Removed "introduction" and "conclusion" from the TOC
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@ -320,6 +320,7 @@ The conceptual design of the Nano Active Stabilization System (NASS) follows a m
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#+name: fig:chapter1_overview
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#+name: fig:chapter1_overview
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#+caption: Overview of the conceptual design development. The approach evolves from simplified analytical models to a multi-body model tuned from experimental modal analysis. It is concluded by closed-loop simulations of tomography experiments, validating the conceptual design.
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#+caption: Overview of the conceptual design development. The approach evolves from simplified analytical models to a multi-body model tuned from experimental modal analysis. It is concluded by closed-loop simulations of tomography experiments, validating the conceptual design.
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#+attr_org: :width 800px
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#+attr_org: :width 800px
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#+attr_latex: :options [h!tbp]
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#+attr_latex: :width \linewidth
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#+attr_latex: :width \linewidth
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[[file:figs/chapter1_overview.png]]
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[[file:figs/chapter1_overview.png]]
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@ -1554,6 +1555,9 @@ Having some flexibility between the measurement point and the point of interest
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Therefore, it is important to take special care when designing sampling environments, especially if a soft nano-hexapod is used.
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Therefore, it is important to take special care when designing sampling environments, especially if a soft nano-hexapod is used.
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*** Conclusion
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*** Conclusion
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:PROPERTIES:
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:UNNUMBERED: t
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:END:
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<<sec:uniaxial_conclusion>>
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<<sec:uniaxial_conclusion>>
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# TODO - Make a table summarizing the findings
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# TODO - Make a table summarizing the findings
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@ -2583,6 +2587,9 @@ Conclusions are similar than those of the uniaxial (non-rotating) model:
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#+end_figure
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#+end_figure
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*** Conclusion
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*** Conclusion
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:PROPERTIES:
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:UNNUMBERED: t
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:END:
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In this study, the gyroscopic effects induced by the spindle's rotation have been studied using a simplified model (Section\nbsp{}ref:sec:rotating_system_description).
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In this study, the gyroscopic effects induced by the spindle's rotation have been studied using a simplified model (Section\nbsp{}ref:sec:rotating_system_description).
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Decentralized acrlong:iff with pure integrators was shown to be unstable when applied to rotating platforms (Section\nbsp{}ref:sec:rotating_iff_pure_int).
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Decentralized acrlong:iff with pure integrators was shown to be unstable when applied to rotating platforms (Section\nbsp{}ref:sec:rotating_iff_pure_int).
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@ -3175,6 +3182,9 @@ This can be seen in Figure\nbsp{}ref:fig:modal_comp_acc_frf_modal_3 that shows t
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#+end_figure
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#+end_figure
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*** Conclusion
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*** Conclusion
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:PROPERTIES:
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:UNNUMBERED: t
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:END:
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<<sec:modal_conclusion>>
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<<sec:modal_conclusion>>
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In this study, a modal analysis of the micro-station was performed.
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In this study, a modal analysis of the micro-station was performed.
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@ -4007,6 +4017,9 @@ A similar error amplitude was observed, thus indicating that the multi-body mode
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[[file:figs/ustation_errors_model_dy_vertical.png]]
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[[file:figs/ustation_errors_model_dy_vertical.png]]
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*** Conclusion
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*** Conclusion
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:PROPERTIES:
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:UNNUMBERED: t
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:END:
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<<sec:ustation_conclusion>>
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<<sec:ustation_conclusion>>
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In this study, a multi-body model of the micro-station was developed.
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In this study, a multi-body model of the micro-station was developed.
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@ -4985,6 +4998,9 @@ The collocated nature of the force sensors ensures stability despite strong coup
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The outer loop implements High Authority Control, enabling precise positioning of the mobile platform.
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The outer loop implements High Authority Control, enabling precise positioning of the mobile platform.
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*** Conclusion
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*** Conclusion
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:PROPERTIES:
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:UNNUMBERED: t
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:END:
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<<sec:nhexa_conclusion>>
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<<sec:nhexa_conclusion>>
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After evaluating various architectures, the Stewart platform was selected for the active platform.
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After evaluating various architectures, the Stewart platform was selected for the active platform.
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@ -5007,7 +5023,7 @@ This study establishes the theoretical framework necessary for the subsequent de
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** Validation of the Concept
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** Validation of the Concept
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<<sec:nass>>
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<<sec:nass>>
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*** Introduction
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*** Introduction :ignore:
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The previous chapters have established crucial foundational elements for the development of the Nano Active Stabilization System (NASS).
