Add notes about optimal nano-hexapod / add bib

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Thomas Dehaeze 2020-04-28 11:43:24 +02:00
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@ -759,39 +759,143 @@ This model will be used in the next sections to help the design of the nano-hexa
<<sec:nano_hexapod_design>> <<sec:nano_hexapod_design>>
** Introduction :ignore: ** Introduction :ignore:
As explain before, the nano-hexapod properties (mass, stiffness, architecture, ...) will influence: As explain before, the nano-hexapod properties (mass, stiffness, architecture, ...) will influence:
- the plant dynamics $G$ - the effect of disturbances $G_d$ (important for the rejection of disturbances)
- the effect of disturbances $G_d$ - the plant dynamics $G$ (important for the control robustness properties)
We which here to choose the nano-hexapod properties such that: Thus, we here wish to find the optimal nano-hexapod properties such that:
- has an easy - the effect of disturbances is minimized
- minimize the - the plant uncertainty due to a change of payload mass and experimental conditions is minimized
- minimize $|G_d|$
The study presented here only consider changes in the nano-hexapod *stiffness*.
The nano-hexapod mass cannot be change too much, and will anyway be negligible compare to the metrology reflector and the payload masses.
The choice of the nano-hexapod architecture (e.g. orientations of the actuators and implementation of sensors) will be further studied in accord with the control architecture.
** Optimal Stiffness to reduce the effect of disturbances ** Optimal Stiffness to reduce the effect of disturbances
The nano-hexapod stiffness have a large influence on the sensibility to disturbance (the norm of $G_d$).
** Optimal Stiffness For instance, it is quite obvious that a stiff nano-hexapod is better than a soft one when it comes to direct forces applied to the sample such as cable forces.
The goal is to design a system that is *robust*.
Thus, we have to identify the sources of uncertainty and try to minimize them. A complete study of the optimal nano-hexapod stiffness for the minimization of disturbance sensibility [[https://tdehaeze.github.io/nass-simscape/optimal_stiffness_disturbances.html][here]] and summarized below.
The sensibility to the spindle vibration as a function of the nano-hexapod stiffness is shown in Figure [[fig:opt_stiff_sensitivity_Frz]] (similar curves are obtained for translation stage vibrations).
It is shown that a softer nano-hexapod it better to filter out stage vibrations.
More precisely, is start to filters the vibration at the first suspension mode of the payload on top of the nano-hexapod.
#+name: fig:opt_stiff_sensitivity_Frz
#+caption: Sensitivity to Spindle vertical motion error to the vertical error position of the sample
[[file:figs/opt_stiff_sensitivity_Frz.png]]
The sensibilities to ground motion in the Y and Z directions are shown in Figure [[fig:opt_stiff_sensitivity_Dw]].
We can see that above the suspension mode of the nano-hexapod, the norm of the transmissibility is close to one until the suspension mode of the granite.
It will be further suggested that using soft mounts for the granite can greatly improve the sensibility to ground motion.
#+name: fig:opt_stiff_sensitivity_Dw
#+caption: Sensitivity to Ground motion to the position error of the sample
[[file:figs/opt_stiff_sensitivity_Dw.png]]
Then, we take the Power Spectral Density of all the sources of disturbances as identified in Section [[sec:identification_disturbances]], and we compute what would be the Power Spectral Density of the vertical motion error for all the considered nano-hexapod stiffnesses (Figure [[fig:opt_stiff_psd_dz_tot]]).
We can see that the most important change is in the frequency range 30Hz to 300Hz where a stiffness smaller than $10^5\,[N/m]$ greatly reduces the sensibility to disturbances.
#+name: fig:opt_stiff_psd_dz_tot
#+caption: Amplitude Spectral Density of the Sample vertical position error due to Vertical vibration of the Spindle for multiple nano-hexapod stiffnesses
[[file:figs/opt_stiff_psd_dz_tot.png]]
If we look at the Cumulative amplitude spectrum of the vertical error motion in Figure [[fig:opt_stiff_cas_dz_tot]], we can observe that a soft hexapod ($k < 10^5 - 10^6\,[N/m]$) helps reducing the high frequency disturbances, and thus a smaller control bandwidth will suffice to obtain the wanted performance.
