Add text about optimal stiff w.r.t. uncertainty
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							| @@ -11,7 +11,7 @@ | |||||||
| #+HTML_HEAD: <script src="./js/readtheorg.js"></script> | #+HTML_HEAD: <script src="./js/readtheorg.js"></script> | ||||||
|  |  | ||||||
| #+STARTUP: overview | #+STARTUP: overview | ||||||
| #+DATE: 04-2020 | #+DATE: 05-2020 | ||||||
|  |  | ||||||
| #+LATEX_CLASS: cleanreport | #+LATEX_CLASS: cleanreport | ||||||
| #+LATEX_CLASS_OPTIONS: [conf, hangsection, secbreak] | #+LATEX_CLASS_OPTIONS: [conf, hangsection, secbreak] | ||||||
| @@ -764,51 +764,67 @@ As explain before, the nano-hexapod properties (mass, stiffness, architecture, . | |||||||
| - the plant dynamics $G$ (important for the control robustness properties) | - the plant dynamics $G$ (important for the control robustness properties) | ||||||
|  |  | ||||||
| Thus, we here wish to find the optimal nano-hexapod properties such that: | Thus, we here wish to find the optimal nano-hexapod properties such that: | ||||||
| - the effect of disturbances is minimized | - the effect of disturbances is minimized (Section [[sec:optimal_stiff_dist]]) | ||||||
| - the plant uncertainty due to a change of payload mass and experimental conditions is minimized | - the plant uncertainty due to a change of payload mass and experimental conditions is minimized (Section [[sec:optimal_stiff_plant]]) | ||||||
|  |  | ||||||
| The study presented here only consider changes in the nano-hexapod *stiffness*. | The study presented here only consider changes in the nano-hexapod *stiffness* for two reasons: | ||||||
| The nano-hexapod mass cannot be change too much, and will anyway be negligible compare to the metrology reflector and the payload masses. | - the nano-hexapod mass cannot be change too much, and will anyway be negligible compare to the metrology reflector and the payload masses | ||||||
| The choice of the nano-hexapod architecture (e.g. orientations of the actuators and implementation of sensors) will be further studied in accord with the control architecture. | - the choice of the nano-hexapod architecture (e.g. orientations of the actuators and implementation of sensors) will be further studied in accord with the control architecture | ||||||
|  |  | ||||||
| ** Optimal Stiffness to reduce the effect of disturbances | ** Optimal Stiffness to reduce the effect of disturbances | ||||||
| The nano-hexapod stiffness have a large influence on the sensibility to disturbance (the norm of $G_d$). | <<sec:optimal_stiff_dist>> | ||||||
|  |  | ||||||
|  | *** Introduction                                                    :ignore: | ||||||
|  | As will be seen, the nano-hexapod stiffness have a large influence on the sensibility to disturbance (the norm of $G_d$). | ||||||
| For instance, it is quite obvious that a stiff nano-hexapod is better than a soft one when it comes to direct forces applied to the sample such as cable forces. | For instance, it is quite obvious that a stiff nano-hexapod is better than a soft one when it comes to direct forces applied to the sample such as cable forces. | ||||||
|  |  | ||||||
| A complete study of the optimal nano-hexapod stiffness for the minimization of disturbance sensibility [[https://tdehaeze.github.io/nass-simscape/optimal_stiffness_disturbances.html][here]] and summarized below. | A complete study of the optimal nano-hexapod stiffness for the minimization of disturbance sensibility [[https://tdehaeze.github.io/nass-simscape/optimal_stiffness_disturbances.html][here]] and summarized below. | ||||||
|  |  | ||||||
|  | *** Sensibility to stage vibrations | ||||||
|  | :PROPERTIES: | ||||||
|  | :UNNUMBERED: t | ||||||
|  | :END: | ||||||
|  |  | ||||||
|  | The sensibility to the spindle's vibration for all the considered nano-hexapod stiffnesses (from $10^3\,[N/m]$ to $10^9\,[N/m]$) is shown in Figure [[fig:opt_stiff_sensitivity_Frz]]. | ||||||
