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						@@ -759,39 +759,143 @@ This model will be used in the next sections to help the design of the nano-hexa
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<<sec:nano_hexapod_design>>
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** Introduction                                                      :ignore:
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As explain before, the nano-hexapod properties (mass, stiffness, architecture, ...) will influence:
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- the plant dynamics $G$
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- the effect of disturbances $G_d$
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- the effect of disturbances $G_d$ (important for the rejection of disturbances)
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- the plant dynamics $G$ (important for the control robustness properties)
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We which here to choose the nano-hexapod properties such that:
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- has an easy
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- minimize the
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- minimize $|G_d|$
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Thus, we here wish to find the optimal nano-hexapod properties such that:
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- the effect of disturbances is minimized
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- the plant uncertainty due to a change of payload mass and experimental conditions is minimized
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The study presented here only consider changes in the nano-hexapod *stiffness*.
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The nano-hexapod mass cannot be change too much, and will anyway be negligible compare to the metrology reflector and the payload masses.
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The choice of the nano-hexapod architecture (e.g. orientations of the actuators and implementation of sensors) will be further studied in accord with the control architecture.
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** Optimal Stiffness to reduce the effect of disturbances
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The nano-hexapod stiffness have a large influence on the sensibility to disturbance (the norm of $G_d$).
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** Optimal Stiffness
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The goal is to design a system that is *robust*.
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For instance, it is quite obvious that a stiff nano-hexapod is better than a soft one when it comes to direct forces applied to the sample such as cable forces.
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Thus, we have to identify the sources of uncertainty and try to minimize them.
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A complete study of the optimal nano-hexapod stiffness for the minimization of disturbance sensibility [[https://tdehaeze.github.io/nass-simscape/optimal_stiffness_disturbances.html][here]] and summarized below.
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The sensibility to the spindle vibration as a function of the nano-hexapod stiffness is shown in Figure [[fig:opt_stiff_sensitivity_Frz]] (similar curves are obtained for translation stage vibrations).
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It is shown that a softer nano-hexapod it better to filter out stage vibrations.
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More precisely, is start to filters the vibration at the first suspension mode of the payload on top of the nano-hexapod.
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#+name: fig:opt_stiff_sensitivity_Frz
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#+caption: Sensitivity to Spindle vertical motion error to the vertical error position of the sample
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[[file:figs/opt_stiff_sensitivity_Frz.png]]
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The sensibilities to ground motion in the Y and Z directions are shown in Figure [[fig:opt_stiff_sensitivity_Dw]].
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We can see that above the suspension mode of the nano-hexapod, the norm of the transmissibility is close to one until the suspension mode of the granite.
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It will be further suggested that using soft mounts for the granite can greatly improve the sensibility to ground motion.
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#+name: fig:opt_stiff_sensitivity_Dw
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#+caption: Sensitivity to Ground motion to the position error of the sample
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[[file:figs/opt_stiff_sensitivity_Dw.png]]
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Then, we take the Power Spectral Density of all the sources of disturbances as identified in Section [[sec:identification_disturbances]], and we compute what would be the Power Spectral Density of the vertical motion error for all the considered nano-hexapod stiffnesses (Figure [[fig:opt_stiff_psd_dz_tot]]).
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We can see that the most important change is in the frequency range 30Hz to 300Hz where a stiffness smaller than $10^5\,[N/m]$ greatly reduces the sensibility to disturbances.
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#+name: fig:opt_stiff_psd_dz_tot
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#+caption: Amplitude Spectral Density of the Sample vertical position error due to Vertical vibration of the Spindle for multiple nano-hexapod stiffnesses
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[[file:figs/opt_stiff_psd_dz_tot.png]]
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If we look at the Cumulative amplitude spectrum of the vertical error motion in Figure [[fig:opt_stiff_cas_dz_tot]], we can observe that a soft hexapod ($k < 10^5 - 10^6\,[N/m]$) helps reducing the high frequency disturbances, and thus a smaller control bandwidth will suffice to obtain the wanted performance.
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#+name: fig:opt_stiff_cas_dz_tot
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#+caption: Cumulative Amplitude Spectrum of the Sample vertical position error due to all considered perturbations for multiple nano-hexapod stiffnesses
 | 
			
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[[file:figs/opt_stiff_cas_dz_tot.png]]
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** Optimal Stiffness to reduce the plant uncertainty
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*** Introduction                                                    :ignore:
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One of the primary design goal is to obtain a system that is *robust* to all changes in the system.
 | 
			
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To design a robust system, we have to identify the sources of uncertainty and try to minimize them.
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The uncertainty in the system can be caused by:
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- A change in the *Support's compliance* (complete analysis [[https://tdehaeze.github.io/nass-simscape/uncertainty_support.html][here]]): if the micro-station dynamics is changing due to the change of parts or just because of aging effects, the feedback system should remains stable and the obtained performance should not change.
 | 
			
