65 KiB
Control of the NASS with optimal stiffness
- Introduction
- Low Authority Control - Decentralized Direct Velocity Feedback
- Primary Control in the leg space
- Further More complex simulations
- Primary Control in the task space
Introduction ignore
Low Authority Control - Decentralized Direct Velocity Feedback
<<sec:lac_dvf>>
Introduction ignore
Initialization
initializeGround();
initializeGranite();
initializeTy();
initializeRy();
initializeRz();
initializeMicroHexapod();
initializeAxisc();
initializeMirror();
initializeSimscapeConfiguration();
initializeDisturbances('enable', false);
initializeLoggingConfiguration('log', 'none');
initializeController('type', 'hac-dvf');
We set the stiffness of the payload fixation:
Kp = 1e8; % [N/m]
Identification
K = tf(zeros(6));
Kdvf = tf(zeros(6));
We identify the system for the following payload masses:
Ms = [1, 10, 50];
The nano-hexapod has the following leg's stiffness and damping.
initializeNanoHexapod('k', 1e5, 'c', 2e2);
Controller Design
The obtain dynamics from actuators forces $\tau_i$ to the relative motion of the legs $d\mathcal{L}_i$ is shown in Figure fig:opt_stiff_dvf_plant for the three considered payload masses.
The Root Locus is shown in Figure fig:opt_stiff_dvf_root_locus and wee see that we have unconditional stability.
In order to choose the gain such that we obtain good damping for all the three payload masses, we plot the damping ration of the modes as a function of the gain for all three payload masses in Figure fig:opt_stiff_dvf_damping_gain.
Damping as function of the gain
Finally, we use the following controller for the Decentralized Direct Velocity Feedback:
Kdvf = 5e3*s/(1+s/2/pi/1e3)*eye(6);
Effect of the Low Authority Control on the Primary Plant
Introduction ignore
Let's identify the dynamics from actuator forces $\bm{\tau}$ to displacement as measured by the metrology $\bm{\mathcal{X}}$: \[ \bm{G}(s) = \frac{\bm{\mathcal{X}}}{\bm{\tau}} \] We do so both when the DVF is applied and when it is not applied.
Then, we compute the transfer function from forces applied by the actuators $\bm{\mathcal{F}}$ to the measured position error in the frame of the nano-hexapod $\bm{\epsilon}_{\mathcal{X}_n}$: \[ \bm{G}_\mathcal{X}(s) = \frac{\bm{\epsilon}_{\mathcal{X}_n}}{\bm{\mathcal{F}}} = \bm{G}(s) \bm{J}^{-T} \] The obtained dynamics is shown in Figure fig:opt_stiff_primary_plant_damped_X.
A zero with a positive real part is introduced in the transfer function from $\mathcal{F}_y$ to $\mathcal{X}_y$ after Decentralized Direct Velocity Feedback is applied.
And we compute the transfer function from actuator forces $\bm{\tau}$ to position error of each leg $\bm{\epsilon}_\mathcal{L}$: \[ \bm{G}_\mathcal{L} = \frac{\bm{\epsilon}_\mathcal{L}}{\bm{\tau}} = \bm{J} \bm{G}(s) \] The obtained dynamics is shown in Figure fig:opt_stiff_primary_plant_damped_L.
Identification of the undamped plant ignore
Identification of the damped plant ignore
Effect of the Damping on the plant diagonal dynamics ignore
Effect of the Damping on the coupling dynamics ignore
The coupling (off diagonal elements) of $\bm{G}_\mathcal{X}$ are shown in Figure fig:opt_stiff_primary_plant_damped_coupling_X both when DVF is applied and when it is not.
The coupling does not change a lot with DVF.
The coupling in the space of the legs $\bm{G}_\mathcal{L}$ are shown in Figure fig:opt_stiff_primary_plant_damped_coupling_L.
The magnitude of the coupling between $\tau_i$ and $d\mathcal{L}_j$ (Figure fig:opt_stiff_primary_plant_damped_coupling_L) around the resonance of the nano-hexapod (where the coupling is the highest) is considerably reduced when DVF is applied.
