1227 lines
62 KiB
Org Mode
1227 lines
62 KiB
Org Mode
#+TITLE: Nano Active Stabilization System - Introduction
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:DRAWER:
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#+LANGUAGE: en
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#+EMAIL: dehaeze.thomas@gmail.com
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#+AUTHOR: Dehaeze Thomas
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#+BIND: org-latex-image-default-option "scale=1"
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#+BIND: org-latex-image-default-width ""
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#+LATEX_CLASS: scrreprt
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#+LATEX_CLASS_OPTIONS: [a4paper, 10pt, DIV=12, parskip=full, bibliography=totoc]
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#+LATEX_HEADER: \input{preamble.tex}
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#+LATEX_HEADER_EXTRA: \input{preamble_extra.tex}
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#+LATEX_HEADER_EXTRA: \bibliography{nass-introduction.bib}
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#+BIND: org-latex-bib-compiler "biber"
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#+PROPERTY: header-args:matlab :session *MATLAB*
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#+PROPERTY: header-args:matlab+ :comments org
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#+PROPERTY: header-args:matlab+ :exports none
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#+PROPERTY: header-args:matlab+ :results none
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#+PROPERTY: header-args:matlab+ :eval no-export
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#+PROPERTY: header-args:matlab+ :noweb yes
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#+PROPERTY: header-args:matlab+ :mkdirp yes
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#+PROPERTY: header-args:matlab+ :output-dir figs
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#+PROPERTY: header-args:matlab+ :tangle no
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#+PROPERTY: header-args:latex :headers '("\\usepackage{tikz}" "\\usepackage{import}" "\\import{$HOME/Cloud/tikz/org/}{config.tex}")
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#+PROPERTY: header-args:latex+ :iminoptions -scale 100% -density 150
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#+PROPERTY: header-args:latex+ :imoutoptions -quality 100
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#+PROPERTY: header-args:latex+ :eval no-export
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#+PROPERTY: header-args:latex+ :exports results
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#+PROPERTY: header-args:latex+ :mkdirp yes
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#+PROPERTY: header-args:latex+ :output-dir figs
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#+PROPERTY: header-args:latex+ :post pdf2svg(file=*this*, ext="png")
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:END:
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#+latex: \clearpage
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* Build :noexport:
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#+NAME: startblock
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#+BEGIN_SRC emacs-lisp :results none :tangle no
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(add-to-list 'org-latex-classes
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;; Remove automatic org heading labels
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(defun my-latex-filter-removeOrgAutoLabels (text backend info)
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"Org-mode automatically generates labels for headings despite explicit use of `#+LABEL`. This filter forcibly removes all automatically generated org-labels in headings."
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(when (org-export-derived-backend-p backend 'latex)
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(replace-regexp-in-string "\\\\label{sec:org[a-f0-9]+}\n" "" text)))
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(add-to-list 'org-export-filter-headline-functions
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'my-latex-filter-removeOrgAutoLabels)
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;; Remove all org comments in the output LaTeX file
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(defun delete-org-comments (backend)
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(loop for comment in (reverse (org-element-map (org-element-parse-buffer)
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'comment 'identity))
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do
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(setf (buffer-substring (org-element-property :begin comment)
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"")))
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(add-hook 'org-export-before-processing-hook 'delete-org-comments)
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;; Use no package by default
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(setq org-latex-packages-alist nil)
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;; Do not include the subtitle inside the title
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(setq org-export-before-parsing-hook '(org-ref-glossary-before-parsing
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org-ref-acronyms-before-parsing))
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#+END_SRC
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* Notes :noexport:
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Prefix is =introduction=
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** TODO [#C] Synchrotron moore laws
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#+begin_src matlab :tangle no :exports none :results silent :noweb yes :var current_dir=(file-name-directory buffer-file-name)
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<<matlab-dir>>
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#+end_src
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#+begin_src matlab :exports none :results silent :noweb yes
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<<matlab-init>>
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#+end_src
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#+begin_src matlab
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brilliances = [1e7, 1e8, 5e11, 2e12, 1e14, 1e15, 1e19, 1e21, 2e22, ]
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#+end_src
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** TODO [#C] Complete list of Synchrotrons
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| Name | Country | Generation | Energy | Brightness | Status |
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|------------------------+------------------+------------+--------+------------+--------|
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| ESRF | France, Grenoble | 4th | | | |
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| Soleil | France, Paris | 3rd | | | |
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| Diamond | UK, Oxfordshire | 3rd | 3GeV | | |
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| ALS | US | | | | |
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| SLAC | US | | | | |
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| APS | US | 4th | | | |
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| NSLS II | US, New York | 3rd | 3GeV | 10^21 | |
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| Alba | Spain | | | | |
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| PSI | Switzerland | | | | |
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| Elettra | Italy | | | | |
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| Max IV | Sweden | 4th | 3GeV | | |
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| DESY | Germany | | | | |
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| BESSY | Germany | | | | |
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| SESAME | Jordan | | | | |
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| LNLS | Brazil | 4th | | | |
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| HEPS | China | | | | |
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| NSRL | China | | | | |
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| SSRF | China | | | | |
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| Spring 8 | Japan | | | | |
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| Australian Synchrotron | Australy | | | | |
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| Canadian Light Source | Canada | | | | |
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** TODO [#C] Review about Stewart platforms
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# [[file:~/Cloud/work-projects/ID31-NASS/matlab/stewart-simscape/org/bibliography.org]]
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- [ ] cite:li01_simul_fault_vibrat_isolat_point
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- [ ] cite:bishop02_devel_precis_point_contr_vibrat
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- [ ] cite:hanieh03_activ_stewar
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- [ ] cite:afzali-far16_vibrat_dynam_isotr_hexap_analy_studies
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- [ ] cite:naves20_desig
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** TODO [#C] Review about Stewart platform control
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Based on [[file:~/Cloud/work-projects/ID31-NASS/matlab/stewart-simscape/org/bibliography.org]]
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Broad subject (MIMO control), maybe talk only about vibration control based on external metrology.
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- Active Damping
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- Decentralized
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- Centralized
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- Manually tuned: PID, lead lag, etc...
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- Automatic / Optimal: LQG, H-Infinity
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** TODO [#C] Review of two stage control
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[[elisp:(helm-bibtex nil nil "Two Stage Actuator ")][Two Stage Actuator]]:
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- [X] cite:&xu12_desig_devel_flexur_based_dual
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- [ ] cite:&pahk01_ultra_precis_posit_system_servo_motor
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- [ ] cite:&kobayashi03_phase_stabil_servo_contr_dual
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disk drive
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- [ ] cite:&michellod06_strat_contr_dual_nano_system_singl_metrol
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- [ ] cite:&woody06_desig_perfor_dual_drive_system
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- [ ] cite:&chassagne07_nano_posit_system_with_sub
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- [ ] cite:&schitter08_dual
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- [X] cite:&buice09_desig_evaluat_singl_axis_precis
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- [X] cite:&liu10_desig_contr_long_travel_nano_posit_stage
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- [ ] cite:&ting11_contr_desig_high_frequen_cuttin
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- [ ] cite:&okazaki12_dual_servo_mechan_stage_contin_posit
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- [ ] cite:&ito13_high_precis_posit_system_using
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- [ ] cite:&yamaguchi13_advan_high_perfor_motion_contr_mechat_system
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- [ ] cite:&kim13_desig_contr_singl_stage_dual
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- [ ] cite:&wu13_desig
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- [ ] cite:&parmar14_large_dynam_range_nanop_using
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- [ ] cite:&ito15_low_stiff_dual_stage_actuat
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- [ ] cite:&qingsong16_desig_implem_large_range_compl_microp_system
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- [ ] cite:&zhu17_flexur_based_paral_actuat_dual
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- [ ] cite:&wang17_devel_contr_long_strok_precis_stage
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- [ ] cite:&okyay18_modal_analy_metrol_error_budget
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- [ ] cite:&csencsics18_system_contr_desig_voice_coil
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- [ ] cite:&okyay18_mechat_desig_actuat_optim_contr
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- [ ] cite:&kong18_vibrat_isolat_dual_stage_actuat
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- [ ] cite:&du19_multi_actuat_system_contr
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- [ ] cite:&yun20_inves_two_stage_vibrat_suppr
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- [ ] cite:&mukherjee20_hybrid_contr_precis_posit_applic
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- [ ] cite:&barros21_feedf_contr_piezoel_dual_actuat_system
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*To read in details*:
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- [X] cite:&choi08_desig_contr_nanop_xy_theta_scann
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*top*
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- [X] [[cite:&buice09_desig_evaluat_singl_axis_precis]]
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- [X] cite:&shinno11_newly_devel_long_range_posit
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- [ ] cite:&okazaki12_dual_servo_mechan_stage_contin_posit
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- [ ] cite:&shan15_contr_review
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*good review*
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- [X] cite:&okyay16_mechat_desig_dynam_contr_metrol
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*Good review*
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#+begin_quote
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The alternative, sliding contact bearings are limited to 2-10 [μm] motion resolution, due to stick-slip motion [[cite:&slocum92_precis_machin_desig]], hence they are not preferred.
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Stick-slip occurs due to the difference between static and dynamic coefficients of friction in such bearings, which results in an impact-like disturbance in the control system during motion reversal.