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- A change in the *Payload mass/dynamics* (complete analysis [[https://tdehaeze.github.io/nass-simscape/uncertainty_payload.html][here]]).
 | 
			
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- A change of *experimental condition* such as the micro-station's pose or the spindle rotation (complete analysis [[https://tdehaeze.github.io/nass-simscape/uncertainty_experiment.html][here]])
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All these uncertainties will limit the attainable bandwidth and hence the performances.
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Fortunately, the nano-hexapod stiffness have an influence on the dynamical uncertainty induced by the above effects and we wish here to determine the optimal nano-hexapod stiffness.
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Separate studies has been conducted to see how the support's compliance appears in
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*** Effect of Payload
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:PROPERTIES:
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:UNNUMBERED: t
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:END:
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#+name: fig:opt_stiffness_payload_mass_fz_dz
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#+caption: Dynamics from $\mathcal{F}_z$ to $\mathcal{X}_z$ for varying payload mass, both for a soft nano-hexapod and a stiff nano-hexapod
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[[file:figs/opt_stiffness_payload_mass_fz_dz.png]]
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#+name: fig:opt_stiffness_payload_freq_fz_dz
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#+caption: Dynamics from $\mathcal{F}_z$ to $\mathcal{X}_z$ for varying payload resonance frequency, both for a soft nano-hexapod and a stiff nano-hexapod
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[[file:figs/opt_stiffness_payload_freq_fz_dz.png]]
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*** Effect of Micro-Station Compliance
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:PROPERTIES:
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:UNNUMBERED: t
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:END:
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#+name: fig:opt_stiffness_micro_station_fx_dx
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#+caption: Change of dynamics from force $\mathcal{F}_x$ to displacement $\mathcal{X}_x$ due to the micro-station compliance
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[[file:figs/opt_stiffness_micro_station_fx_dx.png]]
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*** Effect of Spindle Rotating Speed
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:PROPERTIES:
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:UNNUMBERED: t
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:END:
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#+name: fig:opt_stiffness_wz_fx_dx
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#+caption: Change of dynamics from force $\mathcal{F}_x$ to displacement $\mathcal{X}_x$ for a spindle rotation speed from 0rpm to 60rpm
 | 
			
		||||
[[file:figs/opt_stiffness_wz_fx_dx.png]]
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 | 
			
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*** Total Uncertainty
 | 
			
		||||
:PROPERTIES:
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:UNNUMBERED: t
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:END:
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#+name: fig:opt_stiffness_plant_dynamics_task_space
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#+caption: Variability of the dynamics from $\bm{\mathcal{F}}_x$ to $\bm{\mathcal{X}}_x$ with varying nano-hexapod stiffness
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[[file:figs/opt_stiffness_plant_dynamics_task_space.gif]]
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#+begin_important
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The leg stiffness should be at higher than $k = 10^4\,[N/m]$ such that the main resonance frequency does not shift too much when rotating.
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#+end_important
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#+begin_important
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It is usually a good idea to maximize the mass, damping and stiffness of the isolation platform in order to be less sensible to the payload dynamics.
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The best thing to do is to have a stiff isolation platform.
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The dynamics of the nano-hexapod is not affected by the micro-station dynamics (compliance) when the stiffness of the legs is less than $10^6\,[N/m]$. When the nano-hexapod is stiff ($k > 10^7\,[N/m]$), the compliance of the micro-station appears in the primary plant.
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#+end_important
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Uncertainty in the system can be caused by:
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		||||
- Effect of Support Compliance: https://tdehaeze.github.io/nass-simscape/uncertainty_support.html
 | 
			
		||||
- Effect of Payload Dynamics: https://tdehaeze.github.io/nass-simscape/uncertainty_payload.html
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		||||
- Effect of experimental condition (micro-station pose, spindle rotation): https://tdehaeze.github.io/nass-simscape/uncertainty_experiment.html
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All these uncertainty will limit the maximum attainable bandwidth.
 | 
			
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 | 
			
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Fortunately, the nano-hexapod stiffness have an influence on the dynamical uncertainty induced by the above effects.
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Determination of the optimal stiffness based on all the effects:
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- https://tdehaeze.github.io/nass-simscape/uncertainty_optimal_stiffness.html
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#+begin_conclusion
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#+end_conclusion
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The main performance limitation are payload variability
 | 
			
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#+begin_question
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@@ -799,27 +903,14 @@ The main performance limitation are payload variability
 | 
			
		||||
  The first resonance frequency of the sample will limit the performance.
 | 
			
		||||
#+end_question
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The nano-hexapod stiffness will also change the sensibility to disturbances.
 | 
			
