown
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title = "Control of wafer scanners: methods and developments"
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author = ["Thomas Dehaeze"]
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draft = false
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Tags
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:
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Reference
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: ([Heertjes et al. 2020](#org38a977c))
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Author(s)
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: Heertjes, Marcel Fran\ccois, Butler, H., Dirkx, N., van der Meulen, S., Ahlawat, R., O'Brien, K., Simonelli, J., …
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Year
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: 2020
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## Bibliography {#bibliography}
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<a id="org38a977c"></a>Heertjes, Marcel François, Hans Butler, NJ Dirkx, SH van der Meulen, R Ahlawat, K O’Brien, J Simonelli, KT Teng, and Y Zhao. 2020. “Control of Wafer Scanners: Methods and Developments.” In _2020 American Control Conference (ACC)_, 3686–3703. IEEE.
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