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#+end_quote
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- [X] cite:&kong18_vibrat_isolat_dual_stage_actuat
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*only found example of dual stage with hexapod*
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#+begin_quote
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The coarse stage is usually actuated by VCMs or other linear motors, and the fine stage is usually actuated by piezoelectric actuators or VCMs.
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#+end_quote
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#+name: tab:introduction_dual_stages
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#+caption: for each example, interferometers are used as the measured stage position (and signal feedback for the short stroke actuator).
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#+attr_latex: :environment tabularx :width \linewidth :align lXX
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#+attr_latex: :center t :booktabs t
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| DoF | Long Stroke | Short Stroke | Bandwidth | |
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|--------+---------------------------------+---------------+---------------+------------------------------------------------------|
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| X,Y | 2 axis, linear motor | 2 piezo | | cite:&chassagne07_nano_posit_system_with_sub |
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| X,Y,Rz | 1 axis, iron core linear motor | 4 VCM | 85Hz | cite:&choi08_desig_contr_nanop_xy_theta_scann |
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| X | 1 axis, DC motor, feedscrew | 1 PZT | | cite:&buice09_desig_evaluat_singl_axis_precis |
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| X,Y,Rz | 1 axis, ballscrew, rotary motor | 3 piezo | 3 PID, few Hz | cite:&liu10_desig_contr_long_travel_nano_posit_stage |
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| X | 1 axis, Servo motor, ball screw | 1 VCM | | cite:&shinno11_newly_devel_long_range_posit |
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| X | 1 axis, VCM | 1 piezo stack | | cite:&xu12_desig_devel_flexur_based_dual |
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** TODO [#C] Make all the figures
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1. [ ] [[file:figs/introduction_esrf_schematic.svg]]
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highlight Linac, Booster, Storage ring, ID31 beamline
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2. [ ] Good Picture of ESRF: =introduction_esrf_picture=
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3. [ ] Map with all the Synchrotrons in the World: =introduction_synchrotrons=
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Show Synchrotron going to 4th generation, Highlight ESRF
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4. [ ] Synchrotron Moore law =introduction_moore_law=
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5. [ ] Picture of the beam =introduction_beam_3rd_generation= and =introduction_beam_4th_generation=
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6. [ ] ID31/typical beamline layout with: =introduction_id31_layout=
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- Insertion device
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7. [ ] CAD view of the ID31 EH: =introduction_id31_cad=
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- Highlight focussing optics, positioning station, sample, detector
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- Show X-Y-Z vectors
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8. [ ] Micro-Station with each stage in different color and associated motions
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=introduction_id31_microstation_cad=
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=introduction_id31_microstation_picture=
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9. [ ] Typical experiment (ideally from ID31 experiments):
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- [ ] tomography: =introduction_exp_tomography= and =introduction_exp_tomography_image=
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- [ ] scanning: =introduction_exp_scanning= and =introduction_exp_scanning_image=
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10. [ ] Typical linear stage =introduction_linear_stage=
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- Show: stepper motor, ball screw, linear guides
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- Show: straightness, flatness, etc...
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11. [ ] Flexure based stage =introduction_flexure_stage=
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12. [ ] NASS concept: =introduction_nass_concept_schematic=
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- 4 elements: micro-station, nano-hexapod, metrology, control system
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13. [ ] NASS metrology schematic: =introduction_nass_metrology=
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- Nano-hexapod, sample, spherical mirror with flat bottom surface
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- several fiber interferometers with tracking systems (arrows showing that they can move in Rx/Ry)
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14. [ ] Show some passive end-stations =introduction_pass_stations=
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- ID16b
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- ID11
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15. [ ] Show active passive end-stations =introduction_acti_stations=
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- ID16a
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16. [ ] Two stage control =introduction_two_stage_control=
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Schematic with the long stroke, short stroke, metrology and control architecture: trajectory generation => long stroke & short stroke + feedback on the short stroke
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17. [ ] Examples of two stage control:
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- =introduction_two_stage_control_h_bridge= from [[cite:&schmidt20_desig_high_perfor_mechat_third_revis_edition]]
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- =introduction_two_stage_control_example= from [[cite:&shinno11_newly_devel_long_range_posit]]
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18. [ ] Serial VS Parallel: comparison of X-Y-Rz stages
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- =introduction_kinematics_serial=
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- =introduction_kinematics_parallel=
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19. [ ] Stewart platform architecture =introduction_stewart_platform=
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Maybe two pose to show that by changing the length of each strut, it is possible to change the relative position between the two plates?
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Maybe do that with Matlab and then editing with Inkscape
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20. [ ] Different model types
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- =introduction_model_lumped=
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- =introduction_model_fem=
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- =introduction_model_multi_body=
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21. [ ] Feedback System / Closed loop simulations =introduction_close_loop=
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- feedback model with: controller, plant, disturbances (plant output), sensor with noise, actuator with noise
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22. [ ] Dynamic Error Budgeting =introduction_dyn_error_budget=
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- PSD + CPS ? => understand what are the limitations?, similar to what is in [[cite:&schmidt20_desig_high_perfor_mechat_third_revis_edition]] ?
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- Use the same signals than for the previous figure
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23. [ ] About Stewart platform control? Centralized / Decentralized? MIMO / 6 SISO?
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** DONE [#B] Check these papers for literature review
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CLOSED: [2024-05-05 Sun 16:22]
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Check these papers:
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- [[elisp:(helm-bibtex nil nil "nass ")][Nano Active Stabilization System]]
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- [[elisp:(helm-bibtex nil nil "esrf ")][ESRF]]
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- [[elisp:(helm-bibtex nil nil "nanostage ")][Nano Positioning Stage]]
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NASS:
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- [X] cite:&wang12_autom_marker_full_field_hard
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Calibration of spindle run-out errors, and correct the errors in post processing, for tomography
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- [X] cite:&stankevic17_inter_charac_rotat_stages_x_ray_nanot
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- [X] cite:&schroer17_ptynam
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- [X] cite:&nazaretski17_desig_perfor_x_ray_scann
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- [X] cite:&nazaretski15_pushin_limit
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- [X] cite:nazaretski22_new_kirkp_baez_based_scann
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- [X] cite:&naves20_t_flex
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- [X] cite:&kim13_compac_protot_appar_reduc_circl
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- [X] cite:&khaled18_pract_desig_applic_model_predic_contr
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- [X] cite:&holler18_omny_tomog_nano_cryo_stage
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- [X] cite:&holler17_omny_pin_versat_sampl_holder
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- [X] cite:&engblom18_nanop_resul
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- [X] cite:&dehaeze18_sampl_stabil_for_tomog_exper
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- [X] HXN [[cite:&xu23_high_nsls_ii]]
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Laser interferometers on reference ring (on top of rotary stage).
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Used to trigger the detectors (ptychography, microscope)
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ESRF:
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- [X] cite:raimondi21_commis_hybrid_multib_achrom_lattic
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- [X] cite:cotte17_id21_x_ray_infrar_micros
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- [X] cite:martinez-criado16_id16b
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- [X] cite:villar18_nanop_esrf_id16a_nano_imagin_beaml
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- [X] cite:riekel10_progr_micro_nano_diffr_at
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- [X] cite:wright20_new_oppor_at_mater_scien
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- [X] cite:leake19_nanod_beaml_id01
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- [X] cite:versteegen23_inser_devic_contr
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- [X] cite:marion04_hexap_esrf
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- [X] cite:fajardo95_contr_six_degree_paral_manip
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- [X] cite:cammarata09_chopp_system_time_resol_exper
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- [X] cite:dabin02_mechan_desig_high_precis_posit
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- [X] cite:dabin03_precis_mechan_high_accur_beaml
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- [X] cite:guijarro17_bliss_exper_contr_esrf_ebs_beaml
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- [X] cite:janvier13_icepap
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- [X] cite:baker18_esrf_doubl_cryst_monoc_protot_projec
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- [X] cite:dabin04_mecan
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- [X] cite:reichert21_stiff_hexap
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- [X] cite:dehaeze21_mechat_approac_devel_nano_activ_stabil_system
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- [X] cite:brumund21_multib_simul_reduc_order_flexib_bodies_fea
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- [X] cite:dehaeze21_activ_dampin_rotat_platf_using
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- [X] cite:zhang96_groun_vibrat_orme_meris_super_esrf
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- [X] cite:zelenika04_flexur_use_elast_sr_instr_desig
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- [X] cite:youness20_concep
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- [X] cite:ravy18_shinin_light_synch_light
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- [X] cite:dimper15_esrf_upgrad_progr_phase_ii
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- [X] cite:dehaeze18_sampl_stabil_for_tomog_exper
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- [X] cite:dabin04_mecan
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- [X] cite:brendike19_esrf_doubl_cryst_monoc_protot_contr_concep
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nanostage:
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- [X] cite:&yong16_mechan_desig_high_speed_nanop_system
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- [X] cite:&lee17_compac_compl_paral_xy_nano
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- [X] cite:&awtar13_desig_large_range_xy_nanop_system
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- [X] cite:&liu18_desig_trajec_track_contr_piezoel
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- [X] cite:&yong09_desig_ident_contr_flexur_based
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- [X] cite:&fleming10_integ_strain_force_feedb_high
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- [X] cite:&barillot99_desig_funct_tests_xy_piezoel
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** DONE [#C] Table that compares nano positioning stations with metrology / feedback
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CLOSED: [2024-05-05 Sun 11:55]
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- [X] ID16a: capacitive sensors, short stroke, spindle above the fix hexapod, light samples [[cite:&villar18_nanop_esrf_id16a_nano_imagin_beaml]]
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- [X] Soleil Nano probe [[cite:&engblom18_nanop_resul;&stankevic17_inter_charac_rotat_stages_x_ray_nanot]]
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- [X] PSI OMNY [[cite:&holler18_omny_tomog_nano_cryo_stage;&holler17_omny_pin_versat_sampl_holder]]
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[[cite:&holler15_error_motion_compen_track_inter;&holler12_instr_x_ray_nano_imagin]]
|
||
- [X] DESY PETRA III /PtyNAMi/ [[cite:&schropp20_ptynam;&schroer17_ptynam;&schroeck01_compen_desig_linear_time_invar]]
|
||
scanning microscope and tomography
|
||
tracking the mechanical stability of optics relative to the sample scanner
|
||
laser interferometer system to track the sample in the two directions transverse to the optical axis
|
||
#+begin_quote
|
||
For scanning microscopy and tomography it is essential to know where the beam hits the sample.
