750 lines
19 KiB
TeX
750 lines
19 KiB
TeX
% Created 2021-07-22 jeu. 11:33
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% Intended LaTeX compiler: pdflatex
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\usepackage{siunitx}
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\author[shortname]{Thomas Dehaeze \inst{1,2}, Julien Bonnefoy \inst{1} \and Christophe Collette \inst{2,3}}
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\institute[shortinst]{\inst{1} European Synchrotron Radiation Facility, Grenoble, France \and %
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\inst{2} Precision Mechatronics Laboratory, University of Liege, Belgium \and %
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\inst{3} BEAMS Department, Free University of Brussels, Belgium}
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\DeclareSIUnit\rms{rms}
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\usetheme{default}
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\author{Dehaeze Thomas, Bonnefoy Julien and Collette Christophe}
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\date{}
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\title{Mechatronics Approach for the Development of a Nano-Active-Stabilization-System}
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\subtitle{MEDSI2020, July 26-29, 2021}
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\hypersetup{
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pdfauthor={Dehaeze Thomas, Bonnefoy Julien and Collette Christophe},
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pdftitle={Mechatronics Approach for the Development of a Nano-Active-Stabilization-System},
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pdfkeywords={},
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pdfsubject={},
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pdfcreator={Emacs 27.2 (Org mode 9.5)},
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pdflang={English}}
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\begin{document}
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\maketitle
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\section*{Introduction}
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\begin{frame}[label={sec:org289143a}]{The ID31 Micro Station}
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\begin{center}
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\includegraphics[scale=1,width=0.95\linewidth]{figs/micro_hexapod_render.pdf}
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\end{center}
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\begin{tikzpicture}[remember picture,overlay]
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\node[anchor=north east, padding=5pt] at (current page.north east){%
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\includegraphics[width=2em]{figs/icon_animation.pdf}};
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\end{tikzpicture}
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\end{frame}
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\begin{frame}[label={sec:org582891f}]{Introduction - The Nano Active Stabilization System}
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\textbf{Objective}: Improve the position accuracy from \(\approx 10\,\mu m\) down to \(\approx 10\,nm\) \newline
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\textbf{Design approach}: ``Model based design'' / ``Predictive Design''
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\begin{center}
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\includegraphics[scale=1,width=\linewidth]{figs/nass-concept.pdf}
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\end{center}
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\end{frame}
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\begin{frame}[label={sec:orgbb61f47}]{Overview of the Mechatronic Approach - Model Based Design}
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\begin{center}
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\includegraphics[scale=1,width=\linewidth]{figs/nass_mechatronics_approach.png}
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\end{center}
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\end{frame}
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\section{Conceptual Phase}
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\begin{frame}[label={sec:orgaeb9beb}]{Outline - Conceptual Phase}
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\begin{center}
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\includegraphics[scale=1,width=\linewidth]{figs/nass_mechatronics_approach_conceptual_phase.pdf}
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\end{center}
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\end{frame}
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\begin{frame}[label={sec:orgf4201d6}]{Feedback Control - The Control Loop}
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\vspace{-1em}
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\begin{center}
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\includegraphics[scale=1,width=\linewidth]{figs/classical_feedback_schematic.png}
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\end{center}
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\vspace{-1em}
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\begin{columns}
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\begin{column}{0.4\columnwidth}
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\begin{tcolorbox}[title=Why Feedback?]
