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Thomas Dehaeze 2021-07-22 11:34:05 +02:00
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13 changed files with 600 additions and 22 deletions

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@ -888,15 +888,24 @@ CLOSED: [2021-07-21 mer. 17:43]
** Nano-Hexapod - Identified Dynamics ** Nano-Hexapod - Identified Dynamics
Diagonal + off-diagonal transfer function from Va to De (comp with model) \vspace{-1em}
#+attr_latex: :width \linewidth
[[file:figs/nano_hexapod_enc_bode_plot.pdf]]
** Nano-Hexapod - Force Sensors ** Nano-Hexapod - Force Sensors
Diagonal + off-diagonal transfer function from Va to Vs \vspace{-1em}
#+attr_latex: :width \linewidth
[[file:figs/nano_hexapod_iff_bode_plot.pdf]]
** Nano-Hexapod - Damped Dynamics ** Nano-Hexapod - Damped Dynamics
Damped and Undamped, Diagonal + off-diagonal transfer function from Va to De \vspace{-1em}
#+attr_latex: :width \linewidth
[[file:figs/nano_hexapod_damped_bode_plot.pdf]]
** DONE The Nano-Hexapod on top of the Micro-Station ** DONE The Nano-Hexapod on top of the Micro-Station
CLOSED: [2021-07-08 jeu. 11:33] CLOSED: [2021-07-08 jeu. 11:33]

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@ -1,4 +1,4 @@
% Created 2021-07-22 jeu. 10:15 % Created 2021-07-22 jeu. 11:33
% Intended LaTeX compiler: pdflatex % Intended LaTeX compiler: pdflatex
\documentclass[aspectratio=169, t]{clean-beamer} \documentclass[aspectratio=169, t]{clean-beamer}
\usepackage[utf8]{inputenc} \usepackage[utf8]{inputenc}
@ -59,14 +59,480 @@
\begin{document} \begin{document}
\maketitle \maketitle
\section*{Introduction}
\begin{frame}[label={sec:org289143a}]{The ID31 Micro Station}
\begin{center}
\includegraphics[scale=1,width=0.95\linewidth]{figs/micro_hexapod_render.pdf}
\end{center}
\begin{tikzpicture}[remember picture,overlay]
\node[anchor=north east, padding=5pt] at (current page.north east){%
\includegraphics[width=2em]{figs/icon_animation.pdf}};
\end{tikzpicture}
\end{frame}
\begin{frame}[label={sec:org582891f}]{Introduction - The Nano Active Stabilization System}
\textbf{Objective}: Improve the position accuracy from \(\approx 10\,\mu m\) down to \(\approx 10\,nm\) \newline
\textbf{Design approach}: ``Model based design'' / ``Predictive Design''
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nass-concept.pdf}
\end{center}
\end{frame}
\begin{frame}[label={sec:orgbb61f47}]{Overview of the Mechatronic Approach - Model Based Design}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nass_mechatronics_approach.png}
\end{center}
\end{frame}
\section{Conceptual Phase}
\begin{frame}[label={sec:orgaeb9beb}]{Outline - Conceptual Phase}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nass_mechatronics_approach_conceptual_phase.pdf}
\end{center}
\end{frame}
\begin{frame}[label={sec:orgf4201d6}]{Feedback Control - The Control Loop}
\vspace{-1em}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/classical_feedback_schematic.png}
\end{center}
\vspace{-1em}
\begin{columns}
\begin{column}{0.4\columnwidth}
\begin{tcolorbox}[title=Why Feedback?]