|
||
Position uncertainties can arise from vibrations of the focusing optics and of the sample.
|
||
The sample is scanned through the nanobeam, while the optics are kept fixed after initial alignment.
|
||
#+end_quote
|
||
Interferometers used for monitoring, not for closed-loop control
|
||
- [ ] APS/Diamond:
|
||
- [X] cite:&wang12_autom_marker_full_field_hard
|
||
Calibration of spindle run-out errors, and correct the errors in post processing, for tomography
|
||
- [X] [[cite:&geraldes23_sapot_carnaub_sirius_lnls]]
|
||
SIRIUS, LNLS
|
||
#+begin_quote
|
||
Synchrotron scanning X-ray microscopes are generally based on piezo scanning stages, with motion range typically
|
||
limited to 100 µm, such that complementary long-stroke stages, with motion range of several millimeters, are often
|
||
required to comply with alignment and the search of regions of interest in typical millimeter-size samples or sample
|
||
mounts [3, 5–13, 15, 16]. However, potential limitations in this architecture include: 1) limited dynamics and stability,
|
||
with resonance modes in the order of 100 Hz (or less) resulting from multiple stacked stages; 2) parasitic motion
|
||
associated with coarse stages; and 3) deteriorated performance in continuous fly-scan beyond the piezo range, which
|
||
are caused by disturbances introduced by stepper motors or stick-slip piezos [43].
|
||
#+end_quote
|
||
- [X] Delta robot, diamond [[cite:&kelly22_delta_robot_long_travel_nano]]
|
||
|
||
Bandwidth is rarely specified
|
||
|
||
Same table for nano positioning stages without integrated metrology?
|
||
|
||
|
||
* Context of this thesis
|
||
** Synchrotron Radiation Facilities
|
||
**** Accelerating electrons to produce intense X-ray
|
||
|
||
- Explain what is a Synchrotron: light source
|
||
- Say how many there are in the world (~50)
|
||
|
||
#+name: fig:introduction_synchrotrons
|
||
#+caption: 4th generation Synchrotrons in operation (red). Upgrade or new 4th generation projects (green). 3rd generation Synchrotrons (blue).
|
||
#+attr_latex: :width \linewidth
|
||
[[file:figs/introduction_synchrotrons.png]]
|
||
|
||
- Electron part: LINAC, Booster, Storage Ring ref:fig:introduction_esrf_schematic
|
||
- Synchrotron radiation: Insertion device / Bending magnet
|
||
- Many beamlines (large diversity in terms of instrumentation and science)
|
||
- Science that can be performed:
|
||
- structural biology, structure of materials, matter at extreme, ...
|
||
|
||
|
||
**** The European Synchrotron Radiation Facility
|
||
|
||
#+name: fig:fig_label
|
||
#+caption: Caption with reference to sub figure (\subref{fig:fig_label_a})
|
||
#+attr_latex: :options [htbp]
|
||
#+begin_figure
|
||
#+attr_latex: :caption \subcaption{\label{fig:introduction_esrf_schematic}Schematic of the ESRF - Over 40 beamlines. Booster, Linac, storage ring}
|
||
#+attr_latex: :options {0.49\textwidth}
|
||
#+begin_subfigure
|
||
#+attr_latex: :width 0.95\linewidth
|
||
[[file:figs/introduction_esrf_schematic.png]]
|
||
#+end_subfigure
|
||
#+attr_latex: :caption \subcaption{\label{fig:introduction_esrf_picture}European Synchrotron Radiation Facility}
|
||
#+attr_latex: :options {0.49\textwidth}
|
||
#+begin_subfigure
|
||
#+attr_latex: :width 0.95\linewidth
|
||
[[file:figs/introduction_esrf_picture.jpg]]
|
||
#+end_subfigure
|
||
#+end_figure
|
||
|
||
**** 3rd and 4th generation Synchrotrons
|
||
|
||
Brilliance: figure of merit for synchrotron
|
||
|
||
- 4th generation light sources
|
||
- [[cite:&raimondi21_commis_hybrid_multib_achrom_lattic]]
|
||
- [ ] Picture of 3rd generation "beam source" vs 4th generation?
|
||
- [ ] Picture showing Synchrotron "moore's law"
|
||
|
||
#+name: fig:introduction_moore_law
|
||
#+caption: Figure caption
|
||
[[file:figs/introduction_moore_law.pdf]]
|
||
|
||
|
||
|
||
** The ID31 ESRF Beamline
|
||
**** Beamline Layout
|
||
|
||
- [ ] Beamline layout (OH, EH)
|
||
- ID31 and Micro Station (Figure ref:fig:introduction_id31_microstation_picture)
|
||
Check https://www.esrf.fr/UsersAndScience/Experiments/StructMaterials/ID31
|
||
https://www.wayforlight.eu/beamline/23244
|
||
- X-ray beam + detectors + sample stage (Figure ref:fig:introduction_id31_beamline_schematic)
|
||
- Focusing optics
|
||
- Optical schematic with: source, lens, sample and detector.
|
||
Explain that what is the most important is the relative position between the sample and the lens.
|
||
- Explain the XYZ frame for all the thesis (ESRF convention: X: x-ray, Z gravity up)
|
||
- [ ] Add XYZ on figure ref:fig:introduction_id31_cad
|
||
|
||
#+begin_src latex :file id31_microstation_picture.pdf
|
||
\begin{tikzpicture}
|
||
\node[inner sep=0pt, anchor=south west] (photo) at (0,0)
|
||
{\includegraphics[width=0.39\textwidth]{/home/thomas/Cloud/documents/reports/phd-thesis/figs/exp_setup_photo.png}};
|
||
|
||
\coordinate[] (aheight) at (photo.north west);
|
||
\coordinate[] (awidth) at (photo.south east);
|
||
|
||
\coordinate[] (granite) at ($0.1*(aheight)+0.1*(awidth)$);
|
||
\coordinate[] (trans) at ($0.5*(aheight)+0.4*(awidth)$);
|
||
\coordinate[] (tilt) at ($0.65*(aheight)+0.75*(awidth)$);
|
||
\coordinate[] (hexapod) at ($0.7*(aheight)+0.5*(awidth)$);
|
||
\coordinate[] (sample) at ($0.9*(aheight)+0.55*(awidth)$);
|
||
|
||
% Granite
|
||
\node[labelc] at (granite) {1};
|
||
% Translation stage
|
||
\node[labelc] at (trans) {2};
|
||
% Tilt Stage
|
||
\node[labelc] at (tilt) {3};
|
||
% Micro-Hexapod
|
||
\node[labelc] at (hexapod) {4};
|
||
% Sample
|
||
\node[labelc] at (sample) {5};
|
||
|
||
% Axis
|
||
\begin{scope}[shift={($0.07*(aheight)+0.87*(awidth)$)}]
|
||
\draw[->] (0, 0) -- ++(55:0.7) node[above] {$y$};
|
||
\draw[->] (0, 0) -- ++(90:0.9) node[left] {$z$};
|
||
\draw[->] (0, 0) -- ++(-20:0.7) node[above] {$x$};
|
||
\end{scope}
|
||
\end{tikzpicture}
|
||
#+end_src
|
||
|
||
#+name: fig:introduction_id31_cad
|
||
#+caption: CAD view of the optical hutch with the nano-focusing optics, the micro-station
|
||
#+attr_latex: :width 0.8\linewidth
|
||
[[file:figs/introduction_id31_cad.jpg]]
|
||
|
||
**** Positioning End Station: The Micro-Station
|
||
|
||
Micro-Station:
|
||
- DoF with strokes: Ty, Ry, Rz, Hexapod
|
||
- Experiments: tomography, reflectivity, truncation rod, ...