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\begin{itemize}
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\item Model uncertainties
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\item Unknown disturbances
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\end{itemize}
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\end{tcolorbox}
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\end{column}
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\begin{column}{0.6\columnwidth}
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\begin{tcolorbox}[title=Every elements can limit the performances]
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\begin{itemize}
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\item Drivers, Actuators, Sensors
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\item Mechanical System
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\item Controller
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\end{itemize}
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\end{tcolorbox}
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\end{column}
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\end{columns}
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\end{frame}
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\begin{frame}[label={sec:org79cdad4}]{Noise Budgeting and Required Control Bandwidth}
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\vspace{-1em}
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\begin{center}
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\includegraphics[scale=1,width=\linewidth]{figs/identification_control_noise_budget.red.pdf}
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\end{center}
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\end{frame}
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\begin{frame}[label={sec:org176e59b}]{Limitation of the Controller Bandwidth?}
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\begin{columns}
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\begin{column}{0.6\columnwidth}
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\vspace{-2em}
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\only<1>{
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\begin{center}
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\includegraphics[scale=1,width=\linewidth]{figs/control_bandwidth_1_classical.pdf}
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\end{center}
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}\only<2>{
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\begin{center}
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\includegraphics[scale=1,width=\linewidth]{figs/control_bandwidth_2_above_res.pdf}
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\end{center}
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}\only<3>{
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\begin{center}
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\includegraphics[scale=1,width=\linewidth]{figs/control_bandwidth_3_next_gen.pdf}
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\end{center}
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}
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\end{column}
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\begin{column}{0.4\columnwidth}
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\vspace{-2em}
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\begin{center}
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\includegraphics[scale=1,width=\linewidth]{figs/test_bench_apa_simple.pdf}
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\end{center}
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\only<1>{
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\begin{tcolorbox}[title=Typical Approach, fontupper=\small]
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``As stiff as possible'' \newline
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Simple controller (e.g. PID)
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\end{tcolorbox}
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}\only<2>{
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\begin{tcolorbox}[title=Alternative Approach, fontupper=\small]
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Limited by complex dynamics\newline
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Model based controller
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\end{tcolorbox}
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}\only<3>{
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\begin{tcolorbox}[title=Next-Gen Systems, fontupper=\small]
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Active research topic\newline
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Complex controllers
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\end{tcolorbox}
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}
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\end{column}
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\end{columns}
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\end{frame}
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\begin{frame}[label={sec:org21bb7d1}]{Soft or Stiff \(\nu\text{-hexapod}\) ? Interaction with the \(\mu\text{-station}\)}
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\vspace{-3em}
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\begin{columns}
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\begin{column}{0.3\columnwidth}