\begin{itemize}
\item Model uncertainties
\item Unknown disturbances
\end{itemize}
\end{tcolorbox}
\end{column}
\begin{column}{0.6\columnwidth}
\begin{tcolorbox}[title=Every elements can limit the performances]
\begin{itemize}
\item Drivers, Actuators, Sensors
\item Mechanical System
\item Controller
\end{itemize}
\end{tcolorbox}
\end{column}
\end{columns}
\end{frame}
\begin{frame}[label={sec:org79cdad4}]{Noise Budgeting and Required Control Bandwidth}
\vspace{-1em}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/identification_control_noise_budget.red.pdf}
\end{center}
\end{frame}
\begin{frame}[label={sec:org176e59b}]{Limitation of the Controller Bandwidth?}
\begin{columns}
\begin{column}{0.6\columnwidth}
\vspace{-2em}
\only<1>{
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/control_bandwidth_1_classical.pdf}
\end{center}
}\only<2>{
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/control_bandwidth_2_above_res.pdf}
\end{center}
}\only<3>{
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/control_bandwidth_3_next_gen.pdf}
\end{center}
}
\end{column}
\begin{column}{0.4\columnwidth}
\vspace{-2em}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/test_bench_apa_simple.pdf}
\end{center}
\only<1>{
\begin{tcolorbox}[title=Typical Approach, fontupper=\small]
``As stiff as possible'' \newline
Simple controller (e.g. PID)
\end{tcolorbox}
}\only<2>{
\begin{tcolorbox}[title=Alternative Approach, fontupper=\small]
Limited by complex dynamics\newline
Model based controller
\end{tcolorbox}
}\only<3>{
\begin{tcolorbox}[title=Next-Gen Systems, fontupper=\small]
Active research topic\newline
Complex controllers
\end{tcolorbox}
}
\end{column}
\end{columns}
\end{frame}
\begin{frame}[label={sec:org21bb7d1}]{Soft or Stiff \(\nu\text{-hexapod}\) ? Interaction with the \(\mu\text{-station}\)}
\vspace{-3em}
\begin{columns}
\begin{column}{0.3\columnwidth}
\onslide<1->{
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nass_example_uncertainty_support_only_hexapod.pdf}
\end{center}
}\onslide<2->{
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nass_example_uncertainty_support.pdf}
\end{center}
}
\end{column}
\begin{column}{0.7\columnwidth}
\onslide<1->{
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nass_example_alone.pdf}
\end{center}
\vspace{-2em}
}\onslide<2->{
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nass_example_support_uncertainty_d_L.pdf}
\end{center}
}
\end{column}
\end{columns}
\end{frame}
\begin{frame}[label={sec:org12c046c}]{Complexity of the Micro-Station Dynamics (Model Analysis)}
\vspace{-1em}
\begin{center}
\includegraphics[scale=1,width=0.95\linewidth]{figs/modes_annotated.png}
\end{center}
\begin{tikzpicture}[remember picture,overlay]
\node[anchor=north east, padding=5pt] at (current page.north east){%
\includegraphics[width=2em]{figs/icon_animation.pdf}};
\end{tikzpicture}
\end{frame}
\begin{frame}[label={sec:org1ffb21e}]{Control Strategy: HAC-LAC}
\vspace{-0.5em}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nass_schematic_test.pdf}
\end{center}
\vspace{-2.0em}
\begin{columns}
\begin{column}{0.5\columnwidth}
\begin{tcolorbox}[title=Low Authority Control]
\begin{itemize}
\item Collocated sensors/actuators
\item Guaranteed Stability
\item Adds damping
\item \(\searrow\) vibration near resonances
\end{itemize}
\end{tcolorbox}
\end{column}
\begin{column}{0.5\columnwidth}
\begin{tcolorbox}[title=High Authority Control]
\begin{itemize}
\item Position sensors
\item Complex dynamics
\item \(\searrow\) vibration in the bandwidth
\item Use transformation matrices
\end{itemize}
