1227 lines
		
	
	
		
			62 KiB
		
	
	
	
		
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			1227 lines
		
	
	
		
			62 KiB
		
	
	
	
		
			Org Mode
		
	
	
	
	
	
| #+TITLE: Nano Active Stabilization System - Introduction
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| :DRAWER:
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| #+LANGUAGE: en
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| #+EMAIL: dehaeze.thomas@gmail.com
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| #+AUTHOR: Dehaeze Thomas
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| 
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| #+BIND: org-latex-image-default-option "scale=1"
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| #+BIND: org-latex-image-default-width ""
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| 
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| #+LATEX_CLASS: scrreprt
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| #+LATEX_CLASS_OPTIONS: [a4paper, 10pt, DIV=12, parskip=full, bibliography=totoc]
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| #+LATEX_HEADER: \input{preamble.tex}
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| #+LATEX_HEADER_EXTRA: \input{preamble_extra.tex}
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| #+LATEX_HEADER_EXTRA: \bibliography{nass-introduction.bib}
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| 
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| #+BIND: org-latex-bib-compiler "biber"
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| 
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| #+PROPERTY: header-args:matlab  :session *MATLAB*
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| #+PROPERTY: header-args:matlab+ :comments org
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| #+PROPERTY: header-args:matlab+ :exports none
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| #+PROPERTY: header-args:matlab+ :results none
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| #+PROPERTY: header-args:matlab+ :eval no-export
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| #+PROPERTY: header-args:matlab+ :noweb yes
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| #+PROPERTY: header-args:matlab+ :mkdirp yes
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| #+PROPERTY: header-args:matlab+ :output-dir figs
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| #+PROPERTY: header-args:matlab+ :tangle no
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| 
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| #+PROPERTY: header-args:latex  :headers '("\\usepackage{tikz}" "\\usepackage{import}" "\\import{$HOME/Cloud/tikz/org/}{config.tex}")
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| #+PROPERTY: header-args:latex+ :imagemagick t :fit yes
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| #+PROPERTY: header-args:latex+ :iminoptions -scale 100% -density 150
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| #+PROPERTY: header-args:latex+ :imoutoptions -quality 100
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| #+PROPERTY: header-args:latex+ :results file raw replace
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| #+PROPERTY: header-args:latex+ :buffer no
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| #+PROPERTY: header-args:latex+ :tangle no
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| #+PROPERTY: header-args:latex+ :eval no-export
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| #+PROPERTY: header-args:latex+ :exports results
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| #+PROPERTY: header-args:latex+ :mkdirp yes
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| #+PROPERTY: header-args:latex+ :output-dir figs
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| #+PROPERTY: header-args:latex+ :post pdf2svg(file=*this*, ext="png")
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| :END:
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| 
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| #+latex: \clearpage
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| 
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| * Build                                                             :noexport:
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| #+NAME: startblock
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| #+BEGIN_SRC emacs-lisp :results none :tangle no
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| (add-to-list 'org-latex-classes
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|              '("scrreprt"
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|                "\\documentclass{scrreprt}"
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|                ("\\chapter{%s}" . "\\chapter*{%s}")
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|                ("\\section{%s}" . "\\section*{%s}")
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|                ("\\subsection{%s}" . "\\subsection*{%s}")
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|                ("\\paragraph{%s}" . "\\paragraph*{%s}")
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|                ))
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| 
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| 
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| ;; Remove automatic org heading labels
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| (defun my-latex-filter-removeOrgAutoLabels (text backend info)
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|   "Org-mode automatically generates labels for headings despite explicit use of `#+LABEL`. This filter forcibly removes all automatically generated org-labels in headings."
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|   (when (org-export-derived-backend-p backend 'latex)
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|     (replace-regexp-in-string "\\\\label{sec:org[a-f0-9]+}\n" "" text)))
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| (add-to-list 'org-export-filter-headline-functions
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|              'my-latex-filter-removeOrgAutoLabels)
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| 
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| ;; Remove all org comments in the output LaTeX file
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| (defun delete-org-comments (backend)
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|   (loop for comment in (reverse (org-element-map (org-element-parse-buffer)
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|                                     'comment 'identity))
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|         do
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|         (setf (buffer-substring (org-element-property :begin comment)
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|                                 (org-element-property :end comment))
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|               "")))
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| (add-hook 'org-export-before-processing-hook 'delete-org-comments)
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| 
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| ;; Use no package by default
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| (setq org-latex-packages-alist nil)
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| (setq org-latex-default-packages-alist nil)
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| 
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| ;; Do not include the subtitle inside the title
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| (setq org-latex-subtitle-separate t)
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| (setq org-latex-subtitle-format "\\subtitle{%s}")
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| 
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| (setq org-export-before-parsing-hook '(org-ref-glossary-before-parsing
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|                                        org-ref-acronyms-before-parsing))
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| #+END_SRC
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| 
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| * Notes                                                             :noexport:
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| 
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| Prefix is =introduction=
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| 
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| ** TODO [#C] Synchrotron moore laws
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| #+begin_src matlab :tangle no :exports none :results silent :noweb yes :var current_dir=(file-name-directory buffer-file-name)
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| <<matlab-dir>>
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| #+end_src
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| 
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| #+begin_src matlab :exports none :results silent :noweb yes
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| <<matlab-init>>
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| #+end_src
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| 
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| #+begin_src matlab
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| brilliances = [1e7, 1e8, 5e11, 2e12, 1e14, 1e15, 1e19, 1e21, 2e22, ]
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| #+end_src
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| 
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| 
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| ** TODO [#C] Complete list of Synchrotrons
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| 
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| | Name                   | Country          | Generation | Energy | Brightness | Status |
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| |------------------------+------------------+------------+--------+------------+--------|
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| | ESRF                   | France, Grenoble | 4th        |        |            |        |
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| | Soleil                 | France, Paris    | 3rd        |        |            |        |
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| | Diamond                | UK, Oxfordshire  | 3rd        | 3GeV   |            |        |
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| | ALS                    | US               |            |        |            |        |
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| | SLAC                   | US               |            |        |            |        |
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| | APS                    | US               | 4th        |        |            |        |
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| | NSLS II                | US, New York     | 3rd        | 3GeV   |      10^21 |        |
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| | Alba                   | Spain            |            |        |            |        |
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| | PSI                    | Switzerland      |            |        |            |        |
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| | Elettra                | Italy            |            |        |            |        |
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| | Max IV                 | Sweden           | 4th        | 3GeV   |            |        |
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| | DESY                   | Germany          |            |        |            |        |
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| | BESSY                  | Germany          |            |        |            |        |
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| | SESAME                 | Jordan           |            |        |            |        |
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| | LNLS                   | Brazil           | 4th        |        |            |        |
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| | HEPS                   | China            |            |        |            |        |
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| | NSRL                   | China            |            |        |            |        |
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| | SSRF                   | China            |            |        |            |        |
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| | Spring 8               | Japan            |            |        |            |        |
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| | Australian Synchrotron | Australy         |            |        |            |        |
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| | Canadian Light Source  | Canada           |            |        |            |        |
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| 
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| 
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| ** TODO [#C] Review about Stewart platforms
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| 
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| # [[file:~/Cloud/work-projects/ID31-NASS/matlab/stewart-simscape/org/bibliography.org]]
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| 
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| - [ ] cite:li01_simul_fault_vibrat_isolat_point
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| - [ ] cite:bishop02_devel_precis_point_contr_vibrat
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| - [ ] cite:hanieh03_activ_stewar
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| - [ ] cite:afzali-far16_vibrat_dynam_isotr_hexap_analy_studies
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| - [ ] cite:naves20_desig
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| 
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| ** TODO [#C] Review about Stewart platform control
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| 
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| Based on [[file:~/Cloud/work-projects/ID31-NASS/matlab/stewart-simscape/org/bibliography.org]]
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| 
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| Broad subject (MIMO control), maybe talk only about vibration control based on external metrology.
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| 
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| - Active Damping
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| - Decentralized
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| - Centralized
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| - Manually tuned: PID, lead lag, etc...
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| - Automatic / Optimal: LQG, H-Infinity
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| 
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| ** TODO [#C] Review of two stage control
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| 
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| [[elisp:(helm-bibtex nil nil "Two Stage Actuator ")][Two Stage Actuator]]:
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| - [X] cite:&xu12_desig_devel_flexur_based_dual
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| - [ ] cite:&pahk01_ultra_precis_posit_system_servo_motor
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| - [ ] cite:&kobayashi03_phase_stabil_servo_contr_dual
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|   disk drive
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| - [ ] cite:&michellod06_strat_contr_dual_nano_system_singl_metrol
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| - [ ] cite:&woody06_desig_perfor_dual_drive_system
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| - [ ] cite:&chassagne07_nano_posit_system_with_sub
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| - [ ] cite:&schitter08_dual
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| - [X] cite:&buice09_desig_evaluat_singl_axis_precis
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| - [X] cite:&liu10_desig_contr_long_travel_nano_posit_stage
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| - [ ] cite:&ting11_contr_desig_high_frequen_cuttin
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| - [ ] cite:&okazaki12_dual_servo_mechan_stage_contin_posit
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| - [ ] cite:&ito13_high_precis_posit_system_using
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| - [ ] cite:&yamaguchi13_advan_high_perfor_motion_contr_mechat_system
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| - [ ] cite:&kim13_desig_contr_singl_stage_dual
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| - [ ] cite:&wu13_desig
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| - [ ] cite:&parmar14_large_dynam_range_nanop_using
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| - [ ] cite:&ito15_low_stiff_dual_stage_actuat
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| - [ ] cite:&qingsong16_desig_implem_large_range_compl_microp_system
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| - [ ] cite:&zhu17_flexur_based_paral_actuat_dual
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| - [ ] cite:&wang17_devel_contr_long_strok_precis_stage
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| - [ ] cite:&okyay18_modal_analy_metrol_error_budget
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| - [ ] cite:&csencsics18_system_contr_desig_voice_coil
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| - [ ] cite:&okyay18_mechat_desig_actuat_optim_contr
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| - [ ] cite:&kong18_vibrat_isolat_dual_stage_actuat
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| - [ ] cite:&du19_multi_actuat_system_contr
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| - [ ] cite:&yun20_inves_two_stage_vibrat_suppr
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| - [ ] cite:&mukherjee20_hybrid_contr_precis_posit_applic
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| - [ ] cite:&barros21_feedf_contr_piezoel_dual_actuat_system
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| 
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| *To read in details*:
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| - [X] cite:&choi08_desig_contr_nanop_xy_theta_scann
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|   *top*
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| - [X] [[cite:&buice09_desig_evaluat_singl_axis_precis]]
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| - [X] cite:&shinno11_newly_devel_long_range_posit
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| - [ ] cite:&okazaki12_dual_servo_mechan_stage_contin_posit
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| - [ ] cite:&shan15_contr_review
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|   *good review*
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| - [X] cite:&okyay16_mechat_desig_dynam_contr_metrol
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|   *Good review*
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|   #+begin_quote
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|   The alternative, sliding contact bearings are limited to 2-10 [μm] motion resolution, due to stick-slip motion [[cite:&slocum92_precis_machin_desig]], hence they are not preferred.
