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\author[shortname]{Thomas Dehaeze \inst{1,2}, Julien Bonnefoy \inst{1} \and Christophe Collette \inst{2,3}}
\institute[shortinst]{\inst{1} European Synchrotron Radiation Facility, Grenoble, France \and %
\inst{2} Precision Mechatronics Laboratory, University of Liege, Belgium \and %
\inst{3} BEAMS Department, Free University of Brussels, Belgium}
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\author{Dehaeze Thomas, Bonnefoy Julien and Collette Christophe}
\date{}
\title{Mechatronics Approach for the Development of a Nano-Active-Stabilization-System}
\subtitle{MEDSI2020, July 26-29, 2021}
\hypersetup{
 pdfauthor={Dehaeze Thomas, Bonnefoy Julien and Collette Christophe},
 pdftitle={Mechatronics Approach for the Development of a Nano-Active-Stabilization-System},
 pdfkeywords={},
 pdfsubject={},
 pdfcreator={Emacs 27.2 (Org mode 9.5)}, 
 pdflang={English}}
\begin{document}

\maketitle

\section*{Introduction}
\begin{frame}[label={sec:org289143a}]{The ID31 Micro Station}
\begin{center}
\includegraphics[scale=1,width=0.95\linewidth]{figs/micro_hexapod_render.pdf}
\end{center}

\begin{tikzpicture}[remember picture,overlay]
    \node[anchor=north east, padding=5pt] at (current page.north east){%
    \includegraphics[width=2em]{figs/icon_animation.pdf}};
\end{tikzpicture}
\end{frame}

\begin{frame}[label={sec:org582891f}]{Introduction - The Nano Active Stabilization System}
\textbf{Objective}: Improve the position accuracy from \(\approx 10\,\mu m\) down to \(\approx 10\,nm\) \newline
\textbf{Design approach}: ``Model based design'' / ``Predictive Design''

\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nass-concept.pdf}
\end{center}
\end{frame}

\begin{frame}[label={sec:orgbb61f47}]{Overview of the Mechatronic Approach - Model Based Design}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nass_mechatronics_approach.png}
\end{center}
\end{frame}

\section{Conceptual Phase}
\begin{frame}[label={sec:orgaeb9beb}]{Outline - Conceptual Phase}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nass_mechatronics_approach_conceptual_phase.pdf}
\end{center}
\end{frame}

\begin{frame}[label={sec:orgf4201d6}]{Feedback Control - The Control Loop}
\vspace{-1em}

\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/classical_feedback_schematic.png}
\end{center}

\vspace{-1em}

\begin{columns}
\begin{column}{0.4\columnwidth}
\begin{tcolorbox}[title=Why Feedback?]
\begin{itemize}
\item Model uncertainties
\item Unknown disturbances
\end{itemize}
\end{tcolorbox}
\end{column}

\begin{column}{0.6\columnwidth}
\begin{tcolorbox}[title=Every elements can limit the performances]
\begin{itemize}
\item Drivers, Actuators, Sensors
\item Mechanical System
\item Controller
\end{itemize}
\end{tcolorbox}
\end{column}
\end{columns}
\end{frame}

\begin{frame}[label={sec:org79cdad4}]{Noise Budgeting and Required Control Bandwidth}
\vspace{-1em}

\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/identification_control_noise_budget.red.pdf}
\end{center}
\end{frame}

\begin{frame}[label={sec:org176e59b}]{Limitation of the Controller Bandwidth?}
\begin{columns}
\begin{column}{0.6\columnwidth}
\vspace{-2em}

\only<1>{

\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/control_bandwidth_1_classical.pdf}
\end{center}

}\only<2>{

\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/control_bandwidth_2_above_res.pdf}
\end{center}

}\only<3>{

\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/control_bandwidth_3_next_gen.pdf}
\end{center}

}
\end{column}

\begin{column}{0.4\columnwidth}
\vspace{-2em}

\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/test_bench_apa_simple.pdf}
\end{center}

\only<1>{

\begin{tcolorbox}[title=Typical Approach, fontupper=\small]
``As stiff as possible'' \newline
Simple controller (e.g. PID)
\end{tcolorbox}

}\only<2>{

\begin{tcolorbox}[title=Alternative Approach, fontupper=\small]
Limited by complex dynamics\newline
Model based controller
\end{tcolorbox}