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The previous chapters have established crucial foundational elements for the development of the Nano Active Stabilization System (NASS).
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The uniaxial model study demonstrated that very stiff nano-hexapod configurations should be avoided due to their high coupling with the micro-station dynamics.
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The uniaxial model study demonstrated that very stiff nano-hexapod configurations should be avoided due to their high coupling with the micro-station dynamics.
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@ -5506,6 +5522,9 @@ For higher mass configurations, rotational velocities are expected to be below 3
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#+end_figure
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#+end_figure
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*** Conclusion
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*** Conclusion
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:PROPERTIES:
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:UNNUMBERED: t
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:END:
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<<sec:nass_conclusion>>
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<<sec:nass_conclusion>>
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The development and analysis presented in this chapter have successfully validated the Nano Active Stabilization System concept, marking the completion of the conceptual design phase.
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The development and analysis presented in this chapter have successfully validated the Nano Active Stabilization System concept, marking the completion of the conceptual design phase.
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@ -6531,6 +6550,9 @@ This specification will guide the design of the flexible joints.
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# TODO - Add link to section
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# TODO - Add link to section
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*** Conclusion
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*** Conclusion
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:PROPERTIES:
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:UNNUMBERED: notoc
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:END:
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<<sec:detail_kinematics_conclusion>>
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<<sec:detail_kinematics_conclusion>>
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This chapter has explored the optimization of the nano-hexapod geometry for the Nano Active Stabilization System (NASS).
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This chapter has explored the optimization of the nano-hexapod geometry for the Nano Active Stabilization System (NASS).
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@ -7309,6 +7331,9 @@ While additional degrees of freedom could potentially capture more dynamic featu
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#+end_figure
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#+end_figure
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*** Conclusion
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*** Conclusion
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:PROPERTIES:
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:UNNUMBERED: notoc
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:END:
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<<sec:detail_fem_conclusion>>
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<<sec:detail_fem_conclusion>>
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In this chapter, the methodology of combining finite element analysis with multi-body modeling has been demonstrated and validated, proving particularly valuable for the detailed design of nano-hexapod components.
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In this chapter, the methodology of combining finite element analysis with multi-body modeling has been demonstrated and validated, proving particularly valuable for the detailed design of nano-hexapod components.
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@ -8821,6 +8846,9 @@ The control architecture has been presented for SISO systems, but can be applied
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It will be experimentally validated with the NASS during the experimental phase.
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It will be experimentally validated with the NASS during the experimental phase.
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*** Conclusion
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*** Conclusion
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:PROPERTIES:
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:UNNUMBERED: notoc
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:END:
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<<sec:detail_control_conclusion>>
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<<sec:detail_control_conclusion>>
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In order to optimize the control of the Nano Active Stabilization System, several aspects of control theory were studied.
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In order to optimize the control of the Nano Active Stabilization System, several aspects of control theory were studied.
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@ -9399,6 +9427,9 @@ This confirms that the selected instrumentation, with its measured noise charact
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[[file:figs/detail_instrumentation_cl_noise_budget.png]]
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[[file:figs/detail_instrumentation_cl_noise_budget.png]]
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*** Conclusion
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*** Conclusion
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:PROPERTIES:
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:UNNUMBERED: notoc
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:END:
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<<sec:detail_instrumentation_conclusion>>
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<<sec:detail_instrumentation_conclusion>>
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This section has presented a comprehensive approach to the selection and characterization of instrumentation for the nano active stabilization system.
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This section has presented a comprehensive approach to the selection and characterization of instrumentation for the nano active stabilization system.
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@ -9492,6 +9523,7 @@ The HAC-LAC control architecture is implemented and tested under various experim
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#+name: fig:chapter3_overview
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#+name: fig:chapter3_overview
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#+caption: Overview of the Experimental validation phase. The actuators and flexible joints and individual tested and then integrated into the struts. The Nano-hexapod is then mounted and the complete system is validated on the ID31 beamline.
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#+caption: Overview of the Experimental validation phase. The actuators and flexible joints and individual tested and then integrated into the struts. The Nano-hexapod is then mounted and the complete system is validated on the ID31 beamline.