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| Stick-slip occurs due to the difference between static and dynamic coefficients of friction in such bearings, which results in an impact-like disturbance in the control system during motion reversal.
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|   #+end_quote
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| - [X] cite:&kong18_vibrat_isolat_dual_stage_actuat
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|   *only found example of dual stage with hexapod*
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|   #+begin_quote
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|   The coarse stage is usually actuated by VCMs or other linear motors, and the fine stage is usually actuated by piezoelectric actuators or VCMs.
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|   #+end_quote
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| 
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| #+name: tab:introduction_dual_stages
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| #+caption: for each example, interferometers are used as the measured stage position (and signal feedback for the short stroke actuator).
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| #+attr_latex: :environment tabularx :width \linewidth :align lXX
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| #+attr_latex: :center t :booktabs t
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| | DoF    | Long Stroke                     | Short Stroke  | Bandwidth     |                                                      |
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| |--------+---------------------------------+---------------+---------------+------------------------------------------------------|
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| | X,Y    | 2 axis, linear motor            | 2 piezo       |               | cite:&chassagne07_nano_posit_system_with_sub         |
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| | X,Y,Rz | 1 axis, iron core linear motor  | 4 VCM         | 85Hz          | cite:&choi08_desig_contr_nanop_xy_theta_scann        |
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| | X      | 1 axis, DC motor, feedscrew     | 1 PZT         |               | cite:&buice09_desig_evaluat_singl_axis_precis        |
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| | X,Y,Rz | 1 axis, ballscrew, rotary motor | 3 piezo       | 3 PID, few Hz | cite:&liu10_desig_contr_long_travel_nano_posit_stage |
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| | X      | 1 axis, Servo motor, ball screw | 1 VCM         |               | cite:&shinno11_newly_devel_long_range_posit          |
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| | X      | 1 axis, VCM                     | 1 piezo stack |               | cite:&xu12_desig_devel_flexur_based_dual             |
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| 
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| ** TODO [#C] Make all the figures
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| 
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| 1. [ ] [[file:figs/introduction_esrf_schematic.svg]]
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|    highlight Linac, Booster, Storage ring, ID31 beamline
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| 2. [ ] Good Picture of ESRF: =introduction_esrf_picture=
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| 3. [ ] Map with all the Synchrotrons in the World: =introduction_synchrotrons=
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|    Show Synchrotron going to 4th generation, Highlight ESRF
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| 4. [ ] Synchrotron Moore law =introduction_moore_law=
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| 5. [ ] Picture of the beam =introduction_beam_3rd_generation= and =introduction_beam_4th_generation=
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| 6. [ ] ID31/typical beamline layout with: =introduction_id31_layout=
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|    - Insertion device
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| 7. [ ] CAD view of the ID31 EH: =introduction_id31_cad=
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|    - Highlight focussing optics, positioning station, sample, detector
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|    - Show X-Y-Z vectors
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| 8. [ ] Micro-Station with each stage in different color and associated motions
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|    =introduction_id31_microstation_cad=
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|    =introduction_id31_microstation_picture=
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| 9. [ ] Typical experiment (ideally from ID31 experiments):
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|    - [ ] tomography: =introduction_exp_tomography= and =introduction_exp_tomography_image=
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|    - [ ] scanning: =introduction_exp_scanning= and =introduction_exp_scanning_image=
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| 10. [ ] Typical linear stage =introduction_linear_stage=
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|     - Show: stepper motor, ball screw, linear guides
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|     - Show: straightness, flatness, etc...
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| 11. [ ] Flexure based stage =introduction_flexure_stage=
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| 12. [ ] NASS concept: =introduction_nass_concept_schematic=
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|     - 4 elements: micro-station, nano-hexapod, metrology, control system
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| 13. [ ] NASS metrology schematic: =introduction_nass_metrology=
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|     - Nano-hexapod, sample, spherical mirror with flat bottom surface
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|     - several fiber interferometers with tracking systems (arrows showing that they can move in Rx/Ry)
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| 14. [ ] Show some passive end-stations =introduction_pass_stations=
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|     - ID16b
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|     - ID11
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| 15. [ ] Show active passive end-stations =introduction_acti_stations=
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|     - ID16a
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| 16. [ ] Two stage control =introduction_two_stage_control=
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|     Schematic with the long stroke, short stroke, metrology and control architecture: trajectory generation => long stroke & short stroke + feedback on the short stroke
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| 17. [ ] Examples of two stage control:
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|     - =introduction_two_stage_control_h_bridge= from [[cite:&schmidt20_desig_high_perfor_mechat_third_revis_edition]]
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|     - =introduction_two_stage_control_example= from [[cite:&shinno11_newly_devel_long_range_posit]]
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| 18. [ ] Serial VS Parallel: comparison of X-Y-Rz stages
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|     - =introduction_kinematics_serial=
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|     - =introduction_kinematics_parallel=
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| 19. [ ] Stewart platform architecture =introduction_stewart_platform=
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|     Maybe two pose to show that by changing the length of each strut, it is possible to change the relative position between the two plates?
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|     Maybe do that with Matlab and then editing with Inkscape
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| 20. [ ] Different model types
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|     - =introduction_model_lumped=
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|     - =introduction_model_fem=
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|     - =introduction_model_multi_body=
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| 21. [ ] Feedback System / Closed loop simulations =introduction_close_loop=
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|     - feedback model with: controller, plant, disturbances (plant output), sensor with noise, actuator with noise
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| 22. [ ] Dynamic Error Budgeting =introduction_dyn_error_budget=
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|     - PSD + CPS ? => understand what are the limitations?, similar to what is in [[cite:&schmidt20_desig_high_perfor_mechat_third_revis_edition]] ?
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|     - Use the same signals than for the previous figure
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| 23. [ ] About Stewart platform control? Centralized / Decentralized? MIMO / 6 SISO?
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| 
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| ** DONE [#B] Check these papers for literature review
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| CLOSED: [2024-05-05 Sun 16:22]
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| 
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| Check these papers:
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| - [[elisp:(helm-bibtex nil nil "nass ")][Nano Active Stabilization System]]
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| - [[elisp:(helm-bibtex nil nil "esrf ")][ESRF]]
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| - [[elisp:(helm-bibtex nil nil "nanostage ")][Nano Positioning Stage]]
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| 
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| 
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| NASS:
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| - [X] cite:&wang12_autom_marker_full_field_hard
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|   Calibration of spindle run-out errors, and correct the errors in post processing, for tomography
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| - [X] cite:&stankevic17_inter_charac_rotat_stages_x_ray_nanot
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| - [X] cite:&schroer17_ptynam
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| - [X] cite:&nazaretski17_desig_perfor_x_ray_scann
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| - [X] cite:&nazaretski15_pushin_limit
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| - [X] cite:nazaretski22_new_kirkp_baez_based_scann
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| 
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| - [X] cite:&naves20_t_flex
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| - [X] cite:&kim13_compac_protot_appar_reduc_circl
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| - [X] cite:&khaled18_pract_desig_applic_model_predic_contr
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| - [X] cite:&holler18_omny_tomog_nano_cryo_stage
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| - [X] cite:&holler17_omny_pin_versat_sampl_holder
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| - [X] cite:&engblom18_nanop_resul
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| - [X] cite:&dehaeze18_sampl_stabil_for_tomog_exper
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| - [X] HXN [[cite:&xu23_high_nsls_ii]]
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|   Laser interferometers on reference ring (on top of rotary stage).
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|   Used to trigger the detectors (ptychography, microscope)
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| 
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| ESRF:
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| - [X] cite:raimondi21_commis_hybrid_multib_achrom_lattic
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| - [X] cite:cotte17_id21_x_ray_infrar_micros
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| - [X] cite:martinez-criado16_id16b
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| - [X] cite:villar18_nanop_esrf_id16a_nano_imagin_beaml
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| - [X] cite:riekel10_progr_micro_nano_diffr_at
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| - [X] cite:wright20_new_oppor_at_mater_scien
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| - [X] cite:leake19_nanod_beaml_id01
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| - [X] cite:versteegen23_inser_devic_contr
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| - [X] cite:marion04_hexap_esrf
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| - [X] cite:fajardo95_contr_six_degree_paral_manip
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| - [X] cite:cammarata09_chopp_system_time_resol_exper
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| - [X] cite:dabin02_mechan_desig_high_precis_posit
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| - [X] cite:dabin03_precis_mechan_high_accur_beaml
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| - [X] cite:guijarro17_bliss_exper_contr_esrf_ebs_beaml
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| - [X] cite:janvier13_icepap
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| - [X] cite:baker18_esrf_doubl_cryst_monoc_protot_projec
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| - [X] cite:dabin04_mecan
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| - [X] cite:reichert21_stiff_hexap
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| - [X] cite:dehaeze21_mechat_approac_devel_nano_activ_stabil_system
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| - [X] cite:brumund21_multib_simul_reduc_order_flexib_bodies_fea
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| - [X] cite:dehaeze21_activ_dampin_rotat_platf_using
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| - [X] cite:zhang96_groun_vibrat_orme_meris_super_esrf
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| - [X] cite:zelenika04_flexur_use_elast_sr_instr_desig
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| - [X] cite:youness20_concep
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| - [X] cite:ravy18_shinin_light_synch_light
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| - [X] cite:dimper15_esrf_upgrad_progr_phase_ii
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| - [X] cite:dehaeze18_sampl_stabil_for_tomog_exper
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| - [X] cite:dabin04_mecan
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| - [X] cite:brendike19_esrf_doubl_cryst_monoc_protot_contr_concep
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| 
 | ||
| nanostage:
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| - [X] cite:&yong16_mechan_desig_high_speed_nanop_system
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| - [X] cite:&lee17_compac_compl_paral_xy_nano
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| - [X] cite:&awtar13_desig_large_range_xy_nanop_system
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| - [X] cite:&liu18_desig_trajec_track_contr_piezoel
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| - [X] cite:&yong09_desig_ident_contr_flexur_based
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| - [X] cite:&fleming10_integ_strain_force_feedb_high
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| - [X] cite:&barillot99_desig_funct_tests_xy_piezoel
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| 
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| ** DONE [#C] Table that compares nano positioning stations with metrology / feedback
 | ||
| CLOSED: [2024-05-05 Sun 11:55]
 | ||
| 
 | ||
| - [X] ID16a: capacitive sensors, short stroke, spindle above the fix hexapod, light samples [[cite:&villar18_nanop_esrf_id16a_nano_imagin_beaml]]
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| - [X] Soleil Nano probe [[cite:&engblom18_nanop_resul;&stankevic17_inter_charac_rotat_stages_x_ray_nanot]]
 | ||
| - [X] PSI OMNY [[cite:&holler18_omny_tomog_nano_cryo_stage;&holler17_omny_pin_versat_sampl_holder]]
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|   [[cite:&holler15_error_motion_compen_track_inter;&holler12_instr_x_ray_nano_imagin]]
 | ||
| - [X] DESY PETRA III /PtyNAMi/ [[cite:&schropp20_ptynam;&schroer17_ptynam;&schroeck01_compen_desig_linear_time_invar]]
 | ||
|   scanning microscope and tomography
 | ||
|   tracking the mechanical stability of optics relative to the sample scanner
 | ||
|   laser interferometer system to track the sample in the two directions transverse to the optical axis
 | ||
|   #+begin_quote
 | ||
|   For scanning microscopy and tomography it is essential to know where the beam hits the sample.