|
||
Make a table to explain the different "experiments"
|
||
- Explain how it is used (positioning, scans), what it does. But not about the performances
|
||
- Different sample environments
|
||
|
||
#+begin_src latex :file id31_beamline_schematic.pdf
|
||
\begin{tikzpicture}
|
||
% Parameters
|
||
\def\blockw{6.0cm}
|
||
\def\blockh{1.2cm}
|
||
|
||
\def\tiltdeg{3}
|
||
\coordinate[] (rotationpoint) at (0, 4.5*\blockh);
|
||
|
||
\begin{scope}[rotate around={\tiltdeg:(rotationpoint)}]
|
||
% Tilt
|
||
\path[] ([shift=(-120:4*\blockh)]rotationpoint) coordinate(beginarc) arc (-120:-110:4*\blockh) %
|
||
-- ([shift=(-70:4*\blockh)]rotationpoint) arc (-70:-60:4*\blockh)%
|
||
|- ++(-0.15*\blockw, 0.6*\blockh) coordinate (spindlene)%
|
||
|- ($(beginarc) + (0.15*\blockw, 0.2*\blockh)$) coordinate (spindlesw) -- ++(0, 0.4*\blockh) coordinate(tiltte) -| cycle;
|
||
|
||
% Spindle
|
||
\coordinate[] (spindlese) at (spindlesw-|spindlene);
|
||
\draw[fill=black!30] ($(spindlese)+(-0.1,0.1)+(-0.1*\blockw, 0)$) -| ($(spindlene)+(-0.1, 0)$) -| coordinate[pos=0.25](spindletop) ($(spindlesw)+(0.1,0.1)$) -| ++(0.1*\blockw, -\blockh) -| coordinate[pos=0.25](spindlebot) cycle;
|
||
|
||
% \draw[dashed, color=black!60] ($(spindletop)+(0, 0.2)$) -- ($(spindlebot)+(0,-0.2)$);
|
||
|
||
% Tilt
|
||
\draw[fill=black!60] ([shift=(-120:4*\blockh)]rotationpoint) coordinate(beginarc) arc (-120:-110:4*\blockh) %
|
||
-- ([shift=(-70:4*\blockh)]rotationpoint) arc (-70:-60:4*\blockh)%
|
||
|- coordinate (tiltne) ++(-0.15*\blockw, 0.6*\blockh) coordinate (spindlene)%
|
||
|- ($(beginarc) + (0.15*\blockw, 0.2*\blockh)$) coordinate (spindlesw) -- ++(0, 0.4*\blockh) -| cycle;
|
||
|
||
% Micro-Hexapod
|
||
\begin{scope}[shift={(spindletop)}]
|
||
% Parameters definitions
|
||
\def\baseh{0.22*\blockh} % Height of the base
|
||
\def\naceh{0.18*\blockh} % Height of the nacelle
|
||
\def\baser{0.22*\blockw} % Radius of the base
|
||
\def\nacer{0.18*\blockw} % Radius of the nacelle
|
||
|
||
\def\armr{0.2*\blockh} % Radius of the arms
|
||
\def\basearmborder{0.2}
|
||
\def\nacearmborder{0.2}
|
||
|
||
\def\xnace{0} \def\ynace{\blockh-\naceh} \def\anace{0}
|
||
\def\xbase{0} \def\ybase{0} \def\abase{0}
|
||
|
||
% Hexapod1
|
||
\begin{scope}[shift={(\xbase, \ybase)}, rotate=\abase]
|
||
% Base
|
||
\draw[fill=white] (-\baser, 0) coordinate[](uhexabot) rectangle (\baser, \baseh);
|
||
|
||
\coordinate[] (armbasel) at (-\baser+\basearmborder+\armr, \baseh);
|
||
\coordinate[] (armbasec) at (0, \baseh);
|
||
\coordinate[] (armbaser) at (\baser-\basearmborder-\armr, \baseh);
|
||
|
||
\begin{scope}[shift={(\xnace, \ynace)}, rotate=\anace]
|
||
\draw[fill=white] (-\nacer, 0) rectangle (\nacer, \naceh);
|
||
\coordinate[] (uhexatop) at (0, \naceh);
|
||
\coordinate[] (armnacel) at (-\nacer+\nacearmborder+\armr, 0);
|
||
\coordinate[] (armnacec) at (0, 0);
|
||
\coordinate[] (armnacer) at (\nacer-\nacearmborder-\armr, 0);
|
||
\end{scope}
|
||
|
||
\draw[] (armbasec) -- (armnacer);
|
||
\draw[] (armbasec) -- (armnacel);
|
||
\draw[] (armbasel) -- coordinate(mhexaw) (armnacel);
|
||
\draw[] (armbasel) -- (armnacec);
|
||
\draw[] (armbaser) -- (armnacec);
|
||
\draw[] (armbaser) -- coordinate(mhexae) (armnacer);
|
||
\end{scope}
|
||
\end{scope}
|
||
|
||
% Sample
|
||
\begin{scope}[shift={(uhexatop)}]
|
||
\draw[fill=white] (-0.1*\blockw, 0) coordinate[](samplebot) rectangle coordinate[pos=0.5](samplecenter) node[pos=0.5, above]{Sample} (0.1*\blockw, \blockh) coordinate[](samplene);
|
||
\coordinate[](samplenw) at (-0.1*\blockw, \blockh);
|
||
\end{scope}
|
||
\end{scope}
|
||
|
||
\begin{scope}[shift={(0, -0.3*\blockh)}]
|
||
% Translation Stage - fixed part
|
||
\draw[fill=black!40] (-0.5*\blockw, 0) coordinate[](tyb) rectangle (0.5*\blockw, 0.15*\blockh);
|
||
\coordinate[] (measposbot) at (0.5*\blockw, 0);
|
||
|
||
% Translation Stage - mobile part
|
||
\draw[fill=black!10, fill opacity=0.5] (-0.5*\blockw, 0.2*\blockh) -- (-0.5*\blockw, 1.5*\blockh) coordinate[](tyt) -- (0.5*\blockw, 1.5*\blockh) -- (0.5*\blockw, 0.2*\blockh) -- (0.35*\blockw, 0.2*\blockh) -- (0.35*\blockw, 0.8*\blockh) -- (-0.35*\blockw, 0.8*\blockh) -- (-0.35*\blockw, 0.2*\blockh) -- cycle;
|
||
|
||
% Translation Guidance
|
||
\draw[dashed, color=black!60] ($(-0.5*\blockw, 0)+( 0.075*\blockw,0.5*\blockh)$) circle (0.2*\blockh);
|
||
\draw[dashed, color=black!60] ($( 0.5*\blockw, 0)+(-0.075*\blockw,0.5*\blockh)$) circle (0.2*\blockh);
|
||
|
||
% Tilt Guidance
|
||
\draw[dashed, color=black!60] ([shift=(-107:4.1*\blockh)]rotationpoint) arc (-107:-120:4.1*\blockh);
|
||
\draw[dashed, color=black!60] ([shift=( -73:4.1*\blockh)]rotationpoint) arc (-73:-60:4.1*\blockh);
|
||
\end{scope}
|
||
|
||
% % Vertical line
|
||
% \draw[dashed, color=black] (samplecenter) -- ++(0, -4*\blockh);
|
||
% \begin{scope}[rotate around={\tiltdeg:(samplecenter)}]
|
||
% \draw[dashed, color=black] (samplecenter) -- ++(0, -4*\blockh);
|
||
% \node[] at ($(samplecenter)+(0, -2.3*\blockh)$) {\AxisRotator[rotate=-90]};
|
||
% \node[right, shift={(0.3,0)}] at ($(samplecenter)+(0, -2.3*\blockh)$) {$\theta_z$};
|
||
% \end{scope}
|
||
% \draw[->] ([shift=(-90:3.6*\blockh)]samplecenter) arc (-90:-87:3.6*\blockh) node[right]{$\theta_y$};
|
||
|
||
% Laser
|
||
\begin{scope}[shift={(samplecenter)}]
|
||
\draw[color=red, -<-=0.3] (samplecenter) node[circle, fill=red, inner sep=0pt, minimum size=3pt]{} -- node[pos=0.3, above, color=black]{X-ray} ($(samplecenter)+(1.2*\blockw,0)$);
|
||
\end{scope}
|
||
|
||
% Axis
|
||
\begin{scope}[shift={(-0.35*\blockw, 3*\blockh)}]
|
||
\def\axissize{0.8cm}
|
||
\draw[->] (0, 0) -- ++(0, \axissize) node[right]{$z$};
|
||
\draw[->] (0, 0) -- ++(-\axissize, 0) node[above]{$x$};
|
||
\draw[fill, color=black] (0, 0) circle (0.05*\axissize);
|
||
\node[draw, circle, inner sep=0pt, minimum size=0.4*\axissize, label=right:$y$] (yaxis) at (0, 0){};
|
||
% \node[draw, circle, inner sep=0pt, cross, minimum size=0.4*\axissize, label=left:$y$] (yaxis) at (0, 0){};
|
||
\end{scope}
|
||
|
||
\node[fit={($(-0.6*\blockw, -0.5*\blockh)$) ($(0.6*\blockw, 4*\blockh)$)}, inner sep=0pt, draw, dashed, color=gray, label={Positioning Station}] (possystem) {};
|
||
|
||
\draw[fill=black!30] ($(tyb)+(-5, -1)$) coordinate[](granitesw) rectangle node[pos=0.5]{Granite Frame} ($(measposbot)+(5, 0)$) coordinate[](granitene);
|
||
|
||
% Focusing Optics
|
||
\draw[fill=black!20] ($(granitene)+(-1.5, 3)$) rectangle ++(-1, 2);
|
||
\draw[spring] ($(granitene)+(-2, 0)$) -- ++(0, 3);
|
||
|
||
\node[fit={($(granitene)+(-2.8, -0.2)$) ($(granitene)+(-1.2, 5.2)$)}, inner sep=0pt, draw, dashed, color=gray, label={Focusing Optics}] () {};
|
||
|
||
% Measurement Optics
|
||
\draw[fill=black!20] ($(granitesw)+(1.5, 4)$) rectangle ++(1, 2);
|
||
\draw[spring] ($(granitesw)+(2, 1)$) -- ++(0, 3);
|
||
|
||
\node[fit={($(granitesw)+(2.8, 0.8)$) ($(granitesw)+(1.2, 6.2)$)}, inner sep=0pt, draw, dashed, color=gray, label={Imagery System}] () {};
|
||
\end{tikzpicture}
|
||
#+end_src
|
||
|
||
- Alternative: =id31_microstation_cad_view.png= (CAD view)
|
||
|
||
#+name: fig:introduction_id31_microstation_picture
|
||
#+caption: Picture of the ID31 Micro-Station with annotations
|
||
#+attr_latex: :width 0.49\linewidth
|
||
#+RESULTS:
|
||
[[file:figs/introduction_id31_microstation_picture.png]]
|
||
|
||
**** Science performed on ID31
|
||
|
||
- Few words about science made on ID31 and why nano-meter accuracy is required
|
||
- Typical experiments (tomography, ...), various samples (up to 50kg), sample environments (high temp, cryo, etc..)