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#+attr_org: :width 800px
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#+attr_org: :width 800px
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#+attr_latex: :options [h!tbp]
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#+attr_latex: :width \linewidth
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#+attr_latex: :width \linewidth
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[[file:figs/chapter3_overview.png]]
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[[file:figs/chapter3_overview.png]]
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@ -13025,11 +13057,6 @@ With the implementation of an accurate online metrology system, the NASS will be
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* TODO Conclusion and Future Work
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* TODO Conclusion and Future Work
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<<chap:conclusion>>
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<<chap:conclusion>>
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* Appendix :noexport:ignore:
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#+latex: \appendix
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* Mathematical Tools for Mechatronics :noexport:
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* Stewart Platform - Kinematics :noexport:
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* Bibliography :ignore:
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* Bibliography :ignore:
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#+latex: \printbibliography[heading=bibintoc,title={Bibliography}]
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#+latex: \printbibliography[heading=bibintoc,title={Bibliography}]
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@ -1,4 +1,4 @@
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% Created 2025-04-16 Wed 11:28
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% Created 2025-04-16 Wed 12:14
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% Intended LaTeX compiler: pdflatex
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% Intended LaTeX compiler: pdflatex
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\documentclass[a4paper, 10pt, DIV=12, parskip=full, bibliography=totoc]{scrreprt}
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\documentclass[a4paper, 10pt, DIV=12, parskip=full, bibliography=totoc]{scrreprt}
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@ -204,7 +204,7 @@ The conceptual design of the Nano Active Stabilization System (NASS) follows a m
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\begin{figure}[htbp]
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\begin{figure}[htbp]
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\centering
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\centering
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\includegraphics[scale=1,width=\linewidth]{figs/chapter1_overview.png}
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\includegraphics[h!tbp,width=\linewidth]{figs/chapter1_overview.png}
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\caption{\label{fig:chapter1_overview}Overview of the conceptual design development. The approach evolves from simplified analytical models to a multi-body model tuned from experimental modal analysis. It is concluded by closed-loop simulations of tomography experiments, validating the conceptual design.}
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\caption{\label{fig:chapter1_overview}Overview of the conceptual design development. The approach evolves from simplified analytical models to a multi-body model tuned from experimental modal analysis. It is concluded by closed-loop simulations of tomography experiments, validating the conceptual design.}
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\end{figure}
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\end{figure}
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@ -1358,7 +1358,7 @@ This is why high-bandwidth soft positioning stages are usually restricted to con
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Having some flexibility between the measurement point and the point of interest (i.e., the sample point to be position on the x-ray) also degrades the position stability as shown in Section~\ref{ssec:uniaxial_payload_dynamics_effect_stability}.
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Having some flexibility between the measurement point and the point of interest (i.e., the sample point to be position on the x-ray) also degrades the position stability as shown in Section~\ref{ssec:uniaxial_payload_dynamics_effect_stability}.
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Therefore, it is important to take special care when designing sampling environments, especially if a soft nano-hexapod is used.
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Therefore, it is important to take special care when designing sampling environments, especially if a soft nano-hexapod is used.
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\subsection{Conclusion}
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\subsection*{Conclusion}
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\label{sec:uniaxial_conclusion}
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\label{sec:uniaxial_conclusion}
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In this study, a uniaxial model of the nano-active-stabilization-system was tuned from both dynamical measurements (Section~\ref{sec:uniaxial_micro_station_model}) and from disturbances measurements (Section~\ref{sec:uniaxial_disturbances}).
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In this study, a uniaxial model of the nano-active-stabilization-system was tuned from both dynamical measurements (Section~\ref{sec:uniaxial_micro_station_model}) and from disturbances measurements (Section~\ref{sec:uniaxial_disturbances}).
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@ -2320,8 +2320,7 @@ Conclusions are similar than those of the uniaxial (non-rotating) model:
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\end{subfigure}
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\end{subfigure}
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\caption{\label{fig:rotating_nass_effect_direct_forces}Effect of sample forces \(f_{s,x}\) on the position error \(d_x\) - Comparison of active damping techniques for the three nano-hexapod stiffnesses. Integral Force Feedback degrades this compliance at low-frequency.}
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\caption{\label{fig:rotating_nass_effect_direct_forces}Effect of sample forces \(f_{s,x}\) on the position error \(d_x\) - Comparison of active damping techniques for the three nano-hexapod stiffnesses. Integral Force Feedback degrades this compliance at low-frequency.}
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\end{figure}
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\end{figure}
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\subsection{Conclusion}
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\subsection*{Conclusion}
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In this study, the gyroscopic effects induced by the spindle's rotation have been studied using a simplified model (Section~\ref{sec:rotating_system_description}).