}\only<3>{

\begin{tcolorbox}[title=Next-Gen Systems, fontupper=\small]
Active research topic\newline
Complex controllers
\end{tcolorbox}

}
\end{column}
\end{columns}
\end{frame}

\begin{frame}[label={sec:org21bb7d1}]{Soft or Stiff \(\nu\text{-hexapod}\) ? Interaction with the \(\mu\text{-station}\)}
\vspace{-3em}
\begin{columns}
\begin{column}{0.3\columnwidth}
\onslide<1->{

\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nass_example_uncertainty_support_only_hexapod.pdf}
\end{center}

}\onslide<2->{

\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nass_example_uncertainty_support.pdf}
\end{center}

}
\end{column}

\begin{column}{0.7\columnwidth}
\onslide<1->{

\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nass_example_alone.pdf}
\end{center}

\vspace{-2em}

}\onslide<2->{

\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nass_example_support_uncertainty_d_L.pdf}
\end{center}

}
\end{column}
\end{columns}
\end{frame}

\begin{frame}[label={sec:org12c046c}]{Complexity of the Micro-Station Dynamics (Model Analysis)}
\vspace{-1em}

\begin{center}
\includegraphics[scale=1,width=0.95\linewidth]{figs/modes_annotated.png}
\end{center}

\begin{tikzpicture}[remember picture,overlay]
    \node[anchor=north east, padding=5pt] at (current page.north east){%
    \includegraphics[width=2em]{figs/icon_animation.pdf}};
\end{tikzpicture}
\end{frame}

\begin{frame}[label={sec:org1ffb21e}]{Control Strategy: HAC-LAC}
\vspace{-0.5em}

\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nass_schematic_test.pdf}
\end{center}

\vspace{-2.0em}

\begin{columns}
\begin{column}{0.5\columnwidth}
\begin{tcolorbox}[title=Low Authority Control]
\begin{itemize}
\item Collocated sensors/actuators
\item Guaranteed Stability
\item Adds damping
\item \(\searrow\) vibration near resonances
\end{itemize}
\end{tcolorbox}
\end{column}

\begin{column}{0.5\columnwidth}
\begin{tcolorbox}[title=High Authority Control]
\begin{itemize}
\item Position sensors
\item Complex dynamics
\item \(\searrow\) vibration in the bandwidth
\item Use transformation matrices
\end{itemize}
\end{tcolorbox}
\end{column}
\end{columns}
\end{frame}

\begin{frame}[label={sec:org4b89eaa}]{Multi-Body Models - Simulations}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/simscape_simulation.jpg}
\end{center}


\begin{tikzpicture}[remember picture, overlay]
  \node[align=left, anchor=south east, text width=5.5cm,shift={(-1em, 1em)}] at (current page.south east){%
  \begin{tcolorbox}
  \begin{center}
    Validation of the concept
  \end{center}
  \end{tcolorbox}};
\end{tikzpicture}

\begin{tikzpicture}[remember picture,overlay]
    \node[anchor=north east, padding=5pt] at (current page.north east){%
    \includegraphics[width=2em]{figs/icon_animation.pdf}};
\end{tikzpicture}
\end{frame}

\section{Detail Design Phase}
\begin{frame}[label={sec:org94436e6}]{Outline - Detail Design Phase}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nass_mechatronics_approach_detailed_phase.pdf}
\end{center}
\end{frame}

\begin{frame}[label={sec:org7d8abb1}]{Nano-Hexapod Overview - Key elements}
\vspace{2em}

\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nano_hexapod_elements.red.pdf}
\end{center}
\end{frame}

\begin{frame}[label={sec:orgf39c76d}]{Include Flexible Elements in a Multi-Body model}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/super_element_simscape.pdf}
\end{center}
\end{frame}

\begin{frame}[label={sec:orgc3f2ae5}]{Choice of Actuator - Amplifier Piezoelectric Actuator}
\vspace{-2em}
\begin{columns}
\begin{column}{0.5\columnwidth}
\scriptsize
\begin{center}
\begin{tabularx}{0.8\linewidth}{ccc}
\toprule
\textbf{Characteristic} & \textbf{Specs} & \textbf{Doc.}\\
\midrule
Axial Stiff. & \SI{\approx 2}{\newton/\micro\meter} & \SI{1.8}{\newton/\micro\meter}\\
Sufficient Stroke & \SI{> 100}{\micro\meter} & \SI{368}{\micro\meter}\\
Height & \SI{< 50}{\milli\meter} & \SI{30}{\milli\meter}\\
High Resolution & \SI{< 5}{\nano\meter} & \SI{3}{\nano\meter}\\
\bottomrule
\end{tabularx}
\end{center}
\normalsize