| The sensibility to the spindle vibration as a function of the nano-hexapod stiffness is shown in Figure [[fig:opt_stiff_sensitivity_Frz]] (similar curves are obtained for translation stage vibrations). | It is shown that a softer nano-hexapod it better to filter out vertical vibrations of the spindle. | ||||||
| It is shown that a softer nano-hexapod it better to filter out stage vibrations. |  | ||||||
| More precisely, is start to filters the vibration at the first suspension mode of the payload on top of the nano-hexapod. | More precisely, is start to filters the vibration at the first suspension mode of the payload on top of the nano-hexapod. | ||||||
|  |  | ||||||
|  | The same conclusion is made for vibrations of the translation stage. | ||||||
|  |  | ||||||
| #+name: fig:opt_stiff_sensitivity_Frz | #+name: fig:opt_stiff_sensitivity_Frz | ||||||
| #+caption: Sensitivity to Spindle vertical motion error to the vertical error position of the sample | #+caption: Sensitivity to Spindle vertical motion error to the vertical error position of the sample | ||||||
| [[file:figs/opt_stiff_sensitivity_Frz.png]] | [[file:figs/opt_stiff_sensitivity_Frz.png]] | ||||||
|  |  | ||||||
|  | *** Sensibility to ground motion | ||||||
|  | :PROPERTIES: | ||||||
|  | :UNNUMBERED: t | ||||||
|  | :END: | ||||||
|  |  | ||||||
| The sensibilities to ground motion in the Y and Z directions are shown in Figure [[fig:opt_stiff_sensitivity_Dw]]. | The sensibilities to ground motion in the Y and Z directions are shown in Figure [[fig:opt_stiff_sensitivity_Dw]]. | ||||||
| We can see that above the suspension mode of the nano-hexapod, the norm of the transmissibility is close to one until the suspension mode of the granite. | We can see that above the suspension mode of the nano-hexapod, the norm of the transmissibility is close to one until the suspension mode of the granite. | ||||||
|  | Thus, a stiff nano-hexapod is better for reducing the effect of ground motion at low frequency. | ||||||
|  |  | ||||||
| It will be further suggested that using soft mounts for the granite can greatly improve the sensibility to ground motion. | It will be further suggested that using soft mounts for the granite can greatly lower the sensibility to ground motion. | ||||||
|  |  | ||||||
| #+name: fig:opt_stiff_sensitivity_Dw | #+name: fig:opt_stiff_sensitivity_Dw | ||||||
| #+caption: Sensitivity to Ground motion to the position error of the sample | #+caption: Sensitivity to Ground motion to the position error of the sample | ||||||
| [[file:figs/opt_stiff_sensitivity_Dw.png]] | [[file:figs/opt_stiff_sensitivity_Dw.png]] | ||||||
|  |  | ||||||
|  | *** Dynamic Noise Budgeting considering all the disturbances | ||||||
|  | :PROPERTIES: | ||||||
|  | :UNNUMBERED: t | ||||||
|  | :END: | ||||||
|  |  | ||||||
|  | However, lowering the sensibility to some disturbance at a frequency where its effect is already small compare to the other disturbances sources is not really interesting. | ||||||
|  | What is more important than comparing the sensitivity to disturbances, is thus to compare the obtain power spectral density of the sample's position error. | ||||||
|  | From the Power Spectral Density of all the sources of disturbances identified in Section [[sec:identification_disturbances]], we compute what would be the Power Spectral Density of the vertical motion error for all the considered nano-hexapod stiffnesses (Figure [[fig:opt_stiff_psd_dz_tot]]). | ||||||
|  |  | ||||||
| Then, we take the Power Spectral Density of all the sources of disturbances as identified in Section [[sec:identification_disturbances]], and we compute what would be the Power Spectral Density of the vertical motion error for all the considered nano-hexapod stiffnesses (Figure [[fig:opt_stiff_psd_dz_tot]]). | We can see that the most important change is in the frequency range 30Hz to 300Hz where a stiffness smaller than $10^5\,[N/m]$ greatly reduces the sample's vibrations. | ||||||
|  |  | ||||||
| We can see that the most important change is in the frequency range 30Hz to 300Hz where a stiffness smaller than $10^5\,[N/m]$ greatly reduces the sensibility to disturbances. |  | ||||||