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In this study, the gyroscopic effects induced by the spindle's rotation have been studied using a simplified model (Section~\ref{sec:rotating_system_description}).
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Decentralized \acrlong{iff} with pure integrators was shown to be unstable when applied to rotating platforms (Section~\ref{sec:rotating_iff_pure_int}).
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Decentralized \acrlong{iff} with pure integrators was shown to be unstable when applied to rotating platforms (Section~\ref{sec:rotating_iff_pure_int}).
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Two modifications of the classical \acrshort{iff} control have been proposed to overcome this issue.
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Two modifications of the classical \acrshort{iff} control have been proposed to overcome this issue.
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@ -2888,7 +2887,7 @@ This can be seen in Figure~\ref{fig:modal_comp_acc_frf_modal_3} that shows the f
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\end{subfigure}
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\end{subfigure}
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\caption{\label{fig:modal_comp_acc_frf_modal}Comparison of the measured FRF with the FRF synthesized from the modal model.}
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\caption{\label{fig:modal_comp_acc_frf_modal}Comparison of the measured FRF with the FRF synthesized from the modal model.}
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\end{figure}
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\end{figure}
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\subsection{Conclusion}
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\subsection*{Conclusion}
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\label{sec:modal_conclusion}
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\label{sec:modal_conclusion}
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In this study, a modal analysis of the micro-station was performed.
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In this study, a modal analysis of the micro-station was performed.
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@ -3674,7 +3673,7 @@ A similar error amplitude was observed, thus indicating that the multi-body mode
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\includegraphics[scale=1]{figs/ustation_errors_model_dy_vertical.png}
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\includegraphics[scale=1]{figs/ustation_errors_model_dy_vertical.png}
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\caption{\label{fig:ustation_errors_model_dy_vertical}Vertical errors during a constant-velocity scan of the translation stage. Comparison of the measurements and simulated errors.}
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\caption{\label{fig:ustation_errors_model_dy_vertical}Vertical errors during a constant-velocity scan of the translation stage. Comparison of the measurements and simulated errors.}
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\end{figure}
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\end{figure}
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\subsection{Conclusion}
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\subsection*{Conclusion}
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\label{sec:ustation_conclusion}
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\label{sec:ustation_conclusion}
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In this study, a multi-body model of the micro-station was developed.
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In this study, a multi-body model of the micro-station was developed.
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@ -4615,7 +4614,7 @@ The HAC-LAC strategy was then implemented.
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The inner loop implements decentralized Integral Force Feedback for active damping.
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The inner loop implements decentralized Integral Force Feedback for active damping.
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The collocated nature of the force sensors ensures stability despite strong coupling between struts at resonance frequencies, enabling effective damping of structural modes.
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The collocated nature of the force sensors ensures stability despite strong coupling between struts at resonance frequencies, enabling effective damping of structural modes.
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The outer loop implements High Authority Control, enabling precise positioning of the mobile platform.
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The outer loop implements High Authority Control, enabling precise positioning of the mobile platform.
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\subsection{Conclusion}
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\subsection*{Conclusion}
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\label{sec:nhexa_conclusion}
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\label{sec:nhexa_conclusion}
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After evaluating various architectures, the Stewart platform was selected for the active platform.
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After evaluating various architectures, the Stewart platform was selected for the active platform.
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@ -4637,8 +4636,6 @@ This approach combines decentralized Integral Force Feedback for active damping
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This study establishes the theoretical framework necessary for the subsequent development and validation of the NASS.
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This study establishes the theoretical framework necessary for the subsequent development and validation of the NASS.
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\section{Validation of the Concept}
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\section{Validation of the Concept}
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\label{sec:nass}
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\label{sec:nass}
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\subsection{Introduction}
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The previous chapters have established crucial foundational elements for the development of the Nano Active Stabilization System (NASS).
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The previous chapters have established crucial foundational elements for the development of the Nano Active Stabilization System (NASS).
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The uniaxial model study demonstrated that very stiff nano-hexapod configurations should be avoided due to their high coupling with the micro-station dynamics.
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The uniaxial model study demonstrated that very stiff nano-hexapod configurations should be avoided due to their high coupling with the micro-station dynamics.
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A rotating three-degree-of-freedom model revealed that soft nano-hexapod designs prove unsuitable due to gyroscopic effect induced by the spindle rotation.
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A rotating three-degree-of-freedom model revealed that soft nano-hexapod designs prove unsuitable due to gyroscopic effect induced by the spindle rotation.