|
||
- Alignment of the sample, then
|
||
- Reflectivity
|
||
- Tomography
|
||
- Diffraction tomography: most critical
|
||
- Example of picture obtained (Figure ref:fig:introduction_id31_tomography_result) with resolution
|
||
|
||
|
||
=introduction_exp_scanning= and =introduction_exp_scanning_image=
|
||
|
||
#+name: fig:introduction_id31_tomography_result
|
||
#+caption: Image obtained on the ID31 beamline
|
||
#+attr_latex: :width 0.49\linewidth
|
||
[[file:example-image-c.png]]
|
||
|
||
** Need of accurate positioning end stations with high dynamics
|
||
**** A push towards brighter and smaller beams...
|
||
|
||
Improvement of both the light source and the instrumentation:
|
||
- EBS: smaller source + higher flux ref:fig:introduction_beam_ebs
|
||
|
||
#+name: fig:introduction_beam_ebs
|
||
#+caption: View of the ESRF X-ray beam before the EBS upgrade (top) and after the EBS upgrade (bottom)
|
||
[[file:figs/introduction_beam_ebs.png]]
|
||
|
||
|
||
- Better focusing optic (add some links): beam size in the order of 10 to 20nm FWHM (reference) ref:fig:introduction_moore_law_focus
|
||
crossed silicon compound refractive lenses, KB mirrors [17], zone plates [18], or multilayer Laue lenses [19]
|
||
[[cite:&barrett16_reflec_optic_hard_x_ray]]
|
||
|
||
#+name: fig:introduction_moore_law_focus
|
||
#+caption: Figure caption
|
||
[[file:figs/introduction_moore_law_focus.png]]
|
||
|
||
Higher flux density (+high energy of the ID31 beamline) => Radiation damage: needs to scan the sample quite fast with respect to the focused beam
|
||
|
||
- Allowed by better detectors: higher sampling rates and lower noise => possible to scan fast
|
||
[[cite:&hatsui15_x_ray_imagin_detec_synch_xfel_sourc]]
|
||
|
||
**** ...Requires the use of dynamical positioning
|
||
"from traditional step by step scans to /fly-scan/"
|
||
|
||
Fast scans + needs of high accuracy and stability => need mechatronics system with:
|
||
- accurate metrology
|
||
- multi degree of freedom positioning systems
|
||
- fast feedback loops
|
||
|
||
Shift from step by step scan to /fly-scan/ cite:huang15_fly_scan_ptych
|
||
- Much lower pixel size + large image => takes of lot of time if captured step by step.
|
||
Explain what is step by step scanning: move motors from point A to point B, stops, start detector acquisition, open shutter , close the shutter, move to point C, ...
|
||
|
||
[[cite:&xu23_high_nsls_ii]]
|
||
#+begin_quote
|
||
In traditional step scan mode, each exposure position requires the system to stop prior to data acquisition, which may become a limiting factor when fast data collection is required.
|
||
Fly-scanning is chosen as a preferred solution that helps overcome such speed limitations [5, 6].
|
||
In fly-scan mode, the sample keeps moving and a triggering system generates trigger signals based on the position of the sample or the time elapsed.
|
||
The trigger signals are used to control detector exposure.
|
||
#+end_quote
|
||
|
||
- [ ] Make picture representing a typical experiment (maybe YZ scan?) with:
|
||
Probably already shown earlier =introduction_exp_scanning=
|
||
- nano focusing optics (see the beam focused)
|
||
- positioning stage with displayed YZ motion (pixel by pixel in the YZ plane)
|
||
- detector
|
||
|
||
Subject of this thesis: design of high performance positioning station with high dynamics and nanometer accuracy
|
||
|
||
* Challenge definition
|
||
** Multi DoF, Highly accurate, and Long stroke positioning end station?
|
||
**** Performance limitation of "stacked stages" end-stations
|
||
|
||
Typical positioning end station:
|
||
- stacked stages
|
||
- ballscrew, linear guides, rotary motor
|
||
|
||
|
||
Explain the limitation of performances:
|
||
- Backlash, play, thermal expansion, guiding imperfections, ...
|
||
- Give some numbers: straightness of the Ty stage for instance, change of $0.1^oC$ with steel gives x nm of motion
|
||
- Vibrations
|
||
- Explain that this micro-station can only have ~10um of accuracy due to physical limitation
|
||
- Possibility to have linear/rotary encoders that correct the motion in the considered DoF, but does not change anything to the other 5DoF
|
||
|
||
|
||
Talk about flexure based positioning stations?
|
||
Advantages: no backlash, etc...
|
||
But: limited to short stroke
|
||
Picture of schematic of one positioning station based on flexure
|
||
|
||
**** The ID31 Micro-Station
|
||
|
||
Presentation of the Micro-Station in details ref:fig:introduction_id31_microstation_cad:
|
||
- Goal of each stage (e.g. micro-hexapod: static positioning, Ty and Rz: scans, ...)
|
||
- Stroke
|
||
- Initial design objectives: as stiff as possible, smallest errors as possible
|
||
|
||
**** New positioning requirements
|
||
|
||
- To benefits from nano-focusing optics, new source, etc... new positioning requirements
|
||
- Positioning requirements on ID31:
|
||
- Maybe make a table with the requirements and the associated performances of the micro-station
|
||
- Make tables with the wanted motion, stroke, accuracy in different DoF, etc..
|
||
- Sample masses
|
||
|
||
The goal in this thesis is to increase the positioning accuracy of the micro-station to fulfil the initial positioning requirements.
|
||
|
||
*Goal*: Improve accuracy of 6DoF long stroke position platform
|
||
|
||
** The Nano Active Stabilization System
|
||
**** NASS Concept
|
||
|
||
Briefly describe the NASS concept.
|
||
4 parts:
|
||
- Micro Station
|
||
- multi-DoF positioning system with good dynamics
|
||
- 5DoF metrology system
|
||
- Control system and associated instrumentation
|
||
|
||
6DoF vibration control platform on top of a complex positioning platform that correct positioning errors based on an external metrology
|
||
|
||
- [ ] Add the control system in the schematic
|
||
|
||
#+name: fig:introduction_nass_concept_schematic
|
||
#+caption: Nass Concept. 1: micro-station, 2: nano-hexapod, 3: sample, 4: 5DoF metrology
|
||
[[file:figs/introduction_nass_concept_schematic.png]]
|
||
|
||
**** Metrology system
|
||
|
||
Requirements:
|
||
- 5 DoF
|
||
- long stroke
|
||
- nano-meter accurate
|
||
- high bandwidth
|
||
|
||
The accuracy of the NASS will only depend on the accuracy of the metrology system.
|
||
|
||
Concept:
|
||
- Fiber interferometers
|
||
- Spherical reflector with flat bottom
|
||
- Tracking system
|
||
|
||
Complex mechatronics system on its own.
|
||
|
||
This metrology system is not further discussed in this thesis as it is still under active development.
|
||
|
||
In the following of this thesis, it is supposed that the metrology system is accurate, etc..
|
||
|
||
- Say that there are several high precision sensors, but only interferometers for long stroke / high accuracy?
|
||
|
||
**** Multi-DoF Positioning stage for error compensation
|
||
|
||
- 5 DoF
|
||
- High dynamics
|
||
- nano-meter capable (no backlash,)
|
||
- Accept payloads up to 50kg
|
||
|
||
**** MIMO robust control strategies
|
||
|
||
Explain the robustness need?
|
||
- 24 7/7 ...
|
||
- That is why most of end-stations are based on well-proven design (stepper motors, linear guides, ball bearing, ...)
|
||
- Plant uncertainty: many different samples, use cases, rotating velocities, etc...
|
||
|
||
Trade-off between robustness and performance in the design of feedback system.
|
||
|
||
** Predictive Design
|
||
|
||
- The performances of the system will depend on many factors:
|
||
- sensors
|
||
- actuators
|
||
- mechanical design
|
||
- achievable bandwidth
|
||
- ...
|
||
- Need to evaluate the different concepts, and predict the performances to guide the design
|
||
- The goal is to design, built and test this system such that it work as expected the first time.
|
||
Very costly system, so much be correct.
|
||
|
||
** Control Challenge
|
||
|
||
High bandwidth, 6 DoF system for vibration control, fixed on top of a complex multi DoF positioning station, robust, ...