Effect of the Low Authority Control on the Sensibility to Disturbances
Introduction ignore
We may now see how Decentralized Direct Velocity Feedback changes the sensibility to disturbances, namely:
- Ground motion
- Spindle and Translation stage vibrations
- Direct forces applied to the sample
To simplify the analysis, we here only consider the vertical direction, thus, we will look at the transfer functions:
- from vertical ground motion $D_{w,z}$ to the vertical position error of the sample $E_z$
- from vertical vibration forces of the spindle $F_{R_z,z}$ to $E_z$
- from vertical vibration forces of the translation stage $F_{T_y,z}$ to $E_z$
- from vertical direct forces (such as cable forces) $F_{d,z}$ to $E_z$
The norm of these transfer functions are shown in Figure fig:opt_stiff_sensibility_dist_dvf.
Identification ignore
Results ignore
Conclusion ignore
Decentralized Direct Velocity Feedback is shown to increase the effect of stages vibrations at high frequency and to reduce the effect of ground motion and direct forces at low frequency.
Conclusion
Primary Control in the leg space
<<sec:primary_control_L>>
Introduction ignore
In this section we implement the control architecture shown in Figure fig:control_architecture_hac_dvf_pos_L consisting of:
- an inner loop with a decentralized direct velocity feedback control
- an outer loop where the controller $\bm{K}_\mathcal{L}$ is designed in the frame of the legs
The controller for decentralized direct velocity feedback is the one designed in Section sec:lac_dvf.
Plant in the leg space
We now look at the transfer function matrix from $\bm{\tau}^\prime$ to $\bm{\epsilon}_{\mathcal{X}_n}$ for the design of $\bm{K}_\mathcal{L}$.
The diagonal elements of the transfer function matrix from $\bm{\tau}^\prime$ to $\bm{\epsilon}_{\mathcal{X}_n}$ for the three considered masses are shown in Figure fig:opt_stiff_primary_plant_L.
The plant dynamics below $100\ [Hz]$ is only slightly dependent on the payload mass.
Control in the leg space
We design a diagonal controller with all the same diagonal elements.
The requirements for the controller are:
- Crossover frequency of around 100Hz
- Stable for all the considered payload masses
- Sufficient phase and gain margin
- Integral action at low frequency
The design controller is as follows:
- Lead centered around the crossover
- An integrator below 10Hz
- A low pass filter at 250Hz
The loop gain is shown in Figure fig:opt_stiff_primary_loop_gain_L.
h = 2.0;
Kl = 2e7 * eye(6) * ...
1/h*(s/(2*pi*100/h) + 1)/(s/(2*pi*100*h) + 1) * ...
1/h*(s/(2*pi*200/h) + 1)/(s/(2*pi*200*h) + 1) * ...
(s/2/pi/10 + 1)/(s/2/pi/10) * ...
1/(1 + s/2/pi/300);
Finally, we include the Jacobian in the control and we ignore the measurement of the vertical rotation as for the real system.
load('mat/stages.mat', 'nano_hexapod');
K = Kl*nano_hexapod.J*diag([1, 1, 1, 1, 1, 0]);
Sensibility to Disturbances and Noise Budget
Identification ignore
We identify the transfer function from disturbances to the position error of the sample when the HAC-LAC control is applied.
Obtained Sensibility to Disturbances ignore
We compare the norm of these transfer function for the vertical direction when no control is applied and when HAC-LAC control is applied: Figure fig:opt_stiff_primary_control_L_senbility_dist.
Noise Budgeting ignore
Then, we load the Power Spectral Density of the perturbations and we look at the obtained PSD of the displacement error in the vertical direction due to the disturbances:
- Figure fig:opt_stiff_primary_control_L_psd_dist: Amplitude Spectral Density of the vertical position error due to both the vertical ground motion and the vertical vibrations of the spindle
- Figure fig:opt_stiff_primary_control_L_psd_tot: Comparison of the Amplitude Spectral Density of the vertical position error in Open Loop and with the HAC-DVF Control
- Figure fig:opt_stiff_primary_control_L_cas_tot: Comparison of the Cumulative Amplitude Spectrum of the vertical position error in Open Loop and with the HAC-DVF Control
Simulations of Tomography Experiment
Let's now simulate a tomography experiment. To do so, we include all disturbances except vibrations of the translation stage.
initializeDisturbances();
initializeSimscapeConfiguration('gravity', false);
initializeLoggingConfiguration('log', 'all');
And we run the simulation for all three payload Masses.