\vspace{-1em}

\begin{figure}[htbp]
\centering
\includegraphics[scale=1,width=0.9\linewidth]{figs/apa300ml_picture.jpg}
\caption{Picture of the APA300ML}
\end{figure}
\end{column}

\begin{column}{0.5\columnwidth}
\vspace{-1em}

\begin{columns}
\begin{column}{0.4\columnwidth}
\begin{figure}[htbp]
\centering
\includegraphics[scale=1,width=0.8\linewidth]{figs/2dof_apa_model.pdf}
\caption{2-DoF Model}
\end{figure}
\end{column}

\begin{column}{0.6\columnwidth}
\vspace{-1.6em}

\begin{figure}[htbp]
\centering
\includegraphics[scale=1,width=0.9\linewidth]{figs/mesh_APA_schematic.pdf}
\caption{APA Finite Element Model}
\end{figure}
\end{column}
\end{columns}

\begin{figure}[htbp]
\centering
\includegraphics[scale=1,width=\linewidth]{figs/mode_shapes_annotated.pdf}
\caption{Flexible Modes due to limited APA stiffness}
\end{figure}
\end{column}
\end{columns}
\end{frame}

\begin{frame}[label={sec:orge19396b}]{Flexible Joints - Specifications and Optimization}
\vspace{-2em}

\begin{columns}
\begin{column}{0.7\columnwidth}
\scriptsize
\begin{center}
\begin{tabularx}{0.9\linewidth}{cccc}
\toprule
\textbf{Goal} & \textbf{Stiffness} & \textbf{Specs} & \textbf{FEM}\\
\midrule
High DVF Damping & Axial & \SI{> 100}{\newton/\micro\meter} & 94\\
Low Coupling & Bending & \SI{< 100}{\newton\meter/\radian} & 5\\
Low Coupling & Torsion & \SI{< 500}{\newton\meter/\radian} & 260\\
Sufficient Stroke & Bending Stroke & \SI{> 1}{\milli\radian} & 20\\
\bottomrule
\end{tabularx}
\end{center}
\normalsize
\end{column}

\begin{column}{0.3\columnwidth}
\vspace{-2em}

\begin{figure}[htbp]
\centering
\includegraphics[scale=1,width=\linewidth]{figs/flexible_joint_dimensions.pdf}
\caption{Opt. geometry}
\end{figure}
\end{column}
\end{columns}

\vspace{-1em}

\begin{columns}
\begin{column}{0.45\columnwidth}
\vspace{-3em}

\begin{figure}[htbp]
\centering
\includegraphics[scale=1,width=\linewidth]{figs/location_top_flexible_joints.pdf}
\caption{Positioning of the top joint}
\end{figure}
\end{column}

\begin{column}{0.55\columnwidth}
\begin{figure}[htbp]
\centering
\includegraphics[scale=1,width=0.9\linewidth]{figs/flexible_joint_picture.jpg}
\caption{Picture of the joint}
\end{figure}
\end{column}
\end{columns}
\end{frame}

\begin{frame}[label={sec:org5368d2f}]{Instrumentation}
\vspace{-1em}

\begin{columns}
\begin{column}{0.33\columnwidth}
\begin{figure}[htbp]
\centering
\includegraphics[scale=1,height=2.2cm]{figs/amplifier_PD200.jpg}
\caption{PiezoDrive - PD200 Amplifier}
\end{figure}

\vspace{-1em}

\tiny
\begin{center}
\begin{tabularx}{0.75\linewidth}{lc}
\toprule
\textbf{Characteristics} & \textbf{Manual}\\
\midrule
Gain & \num{20}\\
Noise & \SI{0.7}{\milli\volt\rms}\\
Small Signal BW & \SI{7.4}{\kilo\hertz}\\
Large Signal BW & \SI{300}{\hertz}\\
\bottomrule
\end{tabularx}
\end{center}
\normalsize
\end{column}


\begin{column}{0.33\columnwidth}
\begin{figure}[htbp]
\centering
\includegraphics[scale=1,height=2.2cm]{figs/encoder_vionic.jpg}
\caption{Renishaw - Vionic Encoder}
\end{figure}