|
||
|
||
- Many different configurations (tomography, Ty scans, slow fast, ...)
|
||
- Complex MIMO system. Dynamics of the system could be coupled to the complex dynamics of the micro station
|
||
- Rotation aspect, gyroscopic effects, actuators are rotating with respect to the sensors
|
||
- Robustness to payload change: very critical.
|
||
Say that high performance systems (lithography machines, etc...) works with calibrated payloads.
|
||
Being robust to change of payload inertia means large stability margins and therefore less performance.
|
||
|
||
* Literature Review
|
||
** Nano Positioning end-stations
|
||
**** End Station with Stacked Stages
|
||
|
||
Stacked stages:
|
||
- errors are combined
|
||
|
||
To have acceptable performances / stability:
|
||
- limited number of stages
|
||
- high performances stages (air bearing etc...)
|
||
|
||
Examples:
|
||
- ID16b [[cite:&martinez-criado16_id16b]]
|
||
- ID13 [[cite:&riekel10_progr_micro_nano_diffr_at]]
|
||
- ID11 cite:wright20_new_oppor_at_mater_scien
|
||
- ID01 [[cite:&leake19_nanod_beaml_id01]]
|
||
- [ ] Maybe make a table to compare stations
|
||
|
||
Explain limitations => Thermal drifts, run-out errors of spindles (improved by using air bearing), straightness of translation stages, ...
|
||
|
||
**** Online Metrology and Active Control of Positioning Errors
|
||
|
||
The idea of having an external metrology to correct for errors is not new.
|
||
|
||
- To have even better performances: online metrology are required.
|
||
- Several strategies:
|
||
- only used for measurements (post processing)
|
||
- for calibration
|
||
- for triggering detectors
|
||
- for real time positioning control
|
||
|
||
|
||
|
||
- [ ] HXN [[cite:&xu23_high_nsls_ii]]
|
||
Laser interferometers on reference ring (on top of rotary stage).
|
||
Used to trigger the detectors (ptychography, microscope)
|
||
Similar to cite:&wang12_autom_marker_full_field_hard
|
||
|
||
#+name: tab:introduction_sample_stages
|
||
#+caption: Table caption
|
||
#+attr_latex: :environment tabularx :width \linewidth :align lllllllX
|
||
#+attr_latex: :center t :booktabs t
|
||
| Architecture | Sensors and measured DoFs | Actuators and controlled DoFs | Institute, BL | OL/CL (bandwidth) | Stroke, DoF | Samples | Ref |
|
||
|-----------------------------------------------+--------------------------------------+-------------------------------+----------------+---------------------+-----------------------+--------------+----------------------------------------------------------------------------------|
|
||
| XYZ, Spherical retroreflector, Sample | 3 interferometers[fn:1], Y,Z | YZ piezo stages | PETRA III, P06 | OL | 100um | light | [[cite:&schroer17_ptynam;&schropp20_ptynam]] |
|
||
| Spindle / Metrology Ring / XYZ Stage / Sample | 3 Capacitive, Y,Z,Rx | | NSLS, X8C | OL, post processing | | micron scale | cite:&wang12_autom_marker_full_field_hard |
|
||
| *Hexapod* / Spindle / Metrology Ring / Sample | 12 Capacitive[fn:4], X,Y,Z,Rx,Ry | Piezo (Hexapod) | ESRF, ID16a | CL, 10Hz bandwidth | 50um, 500urad | light | [[cite:&villar18_nanop_esrf_id16a_nano_imagin_beaml]] |
|
||
| XYZ, Rz, XY, Cylindrical reference | 5 interferometers[fn:3], X,Y,Z,Rx,Ry | XYZ linear motors | Soleil | CL | | light | [[cite:&engblom18_nanop_resul;&stankevic17_inter_charac_rotat_stages_x_ray_nanot]] |
|
||
| XYZ, Rz, XYZ Spherical reference | 3 Interferometers[fn:2], Y,Z,Rx | XYZ parallel piezo stage | PSI, OMNY | CL | 400um | light | [[cite:&holler18_omny_tomog_nano_cryo_stage;&holler17_omny_pin_versat_sampl_holder]] |
|
||
| XYZ, mirrors/sample | 3 interferometers[fn:3], XYZ | XYZ piezo stage | APS | CL, 3 PID | 3mm | light | [[cite:&nazaretski15_pushin_limit]] |
|
||
| Rz, Parallel XYZ stage | 3 interferometers[fn:1] | 3xVCM parallel stage | LNLS, CARNAUBA | CL, 100Hz bandwidth | YZ: 3mm, Rz: +-110deg | light | [[cite:&geraldes23_sapot_carnaub_sirius_lnls]] |
|
||
| Parallel XYZ stage | 3 interferometers[fn:2], XYZ | 3xVCM parallel stage | Diamond, I14 | CL, 100Hz bandwidth | XYZ: 3mm | up to 350g | [[cite:&kelly22_delta_robot_long_travel_nano]] |
|
||
|
||
- [ ] Figure with different stages
|
||
- [ ] Compared to the existing stages (see table), what are the challenges here? Rotation, large stroke, light to heavy payloads, lots of DoF (5 to be controlled)
|
||
- [ ] Comparison with NASS?
|
||
| Architecture | Sensors | Actuators | Institute, BL | OL/CL (bandwidth) | Stroke, DoF | Samples | Ref |
|
||
|-------------------------+--------------------+-----------+---------------+-------------------+------------------+------------+-----|
|
||
| Ty,Ry,Rz,Hexapod,Sample | 6+ Interferometers | | ESRF, ID31 | CL | Ty, Ry, Rz, Hexa | up to 50kg | |
|
||
|
||
|
||
**** Long Stroke - Short Stroke architecture
|
||
|
||
Speak about two stage control?
|
||
- Long stroke + short stroke
|
||
- Usually applied to 1dof, 3dof (show some examples: disk drive, wafer scanner)
|
||
- Any application in 6DoF? Maybe new!
|
||
- In the table, say which ones are long stroke / short stroke. Some new stages are just long stroke (voice coil)
|
||
|
||
** Multi-DoF dynamical positioning stations
|
||
**** Serial and Parallel Kinematics
|
||
|
||
Example of several dynamical stations:
|
||
- XYZ piezo stages
|
||
- Delta robot? Octoglide?
|
||
- Stewart platform
|
||
|
||
Serial vs parallel kinematics (table?)
|
||
|
||
**** Stewart platforms
|
||
|
||
- [ ] Explain the normal stewart platform architecture
|
||
- [ ] Make a table that compares the different stewart platforms for vibration control.
|
||
Geometry (cubic), Actuator (soft, stiff), Sensor, Flexible joints, etc.
|
||
|
||
#+name: fig:introduction_stewart_platform_examples
|
||
#+caption: Examples of Stewart Platforms
|
||
#+begin_figure
|
||
#+name: fig:introduction_stewart_platform_a
|
||
#+attr_latex: :caption \subcaption{Stewart platform based on voice coil actuators}
|
||
#+attr_latex: :options {0.49\textwidth}
|
||
#+begin_subfigure
|
||
#+attr_latex: :width 0.8\linewidth
|
||
[[file:example-image-a.png]]
|
||
#+end_subfigure
|
||
#+name: fig:introduction_stewart_platform_a
|
||
#+attr_latex: :options {0.49\textwidth}
|
||
#+attr_latex: :caption \subcaption{Stewart platform based on piezoelectric actuators}
|
||
#+begin_subfigure
|
||
#+attr_latex: :width 0.8\linewidth
|
||
[[file:example-image-b.png]]
|
||
#+end_subfigure
|
||
#+end_figure
|
||
|
||
** Mechatronics approach
|
||
**** Predicting performances using models
|
||
|
||
- [[cite:&monkhorst04_dynam_error_budget]]
|
||
#+begin_quote
|
||
high costs of the design process: the designed system must be *first time right*.
|
||
When the system is finally build, its performance level should satisfy the specifications.
|
||
No significant changes are allowed in the post design phase.
|
||
Because of this, the designer wants to be able to predict the performance of the system a-priori and gain insight in the performance limiting factors of the system.
|
||
#+end_quote
|
||
|
||
|
||
Can use several models:
|
||
- Lumped mass-spring-damper models
|
||
cite:rankers98_machin
|
||
- Multi-Body Models
|
||
- Finite element models
|
||
Sub structuring?
|
||
|
||
**** Closed-Loop Simulations
|
||
|
||
[[cite:&schmidt20_desig_high_perfor_mechat_third_revis_edition]]
|
||
|
||
Say what can limit the performances for a complex mechatronics systems as this one:
|
||
- disturbances
|
||
- measurement noise
|
||
- DAC / amplifier noise (actuator)
|
||
- feedback system / bandwidth
|
||
|
||
Simulations can help evaluate the behavior of the system.
|
||
|
||
**** Dynamic Error Budgeting
|
||
|
||
- [[cite:&monkhorst04_dynam_error_budget]]
|
||
#+begin_quote
|
||
high costs of the design process: the designed system must be *first time right*.
|
||
When the system is finally build, its performance level should satisfy the specifications.
|
||
No significant changes are allowed in the post design phase.
|
||
Because of this, the designer wants to be able to predict the performance of the system a-priori and gain insight in the performance limiting factors of the system.