\end{tcolorbox}
\end{column}
\end{columns}
\end{frame}
\begin{frame}[label={sec:org4b89eaa}]{Multi-Body Models - Simulations}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/simscape_simulation.jpg}
\end{center}
\begin{tikzpicture}[remember picture, overlay]
\node[align=left, anchor=south east, text width=5.5cm,shift={(-1em, 1em)}] at (current page.south east){%
\begin{tcolorbox}
\begin{center}
Validation of the concept
\end{center}
\end{tcolorbox}};
\end{tikzpicture}
\begin{tikzpicture}[remember picture,overlay]
\node[anchor=north east, padding=5pt] at (current page.north east){%
\includegraphics[width=2em]{figs/icon_animation.pdf}};
\end{tikzpicture}
\end{frame}
\section{Detail Design Phase}
\begin{frame}[label={sec:org94436e6}]{Outline - Detail Design Phase}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nass_mechatronics_approach_detailed_phase.pdf}
\end{center}
\end{frame}
\begin{frame}[label={sec:org7d8abb1}]{Nano-Hexapod Overview - Key elements}
\vspace{2em}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nano_hexapod_elements.red.pdf}
\end{center}
\end{frame}
\begin{frame}[label={sec:orgf39c76d}]{Include Flexible Elements in a Multi-Body model}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/super_element_simscape.pdf}
\end{center}
\end{frame}
\begin{frame}[label={sec:orgc3f2ae5}]{Choice of Actuator - Amplifier Piezoelectric Actuator}
\vspace{-2em}
\begin{columns}
\begin{column}{0.5\columnwidth}
\scriptsize
\begin{center}
\begin{tabularx}{0.8\linewidth}{ccc}
\toprule
\textbf{Characteristic} & \textbf{Specs} & \textbf{Doc.}\\
\midrule
Axial Stiff. & \SI{\approx 2}{\newton/\micro\meter} & \SI{1.8}{\newton/\micro\meter}\\
Sufficient Stroke & \SI{> 100}{\micro\meter} & \SI{368}{\micro\meter}\\
Height & \SI{< 50}{\milli\meter} & \SI{30}{\milli\meter}\\
High Resolution & \SI{< 5}{\nano\meter} & \SI{3}{\nano\meter}\\
\bottomrule
\end{tabularx}
\end{center}
\normalsize
\vspace{-1em}
\begin{figure}[htbp]
\centering
\includegraphics[scale=1,width=0.9\linewidth]{figs/apa300ml_picture.jpg}
\caption{Picture of the APA300ML}
\end{figure}
\end{column}
\begin{column}{0.5\columnwidth}
\vspace{-1em}
\begin{columns}
\begin{column}{0.4\columnwidth}
\begin{figure}[htbp]
\centering
\includegraphics[scale=1,width=0.8\linewidth]{figs/2dof_apa_model.pdf}
\caption{2-DoF Model}
\end{figure}
\end{column}
\begin{column}{0.6\columnwidth}
\vspace{-1.6em}
\begin{figure}[htbp]
\centering
\includegraphics[scale=1,width=0.9\linewidth]{figs/mesh_APA_schematic.pdf}
\caption{APA Finite Element Model}
\end{figure}
\end{column}
\end{columns}
\begin{figure}[htbp]
\centering
\includegraphics[scale=1,width=\linewidth]{figs/mode_shapes_annotated.pdf}
\caption{Flexible Modes due to limited APA stiffness}
\end{figure}
\end{column}
\end{columns}
\end{frame}
\begin{frame}[label={sec:orge19396b}]{Flexible Joints - Specifications and Optimization}
\vspace{-2em}
\begin{columns}
\begin{column}{0.7\columnwidth}
\scriptsize
\begin{center}
\begin{tabularx}{0.9\linewidth}{cccc}
\toprule
\textbf{Goal} & \textbf{Stiffness} & \textbf{Specs} & \textbf{FEM}\\
\midrule
High DVF Damping & Axial & \SI{> 100}{\newton/\micro\meter} & 94\\
Low Coupling & Bending & \SI{< 100}{\newton\meter/\radian} & 5\\
Low Coupling & Torsion & \SI{< 500}{\newton\meter/\radian} & 260\\
Sufficient Stroke & Bending Stroke & \SI{> 1}{\milli\radian} & 20\\
\bottomrule
\end{tabularx}
\end{center}
\normalsize
\end{column}
\begin{column}{0.3\columnwidth}
\vspace{-2em}
\begin{figure}[htbp]
\centering
\includegraphics[scale=1,width=\linewidth]{figs/flexible_joint_dimensions.pdf}
\caption{Opt. geometry}