\vspace{-1em}

\tiny
\begin{center}
\begin{tabularx}{0.85\linewidth}{lc}
\toprule
\textbf{Characteristics} & \textbf{Manual}\\
\midrule
Range & Ruler length\\
Resolution & \SI{2.5}{\nano\meter}\\
Sub-Divisional Error & \SI{<\pm 15}{\nano\meter}\\
Bandwidth & \SI{>5}{kHz}\\
\bottomrule
\end{tabularx}
\end{center}
\normalsize
\end{column}

\begin{column}{0.33\columnwidth}
\begin{figure}[htbp]
\centering
\includegraphics[scale=1,height=2.2cm]{figs/Speedgoat-Performance-Real-Time-Target-Machine.jpg}
\caption{Speedgoat - Target Machine}
\end{figure}

\vspace{-1em}

\tiny
\begin{center}
\begin{tabularx}{0.8\linewidth}{lc}
\toprule
\textbf{Characteristics} & \textbf{Manual}\\
\midrule
ADC (x16) & 16bit, \SI{\pm 10}{V}\\
DAC (x8) & 16bit, \SI{\pm 10}{V}\\
Digital I/O (x30) & \SI{<\pm 15}{\nano\meter}\\
Sampling Freq. & \SI{>10}{kHz}\\
\bottomrule
\end{tabularx}
\end{center}
\normalsize
\end{column}
\end{columns}

\vspace{1em}

\begin{tcolorbox}
\begin{center}
All elements could be chosen/design based on the models
\end{center}
\end{tcolorbox}
\end{frame}

\section{Experimental Phase}
\begin{frame}[label={sec:org70a96b2}]{Outline - Experimental Phase}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nass_mechatronics_approach_experimental_phase.pdf}
\end{center}
\end{frame}

\begin{frame}[label={sec:org77b0197}]{Flexible Joints - Measurements}
\vspace{-2em}
\begin{columns}
\begin{column}{0.5\columnwidth}
\begin{center}
\includegraphics[scale=1,width=0.95\linewidth]{figs/received_flexible_joints.jpg}
\end{center}

\begin{center}
\includegraphics[scale=1,width=0.95\linewidth]{figs/soft_measure_flex_size.jpg}
\end{center}
\end{column}

\begin{column}{0.55\columnwidth}
\vspace{-1.5em}

\begin{center}
\includegraphics[scale=1,width=0.8\linewidth]{figs/flexible_joint_bench.pdf}
\end{center}

\vspace{-1em}

\begin{center}
\includegraphics[scale=1,width=0.9\linewidth]{figs/flex_joint_meas_example_F_d_lin_fit.pdf}
\end{center}
\end{column}
\end{columns}
\end{frame}

\begin{frame}[label={sec:orga77e8f6}]{Amplified Piezoelectric Actuator - Test Bench}
\vspace{-1em}

\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/test_bench_apa300ml.red.pdf}
\end{center}

\begin{tikzpicture}[remember picture, overlay]
  \node[align=left, anchor=north east, text width=4.5cm] at (current page.north east){%
  \begin{tcolorbox}[title=Goals]
  \begin{itemize}
    \item Identify Dynamics
    \item Tune APA Model
    \item Test IFF
  \end{itemize}
  \end{tcolorbox}};
\end{tikzpicture}
\end{frame}

\begin{frame}[label={sec:org3e1d2df}]{Amplified Piezoelectric Actuator - Extracted Model}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/apa_comp_model_frf.pdf}
\end{center}
\end{frame}

\begin{frame}[label={sec:orgffa6e55}]{Amplified Piezoelectric Actuator - Integral Force Feedback}
\vspace{-3em}
\begin{columns}
\begin{column}{0.62\columnwidth}
\vspace{1em}