 | ||
|   Position uncertainties can arise from vibrations of the focusing optics and of the sample.
 | ||
|   The sample is scanned through the nanobeam, while the optics are kept fixed after initial alignment.
 | ||
|   #+end_quote
 | ||
|   Interferometers used for monitoring, not for closed-loop control
 | ||
| - [ ] APS/Diamond:
 | ||
| - [X] cite:&wang12_autom_marker_full_field_hard
 | ||
|   Calibration of spindle run-out errors, and correct the errors in post processing, for tomography
 | ||
| - [X] [[cite:&geraldes23_sapot_carnaub_sirius_lnls]]
 | ||
|   SIRIUS, LNLS
 | ||
|   #+begin_quote
 | ||
| Synchrotron scanning X-ray microscopes are generally based on piezo scanning stages, with motion range typically
 | ||
| limited to 100 µm, such that complementary long-stroke stages, with motion range of several millimeters, are often
 | ||
| required to comply with alignment and the search of regions of interest in typical millimeter-size samples or sample
 | ||
| mounts [3, 5–13, 15, 16]. However, potential limitations in this architecture include: 1) limited dynamics and stability,
 | ||
| with resonance modes in the order of 100 Hz (or less) resulting from multiple stacked stages; 2) parasitic motion
 | ||
| associated with coarse stages; and 3) deteriorated performance in continuous fly-scan beyond the piezo range, which
 | ||
| are caused by disturbances introduced by stepper motors or stick-slip piezos [43].
 | ||
|   #+end_quote
 | ||
| - [X] Delta robot, diamond [[cite:&kelly22_delta_robot_long_travel_nano]]
 | ||
| 
 | ||
| Bandwidth is rarely specified
 | ||
| 
 | ||
| Same table for nano positioning stages without integrated metrology?
 | ||
| 
 | ||
| 
 | ||
| * Context of this thesis
 | ||
| ** Synchrotron Radiation Facilities
 | ||
| **** Accelerating electrons to produce intense X-ray
 | ||
| 
 | ||
| - Explain what is a Synchrotron: light source
 | ||
| - Say how many there are in the world (~50)
 | ||
| 
 | ||
| #+name: fig:introduction_synchrotrons
 | ||
| #+caption: 4th generation Synchrotrons in operation (red). Upgrade or new 4th generation projects (green). 3rd generation Synchrotrons (blue).
 | ||
| #+attr_latex: :width \linewidth
 | ||
| [[file:figs/introduction_synchrotrons.png]]
 | ||
| 
 | ||
| - Electron part: LINAC, Booster, Storage Ring ref:fig:introduction_esrf_schematic
 | ||
| - Synchrotron radiation: Insertion device / Bending magnet
 | ||
| - Many beamlines (large diversity in terms of instrumentation and science)
 | ||
| - Science that can be performed:
 | ||
|   - structural biology, structure of materials, matter at extreme, ...
 | ||
| 
 | ||
| 
 | ||
| **** The European Synchrotron Radiation Facility
 | ||
| 
 | ||
| #+name: fig:fig_label
 | ||
| #+caption: Caption with reference to sub figure (\subref{fig:fig_label_a})
 | ||
| #+attr_latex: :options [htbp]
 | ||
| #+begin_figure
 | ||
| #+attr_latex: :caption \subcaption{\label{fig:introduction_esrf_schematic}Schematic of the ESRF - Over 40 beamlines. Booster, Linac, storage ring}
 | ||
| #+attr_latex: :options {0.49\textwidth}
 | ||
| #+begin_subfigure
 | ||
| #+attr_latex: :width 0.95\linewidth
 | ||
| [[file:figs/introduction_esrf_schematic.png]]
 | ||
| #+end_subfigure
 | ||
| #+attr_latex: :caption \subcaption{\label{fig:introduction_esrf_picture}European Synchrotron Radiation Facility}
 | ||
| #+attr_latex: :options {0.49\textwidth}
 | ||
| #+begin_subfigure
 | ||
| #+attr_latex: :width 0.95\linewidth
 | ||
| [[file:figs/introduction_esrf_picture.jpg]]
 | ||
| #+end_subfigure
 | ||
| #+end_figure
 | ||
| 
 | ||
| **** 3rd and 4th generation Synchrotrons
 | ||
| 
 | ||
| Brilliance: figure of merit for synchrotron
 | ||
| 
 | ||
| - 4th generation light sources
 | ||
|   - [[cite:&raimondi21_commis_hybrid_multib_achrom_lattic]]
 | ||
|   - [ ] Picture of 3rd generation "beam source" vs 4th generation?
 | ||
| - [ ] Picture showing Synchrotron "moore's law"
 | ||
| 
 | ||
| #+name: fig:introduction_moore_law
 | ||
| #+caption: Figure caption
 | ||
| [[file:figs/introduction_moore_law.pdf]]
 | ||
| 
 | ||
| 
 | ||
| 
 | ||
| ** The ID31 ESRF Beamline
 | ||
| **** Beamline Layout
 | ||
| 
 | ||
| - [ ] Beamline layout (OH, EH)
 | ||
| - ID31 and Micro Station (Figure ref:fig:introduction_id31_microstation_picture)
 | ||
|   Check https://www.esrf.fr/UsersAndScience/Experiments/StructMaterials/ID31
 | ||
|   https://www.wayforlight.eu/beamline/23244
 | ||
| - X-ray beam + detectors + sample stage (Figure ref:fig:introduction_id31_beamline_schematic)
 | ||
| - Focusing optics
 | ||
| - Optical schematic with: source, lens, sample and detector.
 | ||
|   Explain that what is the most important is the relative position between the sample and the lens.
 | ||
| - Explain the XYZ frame for all the thesis (ESRF convention: X: x-ray, Z gravity up)
 | ||
|   - [ ] Add XYZ on figure ref:fig:introduction_id31_cad
 | ||
| 
 | ||
| #+begin_src latex :file id31_microstation_picture.pdf
 | ||
| \begin{tikzpicture}
 | ||
|   \node[inner sep=0pt, anchor=south west] (photo) at (0,0)
 | ||
|   {\includegraphics[width=0.39\textwidth]{/home/thomas/Cloud/documents/reports/phd-thesis/figs/exp_setup_photo.png}};
 | ||
| 
 | ||
|   \coordinate[] (aheight) at (photo.north west);
 | ||
|   \coordinate[] (awidth)  at (photo.south east);
 | ||
| 
 | ||
|   \coordinate[] (granite) at ($0.1*(aheight)+0.1*(awidth)$);
 | ||
|   \coordinate[] (trans)   at ($0.5*(aheight)+0.4*(awidth)$);
 | ||
|   \coordinate[] (tilt)    at ($0.65*(aheight)+0.75*(awidth)$);
 | ||
|   \coordinate[] (hexapod) at ($0.7*(aheight)+0.5*(awidth)$);
 | ||
|   \coordinate[] (sample)  at ($0.9*(aheight)+0.55*(awidth)$);
 | ||
| 
 | ||
|   % Granite
 | ||
|   \node[labelc] at (granite) {1};
 | ||
|   % Translation stage
 | ||
|   \node[labelc] at (trans) {2};
 | ||
|   % Tilt Stage
 | ||
|   \node[labelc] at (tilt) {3};
 | ||
|   % Micro-Hexapod
 | ||
|   \node[labelc] at (hexapod) {4};
 | ||
|   % Sample
 | ||
|   \node[labelc] at (sample) {5};
 | ||
| 
 | ||
|   % Axis
 | ||
|   \begin{scope}[shift={($0.07*(aheight)+0.87*(awidth)$)}]
 | ||
|     \draw[->] (0, 0) -- ++(55:0.7) node[above] {$y$};
 | ||
|     \draw[->] (0, 0) -- ++(90:0.9) node[left] {$z$};
 | ||
|     \draw[->] (0, 0) -- ++(-20:0.7) node[above] {$x$};
 | ||
|   \end{scope}
 | ||
| \end{tikzpicture}
 | ||
| #+end_src
 | ||
| 
 | ||
| #+name: fig:introduction_id31_cad
 | ||
| #+caption: CAD view of the optical hutch with the nano-focusing optics, the micro-station
 | ||
| #+attr_latex: :width 0.8\linewidth
 | ||
| [[file:figs/introduction_id31_cad.jpg]]
 | ||
| 
 | ||
| **** Positioning End Station: The Micro-Station
 | ||
| 
 | ||
| Micro-Station:
 | ||
| - DoF with strokes: Ty, Ry, Rz, Hexapod
 | ||
| - Experiments: tomography, reflectivity, truncation rod, ...