|  |  | ||||||
| #+name: fig:opt_stiff_psd_dz_tot | #+name: fig:opt_stiff_psd_dz_tot | ||||||
| #+caption: Amplitude Spectral Density of the Sample vertical position error due to Vertical vibration of the Spindle for multiple nano-hexapod stiffnesses | #+caption: Amplitude Spectral Density of the Sample vertical position error due to Vertical vibration of the Spindle for multiple nano-hexapod stiffnesses | ||||||
| [[file:figs/opt_stiff_psd_dz_tot.png]] | [[file:figs/opt_stiff_psd_dz_tot.png]] | ||||||
|  |  | ||||||
|  |  | ||||||
| If we look at the Cumulative amplitude spectrum of the vertical error motion in Figure [[fig:opt_stiff_cas_dz_tot]], we can observe that a soft hexapod ($k < 10^5 - 10^6\,[N/m]$) helps reducing the high frequency disturbances, and thus a smaller control bandwidth will suffice to obtain the wanted performance. | If we look at the Cumulative amplitude spectrum of the vertical error motion in Figure [[fig:opt_stiff_cas_dz_tot]], we can observe that a soft hexapod ($k < 10^5 - 10^6\,[N/m]$) helps reducing the high frequency disturbances, and thus a smaller control bandwidth will suffice to obtain the wanted performance. | ||||||
|  |  | ||||||
| #+name: fig:opt_stiff_cas_dz_tot | #+name: fig:opt_stiff_cas_dz_tot | ||||||
| @@ -816,102 +832,185 @@ If we look at the Cumulative amplitude spectrum of the vertical error motion in | |||||||
| [[file:figs/opt_stiff_cas_dz_tot.png]] | [[file:figs/opt_stiff_cas_dz_tot.png]] | ||||||
|  |  | ||||||
| ** Optimal Stiffness to reduce the plant uncertainty | ** Optimal Stiffness to reduce the plant uncertainty | ||||||
|  | <<sec:optimal_stiff_plant>> | ||||||
|  |  | ||||||
| *** Introduction                                                    :ignore: | *** Introduction                                                    :ignore: | ||||||
| One of the primary design goal is to obtain a system that is *robust* to all changes in the system. | One of the most important design goal is to obtain a system that is *robust* to all changes in the system. | ||||||
| To design a robust system, we have to identify the sources of uncertainty and try to minimize them. | Therefore, we have to identify all changes that might occurs in the system and choose the nano-hexapod stiffness such that the uncertainty to these changes is minimized. | ||||||
|  |  | ||||||
| The uncertainty in the system can be caused by: | The uncertainty in the system can be caused by: | ||||||
| - A change in the *Support's compliance* (complete analysis [[https://tdehaeze.github.io/nass-simscape/uncertainty_support.html][here]]): if the micro-station dynamics is changing due to the change of parts or just because of aging effects, the feedback system should remains stable and the obtained performance should not change. | - A change in the *Support's compliance* (complete analysis [[https://tdehaeze.github.io/nass-simscape/uncertainty_support.html][here]]): if the micro-station dynamics is changing due to the change of parts or just because of aging effects, the feedback system should remains stable and the obtained performance should not change | ||||||
| - A change in the *Payload mass/dynamics* (complete analysis [[https://tdehaeze.github.io/nass-simscape/uncertainty_payload.html][here]]). | - A change in the *Payload mass/dynamics* (complete analysis [[https://tdehaeze.github.io/nass-simscape/uncertainty_payload.html][here]]): the sample's mass is ranging from $1\,kg$ to $50\,kg$ | ||||||
| - A change of *experimental condition* such as the micro-station's pose or the spindle rotation (complete analysis [[https://tdehaeze.github.io/nass-simscape/uncertainty_experiment.html][here]]) | - A change of *experimental condition* such as the micro-station's pose or the spindle rotation (complete analysis [[https://tdehaeze.github.io/nass-simscape/uncertainty_experiment.html][here]]) | ||||||
|  |  | ||||||
|  | All these uncertainties will limit the attainable bandwidth and hence the obtained performance. | ||||||
|  |  | ||||||