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\onslide<1->{
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\begin{center}
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\includegraphics[scale=1,width=\linewidth]{figs/nass_example_uncertainty_support_only_hexapod.pdf}
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\end{center}
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}\onslide<2->{
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\begin{center}
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\includegraphics[scale=1,width=\linewidth]{figs/nass_example_uncertainty_support.pdf}
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\end{center}
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}
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\end{column}
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\begin{column}{0.7\columnwidth}
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\onslide<1->{
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\begin{center}
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\includegraphics[scale=1,width=\linewidth]{figs/nass_example_alone.pdf}
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\end{center}
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\vspace{-2em}
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}\onslide<2->{
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\begin{center}
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\includegraphics[scale=1,width=\linewidth]{figs/nass_example_support_uncertainty_d_L.pdf}
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\end{center}
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}
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\end{column}
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\end{columns}
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\end{frame}
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\begin{frame}[label={sec:org12c046c}]{Complexity of the Micro-Station Dynamics (Model Analysis)}
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\vspace{-1em}
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\begin{center}
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\includegraphics[scale=1,width=0.95\linewidth]{figs/modes_annotated.png}
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\end{center}
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\begin{tikzpicture}[remember picture,overlay]
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\node[anchor=north east, padding=5pt] at (current page.north east){%
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\includegraphics[width=2em]{figs/icon_animation.pdf}};
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\end{tikzpicture}
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\end{frame}
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\begin{frame}[label={sec:org1ffb21e}]{Control Strategy: HAC-LAC}
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\vspace{-0.5em}
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\begin{center}
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\includegraphics[scale=1,width=\linewidth]{figs/nass_schematic_test.pdf}
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\end{center}
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\vspace{-2.0em}
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\begin{columns}
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\begin{column}{0.5\columnwidth}
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\begin{tcolorbox}[title=Low Authority Control]
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\begin{itemize}
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\item Collocated sensors/actuators
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\item Guaranteed Stability
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\item Adds damping
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\item \(\searrow\) vibration near resonances
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\end{itemize}
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\end{tcolorbox}
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\end{column}
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\begin{column}{0.5\columnwidth}
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\begin{tcolorbox}[title=High Authority Control]
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\begin{itemize}
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\item Position sensors
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\item Complex dynamics
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\item \(\searrow\) vibration in the bandwidth
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\item Use transformation matrices
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\end{itemize}
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\end{tcolorbox}
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\end{column}
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\end{columns}
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\end{frame}
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\begin{frame}[label={sec:org4b89eaa}]{Multi-Body Models - Simulations}
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\begin{center}
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\includegraphics[scale=1,width=\linewidth]{figs/simscape_simulation.jpg}
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\end{center}
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\begin{tikzpicture}[remember picture, overlay]