 | ||
|   Make a table to explain the different "experiments"
 | ||
| - Explain how it is used (positioning, scans), what it does. But not about the performances
 | ||
| - Different sample environments
 | ||
| 
 | ||
| #+begin_src latex :file id31_beamline_schematic.pdf
 | ||
|   \begin{tikzpicture}
 | ||
|     % Parameters
 | ||
|     \def\blockw{6.0cm}
 | ||
|     \def\blockh{1.2cm}
 | ||
| 
 | ||
|     \def\tiltdeg{3}
 | ||
|     \coordinate[] (rotationpoint) at (0, 4.5*\blockh);
 | ||
| 
 | ||
|     \begin{scope}[rotate around={\tiltdeg:(rotationpoint)}]
 | ||
|       % Tilt
 | ||
|       \path[] ([shift=(-120:4*\blockh)]rotationpoint) coordinate(beginarc) arc (-120:-110:4*\blockh) %
 | ||
|       -- ([shift=(-70:4*\blockh)]rotationpoint) arc (-70:-60:4*\blockh)%
 | ||
|       |- ++(-0.15*\blockw, 0.6*\blockh) coordinate (spindlene)%
 | ||
|       |- ($(beginarc) + (0.15*\blockw, 0.2*\blockh)$) coordinate (spindlesw) -- ++(0, 0.4*\blockh) coordinate(tiltte) -| cycle;
 | ||
| 
 | ||
|       % Spindle
 | ||
|       \coordinate[] (spindlese) at (spindlesw-|spindlene);
 | ||
|       \draw[fill=black!30] ($(spindlese)+(-0.1,0.1)+(-0.1*\blockw, 0)$) -| ($(spindlene)+(-0.1, 0)$) -| coordinate[pos=0.25](spindletop) ($(spindlesw)+(0.1,0.1)$) -| ++(0.1*\blockw, -\blockh) -| coordinate[pos=0.25](spindlebot) cycle;
 | ||
| 
 | ||
|       % \draw[dashed, color=black!60] ($(spindletop)+(0, 0.2)$) -- ($(spindlebot)+(0,-0.2)$);
 | ||
| 
 | ||
|       % Tilt
 | ||
|       \draw[fill=black!60] ([shift=(-120:4*\blockh)]rotationpoint) coordinate(beginarc) arc (-120:-110:4*\blockh) %
 | ||
|       -- ([shift=(-70:4*\blockh)]rotationpoint) arc (-70:-60:4*\blockh)%
 | ||
|       |- coordinate (tiltne) ++(-0.15*\blockw, 0.6*\blockh) coordinate (spindlene)%
 | ||
|       |- ($(beginarc) + (0.15*\blockw, 0.2*\blockh)$) coordinate (spindlesw) -- ++(0, 0.4*\blockh) -| cycle;
 | ||
| 
 | ||
|       % Micro-Hexapod
 | ||
|       \begin{scope}[shift={(spindletop)}]
 | ||
|         % Parameters definitions
 | ||
|         \def\baseh{0.22*\blockh} % Height of the base
 | ||
|         \def\naceh{0.18*\blockh} % Height of the nacelle
 | ||
|         \def\baser{0.22*\blockw} % Radius of the base
 | ||
|         \def\nacer{0.18*\blockw} % Radius of the nacelle
 | ||
| 
 | ||
|         \def\armr{0.2*\blockh} % Radius of the arms
 | ||
|         \def\basearmborder{0.2}
 | ||
|         \def\nacearmborder{0.2}
 | ||
| 
 | ||
|         \def\xnace{0} \def\ynace{\blockh-\naceh} \def\anace{0}
 | ||
|         \def\xbase{0} \def\ybase{0} \def\abase{0}
 | ||
| 
 | ||
|         % Hexapod1
 | ||
|         \begin{scope}[shift={(\xbase, \ybase)}, rotate=\abase]
 | ||
|           % Base
 | ||
|           \draw[fill=white] (-\baser, 0) coordinate[](uhexabot) rectangle (\baser, \baseh);
 | ||
| 
 | ||
|           \coordinate[] (armbasel) at (-\baser+\basearmborder+\armr, \baseh);
 | ||
|           \coordinate[] (armbasec) at (0, \baseh);
 | ||
|           \coordinate[] (armbaser) at (\baser-\basearmborder-\armr, \baseh);
 | ||
| 
 | ||
|           \begin{scope}[shift={(\xnace, \ynace)}, rotate=\anace]
 | ||
|             \draw[fill=white] (-\nacer, 0) rectangle (\nacer, \naceh);
 | ||
|             \coordinate[] (uhexatop) at (0, \naceh);
 | ||
|             \coordinate[] (armnacel) at (-\nacer+\nacearmborder+\armr, 0);
 | ||
|             \coordinate[] (armnacec) at (0, 0);
 | ||
|             \coordinate[] (armnacer) at (\nacer-\nacearmborder-\armr, 0);
 | ||
|           \end{scope}
 | ||
| 
 | ||
|           \draw[] (armbasec) -- (armnacer);
 | ||
|           \draw[] (armbasec) -- (armnacel);
 | ||
|           \draw[] (armbasel) -- coordinate(mhexaw) (armnacel);
 | ||
|           \draw[] (armbasel) -- (armnacec);
 | ||
|           \draw[] (armbaser) -- (armnacec);
 | ||
|           \draw[] (armbaser) -- coordinate(mhexae) (armnacer);
 | ||
|         \end{scope}
 | ||
|       \end{scope}
 | ||
| 
 | ||
|       % Sample
 | ||
|       \begin{scope}[shift={(uhexatop)}]
 | ||
|         \draw[fill=white] (-0.1*\blockw, 0) coordinate[](samplebot) rectangle coordinate[pos=0.5](samplecenter) node[pos=0.5, above]{Sample} (0.1*\blockw, \blockh) coordinate[](samplene);
 | ||
|         \coordinate[](samplenw) at (-0.1*\blockw, \blockh);
 | ||
|       \end{scope}
 | ||
|     \end{scope}
 | ||
| 
 | ||
|     \begin{scope}[shift={(0, -0.3*\blockh)}]
 | ||
|       % Translation Stage - fixed part
 | ||
|       \draw[fill=black!40] (-0.5*\blockw, 0) coordinate[](tyb) rectangle (0.5*\blockw, 0.15*\blockh);
 | ||
|       \coordinate[] (measposbot) at (0.5*\blockw, 0);
 | ||
| 
 | ||
|       % Translation Stage - mobile part
 | ||
|       \draw[fill=black!10, fill opacity=0.5] (-0.5*\blockw, 0.2*\blockh) -- (-0.5*\blockw, 1.5*\blockh) coordinate[](tyt) -- (0.5*\blockw, 1.5*\blockh) -- (0.5*\blockw, 0.2*\blockh) -- (0.35*\blockw, 0.2*\blockh) -- (0.35*\blockw, 0.8*\blockh) -- (-0.35*\blockw, 0.8*\blockh) -- (-0.35*\blockw, 0.2*\blockh) -- cycle;
 | ||
| 
 | ||
|       % Translation Guidance
 | ||
|       \draw[dashed, color=black!60] ($(-0.5*\blockw, 0)+( 0.075*\blockw,0.5*\blockh)$) circle (0.2*\blockh);
 | ||
|       \draw[dashed, color=black!60] ($( 0.5*\blockw, 0)+(-0.075*\blockw,0.5*\blockh)$) circle (0.2*\blockh);
 | ||
| 
 | ||
|       % Tilt Guidance
 | ||
|       \draw[dashed, color=black!60] ([shift=(-107:4.1*\blockh)]rotationpoint) arc (-107:-120:4.1*\blockh);
 | ||
|       \draw[dashed, color=black!60] ([shift=( -73:4.1*\blockh)]rotationpoint) arc (-73:-60:4.1*\blockh);
 | ||
|     \end{scope}
 | ||
| 
 | ||
|     % % Vertical line
 | ||
|     % \draw[dashed, color=black] (samplecenter) -- ++(0, -4*\blockh);
 | ||
|     % \begin{scope}[rotate around={\tiltdeg:(samplecenter)}]
 | ||
|     %   \draw[dashed, color=black] (samplecenter) -- ++(0, -4*\blockh);
 | ||
|     %   \node[] at ($(samplecenter)+(0, -2.3*\blockh)$) {\AxisRotator[rotate=-90]};
 | ||
|     %   \node[right, shift={(0.3,0)}] at ($(samplecenter)+(0, -2.3*\blockh)$) {$\theta_z$};
 | ||
|     % \end{scope}
 | ||
|     % \draw[->] ([shift=(-90:3.6*\blockh)]samplecenter) arc (-90:-87:3.6*\blockh) node[right]{$\theta_y$};
 | ||
| 
 | ||
|     % Laser
 | ||
|     \begin{scope}[shift={(samplecenter)}]
 | ||
|       \draw[color=red, -<-=0.3] (samplecenter) node[circle, fill=red, inner sep=0pt, minimum size=3pt]{} -- node[pos=0.3, above, color=black]{X-ray} ($(samplecenter)+(1.2*\blockw,0)$);
 | ||
|     \end{scope}
 | ||
| 
 | ||
|     % Axis
 | ||
|     \begin{scope}[shift={(-0.35*\blockw, 3*\blockh)}]
 | ||
|       \def\axissize{0.8cm}
 | ||
|       \draw[->] (0, 0) -- ++(0, \axissize) node[right]{$z$};
 | ||
|       \draw[->] (0, 0) -- ++(-\axissize, 0) node[above]{$x$};
 | ||
|       \draw[fill, color=black] (0, 0) circle (0.05*\axissize);
 | ||
|       \node[draw, circle, inner sep=0pt, minimum size=0.4*\axissize, label=right:$y$] (yaxis) at (0, 0){};
 | ||
|       % \node[draw, circle, inner sep=0pt, cross, minimum size=0.4*\axissize, label=left:$y$] (yaxis) at (0, 0){};
 | ||
|     \end{scope}
 | ||
| 
 | ||
|     \node[fit={($(-0.6*\blockw, -0.5*\blockh)$) ($(0.6*\blockw, 4*\blockh)$)}, inner sep=0pt, draw, dashed, color=gray, label={Positioning Station}] (possystem) {};
 | ||
| 
 | ||
|     \draw[fill=black!30] ($(tyb)+(-5, -1)$) coordinate[](granitesw) rectangle node[pos=0.5]{Granite Frame} ($(measposbot)+(5, 0)$) coordinate[](granitene);
 | ||
| 
 | ||
|     % Focusing Optics
 | ||
|     \draw[fill=black!20] ($(granitene)+(-1.5, 3)$) rectangle ++(-1, 2);
 | ||
|     \draw[spring] ($(granitene)+(-2, 0)$) -- ++(0, 3);
 | ||
| 
 | ||
|     \node[fit={($(granitene)+(-2.8, -0.2)$) ($(granitene)+(-1.2, 5.2)$)}, inner sep=0pt, draw, dashed, color=gray, label={Focusing Optics}] () {};
 | ||
| 
 | ||
|     % Measurement Optics
 | ||
|     \draw[fill=black!20] ($(granitesw)+(1.5, 4)$) rectangle ++(1, 2);
 | ||
|     \draw[spring] ($(granitesw)+(2, 1)$) -- ++(0, 3);
 | ||
| 
 | ||
|     \node[fit={($(granitesw)+(2.8, 0.8)$) ($(granitesw)+(1.2, 6.2)$)}, inner sep=0pt, draw, dashed, color=gray, label={Imagery System}] () {};
 | ||
|   \end{tikzpicture}
 | ||
| #+end_src
 | ||
| 
 | ||
| - Alternative: =id31_microstation_cad_view.png= (CAD view)
 | ||
| 
 | ||
| #+name: fig:introduction_id31_microstation_picture
 | ||
| #+caption: Picture of the ID31 Micro-Station with annotations
 | ||
| #+attr_latex: :width 0.49\linewidth
 | ||
| #+RESULTS:
 | ||
| [[file:figs/introduction_id31_microstation_picture.png]]
 | ||
| 
 | ||
| **** Science performed on ID31
 | ||
| 
 | ||
| - Few words about science made on ID31 and why nano-meter accuracy is required
 | ||
| - Typical experiments (tomography, ...), various samples (up to 50kg), sample environments (high temp, cryo, etc..)