| All these uncertainties will limit the attainable bandwidth and hence the performances. | In the next sections, the effect the considered changes on the *plant dynamics* is quantified and conclusions are made on the optimal stiffness for robustness properties. | ||||||
|  |  | ||||||
|  | In the following study, when we refer to plant dynamics, this means the dynamics from forces applied by the nano-hexapod to the measured sample's position by the metrology. | ||||||
| Fortunately, the nano-hexapod stiffness have an influence on the dynamical uncertainty induced by the above effects and we wish here to determine the optimal nano-hexapod stiffness. | We will only compare the plant dynamics as it is the most important dynamics for robustness and performance properties. | ||||||
|  | However, the dynamics from forces to sensors located in the nano-hexapod legs, such as force and relative motion sensors, have also been considered in a separate study. | ||||||
| Separate studies has been conducted to see how the support's compliance appears in |  | ||||||
|  |  | ||||||
| *** Effect of Payload | *** Effect of Payload | ||||||
| :PROPERTIES: | :PROPERTIES: | ||||||
| :UNNUMBERED: t | :UNNUMBERED: t | ||||||
| :END: | :END: | ||||||
|  |  | ||||||
|  | The most obvious change in the system is the change of payload. | ||||||
|  |  | ||||||
|  | In Figure [[fig:opt_stiffness_payload_mass_fz_dz]] the dynamics is shown for payloads having a first resonance mode at 100Hz and a mass equal to 1kg, 20kg and 50kg. | ||||||
|  | On the left side, the change of dynamics is computed for a very soft nano-hexapod, while on the right side, it is computed for a very stiff nano-hexapod. | ||||||
|  |  | ||||||
|  | One can see that for the soft nano-hexapod: | ||||||
|  | - the first resonance (suspension mode of the nano-hexapod) is lowered with an increase of the sample's mass. | ||||||
|  |   This first resonance corresponds to $\omega = \sqrt{\frac{k_n}{m_n + m_s}}$ where $k_n$ is the vertical nano-hexapod stiffness, $m_n$ the mass of the nano-hexapod's top platform, and $m_s$ the sample's mass | ||||||
|  | - the gain after the first resonance and up until the anti-resonance at 100Hz is changing with the sample's mass | ||||||
|  |  | ||||||
|  | For the stiff-nano-hexapod, the change of payload mass has very little effect (the vertical scale for the amplitude is quite small). | ||||||
|  |  | ||||||
| #+name: fig:opt_stiffness_payload_mass_fz_dz | #+name: fig:opt_stiffness_payload_mass_fz_dz | ||||||
| #+caption: Dynamics from $\mathcal{F}_z$ to $\mathcal{X}_z$ for varying payload mass, both for a soft nano-hexapod and a stiff nano-hexapod | #+caption: Dynamics from $\mathcal{F}_z$ to $\mathcal{X}_z$ for varying payload mass, both for a soft nano-hexapod (left) and a stiff nano-hexapod (right) | ||||||
| [[file:figs/opt_stiffness_payload_mass_fz_dz.png]] | [[file:figs/opt_stiffness_payload_mass_fz_dz.png]] | ||||||
|  |  | ||||||
|  | In Figure [[fig:opt_stiffness_payload_freq_fz_dz]] is shown the effect of a change of payload dynamics. | ||||||
|  | The mass of the payload is fixed and its resonance frequency is changing from 50Hz to 500Hz. | ||||||
|  |  | ||||||
|  | We can see (more easily for the soft nano-hexapod), that resonance of the payload produces an anti-resonance for the considered dynamics. | ||||||
|  |  | ||||||
| #+name: fig:opt_stiffness_payload_freq_fz_dz | #+name: fig:opt_stiffness_payload_freq_fz_dz | ||||||
| #+caption: Dynamics from $\mathcal{F}_z$ to $\mathcal{X}_z$ for varying payload resonance frequency, both for a soft nano-hexapod and a stiff nano-hexapod | #+caption: Dynamics from $\mathcal{F}_z$ to $\mathcal{X}_z$ for varying payload resonance frequency, both for a soft nano-hexapod and a stiff nano-hexapod | ||||||
| [[file:figs/opt_stiffness_payload_freq_fz_dz.png]] | [[file:figs/opt_stiffness_payload_freq_fz_dz.png]] | ||||||
|  |  | ||||||
|  |  | ||||||
|  | The dynamics for all the payloads (mass from 1kg to 50kg and first resonance from 50Hz to 500Hz) and all the considered nano-hexapod stiffnesses are display in Figure [[fig:opt_stiffness_payload_impedance_all_fz_dz]]. | ||||||