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\node[align=left, anchor=south east, text width=5.5cm,shift={(-1em, 1em)}] at (current page.south east){%
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\begin{tcolorbox}
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\begin{center}
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Validation of the concept
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\end{center}
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\end{tcolorbox}};
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\end{tikzpicture}
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\begin{tikzpicture}[remember picture,overlay]
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\node[anchor=north east, padding=5pt] at (current page.north east){%
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\includegraphics[width=2em]{figs/icon_animation.pdf}};
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\end{tikzpicture}
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\end{frame}
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\section{Detail Design Phase}
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\begin{frame}[label={sec:org94436e6}]{Outline - Detail Design Phase}
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\begin{center}
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\includegraphics[scale=1,width=\linewidth]{figs/nass_mechatronics_approach_detailed_phase.pdf}
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\end{center}
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\end{frame}
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\begin{frame}[label={sec:org7d8abb1}]{Nano-Hexapod Overview - Key elements}
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\vspace{2em}
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\begin{center}
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\includegraphics[scale=1,width=\linewidth]{figs/nano_hexapod_elements.red.pdf}
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\end{center}
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\end{frame}
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\begin{frame}[label={sec:orgf39c76d}]{Include Flexible Elements in a Multi-Body model}
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\begin{center}
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\includegraphics[scale=1,width=\linewidth]{figs/super_element_simscape.pdf}
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\end{center}
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\end{frame}
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\begin{frame}[label={sec:orgc3f2ae5}]{Choice of Actuator - Amplifier Piezoelectric Actuator}
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\vspace{-2em}
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\begin{columns}
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\begin{column}{0.5\columnwidth}
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\scriptsize
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\begin{center}
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\begin{tabularx}{0.8\linewidth}{ccc}
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\toprule
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\textbf{Characteristic} & \textbf{Specs} & \textbf{Doc.}\\
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\midrule
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Axial Stiff. & \SI{\approx 2}{\newton/\micro\meter} & \SI{1.8}{\newton/\micro\meter}\\
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Sufficient Stroke & \SI{> 100}{\micro\meter} & \SI{368}{\micro\meter}\\
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Height & \SI{< 50}{\milli\meter} & \SI{30}{\milli\meter}\\
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High Resolution & \SI{< 5}{\nano\meter} & \SI{3}{\nano\meter}\\
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\bottomrule
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\end{tabularx}
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\end{center}
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\normalsize
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\vspace{-1em}
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\begin{figure}[htbp]
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\centering
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\includegraphics[scale=1,width=0.9\linewidth]{figs/apa300ml_picture.jpg}
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\caption{Picture of the APA300ML}
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\end{figure}
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\end{column}
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\begin{column}{0.5\columnwidth}
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\vspace{-1em}
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\begin{columns}
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\begin{column}{0.4\columnwidth}
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\begin{figure}[htbp]
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\centering
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\includegraphics[scale=1,width=0.8\linewidth]{figs/2dof_apa_model.pdf}
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\caption{2-DoF Model}
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\end{figure}
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\end{column}
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\begin{column}{0.6\columnwidth}