\end{figure}
\end{column}
\end{columns}
\vspace{-1em}
\begin{columns}
\begin{column}{0.45\columnwidth}
\vspace{-3em}
\begin{figure}[htbp]
\centering
\includegraphics[scale=1,width=\linewidth]{figs/location_top_flexible_joints.pdf}
\caption{Positioning of the top joint}
\end{figure}
\end{column}
\begin{column}{0.55\columnwidth}
\begin{figure}[htbp]
\centering
\includegraphics[scale=1,width=0.9\linewidth]{figs/flexible_joint_picture.jpg}
\caption{Picture of the joint}
\end{figure}
\end{column}
\end{columns}
\end{frame}
\begin{frame}[label={sec:org5368d2f}]{Instrumentation}
\vspace{-1em}
\begin{columns}
\begin{column}{0.33\columnwidth}
\begin{figure}[htbp]
\centering
\includegraphics[scale=1,height=2.2cm]{figs/amplifier_PD200.jpg}
\caption{PiezoDrive - PD200 Amplifier}
\end{figure}
\vspace{-1em}
\tiny
\begin{center}
\begin{tabularx}{0.75\linewidth}{lc}
\toprule
\textbf{Characteristics} & \textbf{Manual}\\
\midrule
Gain & \num{20}\\
Noise & \SI{0.7}{\milli\volt\rms}\\
Small Signal BW & \SI{7.4}{\kilo\hertz}\\
Large Signal BW & \SI{300}{\hertz}\\
\bottomrule
\end{tabularx}
\end{center}
\normalsize
\end{column}
\begin{column}{0.33\columnwidth}
\begin{figure}[htbp]
\centering
\includegraphics[scale=1,height=2.2cm]{figs/encoder_vionic.jpg}
\caption{Renishaw - Vionic Encoder}
\end{figure}
\vspace{-1em}
\tiny
\begin{center}
\begin{tabularx}{0.85\linewidth}{lc}
\toprule
\textbf{Characteristics} & \textbf{Manual}\\
\midrule
Range & Ruler length\\
Resolution & \SI{2.5}{\nano\meter}\\
Sub-Divisional Error & \SI{<\pm 15}{\nano\meter}\\
Bandwidth & \SI{>5}{kHz}\\
\bottomrule
\end{tabularx}
\end{center}
\normalsize
\end{column}
\begin{column}{0.33\columnwidth}
\begin{figure}[htbp]
\centering
\includegraphics[scale=1,height=2.2cm]{figs/Speedgoat-Performance-Real-Time-Target-Machine.jpg}
\caption{Speedgoat - Target Machine}
\end{figure}
\vspace{-1em}
\tiny
\begin{center}
\begin{tabularx}{0.8\linewidth}{lc}
\toprule
\textbf{Characteristics} & \textbf{Manual}\\
\midrule
ADC (x16) & 16bit, \SI{\pm 10}{V}\\
DAC (x8) & 16bit, \SI{\pm 10}{V}\\
Digital I/O (x30) & \SI{<\pm 15}{\nano\meter}\\
Sampling Freq. & \SI{>10}{kHz}\\
\bottomrule
\end{tabularx}
\end{center}
\normalsize
\end{column}
\end{columns}
\vspace{1em}
\begin{tcolorbox}
\begin{center}
All elements could be chosen/design based on the models
\end{center}
\end{tcolorbox}
\end{frame}
\section{Experimental Phase} \section{Experimental Phase}
\begin{frame}[label={sec:orgf3c94cd}]{Outline - Experimental Phase} \begin{frame}[label={sec:org70a96b2}]{Outline - Experimental Phase}
\begin{center} \begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nass_mechatronics_approach_experimental_phase.pdf} \includegraphics[scale=1,width=\linewidth]{figs/nass_mechatronics_approach_experimental_phase.pdf}
\end{center} \end{center}
\end{frame} \end{frame}
\begin{frame}[label={sec:org479753d}]{Flexible Joints - Measurements} \begin{frame}[label={sec:org77b0197}]{Flexible Joints - Measurements}
\vspace{-2em} \vspace{-2em}
\begin{columns} \begin{columns}
\begin{column}{0.5\columnwidth} \begin{column}{0.5\columnwidth}
@ -95,7 +561,7 @@
\end{columns} \end{columns}
\end{frame} \end{frame}
\begin{frame}[label={sec:org3b64613}]{Amplified Piezoelectric Actuator - Test Bench} \begin{frame}[label={sec:orga77e8f6}]{Amplified Piezoelectric Actuator - Test Bench}
\vspace{-1em} \vspace{-1em}
\begin{center} \begin{center}
@ -114,13 +580,13 @@
\end{tikzpicture} \end{tikzpicture}
\end{frame} \end{frame}
\begin{frame}[label={sec:orge94bd9a}]{Amplified Piezoelectric Actuator - Extracted Model} \begin{frame}[label={sec:org3e1d2df}]{Amplified Piezoelectric Actuator - Extracted Model}