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Effect of Nano-hexapod stiffness on the Sensibility to disturbances: https://tdehaeze.github.io/nass-simscape/optimal_stiffness_disturbances.html
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#+begin_conclusion
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#+end_conclusion
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** Sensors to be included
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It is preferred that *one* controller is working for all the payloads.
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If not possible, the alternative would be to develop an adaptive controller that depends on the payload mass/inertia.
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Ways to damp:
 | 
			
		||||
- Force Sensor
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- Relative Velocity Sensors
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- Inertial Sensor
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https://tdehaeze.github.io/rotating-frame/index.html
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Sensors to be included:
 | 
			
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** Conclusion
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		||||
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* Robust Control Architecture
 | 
			
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@@ -829,15 +920,38 @@ Sensors to be included:
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		||||
https://tdehaeze.github.io/nass-simscape/optimal_stiffness_control.html
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** Active Damping and Sensors to be included
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Ways to damp:
 | 
			
		||||
- Force Sensor
 | 
			
		||||
- Relative Velocity Sensors
 | 
			
		||||
- Inertial Sensor
 | 
			
		||||
 | 
			
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https://tdehaeze.github.io/rotating-frame/index.html
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 | 
			
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Sensors to be included:
 | 
			
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 | 
			
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** Motion Control
 | 
			
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 | 
			
		||||
** Simulation of Tomography Experiments
 | 
			
		||||
<<sec:tomography_experiment>>
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 | 
			
		||||
#+name: fig:opt_stiff_hac_dvf_L_psd_disp_error
 | 
			
		||||
#+caption: Amplitude Spectral Density of the position error in Open Loop and with the HAC-LAC controller
 | 
			
		||||
[[file:figs/opt_stiff_hac_dvf_L_psd_disp_error.png]]
 | 
			
		||||
 | 
			
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#+name: fig:opt_stiff_hac_dvf_L_cas_disp_error
 | 
			
		||||
#+caption: Cumulative Amplitude Spectrum of the position error in Open Loop and with the HAC-LAC controller
 | 
			
		||||
[[file:figs/opt_stiff_hac_dvf_L_cas_disp_error.png]]
 | 
			
		||||
 | 
			
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#+name: fig:opt_stiff_hac_dvf_L_pos_error
 | 
			
		||||
#+caption: Position Error of the sample during a tomography experiment when no control is applied and with the HAC-DVF control architecture
 | 
			
		||||
[[file:figs/opt_stiff_hac_dvf_L_pos_error.png]]
 | 
			
		||||
 | 
			
		||||
#+name: fig:closed_loop_sim_zoom
 | 
			
		||||
#+caption: Figure caption
 | 
			
		||||
#+caption: Tomography Experiment using the Simscape Model in Closed Loop with the HAC-LAC Control - Zoom on the sample's position (the full vertical scale is $\approx 10 \mu m$)
 | 
			
		||||
[[file:figs/closed_loop_sim_zoom.gif]]
 | 
			
		||||
 | 
			
		||||
 | 
			
		||||
 | 
			
		||||
** Conclusion
 | 
			
		||||
* Further notes
 | 
			
		||||
Soft granite
 | 
			
		||||
@@ -849,3 +963,6 @@ Common metrology frame for the nano-focusing optics and the measurement of the s
 | 
			
		||||
Cable forces?
 | 
			
		||||
 | 
			
		||||
Slip-Ring noise?
 | 
			
		||||
* Bibliography                                                        :ignore:
 | 
			
		||||
bibliographystyle:unsrt
 | 
			
		||||
bibliography:ref.bib
 | 
			
		||||
 
 | 
			
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										20
									
								
								ref.bib
									
									
									
									
									
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						@@ -0,0 +1,20 @@
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		||||
@book{schmidt14_desig_high_perfor_mechat_revis_edition,
 | 
			
		||||
  author = {Schmidt, R Munnig and Schitter, Georg and Rankers, Adrian},
 | 
			
		||||
  title = {The Design of High Performance Mechatronics - 2nd Revised Edition},
 | 
			
		||||
  year = {2014},
 | 
			
		||||
  publisher = {Ios Press},
 | 
			
		||||
  tags = {favorite},
 | 
			
		||||
}
 | 
			
		||||
 | 
			
		||||
@article{oomen18_advan_motion_contr_precis_mechat,
 | 
			
		||||
  author = {Tom Oomen},
 | 
			
		||||
  title = {Advanced Motion Control for Precision Mechatronics: Control, Identification, and Learning of Complex Systems},
 | 
			
		||||
  journal = {IEEJ Journal of Industry Applications},
 | 
			
		||||
  volume = {7},
 | 
			
		||||
  number = {2},
 | 
			
		||||
  pages = {127-140},
 | 
			
		||||
  year = {2018},
 | 
			
		||||
  doi = {10.1541/ieejjia.7.127},
 | 
			
		||||
  url = {https://doi.org/10.1541/ieejjia.7.127},
 | 
			
		||||
  tags = {favorite},
 | 
			
		||||
}
 | 
			
		||||