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\vspace{-1.6em}
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\begin{figure}[htbp]
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\centering
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\includegraphics[scale=1,width=0.9\linewidth]{figs/mesh_APA_schematic.pdf}
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\caption{APA Finite Element Model}
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\end{figure}
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\end{column}
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\end{columns}
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\begin{figure}[htbp]
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\centering
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\includegraphics[scale=1,width=\linewidth]{figs/mode_shapes_annotated.pdf}
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\caption{Flexible Modes due to limited APA stiffness}
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\end{figure}
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\end{column}
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\end{columns}
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\end{frame}
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\begin{frame}[label={sec:orge19396b}]{Flexible Joints - Specifications and Optimization}
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\vspace{-2em}
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\begin{columns}
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\begin{column}{0.7\columnwidth}
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\scriptsize
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\begin{center}
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\begin{tabularx}{0.9\linewidth}{cccc}
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\toprule
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\textbf{Goal} & \textbf{Stiffness} & \textbf{Specs} & \textbf{FEM}\\
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\midrule
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High DVF Damping & Axial & \SI{> 100}{\newton/\micro\meter} & 94\\
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Low Coupling & Bending & \SI{< 100}{\newton\meter/\radian} & 5\\
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Low Coupling & Torsion & \SI{< 500}{\newton\meter/\radian} & 260\\
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Sufficient Stroke & Bending Stroke & \SI{> 1}{\milli\radian} & 20\\
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\bottomrule
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\end{tabularx}
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\end{center}
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\normalsize
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\end{column}
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\begin{column}{0.3\columnwidth}
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\vspace{-2em}
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\begin{figure}[htbp]
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\centering
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\includegraphics[scale=1,width=\linewidth]{figs/flexible_joint_dimensions.pdf}
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\caption{Opt. geometry}
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\end{figure}
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\end{column}
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\end{columns}
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\vspace{-1em}
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\begin{columns}
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\begin{column}{0.45\columnwidth}
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\vspace{-3em}
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\begin{figure}[htbp]
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\centering
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\includegraphics[scale=1,width=\linewidth]{figs/location_top_flexible_joints.pdf}
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\caption{Positioning of the top joint}
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\end{figure}
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\end{column}
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\begin{column}{0.55\columnwidth}
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\begin{figure}[htbp]
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\centering
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\includegraphics[scale=1,width=0.9\linewidth]{figs/flexible_joint_picture.jpg}
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\caption{Picture of the joint}
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\end{figure}
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\end{column}
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\end{columns}
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\end{frame}
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\begin{frame}[label={sec:org5368d2f}]{Instrumentation}
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\vspace{-1em}
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\begin{columns}
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\begin{column}{0.33\columnwidth}
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\begin{figure}[htbp]
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\centering