 | ||
|   - Alignment of the sample, then
 | ||
|   - Reflectivity
 | ||
|   - Tomography
 | ||
|   - Diffraction tomography: most critical
 | ||
| - Example of picture obtained (Figure ref:fig:introduction_id31_tomography_result) with resolution
 | ||
| 
 | ||
| 
 | ||
| =introduction_exp_scanning= and =introduction_exp_scanning_image=
 | ||
| 
 | ||
| #+name: fig:introduction_id31_tomography_result
 | ||
| #+caption: Image obtained on the ID31 beamline
 | ||
| #+attr_latex: :width 0.49\linewidth
 | ||
| [[file:example-image-c.png]]
 | ||
| 
 | ||
| ** Need of accurate positioning end stations with high dynamics
 | ||
| **** A push towards brighter and smaller beams...
 | ||
| 
 | ||
| Improvement of both the light source and the instrumentation:
 | ||
| - EBS: smaller source + higher flux ref:fig:introduction_beam_ebs
 | ||
| 
 | ||
| #+name: fig:introduction_beam_ebs
 | ||
| #+caption: View of the ESRF X-ray beam before the EBS upgrade (top) and after the EBS upgrade (bottom)
 | ||
| [[file:figs/introduction_beam_ebs.png]]
 | ||
| 
 | ||
| 
 | ||
| - Better focusing optic (add some links): beam size in the order of 10 to 20nm FWHM (reference) ref:fig:introduction_moore_law_focus
 | ||
|   crossed silicon compound refractive lenses, KB mirrors [17], zone plates [18], or multilayer Laue lenses [19]
 | ||
|   [[cite:&barrett16_reflec_optic_hard_x_ray]]
 | ||
| 
 | ||
| #+name: fig:introduction_moore_law_focus
 | ||
| #+caption: Figure caption
 | ||
| [[file:figs/introduction_moore_law_focus.png]]
 | ||
| 
 | ||
| Higher flux density (+high energy of the ID31 beamline) => Radiation damage: needs to scan the sample quite fast with respect to the focused beam
 | ||
| 
 | ||
| - Allowed by better detectors: higher sampling rates and lower noise => possible to scan fast
 | ||
|   [[cite:&hatsui15_x_ray_imagin_detec_synch_xfel_sourc]]
 | ||
| 
 | ||
| **** ...Requires the use of dynamical positioning
 | ||
| "from traditional step by step scans to /fly-scan/"
 | ||
| 
 | ||
| Fast scans + needs of high accuracy and stability => need mechatronics system with:
 | ||
| - accurate metrology
 | ||
| - multi degree of freedom positioning systems
 | ||
| - fast feedback loops
 | ||
| 
 | ||
| Shift from step by step scan to /fly-scan/ cite:huang15_fly_scan_ptych
 | ||
| - Much lower pixel size + large image => takes of lot of time if captured step by step.
 | ||
|   Explain what is step by step scanning: move motors from point A to point B, stops, start detector acquisition, open shutter , close the shutter, move to point C, ...
 | ||
| 
 | ||
| [[cite:&xu23_high_nsls_ii]]
 | ||
| #+begin_quote
 | ||
| In traditional step scan mode, each exposure position requires the system to stop prior to data acquisition, which may become a limiting factor when fast data collection is required.
 | ||
| Fly-scanning is chosen as a preferred solution that helps overcome such speed limitations [5, 6].
 | ||
| In fly-scan mode, the sample keeps moving and a triggering system generates trigger signals based on the position of the sample or the time elapsed.
 | ||
| The trigger signals are used to control detector exposure.
 | ||
| #+end_quote
 | ||
| 
 | ||
| - [ ] Make picture representing a typical experiment (maybe YZ scan?) with:
 | ||
|   Probably already shown earlier =introduction_exp_scanning=
 | ||
|   - nano focusing optics (see the beam focused)
 | ||
|   - positioning stage with displayed YZ motion (pixel by pixel in the YZ plane)
 | ||
|   - detector
 | ||
| 
 | ||
| Subject of this thesis: design of high performance positioning station with high dynamics and nanometer accuracy
 | ||
| 
 | ||
| * Challenge definition
 | ||
| ** Multi DoF, Highly accurate, and Long stroke positioning end station?
 | ||
| **** Performance limitation of "stacked stages" end-stations
 | ||
| 
 | ||
| Typical positioning end station:
 | ||
| - stacked stages
 | ||
| - ballscrew, linear guides, rotary motor
 | ||
| 
 | ||
| 
 | ||
| Explain the limitation of performances:
 | ||
| - Backlash, play, thermal expansion, guiding imperfections, ...
 | ||
| - Give some numbers: straightness of the Ty stage for instance, change of $0.1^oC$ with steel gives x nm of motion
 | ||
| - Vibrations
 | ||
| - Explain that this micro-station can only have ~10um of accuracy due to physical limitation
 | ||
| - Possibility to have linear/rotary encoders that correct the motion in the considered DoF, but does not change anything to the other 5DoF
 | ||
| 
 | ||
| 
 | ||
| Talk about flexure based positioning stations?
 | ||
| Advantages: no backlash, etc...
 | ||
| But: limited to short stroke
 | ||
| Picture of schematic of one positioning station based on flexure
 | ||
| 
 | ||
| **** The ID31 Micro-Station
 | ||
| 
 | ||
| Presentation of the Micro-Station in details ref:fig:introduction_id31_microstation_cad:
 | ||
| - Goal of each stage (e.g. micro-hexapod: static positioning, Ty and Rz: scans, ...)
 | ||
| - Stroke
 | ||
| - Initial design objectives: as stiff as possible, smallest errors as possible
 | ||
| 
 | ||
| **** New positioning requirements
 | ||
| 
 | ||
| - To benefits from nano-focusing optics, new source, etc... new positioning requirements
 | ||
| - Positioning requirements on ID31:
 | ||
|   - Maybe make a table with the requirements and the associated performances of the micro-station
 | ||
|   - Make tables with the wanted motion, stroke, accuracy in different DoF, etc..
 | ||
| - Sample masses
 | ||
| 
 | ||
| The goal in this thesis is to increase the positioning accuracy of the micro-station to fulfil the initial positioning requirements.
 | ||
| 
 | ||
| *Goal*: Improve accuracy of 6DoF long stroke position platform
 | ||
| 
 | ||
| ** The Nano Active Stabilization System
 | ||
| **** NASS Concept
 | ||
| 
 | ||
| Briefly describe the NASS concept.
 | ||
| 4 parts:
 | ||
| - Micro Station
 | ||
| - multi-DoF positioning system with good dynamics
 | ||
| - 5DoF metrology system
 | ||
| - Control system and associated instrumentation
 | ||
| 
 | ||
| 6DoF vibration control platform on top of a complex positioning platform that correct positioning errors based on an external metrology
 | ||
| 
 | ||
| - [ ] Add the control system in the schematic
 | ||
| 
 | ||
| #+name: fig:introduction_nass_concept_schematic
 | ||
| #+caption: Nass Concept. 1: micro-station, 2: nano-hexapod, 3: sample, 4: 5DoF metrology
 | ||
| [[file:figs/introduction_nass_concept_schematic.png]]
 | ||
| 
 | ||
| **** Metrology system
 | ||
| 
 | ||
| Requirements:
 | ||
| - 5 DoF
 | ||
| - long stroke
 | ||
| - nano-meter accurate
 | ||
| - high bandwidth
 | ||
| 
 | ||
| The accuracy of the NASS will only depend on the accuracy of the metrology system.
 | ||
| 
 | ||
| Concept:
 | ||
| - Fiber interferometers
 | ||
| - Spherical reflector with flat bottom
 | ||
| - Tracking system
 | ||
| 
 | ||
| Complex mechatronics system on its own.
 | ||
| 
 | ||
| This metrology system is not further discussed in this thesis as it is still under active development.
 | ||
| 
 | ||
| In the following of this thesis, it is supposed that the metrology system is accurate, etc..
 | ||
| 
 | ||
| - Say that there are several high precision sensors, but only interferometers for long stroke / high accuracy?
 | ||
| 
 | ||
| **** Multi-DoF Positioning stage for error compensation
 | ||
| 
 | ||
| - 5 DoF
 | ||
| - High dynamics
 | ||
| - nano-meter capable (no backlash,)
 | ||
| - Accept payloads up to 50kg
 | ||
| 
 | ||
| **** MIMO robust control strategies
 | ||
| 
 | ||
| Explain the robustness need?
 | ||
| - 24 7/7 ...
 | ||
| - That is why most of end-stations are based on well-proven design (stepper motors, linear guides, ball bearing, ...)
 | ||
| - Plant uncertainty: many different samples, use cases, rotating velocities, etc...
 | ||
| 
 | ||
| Trade-off between robustness and performance in the design of feedback system.
 | ||
| 
 | ||
| ** Predictive Design
 | ||
| 
 | ||
| - The performances of the system will depend on many factors:
 | ||
|   - sensors
 | ||
|   - actuators
 | ||
|   - mechanical design
 | ||
|   - achievable bandwidth
 | ||
|   - ...