\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/test_bench_apa300ml_iff.pdf}
\end{center}

\[ K_{\text{IFF}}(s) = \frac{g}{s} \]
\end{column}

\begin{column}{0.38\columnwidth}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/iff_results_apa95ml.pdf}
\end{center}
\end{column}
\end{columns}
\end{frame}

\begin{frame}[label={sec:org1cfa45e}]{Strut - Mounting Tool}
\vspace{-2.5em}
\begin{columns}
\begin{column}{0.63\columnwidth}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/image_mounting_strut_bench.JPG}
\end{center}
\end{column}

\begin{column}{0.37\columnwidth}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/mounted_strut_picture.jpg}
\end{center}

\begin{tikzpicture}[remember picture,overlay]
    \node[anchor=north east, padding=5pt] at (current page.north east){%
    \includegraphics[width=2em]{figs/icon_animation.pdf}};
\end{tikzpicture}
\end{column}
\end{columns}
\end{frame}
\begin{frame}[label={sec:orgc27d748}]{Strut - Dynamical Measurements}
\vspace{-1em}

\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/test_bench_strut.red.pdf}
\end{center}

\begin{tikzpicture}[remember picture, overlay]
  \node[align=left, anchor=north east, text width=5cm] at (current page.north east){%
  \begin{tcolorbox}[title=Goals]
  \begin{itemize}
    \item Identify Dynamics
    \item Tune Model
    \item Flexible joints effects
    \item Encoder effect
  \end{itemize}
  \end{tcolorbox}};
\end{tikzpicture}
\end{frame}

\begin{frame}[label={sec:org84d4ec1}]{Strut - Encoders Output and Spurious Modes}
\vspace{-3em}
\begin{columns}
\begin{column}{0.45\columnwidth}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/frf_model_encoder_strut.pdf}
\end{center}
\end{column}

\begin{column}{0.55\columnwidth}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/meas_spur_res_struts_2_encoder.jpg}
\end{center}

\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/mode_shapes_annotated.pdf}
\end{center}

\begin{tikzpicture}[remember picture,overlay]
    \node[anchor=north east, padding=5pt] at (current page.north east){%
    \includegraphics[width=2em]{figs/icon_animation.pdf}};
\end{tikzpicture}
\end{column}
\end{columns}
\end{frame}

\begin{frame}[label={sec:org615e0c9}]{Strut - Extracted Model}
\vspace{-1em}

\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/strut_meas_frf_model_int_force.pdf}
\end{center}
\end{frame}

\begin{frame}[label={sec:orgde0ed50}]{Nano-Hexapod Mounting Tool}
\begin{center}
\includegraphics[scale=1,width=0.9\linewidth]{figs/nano_hexapod_mounting.JPG}
\end{center}

\begin{tikzpicture}[remember picture,overlay]
    \node[anchor=north east, padding=5pt] at (current page.north east){%
    \includegraphics[width=2em]{figs/icon_animation.pdf}};
\end{tikzpicture}
\end{frame}

\begin{frame}[label={sec:org4fbd60d}]{Mounted Nano-Hexapod}
\vspace{-1em}

\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/mounted_nano_hexapod_picture.jpg}
\end{center}
\end{frame}

\begin{frame}[label={sec:org90db8c2}]{Nano-Hexapod - Identified Dynamics}
\vspace{-1em}

\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nano_hexapod_enc_bode_plot.pdf}
\end{center}
\end{frame}

\begin{frame}[label={sec:orgb51eb5c}]{Nano-Hexapod - Force Sensors}
\vspace{-1em}

\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nano_hexapod_iff_bode_plot.pdf}
\end{center}
\end{frame}

\begin{frame}[label={sec:org7c39e01}]{Nano-Hexapod - Damped Dynamics}
\vspace{-1em}

\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nano_hexapod_damped_bode_plot.pdf}
\end{center}
\end{frame}

\begin{frame}[label={sec:orgf0421d5}]{The Nano-Hexapod on top of the Micro-Station}
\vspace{-0.5em}

\only<1>{

\begin{center}
\includegraphics[scale=1,width=0.85\linewidth]{figs/nano_hexapod_id31.jpg}
\end{center}

}\only<2>{

\begin{center}
\includegraphics[scale=1,width=0.85\linewidth]{figs/nano_hexapod_id31_zoom.jpg}
\end{center}

}
\end{frame}

\section{Conclusion}
\begin{frame}[label={sec:orgbe10643}]{Conclusion}
\end{frame}
\end{document}