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\includegraphics[scale=1,height=2.2cm]{figs/amplifier_PD200.jpg}
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\caption{PiezoDrive - PD200 Amplifier}
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\end{figure}
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\vspace{-1em}
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\tiny
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\begin{center}
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\begin{tabularx}{0.75\linewidth}{lc}
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\toprule
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\textbf{Characteristics} & \textbf{Manual}\\
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\midrule
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Gain & \num{20}\\
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Noise & \SI{0.7}{\milli\volt\rms}\\
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Small Signal BW & \SI{7.4}{\kilo\hertz}\\
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Large Signal BW & \SI{300}{\hertz}\\
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\bottomrule
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\end{tabularx}
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\end{center}
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\normalsize
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\end{column}
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\begin{column}{0.33\columnwidth}
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\begin{figure}[htbp]
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\centering
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\includegraphics[scale=1,height=2.2cm]{figs/encoder_vionic.jpg}
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\caption{Renishaw - Vionic Encoder}
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\end{figure}
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\vspace{-1em}
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\tiny
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\begin{center}
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\begin{tabularx}{0.85\linewidth}{lc}
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\toprule
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\textbf{Characteristics} & \textbf{Manual}\\
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\midrule
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Range & Ruler length\\
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Resolution & \SI{2.5}{\nano\meter}\\
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Sub-Divisional Error & \SI{<\pm 15}{\nano\meter}\\
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Bandwidth & \SI{>5}{kHz}\\
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\bottomrule
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\end{tabularx}
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\end{center}
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\normalsize
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\end{column}
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\begin{column}{0.33\columnwidth}
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\begin{figure}[htbp]
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|
\centering
|
|
\includegraphics[scale=1,height=2.2cm]{figs/Speedgoat-Performance-Real-Time-Target-Machine.jpg}
|
|
\caption{Speedgoat - Target Machine}
|
|
\end{figure}
|
|
|
|
\vspace{-1em}
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|
|
|
\tiny
|
|
\begin{center}
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|
\begin{tabularx}{0.8\linewidth}{lc}
|
|
\toprule
|
|
\textbf{Characteristics} & \textbf{Manual}\\
|
|
\midrule
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|
ADC (x16) & 16bit, \SI{\pm 10}{V}\\
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|
DAC (x8) & 16bit, \SI{\pm 10}{V}\\
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|
Digital I/O (x30) & \SI{<\pm 15}{\nano\meter}\\
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|
Sampling Freq. & \SI{>10}{kHz}\\
|
|
\bottomrule
|
|
\end{tabularx}
|
|
\end{center}
|
|
\normalsize
|
|
\end{column}
|
|
\end{columns}
|
|
|
|
\vspace{1em}
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|
|
|
\begin{tcolorbox}
|
|
\begin{center}
|
|
All elements could be chosen/design based on the models
|
|
\end{center}
|
|
\end{tcolorbox}
|
|
\end{frame}
|
|
|
|
\section{Experimental Phase}
|
|
\begin{frame}[label={sec:org70a96b2}]{Outline - Experimental Phase}
|
|
\begin{center}
|
|
\includegraphics[scale=1,width=\linewidth]{figs/nass_mechatronics_approach_experimental_phase.pdf}
|
|
\end{center}
|
|
\end{frame}
|
|
|
|
\begin{frame}[label={sec:org77b0197}]{Flexible Joints - Measurements}
|
|
\vspace{-2em}
|
|
\begin{columns}
|
|
\begin{column}{0.5\columnwidth}
|
|
\begin{center}
|
|
\includegraphics[scale=1,width=0.95\linewidth]{figs/received_flexible_joints.jpg}
|
|
\end{center}
|
|
|
|
\begin{center}
|
|
\includegraphics[scale=1,width=0.95\linewidth]{figs/soft_measure_flex_size.jpg}
|
|
\end{center}
|
|
\end{column}
|
|
|
|
\begin{column}{0.55\columnwidth}
|
|
\vspace{-1.5em}
|
|
|
|
\begin{center}
|
|
\includegraphics[scale=1,width=0.8\linewidth]{figs/flexible_joint_bench.pdf}
|
|
\end{center}
|
|
|
|
\vspace{-1em}
|
|
|
|
\begin{center}
|
|
\includegraphics[scale=1,width=0.9\linewidth]{figs/flex_joint_meas_example_F_d_lin_fit.pdf}
|
|
\end{center}
|
|
\end{column}
|
|
\end{columns}
|
|
\end{frame}
|
|
|
|
\begin{frame}[label={sec:orga77e8f6}]{Amplified Piezoelectric Actuator - Test Bench}