\begin{center} \begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/apa_comp_model_frf.pdf} \includegraphics[scale=1,width=\linewidth]{figs/apa_comp_model_frf.pdf}
\end{center} \end{center}
\end{frame} \end{frame}
\begin{frame}[label={sec:org977a349}]{Amplified Piezoelectric Actuator - Integral Force Feedback} \begin{frame}[label={sec:orgffa6e55}]{Amplified Piezoelectric Actuator - Integral Force Feedback}
\vspace{-3em} \vspace{-3em}
\begin{columns} \begin{columns}
\begin{column}{0.62\columnwidth} \begin{column}{0.62\columnwidth}
@ -141,7 +607,7 @@
\end{columns} \end{columns}
\end{frame} \end{frame}
\begin{frame}[label={sec:org891e73c}]{Strut - Mounting Tool} \begin{frame}[label={sec:org1cfa45e}]{Strut - Mounting Tool}
\vspace{-2.5em} \vspace{-2.5em}
\begin{columns} \begin{columns}
\begin{column}{0.63\columnwidth} \begin{column}{0.63\columnwidth}
@ -162,7 +628,7 @@
\end{column} \end{column}
\end{columns} \end{columns}
\end{frame} \end{frame}
\begin{frame}[label={sec:org7ca4f86}]{Strut - Dynamical Measurements} \begin{frame}[label={sec:orgc27d748}]{Strut - Dynamical Measurements}
\vspace{-1em} \vspace{-1em}
\begin{center} \begin{center}
@ -182,7 +648,7 @@
\end{tikzpicture} \end{tikzpicture}
\end{frame} \end{frame}
\begin{frame}[label={sec:org1bb0afd}]{Strut - Encoders Output and Spurious Modes} \begin{frame}[label={sec:org84d4ec1}]{Strut - Encoders Output and Spurious Modes}
\vspace{-3em} \vspace{-3em}
\begin{columns} \begin{columns}
\begin{column}{0.45\columnwidth} \begin{column}{0.45\columnwidth}
@ -208,7 +674,7 @@
\end{columns} \end{columns}
\end{frame} \end{frame}
\begin{frame}[label={sec:org5d75c1c}]{Strut - Extracted Model} \begin{frame}[label={sec:org615e0c9}]{Strut - Extracted Model}
\vspace{-1em} \vspace{-1em}
\begin{center} \begin{center}
@ -216,7 +682,7 @@
\end{center} \end{center}
\end{frame} \end{frame}
\begin{frame}[label={sec:org876bcde}]{Nano-Hexapod Mounting Tool} \begin{frame}[label={sec:orgde0ed50}]{Nano-Hexapod Mounting Tool}
\begin{center} \begin{center}
\includegraphics[scale=1,width=0.9\linewidth]{figs/nano_hexapod_mounting.JPG} \includegraphics[scale=1,width=0.9\linewidth]{figs/nano_hexapod_mounting.JPG}
\end{center} \end{center}
@ -227,7 +693,7 @@
\end{tikzpicture} \end{tikzpicture}
\end{frame} \end{frame}
\begin{frame}[label={sec:org467130b}]{Mounted Nano-Hexapod} \begin{frame}[label={sec:org4fbd60d}]{Mounted Nano-Hexapod}
\vspace{-1em} \vspace{-1em}
\begin{center} \begin{center}
@ -235,19 +701,31 @@
\end{center} \end{center}
\end{frame} \end{frame}
\begin{frame}[label={sec:org1ec90cc}]{Nano-Hexapod - Identified Dynamics} \begin{frame}[label={sec:org90db8c2}]{Nano-Hexapod - Identified Dynamics}
Diagonal + off-diagonal transfer function from Va to De (comp with model) \vspace{-1em}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nano_hexapod_enc_bode_plot.pdf}
\end{center}
\end{frame} \end{frame}
\begin{frame}[label={sec:orgcc130d7}]{Nano-Hexapod - Force Sensors} \begin{frame}[label={sec:orgb51eb5c}]{Nano-Hexapod - Force Sensors}
Diagonal + off-diagonal transfer function from Va to Vs \vspace{-1em}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nano_hexapod_iff_bode_plot.pdf}
\end{center}
\end{frame} \end{frame}
\begin{frame}[label={sec:orgc171e2c}]{Nano-Hexapod - Damped Dynamics} \begin{frame}[label={sec:org7c39e01}]{Nano-Hexapod - Damped Dynamics}
Damped and Undamped, Diagonal + off-diagonal transfer function from Va to De \vspace{-1em}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nano_hexapod_damped_bode_plot.pdf}