 | ||
| - Need to evaluate the different concepts, and predict the performances to guide the design
 | ||
| - The goal is to design, built and test this system such that it work as expected the first time.
 | ||
|   Very costly system, so much be correct.
 | ||
| 
 | ||
| ** Control Challenge
 | ||
| 
 | ||
| High bandwidth, 6 DoF system for vibration control, fixed on top of a complex multi DoF positioning station, robust, ...
 | ||
| 
 | ||
| - Many different configurations (tomography, Ty scans, slow fast, ...)
 | ||
| - Complex MIMO system. Dynamics of the system could be coupled to the complex dynamics of the micro station
 | ||
| - Rotation aspect, gyroscopic effects, actuators are rotating with respect to the sensors
 | ||
| - Robustness to payload change: very critical.
 | ||
|   Say that high performance systems (lithography machines, etc...) works with calibrated payloads.
 | ||
|   Being robust to change of payload inertia means large stability margins and therefore less performance.
 | ||
| 
 | ||
| * Literature Review
 | ||
| ** Nano Positioning end-stations
 | ||
| **** End Station with Stacked Stages
 | ||
| 
 | ||
| Stacked stages:
 | ||
| - errors are combined
 | ||
| 
 | ||
| To have acceptable performances / stability:
 | ||
| - limited number of stages
 | ||
| - high performances stages (air bearing etc...)
 | ||
| 
 | ||
| Examples:
 | ||
| - ID16b [[cite:&martinez-criado16_id16b]]
 | ||
| - ID13 [[cite:&riekel10_progr_micro_nano_diffr_at]]
 | ||
| - ID11 cite:wright20_new_oppor_at_mater_scien
 | ||
| - ID01 [[cite:&leake19_nanod_beaml_id01]]
 | ||
| - [ ] Maybe make a table to compare stations
 | ||
| 
 | ||
| Explain limitations => Thermal drifts, run-out errors of spindles (improved by using air bearing), straightness of translation stages, ...
 | ||
| 
 | ||
| **** Online Metrology and Active Control of Positioning Errors
 | ||
| 
 | ||
| The idea of having an external metrology to correct for errors is not new.
 | ||
| 
 | ||
| - To have even better performances: online metrology are required.
 | ||
| - Several strategies:
 | ||
|   - only used for measurements (post processing)
 | ||
|   - for calibration
 | ||
|   - for triggering detectors
 | ||
|   - for real time positioning control
 | ||
| 
 | ||
| 
 | ||
| 
 | ||
| - [ ] HXN [[cite:&xu23_high_nsls_ii]]
 | ||
|   Laser interferometers on reference ring (on top of rotary stage).
 | ||
|   Used to trigger the detectors (ptychography, microscope)
 | ||
|   Similar to cite:&wang12_autom_marker_full_field_hard
 | ||
| 
 | ||
| #+name: tab:introduction_sample_stages
 | ||
| #+caption: Table caption
 | ||
| #+attr_latex: :environment tabularx :width \linewidth :align lllllllX
 | ||
| #+attr_latex: :center t :booktabs t
 | ||
| | Architecture                                  | Sensors and measured DoFs            | Actuators and controlled DoFs | Institute, BL  | OL/CL (bandwidth)   | Stroke, DoF           | Samples      | Ref                                                                              |
 | ||
| |-----------------------------------------------+--------------------------------------+-------------------------------+----------------+---------------------+-----------------------+--------------+----------------------------------------------------------------------------------|
 | ||
| | XYZ, Spherical retroreflector, Sample         | 3 interferometers[fn:1], Y,Z         | YZ piezo stages               | PETRA III, P06 | OL                  | 100um                 | light        | [[cite:&schroer17_ptynam;&schropp20_ptynam]]                                         |
 | ||
| | Spindle / Metrology Ring / XYZ Stage / Sample | 3 Capacitive, Y,Z,Rx                 |                               | NSLS, X8C      | OL, post processing |                       | micron scale | cite:&wang12_autom_marker_full_field_hard                                        |
 | ||
| | *Hexapod* / Spindle / Metrology Ring / Sample | 12 Capacitive[fn:4], X,Y,Z,Rx,Ry     | Piezo (Hexapod)               | ESRF, ID16a    | CL, 10Hz bandwidth  | 50um, 500urad         | light        | [[cite:&villar18_nanop_esrf_id16a_nano_imagin_beaml]]                                |
 | ||
| | XYZ, Rz, XY, Cylindrical reference            | 5 interferometers[fn:3], X,Y,Z,Rx,Ry | XYZ linear motors             | Soleil         | CL                  |                       | light        | [[cite:&engblom18_nanop_resul;&stankevic17_inter_charac_rotat_stages_x_ray_nanot]]   |
 | ||
| | XYZ, Rz, XYZ Spherical reference              | 3 Interferometers[fn:2], Y,Z,Rx      | XYZ parallel piezo stage      | PSI, OMNY      | CL                  | 400um                 | light        | [[cite:&holler18_omny_tomog_nano_cryo_stage;&holler17_omny_pin_versat_sampl_holder]] |
 | ||
| | XYZ, mirrors/sample                           | 3 interferometers[fn:3], XYZ         | XYZ piezo stage               | APS            | CL, 3 PID           | 3mm                   | light        | [[cite:&nazaretski15_pushin_limit]]                                                  |
 | ||
| | Rz, Parallel XYZ stage                        | 3 interferometers[fn:1]              | 3xVCM parallel stage          | LNLS, CARNAUBA | CL, 100Hz bandwidth | YZ: 3mm, Rz: +-110deg | light        | [[cite:&geraldes23_sapot_carnaub_sirius_lnls]]                                       |
 | ||
| | Parallel XYZ stage                            | 3 interferometers[fn:2], XYZ         | 3xVCM parallel stage          | Diamond, I14   | CL, 100Hz bandwidth | XYZ: 3mm              | up to 350g   | [[cite:&kelly22_delta_robot_long_travel_nano]]                                       |
 | ||
| 
 | ||
| - [ ] Figure with different stages
 | ||
| - [ ] Compared to the existing stages (see table), what are the challenges here? Rotation, large stroke, light to heavy payloads, lots of DoF (5 to be controlled)
 | ||
| - [ ] Comparison with NASS?
 | ||
| | Architecture            | Sensors            | Actuators | Institute, BL | OL/CL (bandwidth) | Stroke, DoF      | Samples    | Ref |
 | ||
| |-------------------------+--------------------+-----------+---------------+-------------------+------------------+------------+-----|
 | ||
| | Ty,Ry,Rz,Hexapod,Sample | 6+ Interferometers |           | ESRF, ID31    | CL                | Ty, Ry, Rz, Hexa | up to 50kg |     |
 | ||
| 
 | ||
| 
 | ||
| **** Long Stroke - Short Stroke architecture
 | ||
| 
 | ||
| Speak about two stage control?
 | ||
| - Long stroke + short stroke
 | ||
| - Usually applied to 1dof, 3dof (show some examples: disk drive, wafer scanner)
 | ||
| - Any application in 6DoF? Maybe new!
 | ||
| - In the table, say which ones are long stroke / short stroke. Some new stages are just long stroke (voice coil)
 | ||
| 
 | ||
| ** Multi-DoF dynamical positioning stations
 | ||
| **** Serial and Parallel Kinematics
 | ||
| 
 | ||
| Example of several dynamical stations:
 | ||
| - XYZ piezo stages
 | ||
| - Delta robot? Octoglide?
 | ||
| - Stewart platform
 | ||
| 
 | ||
| Serial vs parallel kinematics (table?)
 | ||
| 
 | ||
| **** Stewart platforms
 | ||
| 
 | ||
| - [ ] Explain the normal stewart platform architecture
 | ||
| - [ ] Make a table that compares the different stewart platforms for vibration control.
 | ||
|   Geometry (cubic), Actuator (soft, stiff), Sensor, Flexible joints, etc.
 | ||
| 
 | ||
| #+name: fig:introduction_stewart_platform_examples
 | ||
| #+caption: Examples of Stewart Platforms
 | ||
| #+begin_figure
 | ||
| #+name: fig:introduction_stewart_platform_a
 | ||
| #+attr_latex: :caption \subcaption{Stewart platform based on voice coil actuators}
 | ||
| #+attr_latex: :options {0.49\textwidth}
 | ||
| #+begin_subfigure
 | ||
| #+attr_latex: :width 0.8\linewidth
 | ||
| [[file:example-image-a.png]]
 | ||
| #+end_subfigure
 | ||
| #+name: fig:introduction_stewart_platform_a
 | ||
| #+attr_latex: :options {0.49\textwidth}
 | ||
| #+attr_latex: :caption \subcaption{Stewart platform based on piezoelectric actuators}
 | ||
| #+begin_subfigure
 | ||
| #+attr_latex: :width 0.8\linewidth
 | ||
| [[file:example-image-b.png]]
 | ||
| #+end_subfigure
 | ||
| #+end_figure
 | ||
| 
 | ||
| ** Mechatronics approach
 | ||
| **** Predicting performances using models
 | ||
| 
 | ||
| - [[cite:&monkhorst04_dynam_error_budget]]
 | ||
|   #+begin_quote
 | ||
|   high costs of the design process: the designed system must be *first time right*.
 | ||
|   When the system is finally build, its performance level should satisfy the specifications.
 | ||
|   No significant changes are allowed in the post design phase.
 | ||
|   Because of this, the designer wants to be able to predict the performance of the system a-priori and gain insight in the performance limiting factors of the system.
 | ||
|   #+end_quote
 | ||
| 
 | ||
| 
 | ||
| Can use several models:
 | ||
| - Lumped mass-spring-damper models
 | ||
|   cite:rankers98_machin
 | ||
| - Multi-Body Models
 | ||
| - Finite element models
 | ||
|   Sub structuring?
 | ||
| 
 | ||
| **** Closed-Loop Simulations
 | ||
| 
 | ||
| [[cite:&schmidt20_desig_high_perfor_mechat_third_revis_edition]]
 | ||
| 
 | ||
| Say what can limit the performances for a complex mechatronics systems as this one:
 | ||
| - disturbances
 | ||
| - measurement noise
 | ||
| - DAC / amplifier noise (actuator)
 | ||
| - feedback system / bandwidth
 | ||
| 
 | ||
| Simulations can help evaluate the behavior of the system.
 | ||
| 
 | ||
| **** Dynamic Error Budgeting
 | ||
| 
 | ||
| - [[cite:&monkhorst04_dynam_error_budget]]
 | ||
|   #+begin_quote
 | ||
|   high costs of the design process: the designed system must be *first time right*.