|
||
#+end_quote
|
||
- cite:jabben07_mechat
|
||
- [[cite:&okyay16_mechat_desig_dynam_contr_metrol]]
|
||
#+begin_quote
|
||
Error budgets [23] are frequently used in the design of precision machines, in order to assess the
|
||
contributions of different factors such as parasitic motions, thermal expansion, and servo accuracy, on
|
||
the positioning accuracy of a machine. Dynamic Error Budgeting (DEB) or ‘Spectral Analysis’
|
||
extends this concept to the realm of feedback control. Recognizing that the controller can provide
|
||
only a finite attenuation of disturbance signals interfering with the servo, DEB provides a
|
||
methodology for predicting the cumulative effect of such signals on the control error as a function of
|
||
their spectral (frequency) content. The method can be used to predict the control accuracy of a system
|
||
implemented using a set of certain devices under certain conditions before it is realized. Furthermore,
|
||
as it is formulated in the frequency domain, it can be used to optimize the controller design as well,
|
||
typically leading to an H2 - optimal control framework. In DEB, the disturbance signals are modeled
|
||
with their power spectral density (PSD), assuming that they are stationary stochastic processes which
|
||
are not correlated with each other. Then, these PSD’s are transmitted to the performance goal, most
|
||
often the positioning error, using linear time invariant (LTI) system theory. The transmitted PSD’s are
|
||
summed up into the variance of the performance goal, which constitutes a comparative measure of
|
||
performance. Most importantly, the influence of different dynamic factors and disturbance sources,
|
||
which have the greatest impact on the achievable performance (e.g., accuracy) can be easily spotted
|
||
and improved, through this kind of analysis. An approach similar to DEB was followed to decompose
|
||
the contribution of different noise sources on the hard disk position error in [1], [2], [45]. DEB has
|
||
been used to assess the performance of a geophone and a vibration isolation system in [75]. Jabben
|
||
[49] has used DEB in the mechatronic design of a magnetically suspended rotating platform. Aguirre
|
||
et al. [3] have analyzed the performance of active aerostatic thrust bearings using DEB.
|
||
#+end_quote
|
||
|
||
** TODO Control architecture
|
||
|
||
Maybe make a simple review of control strategies for Stewart platform control.
|
||
|
||
* Original Contributions
|
||
**** Introduction :ignore:
|
||
|
||
This thesis proposes several contributions in the fields of Control, Mechatronics Design and Experimental validation.
|
||
|
||
**** Active Damping of rotating mechanical systems using Integral Force Feedback
|
||
|
||
[[cite:&dehaeze20_activ_dampin_rotat_platf_integ_force_feedb;&dehaeze21_activ_dampin_rotat_platf_using]]
|
||
#+begin_quote
|
||
This paper investigates the use of Integral Force Feedback (IFF) for the active damping of rotating mechanical systems.
|
||
Guaranteed stability, typical benefit of IFF, is lost as soon as the system is rotating due to gyroscopic effects.
|
||
To overcome this issue, two modifications of the classical IFF control scheme are proposed.
|
||
The first consists of slightly modifying the control law while the second consists of adding springs in parallel with the force sensors.
|
||
Conditions for stability and optimal parameters are derived.
|
||
The results reveal that, despite their different implementations, both modified IFF control scheme have almost identical damping authority on the suspension modes.
|
||
#+end_quote
|
||
|
||
**** Design of complementary filters using $\mathcal{H}_\infty$ Synthesis and sensor fusion
|
||
|
||
[[cite:&dehaeze19_compl_filter_shapin_using_synth]]
|
||
[[cite:&verma20_virtual_sensor_fusion_high_precis_contr]]
|
||
[[cite:&tsang22_optim_sensor_fusion_method_activ]]
|
||
|
||
- Several uses (link to some papers).
|
||
- For the NASS, they could be use to further improve the robustness of the system.
|
||
|
||
**** Multi-body simulations with reduced order flexible bodies obtained by FEA
|
||
|
||
[[cite:&brumund21_multib_simul_reduc_order_flexib_bodies_fea]]
|
||
|
||
Combined multi-body / FEA techniques and experimental validation on a Stewart platform containing amplified piezoelectric actuators
|
||
Super-element of amplified piezoelectric actuator / combined multibody-FEA technique, experimental validation on an amplified piezoelectric actuator and further validated on a complete stewart platform
|
||
|
||
#+begin_quote
|
||
We considered sub-components in the multi-body model as /reduced order flexible bodies/ representing the component’s modal behaviour with reduced mass and stiffness matrices obtained from finite element analysis (FEA) models.
|
||
These matrices were created from FEA models via modal reduction techniques, more specifically the /component mode synthesis/ (CMS).
|
||
This makes this design approach a combined multibody-FEA technique.
|
||
We validated the technique with a test bench that confirmed the good modelling capabilities using reduced order flexible body models obtained from FEA for an amplified piezoelectric actuator (APA).
|
||
#+end_quote
|
||
|
||
**** Robustness by design
|
||
|
||
- Design of a Stewart platform and associated control architecture that is robust to large plant uncertainties due to large variety of payload and experimental conditions.
|
||
- Instead of relying on complex controller synthesis (such as $\mathcal{H}_\infty$ synthesis or $\mu\text{-synthesis}$) to guarantee the robustness and performance.
|
||
- The approach here is to choose an adequate architecture (mechanics, sensors, actuators) such that controllers are robust by nature.
|
||
- Example: collocated actuator/sensor pair => controller can easily be made robust
|
||
- This is done by using models and using HAC-LAC architecture
|
||
|
||
**** Mechatronics design
|
||
|
||
Conduct a rigorous mechatronics design approach for a nano active stabilization system
|
||
[[cite:&dehaeze18_sampl_stabil_for_tomog_exper;&dehaeze21_mechat_approac_devel_nano_activ_stabil_system]]
|
||
|
||
Approach from start to finish:
|
||
- From first concepts using basic models, to concept validation
|
||
- Detailed design phase
|
||
- Experimental phase
|
||
|
||
Complete design with clear choices based on models.
|
||
Such approach, while not new, is here applied
|
||
This can be used for the design of future end-stations.
|
||
|
||
#+begin_src latex :file nass_mechatronics_approach.pdf
|
||
% \graphicspath{ {/home/thomas/Cloud/thesis/papers/dehaeze21_mechatronics_approach_nass/tikz/figs-tikz} }
|
||
|
||
\begin{tikzpicture}
|
||
% Styles
|
||
\tikzset{myblock/.style= {draw, thin, color=white!70!black, fill=white, text width=3cm, align=center, minimum height=1.4cm}};
|
||
\tikzset{mylabel/.style= {anchor=north, below, font=\bfseries\small, color=black, text width=3cm, align=center}};
|
||
\tikzset{mymodel/.style= {anchor=south, above, font=\small, color=black, text width=3cm, align=center}};
|
||
\tikzset{mystep/.style= {->, ultra thick}};
|
||
|
||
% Blocks
|
||
\node[draw, fill=lightblue, align=center, label={[mylabel, text width=8.0cm] Dynamical Models}, minimum height = 4.5cm, text width = 8.0cm] (model) at (0, 0) {};
|
||
|
||
\node[myblock, fill=lightgreen, label={[mylabel] Disturbances}, left = 3 of model.west] (dist) {};
|
||
\node[myblock, fill=lightgreen, label={[mylabel] Micro Station}, below = 2pt of dist] (mustation) {};
|
||
\node[myblock, fill=lightgreen, label={[mylabel] Nano Hexapod}, above = 2pt of dist] (nanohexapod) {};
|
||
|
||
\node[myblock, fill=lightyellow, label={[mylabel] Mech. Design}, above = 1 of model.north] (mechanical) {};
|
||
\node[myblock, fill=lightyellow, label={[mylabel] Instrumentation}, left = 2pt of mechanical] (instrumentation) {};
|
||
\node[myblock, fill=lightyellow, label={[mylabel] FEM}, right = 2pt of mechanical] (fem) {};
|
||
|
||
\node[myblock, fill=lightred, label={[mylabel] Test Benches}, right = 3 of model.east] (testbenches) {};
|
||
\node[myblock, fill=lightred, label={[mylabel] Assembly}, above = 2pt of testbenches] (mounting) {};
|
||
\node[myblock, fill=lightred, label={[mylabel] Implementation}, below = 2pt of testbenches] (implementation) {};
|
||
|
||
% Text
|
||
\node[anchor=south, above, text width=8cm, align=left] at (model.south) {Extensive use of models for:\begin{itemize}[noitemsep,topsep=5pt]\item Extraction of transfer functions \\ \item Choice of appropriate control architecture \\ \item Tuning of control laws \\ \item Closed loop simulations \\ \item Noise budgets / Evaluation of performances \\ \item Sensibility to parameters / disturbances\end{itemize}\centerline{Models are at the core the mecatronic approach!}};