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@ -5100,7 +5097,7 @@ For higher mass configurations, rotational velocities are expected to be below 3
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\end{subfigure}
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\end{subfigure}
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\caption{\label{fig:nass_tomography_hac_iff}Simulation of tomography experiments - 360deg/s. Beam size is indicated by the dashed black ellipse}
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\caption{\label{fig:nass_tomography_hac_iff}Simulation of tomography experiments - 360deg/s. Beam size is indicated by the dashed black ellipse}
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\end{figure}
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\end{figure}
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\subsection{Conclusion}
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\subsection*{Conclusion}
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\label{sec:nass_conclusion}
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\label{sec:nass_conclusion}
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The development and analysis presented in this chapter have successfully validated the Nano Active Stabilization System concept, marking the completion of the conceptual design phase.
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The development and analysis presented in this chapter have successfully validated the Nano Active Stabilization System concept, marking the completion of the conceptual design phase.
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@ -6027,7 +6024,7 @@ With the nano-hexapod geometry and mobility requirements established, the flexib
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This analysis focuses solely on bending stroke, as the torsional stroke of the flexible joints is expected to be minimal given the absence of vertical rotation requirements.
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This analysis focuses solely on bending stroke, as the torsional stroke of the flexible joints is expected to be minimal given the absence of vertical rotation requirements.
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The required angular stroke for both fixed and mobile joints is estimated to be equal to \(1\,\text{mrad}\).
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The required angular stroke for both fixed and mobile joints is estimated to be equal to \(1\,\text{mrad}\).
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This specification will guide the design of the flexible joints.
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This specification will guide the design of the flexible joints.
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\subsection{Conclusion}
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\subsection*{Conclusion}
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\label{sec:detail_kinematics_conclusion}
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\label{sec:detail_kinematics_conclusion}
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This chapter has explored the optimization of the nano-hexapod geometry for the Nano Active Stabilization System (NASS).
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This chapter has explored the optimization of the nano-hexapod geometry for the Nano Active Stabilization System (NASS).
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@ -6778,7 +6775,7 @@ While additional degrees of freedom could potentially capture more dynamic featu
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\end{subfigure}
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\end{subfigure}
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\caption{\label{fig:detail_fem_joints_fem_vs_perfect_plants}Comparison of the dynamics obtained between a nano-hexpod including joints modelled with FEM and a nano-hexapod having bottom joint modelled by bending stiffness \(k_f\) and axial stiffness \(k_a\) and top joints modelled by bending stiffness \(k_f\), torsion stiffness \(k_t\) and axial stiffness \(k_a\). Both from actuator force \(\bm{f}\) to strut motion measured by external metrology \(\bm{\epsilon}_{\mathcal{L}}\) (\subref{fig:detail_fem_joints_fem_vs_perfect_iff_plant}) and to the force sensors \(\bm{f}_m\) (\subref{fig:detail_fem_joints_fem_vs_perfect_hac_plant}).}
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\caption{\label{fig:detail_fem_joints_fem_vs_perfect_plants}Comparison of the dynamics obtained between a nano-hexpod including joints modelled with FEM and a nano-hexapod having bottom joint modelled by bending stiffness \(k_f\) and axial stiffness \(k_a\) and top joints modelled by bending stiffness \(k_f\), torsion stiffness \(k_t\) and axial stiffness \(k_a\). Both from actuator force \(\bm{f}\) to strut motion measured by external metrology \(\bm{\epsilon}_{\mathcal{L}}\) (\subref{fig:detail_fem_joints_fem_vs_perfect_iff_plant}) and to the force sensors \(\bm{f}_m\) (\subref{fig:detail_fem_joints_fem_vs_perfect_hac_plant}).}
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\end{figure}
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\end{figure}
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\subsection{Conclusion}
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\subsection*{Conclusion}
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\label{sec:detail_fem_conclusion}
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\label{sec:detail_fem_conclusion}
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|
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In this chapter, the methodology of combining finite element analysis with multi-body modeling has been demonstrated and validated, proving particularly valuable for the detailed design of nano-hexapod components.
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In this chapter, the methodology of combining finite element analysis with multi-body modeling has been demonstrated and validated, proving particularly valuable for the detailed design of nano-hexapod components.