#+name: fig:opt_stiff_cas_dz_tot
#+caption: Cumulative Amplitude Spectrum of the Sample vertical position error due to all considered perturbations for multiple nano-hexapod stiffnesses
[[file:figs/opt_stiff_cas_dz_tot.png]]
** Optimal Stiffness to reduce the plant uncertainty
*** Introduction :ignore:
One of the primary design goal is to obtain a system that is *robust* to all changes in the system.
To design a robust system, we have to identify the sources of uncertainty and try to minimize them.
The uncertainty in the system can be caused by:
- A change in the *Support's compliance* (complete analysis [[https://tdehaeze.github.io/nass-simscape/uncertainty_support.html][here]]): if the micro-station dynamics is changing due to the change of parts or just because of aging effects, the feedback system should remains stable and the obtained performance should not change.
- A change in the *Payload mass/dynamics* (complete analysis [[https://tdehaeze.github.io/nass-simscape/uncertainty_payload.html][here]]).
- A change of *experimental condition* such as the micro-station's pose or the spindle rotation (complete analysis [[https://tdehaeze.github.io/nass-simscape/uncertainty_experiment.html][here]])
All these uncertainties will limit the attainable bandwidth and hence the performances.
Fortunately, the nano-hexapod stiffness have an influence on the dynamical uncertainty induced by the above effects and we wish here to determine the optimal nano-hexapod stiffness.
Separate studies has been conducted to see how the support's compliance appears in
*** Effect of Payload
:PROPERTIES:
:UNNUMBERED: t
:END:
#+name: fig:opt_stiffness_payload_mass_fz_dz
#+caption: Dynamics from $\mathcal{F}_z$ to $\mathcal{X}_z$ for varying payload mass, both for a soft nano-hexapod and a stiff nano-hexapod
[[file:figs/opt_stiffness_payload_mass_fz_dz.png]]
#+name: fig:opt_stiffness_payload_freq_fz_dz
#+caption: Dynamics from $\mathcal{F}_z$ to $\mathcal{X}_z$ for varying payload resonance frequency, both for a soft nano-hexapod and a stiff nano-hexapod
[[file:figs/opt_stiffness_payload_freq_fz_dz.png]]
*** Effect of Micro-Station Compliance
:PROPERTIES:
:UNNUMBERED: t
:END:
#+name: fig:opt_stiffness_micro_station_fx_dx
#+caption: Change of dynamics from force $\mathcal{F}_x$ to displacement $\mathcal{X}_x$ due to the micro-station compliance
[[file:figs/opt_stiffness_micro_station_fx_dx.png]]
*** Effect of Spindle Rotating Speed
:PROPERTIES:
:UNNUMBERED: t
:END:
#+name: fig:opt_stiffness_wz_fx_dx
#+caption: Change of dynamics from force $\mathcal{F}_x$ to displacement $\mathcal{X}_x$ for a spindle rotation speed from 0rpm to 60rpm
[[file:figs/opt_stiffness_wz_fx_dx.png]]
*** Total Uncertainty
:PROPERTIES:
:UNNUMBERED: t
:END:
#+name: fig:opt_stiffness_plant_dynamics_task_space
#+caption: Variability of the dynamics from $\bm{\mathcal{F}}_x$ to $\bm{\mathcal{X}}_x$ with varying nano-hexapod stiffness
[[file:figs/opt_stiffness_plant_dynamics_task_space.gif]]
#+begin_important
The leg stiffness should be at higher than $k = 10^4\,[N/m]$ such that the main resonance frequency does not shift too much when rotating.
#+end_important
#+begin_important
It is usually a good idea to maximize the mass, damping and stiffness of the isolation platform in order to be less sensible to the payload dynamics.
The best thing to do is to have a stiff isolation platform.
The dynamics of the nano-hexapod is not affected by the micro-station dynamics (compliance) when the stiffness of the legs is less than $10^6\,[N/m]$. When the nano-hexapod is stiff ($k > 10^7\,[N/m]$), the compliance of the micro-station appears in the primary plant.
#+end_important
Uncertainty in the system can be caused by:
- Effect of Support Compliance: https://tdehaeze.github.io/nass-simscape/uncertainty_support.html
- Effect of Payload Dynamics: https://tdehaeze.github.io/nass-simscape/uncertainty_payload.html
- Effect of experimental condition (micro-station pose, spindle rotation): https://tdehaeze.github.io/nass-simscape/uncertainty_experiment.html
All these uncertainty will limit the maximum attainable bandwidth.
Fortunately, the nano-hexapod stiffness have an influence on the dynamical uncertainty induced by the above effects.