Results
Let's now see how this controller performs.
First, we compute the Power Spectral Density of the sample's position error and we compare it with the open loop case in Figure fig:opt_stiff_hac_dvf_L_psd_disp_error.
Similarly, the Cumulative Amplitude Spectrum is shown in Figure fig:opt_stiff_hac_dvf_L_cas_disp_error.
Finally, the time domain position error signals are shown in Figure fig:opt_stiff_hac_dvf_L_pos_error.
Actuator Stroke and Forces
Conclusion
Further More complex simulations
Introduction ignore
Simulation with Micro-Hexapod Offset
Simulation
The micro-hexapod is inducing a 10mm offset of the sample center of mass with the rotation axis. A tomography experiment is then simulated.
initializeDisturbances();
initializeSimscapeConfiguration('gravity', false);
initializeLoggingConfiguration('log', 'all');
initializeSample('mass', 1, 'freq', 200);
initializeMicroHexapod('AP', [10e-3 0 0]);
initializeReferences('Rz_type', 'rotating', 'Rz_period', 1, ...
'Dh_pos', [10e-3; 0; 0; 0; 0; 0]);
load('mat/conf_simulink.mat');
set_param(conf_simulink, 'StopTime', '3');
sim('nass_model');
Results
Simultaneous Translation scans and Spindle's rotation
Simulation
A simulation is now performed with translation scans and spindle rotation at the same time.
The sample has a mass one 1kg, the spindle rotation speed is 60rpm and the translation scans have a period of 4s and a triangular shape.
initializeDisturbances();
initializeSimscapeConfiguration('gravity', false);
initializeLoggingConfiguration('log', 'all');
initializeSample('mass', 1, 'freq', 200);
initializeReferences('Rz_type', 'rotating', 'Rz_period', 1, ...
'Dy_type', 'triangular', 'Dy_amplitude', 5e-3, 'Dy_period', 4);
Results
Primary Control in the task space
<<sec:primary_control_X>>
Introduction ignore
In this section, the control architecture shown in Figure fig:control_architecture_hac_dvf_pos_X is applied and consists of:
- an inner Low Authority Control loop consisting of a decentralized direct velocity control controller
- an outer loop with the primary controller $\bm{K}_\mathcal{X}$ designed in the task space
Plant in the task space
Let's look $\bm{G}_\mathcal{X}(s)$.
Control in the task space
Kx = tf(zeros(6));
h = 2.5;
Kx(1,1) = 3e7 * ...
1/h*(s/(2*pi*100/h) + 1)/(s/(2*pi*100*h) + 1) * ...
(s/2/pi/1 + 1)/(s/2/pi/1);
Kx(2,2) = Kx(1,1);
h = 2.5;
Kx(3,3) = 3e7 * ...
1/h*(s/(2*pi*100/h) + 1)/(s/(2*pi*100*h) + 1) * ...
(s/2/pi/1 + 1)/(s/2/pi/1);
h = 1.5;
Kx(4,4) = 5e5 * ...
1/h*(s/(2*pi*100/h) + 1)/(s/(2*pi*100*h) + 1) * ...
(s/2/pi/1 + 1)/(s/2/pi/1);
Kx(5,5) = Kx(4,4);
h = 1.5;
Kx(6,6) = 5e4 * ...
1/h*(s/(2*pi*30/h) + 1)/(s/(2*pi*30*h) + 1) * ...
(s/2/pi/1 + 1)/(s/2/pi/1);
Stability
for i = 1:length(Ms)
isstable(feedback(Gm_x{i}*Kx, eye(6), -1))
end