 | ||
|   When the system is finally build, its performance level should satisfy the specifications.
 | ||
|   No significant changes are allowed in the post design phase.
 | ||
|   Because of this, the designer wants to be able to predict the performance of the system a-priori and gain insight in the performance limiting factors of the system.
 | ||
|   #+end_quote
 | ||
| - cite:jabben07_mechat
 | ||
| - [[cite:&okyay16_mechat_desig_dynam_contr_metrol]]
 | ||
|   #+begin_quote
 | ||
| Error budgets [23] are frequently used in the design of precision machines, in order to assess the
 | ||
| contributions of different factors such as parasitic motions, thermal expansion, and servo accuracy, on
 | ||
| the positioning accuracy of a machine. Dynamic Error Budgeting (DEB) or ‘Spectral Analysis’
 | ||
| extends this concept to the realm of feedback control. Recognizing that the controller can provide
 | ||
| only a finite attenuation of disturbance signals interfering with the servo, DEB provides a
 | ||
| methodology for predicting the cumulative effect of such signals on the control error as a function of
 | ||
| their spectral (frequency) content. The method can be used to predict the control accuracy of a system
 | ||
| implemented using a set of certain devices under certain conditions before it is realized. Furthermore,
 | ||
| as it is formulated in the frequency domain, it can be used to optimize the controller design as well,
 | ||
| typically leading to an H2 - optimal control framework. In DEB, the disturbance signals are modeled
 | ||
| with their power spectral density (PSD), assuming that they are stationary stochastic processes which
 | ||
| are not correlated with each other. Then, these PSD’s are transmitted to the performance goal, most
 | ||
| often the positioning error, using linear time invariant (LTI) system theory. The transmitted PSD’s are
 | ||
| summed up into the variance of the performance goal, which constitutes a comparative measure of
 | ||
| performance. Most importantly, the influence of different dynamic factors and disturbance sources,
 | ||
| which have the greatest impact on the achievable performance (e.g., accuracy) can be easily spotted
 | ||
| and improved, through this kind of analysis. An approach similar to DEB was followed to decompose
 | ||
| the contribution of different noise sources on the hard disk position error in [1], [2], [45]. DEB has
 | ||
| been used to assess the performance of a geophone and a vibration isolation system in [75]. Jabben
 | ||
| [49] has used DEB in the mechatronic design of a magnetically suspended rotating platform. Aguirre
 | ||
| et al. [3] have analyzed the performance of active aerostatic thrust bearings using DEB.
 | ||
|   #+end_quote
 | ||
| 
 | ||
| ** TODO Control architecture
 | ||
| 
 | ||
| Maybe make a simple review of control strategies for Stewart platform control.
 | ||
| 
 | ||
| * Original Contributions
 | ||
| **** Introduction                                                  :ignore:
 | ||
| 
 | ||
| This thesis proposes several contributions in the fields of Control, Mechatronics Design and Experimental validation.
 | ||
| 
 | ||
| **** Active Damping of rotating mechanical systems using Integral Force Feedback
 | ||
| 
 | ||
| [[cite:&dehaeze20_activ_dampin_rotat_platf_integ_force_feedb;&dehaeze21_activ_dampin_rotat_platf_using]]
 | ||
| #+begin_quote
 | ||
| This paper investigates the use of Integral Force Feedback (IFF) for the active damping of rotating mechanical systems.
 | ||
| Guaranteed stability, typical benefit of IFF, is lost as soon as the system is rotating due to gyroscopic effects.
 | ||
| To overcome this issue, two modifications of the classical IFF control scheme are proposed.
 | ||
| The first consists of slightly modifying the control law while the second consists of adding springs in parallel with the force sensors.
 | ||
| Conditions for stability and optimal parameters are derived.
 | ||
| The results reveal that, despite their different implementations, both modified IFF control scheme have almost identical damping authority on the suspension modes.
 | ||
| #+end_quote
 | ||
| 
 | ||
| **** Design of complementary filters using $\mathcal{H}_\infty$ Synthesis and sensor fusion
 | ||
| 
 | ||
| [[cite:&dehaeze19_compl_filter_shapin_using_synth]]
 | ||
| [[cite:&verma20_virtual_sensor_fusion_high_precis_contr]]
 | ||
| [[cite:&tsang22_optim_sensor_fusion_method_activ]]
 | ||
| 
 | ||
| - Several uses (link to some papers).
 | ||
| - For the NASS, they could be use to further improve the robustness of the system.
 | ||
| 
 | ||
| **** Multi-body simulations with reduced order flexible bodies obtained by FEA
 | ||
| 
 | ||
| [[cite:&brumund21_multib_simul_reduc_order_flexib_bodies_fea]]
 | ||
| 
 | ||
| Combined multi-body / FEA techniques and experimental validation on a Stewart platform containing amplified piezoelectric actuators
 | ||
| Super-element of amplified piezoelectric actuator / combined multibody-FEA technique, experimental validation on an amplified piezoelectric actuator and further validated on a complete stewart platform
 | ||
| 
 | ||
| #+begin_quote
 | ||
| We considered sub-components in the multi-body model as /reduced order flexible bodies/ representing the component’s modal behaviour with reduced mass and stiffness matrices obtained from finite element analysis (FEA) models.
 | ||
| These matrices were created from FEA models via modal reduction techniques, more specifically the /component mode synthesis/ (CMS).
 | ||
| This makes this design approach a combined multibody-FEA technique.
 | ||
| We validated the technique with a test bench that confirmed the good modelling capabilities using reduced order flexible body models obtained from FEA for an amplified piezoelectric actuator (APA).
 | ||
| #+end_quote
 | ||
| 
 | ||
| **** Robustness by design
 | ||
| 
 | ||
| - Design of a Stewart platform and associated control architecture that is robust to large plant uncertainties due to large variety of payload and experimental conditions.
 | ||
| - Instead of relying on complex controller synthesis (such as $\mathcal{H}_\infty$ synthesis or $\mu\text{-synthesis}$) to guarantee the robustness and performance.
 | ||
| - The approach here is to choose an adequate architecture (mechanics, sensors, actuators) such that controllers are robust by nature.
 | ||
| - Example: collocated actuator/sensor pair => controller can easily be made robust
 | ||
| - This is done by using models and using HAC-LAC architecture
 | ||
| 
 | ||
| **** Mechatronics design
 | ||
| 
 | ||
| Conduct a rigorous mechatronics design approach for a nano active stabilization system
 | ||
| [[cite:&dehaeze18_sampl_stabil_for_tomog_exper;&dehaeze21_mechat_approac_devel_nano_activ_stabil_system]]
 | ||
| 
 | ||
| Approach from start to finish:
 | ||
| - From first concepts using basic models, to concept validation
 | ||
| - Detailed design phase
 | ||
| - Experimental phase
 | ||
| 
 | ||
| Complete design with clear choices based on models.
 | ||
| Such approach, while not new, is here applied
 | ||
| This can be used for the design of future end-stations.
 | ||
| 
 | ||
| #+begin_src latex :file nass_mechatronics_approach.pdf
 | ||
| % \graphicspath{ {/home/thomas/Cloud/thesis/papers/dehaeze21_mechatronics_approach_nass/tikz/figs-tikz} }
 | ||
| 
 | ||
| \begin{tikzpicture}
 | ||
|   % Styles
 | ||
|   \tikzset{myblock/.style= {draw, thin, color=white!70!black, fill=white, text width=3cm, align=center, minimum height=1.4cm}};
 | ||
|   \tikzset{mylabel/.style= {anchor=north, below, font=\bfseries\small, color=black, text width=3cm, align=center}};
 | ||
|   \tikzset{mymodel/.style= {anchor=south, above, font=\small, color=black, text width=3cm, align=center}};
 | ||
|   \tikzset{mystep/.style=  {->, ultra thick}};
 | ||
| 
 | ||
|   % Blocks
 | ||
|   \node[draw, fill=lightblue, align=center, label={[mylabel, text width=8.0cm] Dynamical Models}, minimum height = 4.5cm, text width = 8.0cm] (model) at (0, 0) {};
 | ||
| 
 | ||
|   \node[myblock, fill=lightgreen, label={[mylabel] Disturbances},  left = 3 of model.west]                          (dist) {};
 | ||
|   \node[myblock, fill=lightgreen, label={[mylabel] Micro Station}, below = 2pt of dist] (mustation) {};
 | ||
|   \node[myblock, fill=lightgreen, label={[mylabel] Nano Hexapod}, above = 2pt of dist] (nanohexapod) {};
 | ||
| 
 | ||
|   \node[myblock, fill=lightyellow, label={[mylabel] Mech. Design},    above = 1 of model.north] (mechanical) {};
 | ||
|   \node[myblock, fill=lightyellow, label={[mylabel] Instrumentation}, left  = 2pt of mechanical]  (instrumentation) {};
 | ||
|   \node[myblock, fill=lightyellow, label={[mylabel] FEM},             right = 2pt of mechanical]  (fem) {};
 | ||
| 
 | ||
|   \node[myblock, fill=lightred, label={[mylabel] Test Benches},   right = 3 of model.east]                          (testbenches) {};
 | ||
|   \node[myblock, fill=lightred, label={[mylabel] Assembly},       above = 2pt of testbenches] (mounting) {};
 | ||
|   \node[myblock, fill=lightred, label={[mylabel] Implementation}, below = 2pt of testbenches] (implementation) {};
 | ||
| 
 | ||
|   % Text
 | ||
|   \node[anchor=south, above, text width=8cm, align=left] at (model.south) {Extensive use of models for:\begin{itemize}[noitemsep,topsep=5pt]\item Extraction of transfer functions \\ \item Choice of appropriate control architecture \\ \item Tuning of control laws \\ \item Closed loop simulations \\ \item Noise budgets / Evaluation of performances \\ \item Sensibility to parameters / disturbances\end{itemize}\centerline{Models are at the core the mecatronic approach!}};