|
||
|
||
\node[mymodel] at (mustation.south) {Multiple stages \\ Complex dynamics};
|
||
\node[mymodel] at (dist.south) {Ground motion \\ Position errors};
|
||
\node[mymodel] at (nanohexapod.south) {Different concepts \\ Sensors, Actuators};
|
||
|
||
\node[mymodel] at (instrumentation.south) {Sensors, Actuators \\ Electronics};
|
||
\node[mymodel] at (mechanical.south) {Proper integration \\ Ease of assembly};
|
||
\node[mymodel] at (fem.south) {Optimize key parts: \\ Joints, Plates, APA};
|
||
|
||
\node[mymodel] at (mounting.south) {Struts \\ Nano-Hexapod};
|
||
\node[mymodel] at (testbenches.south) {Instrumentation \\ APA, Struts};
|
||
\node[mymodel] at (implementation.south) {Control tests \\ Micro Station};
|
||
|
||
% Links
|
||
\draw[->] (dist.east) -- node[above, midway]{{\small Measurements}} node[below,midway]{{\small Spectral Analysis}} (dist.east-|model.west);
|
||
\draw[->] (mustation.east) -- node[above, midway]{{\small Measurements}} node[below, midway]{{\small CAD Model}} (mustation.east-|model.west);
|
||
|
||
\draw[->] ($(nanohexapod.east-|model.west)-(0, 0.15)$) -- node[below, midway]{{\small Optimization}} ($(nanohexapod.east)-(0, 0.15)$);
|
||
\draw[<-] ($(nanohexapod.east-|model.west)+(0, 0.15)$) -- node[above, midway]{{\small Model}} ($(nanohexapod.east)+(0, 0.15)$);
|
||
|
||
\draw[->] ($(fem.south|-model.north)+(0.15, 0)$) -- node[right, midway]{{\small Specif.}} ($(fem.south)+(0.15,0)$);
|
||
\draw[<-] ($(fem.south|-model.north)-(0.15, 0)$) -- node[left, midway,align=right]{{\small Super}\\{\small Element}} ($(fem.south)-(0.15,0)$);
|
||
|
||
\draw[->] ($(mechanical.south|-model.north)+(0.15, 0)$) -- node[right, midway]{{\small Specif.}} ($(mechanical.south)+(0.15,0)$);
|
||
\draw[<-] ($(mechanical.south|-model.north)-(0.15, 0)$) -- node[left, midway,align=right]{{\small CAD}\\{\small model}} ($(mechanical.south)-(0.15,0)$);
|
||
|
||
\draw[->] ($(instrumentation.south|-model.north)+(0.15, 0)$) -- node[right, midway]{{\small Specif.}} ($(instrumentation.south)+(0.15,0)$);
|
||
\draw[<-] ($(instrumentation.south|-model.north)-(0.15, 0)$) -- node[left, midway]{{\small Model}} ($(instrumentation.south)-(0.15,0)$);
|
||
|
||
\draw[->] ($(mounting.west-|model.east)+(0, 0.15)$) -- node[above, midway]{{\small Requirements}} ($(mounting.west)+(0, 0.15)$);
|
||
\draw[<-] ($(mounting.west-|model.east)-(0, 0.15)$) -- node[below, midway]{{\small Model refinement}} ($(mounting.west)-(0, 0.15)$);
|
||
|
||
\draw[->] ($(testbenches.west-|model.east)+(0, 0.15)$) -- node[above, midway]{{\small Control Laws}} ($(testbenches.west)+(0, 0.15)$);
|
||
\draw[<-] ($(testbenches.west-|model.east)-(0, 0.15)$) -- node[below, midway]{{\small Model refinement}} ($(testbenches.west)-(0, 0.15)$);
|
||
|
||
\draw[->] ($(implementation.west-|model.east)+(0, 0.15)$) -- node[above, midway]{{\small Control Laws}} ($(implementation.west)+(0, 0.15)$);
|
||
\draw[<-] ($(implementation.west-|model.east)-(0, 0.15)$) -- node[below, midway]{{\small Model refinement}} ($(implementation.west)-(0, 0.15)$);
|
||
|
||
% Main steps
|
||
\node[font=\bfseries, rotate=90, anchor=south, above] (conceptual_phase_node) at (dist.west) {1 - Conceptual Phase};
|
||
\node[font=\bfseries, above] (detailed_phase_node) at (mechanical.north) {2 - Detail Design Phase};
|
||
\node[font=\bfseries, rotate=-90, anchor=south, above] (implementation_phase_node) at (testbenches.east) {3 - Experimental Phase};
|
||
\begin{scope}[on background layer]
|
||
\node[fit={(conceptual_phase_node.north|-nanohexapod.north) (mustation.south east)}, fill=lightgreen!50!white, draw, inner sep=2pt] (conceptual_phase) {};
|
||
\node[fit={(detailed_phase_node.north-|instrumentation.west) (fem.south east)}, fill=lightyellow!50!white, draw, inner sep=2pt] (detailed_phase) {};
|
||
\node[fit={(implementation_phase_node.north|-mounting.north) (implementation.south west)}, fill=lightred!50!white, draw, inner sep=2pt] (implementation_phase) {};
|
||
% \node[above left] at (dob.south east) {DOB};
|
||
\end{scope}
|
||
|
||
% Between main steps
|
||
\draw[mystep, postaction={decorate,decoration={raise=1ex,text along path,text align=center,text={Concept Validation}}}] (conceptual_phase.north) to[out=90, in=180] (detailed_phase.west);
|
||
\draw[mystep, postaction={decorate,decoration={raise=1ex,text along path,text align=center,text={Procurement}}}] (detailed_phase.east) to[out=0, in=90] (implementation_phase.north);
|
||
|
||
% % Inside Model
|
||
% \node[inner sep=1pt, outer sep=6pt, anchor=north west, draw, fill=white, thin] (multibodymodel) at ($(model.north west) - (0, 0.5)$)
|
||
% {\includegraphics[width=5.6cm]{simscape_nano_hexapod.png}};
|
||
|
||
% \node[inner sep=1pt, outer sep=6pt, anchor=south west, draw, fill=white, thin] (simscape) at (model.south west)
|
||
% {\includegraphics[width=5.6cm]{simscape_picture.jpg}};
|
||
|
||
% % Feedback Model
|
||
% \node[inner sep=3pt, outer sep=6pt, anchor=north east, draw, fill=white, thin] (simscape_sim) at ($(model.north east) - (0, 0.5)$)
|
||
% {\includegraphics[width=3.6cm]{simscape_simulations.pdf}};
|
||
|
||
% % FeedBack
|
||
% \node[inner sep=3pt, outer sep=6pt, anchor=south east, draw, fill=white, thin] (feedback) at (model.south east)
|
||
% {\includegraphics[width=3.6cm]{classical_feedback_small.pdf}};
|
||
\end{tikzpicture}
|
||
#+end_src
|
||
|
||
#+name: fig:introduction_nass_mechatronics_approach
|
||
#+caption: Overview of the mechatronic approach used for the Nano-Active-Stabilization-System
|
||
#+attr_latex: :width \linewidth
|
||
#+RESULTS:
|
||
[[file:figs/nass_mechatronics_approach.png]]
|
||
|
||
**** 6DoF vibration control of a rotating platform
|
||
|
||
Vibration control in 5DoF of a rotating stage
|
||
To the author's knowledge, the use of a continuously rotating stewart platform for vibration control has not been proved in the literature.
|
||
|
||
**** Experimental validation of the Nano Active Stabilization System
|
||
|
||
Demonstration of the improvement of the the positioning accuracy of a complex multi DoF (the micro-station) by several orders of magnitude (Section ...) using ...
|
||
|
||
* Thesis Outline - Mechatronics Design Approach
|
||
**** Introduction :ignore:
|
||
|
||
#+name: fig:introduction_overview_chapters
|
||
#+caption: Overview of the sections
|
||
#+attr_latex: :width \linewidth
|
||
[[file:figs/introduction_overview_chapters.png]]
|
||
|
||
This thesis
|
||
- has a structure that follows the mechatronics design approach
|
||
|
||
Is structured in three chapters that corresponds to the three mains parts of the proposed mechatronics approach.
|
||
|
||
A brief overview of these three chapters is given bellow.
|
||
|
||
**** Conceptual design development
|
||
|
||
- Start with simple models for witch trade offs can be easily understood (uniaxial)
|
||
- Increase the model complexity if important physical phenomenon are to be modelled (cf the rotating model)
|
||
- Only when better understanding of the physical effects in play, and only if required, go for higher model complexity (here multi-body model)
|
||
- The system concept and main characteristics should be extracted from the different models and validated with closed-loop simulations with the most accurate model
|
||
- Once the concept is validated, the chosen concept can be design in mode details
|
||
|
||
**** Detailed design
|
||
|
||
- During this detailed design phase, models are refined from the obtained CAD and using FEM
|
||
- The models are used to assists the design and to optimize each element based on dynamical analysis and closed-loop simulations
|
||
- The requirements for all the associated instrumentation can be determined from a dynamical noise budgeting
|
||
- After converging to a detailed design that give acceptable performance based on the models, the different parts can be ordered and the experimental phase begins
|
||
|
||
**** Experimental validation
|
||
|
||
- It is advised that the important characteristics of the different elements are evaluated individually
|
||
Systematic validation/refinement of models with experimental measurements
|
||
- The obtained characteristics can be used to refine the models
|
||
- Then, an accurate model of the system is obtained which can be used during experimental tests (for control synthesis for instance)
|
||
|
||
|
||
* Bibliography :ignore:
|
||
#+latex: \printbibliography[heading=bibintoc,title={Bibliography}]
|
||
|
||
* Footnotes
|
||
[fn:4]Capacitive sensors from Fogale Sensors
|
||
[fn:3]Attocube FPS3010 Fabry-Pérot interferometers
|
||
[fn:2]Attocube IDS3010 Fabry-Pérot interferometers
|
||
[fn:1]PicoScale SmarAct Michelson interferometers
|