Determination of the optimal stiffness based on all the effects: Determination of the optimal stiffness based on all the effects:
- https://tdehaeze.github.io/nass-simscape/uncertainty_optimal_stiffness.html - https://tdehaeze.github.io/nass-simscape/uncertainty_optimal_stiffness.html
#+begin_conclusion
#+end_conclusion
The main performance limitation are payload variability The main performance limitation are payload variability
#+begin_question #+begin_question
@ -799,27 +903,14 @@ The main performance limitation are payload variability
The first resonance frequency of the sample will limit the performance. The first resonance frequency of the sample will limit the performance.
#+end_question #+end_question
The nano-hexapod stiffness will also change the sensibility to disturbances.
Effect of Nano-hexapod stiffness on the Sensibility to disturbances: https://tdehaeze.github.io/nass-simscape/optimal_stiffness_disturbances.html
#+begin_conclusion #+begin_conclusion
#+end_conclusion #+end_conclusion
** Sensors to be included It is preferred that *one* controller is working for all the payloads.
If not possible, the alternative would be to develop an adaptive controller that depends on the payload mass/inertia.
Ways to damp: ** Conclusion
- Force Sensor
- Relative Velocity Sensors
- Inertial Sensor
https://tdehaeze.github.io/rotating-frame/index.html
Sensors to be included:
* Robust Control Architecture * Robust Control Architecture
@ -829,15 +920,38 @@ Sensors to be included:
https://tdehaeze.github.io/nass-simscape/optimal_stiffness_control.html https://tdehaeze.github.io/nass-simscape/optimal_stiffness_control.html
** Active Damping and Sensors to be included
Ways to damp:
- Force Sensor
- Relative Velocity Sensors
- Inertial Sensor
https://tdehaeze.github.io/rotating-frame/index.html
Sensors to be included:
** Motion Control
** Simulation of Tomography Experiments ** Simulation of Tomography Experiments
<<sec:tomography_experiment>> <<sec:tomography_experiment>>
#+name: fig:opt_stiff_hac_dvf_L_psd_disp_error
#+caption: Amplitude Spectral Density of the position error in Open Loop and with the HAC-LAC controller
[[file:figs/opt_stiff_hac_dvf_L_psd_disp_error.png]]
#+name: fig:opt_stiff_hac_dvf_L_cas_disp_error
#+caption: Cumulative Amplitude Spectrum of the position error in Open Loop and with the HAC-LAC controller
[[file:figs/opt_stiff_hac_dvf_L_cas_disp_error.png]]
#+name: fig:opt_stiff_hac_dvf_L_pos_error
#+caption: Position Error of the sample during a tomography experiment when no control is applied and with the HAC-DVF control architecture
[[file:figs/opt_stiff_hac_dvf_L_pos_error.png]]
#+name: fig:closed_loop_sim_zoom #+name: fig:closed_loop_sim_zoom
#+caption: Figure caption #+caption: Tomography Experiment using the Simscape Model in Closed Loop with the HAC-LAC Control - Zoom on the sample's position (the full vertical scale is $\approx 10 \mu m$)
[[file:figs/closed_loop_sim_zoom.gif]] [[file:figs/closed_loop_sim_zoom.gif]]
** Conclusion ** Conclusion
* Further notes * Further notes
Soft granite Soft granite
@ -849,3 +963,6 @@ Common metrology frame for the nano-focusing optics and the measurement of the s
Cable forces? Cable forces?
Slip-Ring noise? Slip-Ring noise?
* Bibliography :ignore:
bibliographystyle:unsrt
bibliography:ref.bib

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@ -0,0 +1,20 @@
@book{schmidt14_desig_high_perfor_mechat_revis_edition,
author = {Schmidt, R Munnig and Schitter, Georg and Rankers, Adrian},
title = {The Design of High Performance Mechatronics - 2nd Revised Edition},
year = {2014},
publisher = {Ios Press},
tags = {favorite},
}
@article{oomen18_advan_motion_contr_precis_mechat,
author = {Tom Oomen},
title = {Advanced Motion Control for Precision Mechatronics: Control, Identification, and Learning of Complex Systems},
journal = {IEEJ Journal of Industry Applications},
volume = {7},
number = {2},
pages = {127-140},
year = {2018},
doi = {10.1541/ieejjia.7.127},
url = {https://doi.org/10.1541/ieejjia.7.127},
tags = {favorite},
}