\end{center}
\end{frame} \end{frame}
\begin{frame}[label={sec:org9927ee9}]{The Nano-Hexapod on top of the Micro-Station} \begin{frame}[label={sec:orgf0421d5}]{The Nano-Hexapod on top of the Micro-Station}
\vspace{-0.5em} \vspace{-0.5em}
\only<1>{ \only<1>{
@ -264,4 +742,8 @@ Damped and Undamped, Diagonal + off-diagonal transfer function from Va to De
} }
\end{frame} \end{frame}
\section{Conclusion}
\begin{frame}[label={sec:orgbe10643}]{Conclusion}
\end{frame}
\end{document} \end{document}

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@ -286,3 +286,90 @@
#+RESULTS: #+RESULTS:
[[file:figs/mass_spring_damper_hac_lac.png]] [[file:figs/mass_spring_damper_hac_lac.png]]
* Mass Spring Damper Model - Bis
#+begin_src latex :file mass_spring_damper_nass.pdf
\begin{tikzpicture}
% ====================
% Parameters
% ====================
\def\bracs{0.05} % Brace spacing vertically
\def\brach{-12pt} % Brace shift horizontaly
% ====================
% ====================
% Ground
% ====================
\draw (-0.9, 0) -- (0.9, 0);
\draw[dashed] (0.9, 0) -- ++(0.5, 0);
\draw[->] (1.3, 0) -- ++(0, 0.4) node[right]{$w$};
% ====================
% ====================
% Granite
\begin{scope}[shift={(0, 0)}]
\draw[fill=white] (-0.9, 1.2) rectangle (0.9, 2.0) node[pos=0.5]{$\scriptstyle\text{granite}$};
\draw[spring] (-0.7, 0) -- ++(0, 1.2);
\draw[damper] ( 0, 0) -- ++(0, 1.2);
\draw[dashed] ( 0.9, 2.0) -- ++(2.0, 0) coordinate(xg);
% \draw[decorate, decoration={brace, amplitude=8pt}, xshift=\brach] %
% (-0.9, \bracs) -- ++(0, 2.0) node[midway,rotate=90,anchor=south,yshift=10pt]{Granite};
\end{scope}
% ====================
% ====================
% Stages
\begin{scope}[shift={(0, 2.0)}]
\draw[fill=white] (-0.9, 1.2) rectangle (0.9, 2.0) node[pos=0.5]{$\scriptstyle\mu\text{-station}$};
\coordinate (mustation) at (0.9, 1.6);
\draw[spring] (-0.7, 0) -- ++(0, 1.2);
\draw[damper] ( 0, 0) -- ++(0, 1.2);
\draw[actuator] ( 0.7, 0) -- ++(0, 1.2) node[midway, right=0.1](ft){$f_t$};
% \draw[decorate, decoration={brace, amplitude=8pt}, xshift=\brach] %
% (-0.9, \bracs) -- ++(0, 2.0) node[midway,rotate=90,anchor=south,yshift=10pt]{$\mu\text{-station}$};
\end{scope}
% ====================
% ====================
% NASS
\begin{scope}[shift={(0, 4.0)}]
\draw[fill=white] (-0.9, 1.2) rectangle (0.9, 2.0) node[pos=0.5]{$\scriptstyle\nu\text{-hexapod}$};
\draw[dashed] (0.9, 2.0) -- ++(2.0, 0) coordinate(xnpos);
\draw[spring] (-0.7, 0) -- ++(0, 1.2) node[midway, left=0.1]{};
\draw[damper] ( 0, 0) -- ++(0, 1.2) node[midway, left=0.2]{};
\draw[actuator] ( 0.7, 0) -- ++(0, 1.2) coordinate[midway, right=0.1](f);
% \draw[decorate, decoration={brace, amplitude=8pt}, xshift=\brach] %
% (-0.9, \bracs) -- ++(0, 2.2) node[midway,rotate=90,anchor=south,yshift=10pt]{$\nu\text{-hexapod}$};
\end{scope}
% ====================
% ====================
% Measured Displacement
\draw[<->, dashed] ($(xg)+(-0.1, 0)$) node[above left](d){$d$} -- ($(xnpos)+(-0.1, 0)$);
% ====================
% ====================
% IFF Control
% \node[block={2em}{1.5em}, right=0.6 of fsensn] (iff) {$K_{\scriptscriptstyle IFF}$};
% \node[addb] (ctrladd) at (f-|iff) {};
\node[block={2em}{1.5em}, right=0.6 of mustation] (ctrl) {$K$};
% \draw[->] (fsensn.east) -- node[midway, above]{$\tau_m$} (iff.west);
% \draw[->] (iff.south) -- (ctrladd.north);
% \draw[->] (ctrladd.west) -- (f.east) node[above right]{$u$};
\draw[->] (d.west) -| (ctrl.south);
\draw[->] (ctrl.north) |- (f) node[above right]{$u$};
% ====================
\end{tikzpicture}
#+end_src
#+RESULTS:
[[file:figs/mass_spring_damper_nass.png]]