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@ -8228,7 +8225,7 @@ Consequently, it remains unclear whether the proposed architecture offers signif
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|
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The control architecture has been presented for SISO systems, but can be applied to MIMO systems when sufficient decoupling is achieved.
|
The control architecture has been presented for SISO systems, but can be applied to MIMO systems when sufficient decoupling is achieved.
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It will be experimentally validated with the NASS during the experimental phase.
|
It will be experimentally validated with the NASS during the experimental phase.
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\subsection{Conclusion}
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\subsection*{Conclusion}
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||||||
\label{sec:detail_control_conclusion}
|
\label{sec:detail_control_conclusion}
|
||||||
|
|
||||||
In order to optimize the control of the Nano Active Stabilization System, several aspects of control theory were studied.
|
In order to optimize the control of the Nano Active Stabilization System, several aspects of control theory were studied.
|
||||||
@ -8400,7 +8397,7 @@ Small Signal Bandwidth \(> 5\,kHz\) & \(6.4\,kHz\) & \(300\,Hz\) & \(30\,kHz\)
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|||||||
Output Impedance: \(< 3.6\,\Omega\) & n/a & \(50\,\Omega\) & n/a & n/a\\
|
Output Impedance: \(< 3.6\,\Omega\) & n/a & \(50\,\Omega\) & n/a & n/a\\
|
||||||
\bottomrule
|
\bottomrule
|
||||||
\end{tabularx}
|
\end{tabularx}
|
||||||
\end{table}\footnotetext[27]{\label{org2235802}The manufacturer proposed to remove the \(50\,\Omega\) output resistor to improve to small signal bandwidth above \(10\,kHz\)}
|
\end{table}\footnotetext[27]{\label{org35798f8}The manufacturer proposed to remove the \(50\,\Omega\) output resistor to improve to small signal bandwidth above \(10\,kHz\)}
|
||||||
\subsubsection{ADC and DAC}
|
\subsubsection{ADC and DAC}
|
||||||
Analog-to-digital converters and digital-to-analog converters play key roles in the system, serving as the interface between the digital RT controller and the analog physical plant.
|
Analog-to-digital converters and digital-to-analog converters play key roles in the system, serving as the interface between the digital RT controller and the analog physical plant.
|
||||||
The proper selection of these components is critical for system performance.
|
The proper selection of these components is critical for system performance.
|
||||||
@ -8790,7 +8787,7 @@ This confirms that the selected instrumentation, with its measured noise charact
|
|||||||
\includegraphics[scale=1]{figs/detail_instrumentation_cl_noise_budget.png}
|
\includegraphics[scale=1]{figs/detail_instrumentation_cl_noise_budget.png}
|
||||||
\caption{\label{fig:detail_instrumentation_cl_noise_budget}Closed-loop noise budgeting using measured noise of instrumentation}
|
\caption{\label{fig:detail_instrumentation_cl_noise_budget}Closed-loop noise budgeting using measured noise of instrumentation}
|
||||||
\end{figure}
|
\end{figure}
|
||||||
\subsection{Conclusion}
|
\subsection*{Conclusion}
|
||||||
\label{sec:detail_instrumentation_conclusion}
|
\label{sec:detail_instrumentation_conclusion}
|
||||||
|
|
||||||
This section has presented a comprehensive approach to the selection and characterization of instrumentation for the nano active stabilization system.
|
This section has presented a comprehensive approach to the selection and characterization of instrumentation for the nano active stabilization system.
|
||||||
@ -8873,7 +8870,7 @@ The HAC-LAC control architecture is implemented and tested under various experim
|
|||||||
|
|
||||||
\begin{figure}[htbp]
|
\begin{figure}[htbp]
|
||||||
\centering
|
\centering
|
||||||
\includegraphics[scale=1,width=\linewidth]{figs/chapter3_overview.png}
|
\includegraphics[h!tbp,width=\linewidth]{figs/chapter3_overview.png}
|
||||||
\caption{\label{fig:chapter3_overview}Overview of the Experimental validation phase. The actuators and flexible joints and individual tested and then integrated into the struts. The Nano-hexapod is then mounted and the complete system is validated on the ID31 beamline.}
|
\caption{\label{fig:chapter3_overview}Overview of the Experimental validation phase. The actuators and flexible joints and individual tested and then integrated into the struts. The Nano-hexapod is then mounted and the complete system is validated on the ID31 beamline.}
|
||||||
\end{figure}
|
\end{figure}
|
||||||
\section{Amplified Piezoelectric Actuator}
|
\section{Amplified Piezoelectric Actuator}
|
||||||
|
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