|
|
\vspace{-1em}
|
|
|
|
\begin{center}
|
|
\includegraphics[scale=1,width=\linewidth]{figs/test_bench_apa300ml.red.pdf}
|
|
\end{center}
|
|
|
|
\begin{tikzpicture}[remember picture, overlay]
|
|
\node[align=left, anchor=north east, text width=4.5cm] at (current page.north east){%
|
|
\begin{tcolorbox}[title=Goals]
|
|
\begin{itemize}
|
|
\item Identify Dynamics
|
|
\item Tune APA Model
|
|
\item Test IFF
|
|
\end{itemize}
|
|
\end{tcolorbox}};
|
|
\end{tikzpicture}
|
|
\end{frame}
|
|
|
|
\begin{frame}[label={sec:org3e1d2df}]{Amplified Piezoelectric Actuator - Extracted Model}
|
|
\begin{center}
|
|
\includegraphics[scale=1,width=\linewidth]{figs/apa_comp_model_frf.pdf}
|
|
\end{center}
|
|
\end{frame}
|
|
|
|
\begin{frame}[label={sec:orgffa6e55}]{Amplified Piezoelectric Actuator - Integral Force Feedback}
|
|
\vspace{-3em}
|
|
\begin{columns}
|
|
\begin{column}{0.62\columnwidth}
|
|
\vspace{1em}
|
|
|
|
\begin{center}
|
|
\includegraphics[scale=1,width=\linewidth]{figs/test_bench_apa300ml_iff.pdf}
|
|
\end{center}
|
|
|
|
\[ K_{\text{IFF}}(s) = \frac{g}{s} \]
|
|
\end{column}
|
|
|
|
\begin{column}{0.38\columnwidth}
|
|
\begin{center}
|
|
\includegraphics[scale=1,width=\linewidth]{figs/iff_results_apa95ml.pdf}
|
|
\end{center}
|
|
\end{column}
|
|
\end{columns}
|
|
\end{frame}
|
|
|
|
\begin{frame}[label={sec:org1cfa45e}]{Strut - Mounting Tool}
|
|
\vspace{-2.5em}
|
|
\begin{columns}
|
|
\begin{column}{0.63\columnwidth}
|
|
\begin{center}
|
|
\includegraphics[scale=1,width=\linewidth]{figs/image_mounting_strut_bench.JPG}
|
|
\end{center}
|
|
\end{column}
|
|
|
|
\begin{column}{0.37\columnwidth}
|
|
\begin{center}
|
|
\includegraphics[scale=1,width=\linewidth]{figs/mounted_strut_picture.jpg}
|
|
\end{center}
|
|
|
|
\begin{tikzpicture}[remember picture,overlay]
|
|
\node[anchor=north east, padding=5pt] at (current page.north east){%
|
|
\includegraphics[width=2em]{figs/icon_animation.pdf}};
|
|
\end{tikzpicture}
|
|
\end{column}
|
|
\end{columns}
|
|
\end{frame}
|
|
\begin{frame}[label={sec:orgc27d748}]{Strut - Dynamical Measurements}
|
|
\vspace{-1em}
|
|
|
|
\begin{center}
|
|
\includegraphics[scale=1,width=\linewidth]{figs/test_bench_strut.red.pdf}
|
|
\end{center}
|
|
|
|
\begin{tikzpicture}[remember picture, overlay]
|
|
\node[align=left, anchor=north east, text width=5cm] at (current page.north east){%
|
|
\begin{tcolorbox}[title=Goals]
|
|
\begin{itemize}
|
|
\item Identify Dynamics
|
|
\item Tune Model
|
|
\item Flexible joints effects
|
|
\item Encoder effect
|
|
\end{itemize}
|
|
\end{tcolorbox}};
|
|
\end{tikzpicture}
|
|
\end{frame}
|
|
|
|
\begin{frame}[label={sec:org84d4ec1}]{Strut - Encoders Output and Spurious Modes}
|
|
\vspace{-3em}
|
|
\begin{columns}
|
|
\begin{column}{0.45\columnwidth}
|
|
\begin{center}
|
|
\includegraphics[scale=1,width=\linewidth]{figs/frf_model_encoder_strut.pdf}
|
|
\end{center}
|
|
\end{column}
|
|
|
|
\begin{column}{0.55\columnwidth}
|
|
\begin{center}
|
|
\includegraphics[scale=1,width=\linewidth]{figs/meas_spur_res_struts_2_encoder.jpg}
|
|
\end{center}
|
|
|
|
\begin{center}
|
|
\includegraphics[scale=1,width=\linewidth]{figs/mode_shapes_annotated.pdf}
|
|
\end{center}
|
|
|
|
\begin{tikzpicture}[remember picture,overlay]
|
|
\node[anchor=north east, padding=5pt] at (current page.north east){%
|
|
\includegraphics[width=2em]{figs/icon_animation.pdf}};
|
|
\end{tikzpicture}
|
|
\end{column}
|
|
\end{columns}
|
|
\end{frame}
|
|
|
|
\begin{frame}[label={sec:org615e0c9}]{Strut - Extracted Model}
|
|
\vspace{-1em}
|
|
|
|
\begin{center}
|
|
\includegraphics[scale=1,width=\linewidth]{figs/strut_meas_frf_model_int_force.pdf}
|
|
\end{center}
|
|
\end{frame}
|
|
|
|
\begin{frame}[label={sec:orgde0ed50}]{Nano-Hexapod Mounting Tool}
|
|
\begin{center}
|
|
\includegraphics[scale=1,width=0.9\linewidth]{figs/nano_hexapod_mounting.JPG}
|
|
\end{center}
|
|
|
|
\begin{tikzpicture}[remember picture,overlay]
|
|
\node[anchor=north east, padding=5pt] at (current page.north east){%
|
|
\includegraphics[width=2em]{figs/icon_animation.pdf}};
|
|
\end{tikzpicture}
|
|
\end{frame}
|
|
|
|
\begin{frame}[label={sec:org4fbd60d}]{Mounted Nano-Hexapod}
|
|
\vspace{-1em}
|
|
|
|
\begin{center}
|
|
\includegraphics[scale=1,width=\linewidth]{figs/mounted_nano_hexapod_picture.jpg}
|
|
\end{center}
|
|
\end{frame}
|
|
|
|
\begin{frame}[label={sec:org90db8c2}]{Nano-Hexapod - Identified Dynamics}
|
|
\vspace{-1em}
|
|
|
|
\begin{center}
|
|
\includegraphics[scale=1,width=\linewidth]{figs/nano_hexapod_enc_bode_plot.pdf}
|
|
\end{center}
|
|
\end{frame}
|
|
|
|
\begin{frame}[label={sec:orgb51eb5c}]{Nano-Hexapod - Force Sensors}
|
|
\vspace{-1em}
|
|
|
|
\begin{center}
|
|
\includegraphics[scale=1,width=\linewidth]{figs/nano_hexapod_iff_bode_plot.pdf}
|
|
\end{center}
|
|
\end{frame}
|
|
|
|
\begin{frame}[label={sec:org7c39e01}]{Nano-Hexapod - Damped Dynamics}
|
|
\vspace{-1em}
|
|
|
|
\begin{center}
|
|
\includegraphics[scale=1,width=\linewidth]{figs/nano_hexapod_damped_bode_plot.pdf}
|
|
\end{center}
|
|
\end{frame}
|
|
|
|
\begin{frame}[label={sec:orgf0421d5}]{The Nano-Hexapod on top of the Micro-Station}
|
|
\vspace{-0.5em}
|
|
|
|
\only<1>{
|
|
|
|
\begin{center}
|
|
\includegraphics[scale=1,width=0.85\linewidth]{figs/nano_hexapod_id31.jpg}
|
|
\end{center}
|
|
|
|
}\only<2>{
|
|
|
|
\begin{center}
|
|
\includegraphics[scale=1,width=0.85\linewidth]{figs/nano_hexapod_id31_zoom.jpg}
|
|
\end{center}
|
|
|
|
}
|
|
\end{frame}
|
|
|
|
\section{Conclusion}
|
|
\begin{frame}[label={sec:orgbe10643}]{Conclusion}
|
|
\end{frame}
|
|
\end{document}
|