 | ||
| 
 | ||
|   \node[mymodel] at (mustation.south)       {Multiple stages     \\ Complex dynamics};
 | ||
|   \node[mymodel] at (dist.south)            {Ground motion       \\ Position errors};
 | ||
|   \node[mymodel] at (nanohexapod.south)     {Different concepts  \\ Sensors, Actuators};
 | ||
| 
 | ||
|   \node[mymodel] at (instrumentation.south) {Sensors, Actuators  \\ Electronics};
 | ||
|   \node[mymodel] at (mechanical.south)      {Proper integration  \\ Ease of assembly};
 | ||
|   \node[mymodel] at (fem.south)             {Optimize key parts: \\ Joints, Plates, APA};
 | ||
| 
 | ||
|   \node[mymodel] at (mounting.south)        {Struts              \\ Nano-Hexapod};
 | ||
|   \node[mymodel] at (testbenches.south)     {Instrumentation     \\ APA, Struts};
 | ||
|   \node[mymodel] at (implementation.south)  {Control tests       \\ Micro Station};
 | ||
| 
 | ||
|   % Links
 | ||
|   \draw[->] (dist.east)      -- node[above, midway]{{\small Measurements}} node[below,midway]{{\small Spectral Analysis}} (dist.east-|model.west);
 | ||
|   \draw[->] (mustation.east) -- node[above, midway]{{\small Measurements}} node[below, midway]{{\small CAD Model}} (mustation.east-|model.west);
 | ||
| 
 | ||
|   \draw[->] ($(nanohexapod.east-|model.west)-(0, 0.15)$) -- node[below, midway]{{\small Optimization}} ($(nanohexapod.east)-(0, 0.15)$);
 | ||
|   \draw[<-] ($(nanohexapod.east-|model.west)+(0, 0.15)$) -- node[above, midway]{{\small Model}} ($(nanohexapod.east)+(0, 0.15)$);
 | ||
| 
 | ||
|   \draw[->] ($(fem.south|-model.north)+(0.15, 0)$) -- node[right, midway]{{\small Specif.}} ($(fem.south)+(0.15,0)$);
 | ||
|   \draw[<-] ($(fem.south|-model.north)-(0.15, 0)$) -- node[left, midway,align=right]{{\small Super}\\{\small Element}}  ($(fem.south)-(0.15,0)$);
 | ||
| 
 | ||
|   \draw[->] ($(mechanical.south|-model.north)+(0.15, 0)$) -- node[right, midway]{{\small Specif.}} ($(mechanical.south)+(0.15,0)$);
 | ||
|   \draw[<-] ($(mechanical.south|-model.north)-(0.15, 0)$) -- node[left, midway,align=right]{{\small CAD}\\{\small model}}        ($(mechanical.south)-(0.15,0)$);
 | ||
| 
 | ||
|   \draw[->] ($(instrumentation.south|-model.north)+(0.15, 0)$) -- node[right, midway]{{\small Specif.}} ($(instrumentation.south)+(0.15,0)$);
 | ||
|   \draw[<-] ($(instrumentation.south|-model.north)-(0.15, 0)$) -- node[left, midway]{{\small Model}}         ($(instrumentation.south)-(0.15,0)$);
 | ||
| 
 | ||
|   \draw[->] ($(mounting.west-|model.east)+(0, 0.15)$) -- node[above, midway]{{\small Requirements}} ($(mounting.west)+(0, 0.15)$);
 | ||
|   \draw[<-] ($(mounting.west-|model.east)-(0, 0.15)$) -- node[below, midway]{{\small Model refinement}}   ($(mounting.west)-(0, 0.15)$);
 | ||
| 
 | ||
|   \draw[->] ($(testbenches.west-|model.east)+(0, 0.15)$) -- node[above, midway]{{\small Control Laws}} ($(testbenches.west)+(0, 0.15)$);
 | ||
|   \draw[<-] ($(testbenches.west-|model.east)-(0, 0.15)$) -- node[below, midway]{{\small Model refinement}}   ($(testbenches.west)-(0, 0.15)$);
 | ||
| 
 | ||
|   \draw[->] ($(implementation.west-|model.east)+(0, 0.15)$) -- node[above, midway]{{\small Control Laws}} ($(implementation.west)+(0, 0.15)$);
 | ||
|   \draw[<-] ($(implementation.west-|model.east)-(0, 0.15)$) -- node[below, midway]{{\small Model refinement}}   ($(implementation.west)-(0, 0.15)$);
 | ||
| 
 | ||
|   % Main steps
 | ||
|   \node[font=\bfseries, rotate=90, anchor=south, above] (conceptual_phase_node) at (dist.west) {1 - Conceptual Phase};
 | ||
|   \node[font=\bfseries, above] (detailed_phase_node) at (mechanical.north) {2 - Detail Design Phase};
 | ||
|   \node[font=\bfseries, rotate=-90, anchor=south, above] (implementation_phase_node) at (testbenches.east) {3 - Experimental Phase};
 | ||
|     \begin{scope}[on background layer]
 | ||
|       \node[fit={(conceptual_phase_node.north|-nanohexapod.north) (mustation.south east)}, fill=lightgreen!50!white, draw, inner sep=2pt] (conceptual_phase) {};
 | ||
|       \node[fit={(detailed_phase_node.north-|instrumentation.west) (fem.south east)}, fill=lightyellow!50!white, draw, inner sep=2pt] (detailed_phase) {};
 | ||
|       \node[fit={(implementation_phase_node.north|-mounting.north) (implementation.south west)}, fill=lightred!50!white, draw, inner sep=2pt] (implementation_phase) {};
 | ||
|       % \node[above left] at (dob.south east) {DOB};
 | ||
|     \end{scope}
 | ||
| 
 | ||
|   % Between main steps
 | ||
|   \draw[mystep, postaction={decorate,decoration={raise=1ex,text along path,text align=center,text={Concept Validation}}}] (conceptual_phase.north) to[out=90, in=180] (detailed_phase.west);
 | ||
|   \draw[mystep, postaction={decorate,decoration={raise=1ex,text along path,text align=center,text={Procurement}}}] (detailed_phase.east) to[out=0, in=90] (implementation_phase.north);
 | ||
| 
 | ||
|   % % Inside Model
 | ||
|   % \node[inner sep=1pt, outer sep=6pt, anchor=north west, draw, fill=white, thin] (multibodymodel) at ($(model.north west) - (0, 0.5)$)
 | ||
|   %   {\includegraphics[width=5.6cm]{simscape_nano_hexapod.png}};
 | ||
| 
 | ||
|   % \node[inner sep=1pt, outer sep=6pt, anchor=south west, draw, fill=white, thin] (simscape) at (model.south west)
 | ||
|   %   {\includegraphics[width=5.6cm]{simscape_picture.jpg}};
 | ||
| 
 | ||
|   % % Feedback Model
 | ||
|   % \node[inner sep=3pt, outer sep=6pt, anchor=north east, draw, fill=white, thin] (simscape_sim) at ($(model.north east) - (0, 0.5)$)
 | ||
|   %   {\includegraphics[width=3.6cm]{simscape_simulations.pdf}};
 | ||
| 
 | ||
|   % % FeedBack
 | ||
|   % \node[inner sep=3pt, outer sep=6pt, anchor=south east, draw, fill=white, thin] (feedback) at (model.south east)
 | ||
|   %   {\includegraphics[width=3.6cm]{classical_feedback_small.pdf}};
 | ||
| \end{tikzpicture}
 | ||
| #+end_src
 | ||
| 
 | ||
| #+name: fig:introduction_nass_mechatronics_approach
 | ||
| #+caption: Overview of the mechatronic approach used for the Nano-Active-Stabilization-System
 | ||
| #+attr_latex: :width \linewidth
 | ||
| #+RESULTS:
 | ||
| [[file:figs/nass_mechatronics_approach.png]]
 | ||
| 
 | ||
| **** 6DoF vibration control of a rotating platform
 | ||
| 
 | ||
| Vibration control in 5DoF of a rotating stage
 | ||
| To the author's knowledge, the use of a continuously rotating stewart platform for vibration control has not been proved in the literature.
 | ||
| 
 | ||
| **** Experimental validation of the Nano Active Stabilization System
 | ||
| 
 | ||
| Demonstration of the improvement of the the positioning accuracy of a complex multi DoF (the micro-station) by several orders of magnitude (Section ...) using ...
 | ||
| 
 | ||
| * Thesis Outline - Mechatronics Design Approach
 | ||
| **** Introduction                                                  :ignore:
 | ||
| 
 | ||
| #+name: fig:introduction_overview_chapters
 | ||
| #+caption: Overview of the sections
 | ||
| #+attr_latex: :width \linewidth
 | ||
| [[file:figs/introduction_overview_chapters.png]]
 | ||
| 
 | ||
| This thesis
 | ||
| - has a structure that follows the mechatronics design approach
 | ||
| 
 | ||
| Is structured in three chapters that corresponds to the three mains parts of the proposed mechatronics approach.
 | ||
| 
 | ||
| A brief overview of these three chapters is given bellow.
 | ||
| 
 | ||
| **** Conceptual design development
 | ||
| 
 | ||
| - Start with simple models for witch trade offs can be easily understood (uniaxial)
 | ||
| - Increase the model complexity if important physical phenomenon are to be modelled (cf the rotating model)
 | ||
| - Only when better understanding of the physical effects in play, and only if required, go for higher model complexity (here multi-body model)
 | ||
| - The system concept and main characteristics should be extracted from the different models and validated with closed-loop simulations with the most accurate model
 | ||
| - Once the concept is validated, the chosen concept can be design in mode details
 | ||
| 
 | ||
| **** Detailed design
 | ||
| 
 | ||
| - During this detailed design phase, models are refined from the obtained CAD and using FEM
 | ||
| - The models are used to assists the design and to optimize each element based on dynamical analysis and closed-loop simulations
 | ||
| - The requirements for all the associated instrumentation can be determined from a dynamical noise budgeting
 | ||
| - After converging to a detailed design that give acceptable performance based on the models, the different parts can be ordered and the experimental phase begins
 | ||
| 
 | ||
| **** Experimental validation
 | ||
| 
 | ||
| - It is advised that the important characteristics of the different elements are evaluated individually
 | ||
|   Systematic validation/refinement of models with experimental measurements
 | ||
| - The obtained characteristics can be used to refine the models
 | ||
| - Then, an accurate model of the system is obtained which can be used during experimental tests (for control synthesis for instance)
 | ||
| 
 | ||
| 
 | ||
| * Bibliography                                                        :ignore:
 | ||
| #+latex: \printbibliography[heading=bibintoc,title={Bibliography}]
 | ||
| 
 | ||
| * Footnotes
 | ||
| [fn:4]Capacitive sensors from Fogale Sensors
 | ||
| [fn:3]Attocube FPS3010 Fabry-Pérot interferometers
 | ||
| [fn:2]Attocube IDS3010 Fabry-Pérot interferometers
 | ||
| [fn:1]PicoScale SmarAct Michelson interferometers
 |