|  |  | ||||||
|  | For nano-hexapod stiffnesses below $10^6\,[N/m]$: | ||||||
|  | - the phase stays between 0 and -180deg which is a very nice property for control | ||||||
|  | - the dynamical change up until the resonance of the payload is mostly a change of gain | ||||||
|  |  | ||||||
|  |  | ||||||
|  | For nano-hexapod stiffnesses above $10^7\,[N/m]$: | ||||||
|  | - the dynamics is unchanged until the first resonance which is around 25Hz-35Hz | ||||||
|  | - above that frequency, the change of dynamics is quite chaotic (we will see in the next section that this is due to the micro-station dynamics) | ||||||
|  |  | ||||||
|  | #+name: fig:opt_stiffness_payload_impedance_all_fz_dz | ||||||
|  | #+caption: Dynamics from $\mathcal{F}_z$ to $\mathcal{X}_z$ for varying payload dynamics, both for a soft nano-hexapod and a stiff nano-hexapod | ||||||
|  | [[file:figs/opt_stiffness_payload_impedance_all_fz_dz.png]] | ||||||
|  |  | ||||||
|  |  | ||||||
|  | #+begin_important | ||||||
|  | For soft nano-hexapods, the payload has an important impact on the dynamics. | ||||||
|  | This will have to be carefully taken into account for the controller design. | ||||||
|  |  | ||||||
|  | For stiff nano-hexapod, the dynamics doe not change with the payload until the first resonance frequency of the nano-hexapod or of the payload. | ||||||
|  |  | ||||||
|  | If possible, the first resonance frequency of the payload should be maximized (stiff fixation). | ||||||
|  |  | ||||||
|  | Heavy samples with low first resonance mode will be very problematic. | ||||||
|  | #+end_important | ||||||
|  |  | ||||||
| *** Effect of Micro-Station Compliance | *** Effect of Micro-Station Compliance | ||||||
| :PROPERTIES: | :PROPERTIES: | ||||||
| :UNNUMBERED: t | :UNNUMBERED: t | ||||||
| :END: | :END: | ||||||
|  |  | ||||||
|  | The micro-station dynamics is quite complex as was shown in Section [[sec:micro_station_dynamics]], moreover, its dynamics can change due to: | ||||||
|  | - a change in some mechanical elements | ||||||
|  | - a change in the position of one stage. | ||||||
|  |   For instance, a large displacement of the micro-hexapod can change the micro-station compliance | ||||||
|  | - a change in a control loop | ||||||
|  |  | ||||||
|  |   | ||||||
|  | Thus, it would be much more robust if the plant dynamics were not depending on the micro-station dynamics. | ||||||
|  | This as several other advantages: | ||||||
|  | - the control could be develop on top on another support and then added to the micro-station without changing the controller | ||||||
|  | - the nano-hexapod could be use on top of any other station much more easily | ||||||
|  |  | ||||||
|  |  | ||||||
|  | To identify the effect of the micro-station compliance on the system dynamics, for each nano-hexapod stiffness, we identify the plant dynamics in two different case (Figure [[fig:opt_stiffness_micro_station_fx_dx]]): | ||||||
|  | - without the micro-station (solid curves) | ||||||
|  | - with the micro-station dynamics (dashed curves) | ||||||
|  |  | ||||||
|  | One can see that for nano-hexapod stiffnesses below $10^6\,[N/m]$, the plant dynamics does not significantly changed due to the micro station dynamics (the solid and dashed curves are superimposed). | ||||||
|  |  | ||||||
|  | For nano-hexapod stiffnesses above $10^7\,[N/m]$, the micro-station compliance appears in the plant dynamics starting at about 45Hz. | ||||||
|  |  | ||||||
| #+name: fig:opt_stiffness_micro_station_fx_dx | #+name: fig:opt_stiffness_micro_station_fx_dx | ||||||
| #+caption: Change of dynamics from force $\mathcal{F}_x$ to displacement $\mathcal{X}_x$ due to the micro-station compliance | #+caption: Change of dynamics from force $\mathcal{F}_x$ to displacement $\mathcal{X}_x$ due to the micro-station compliance | ||||||
| [[file:figs/opt_stiffness_micro_station_fx_dx.png]] | [[file:figs/opt_stiffness_micro_station_fx_dx.png]] | ||||||
|  |  | ||||||
|  | #+begin_important | ||||||
|  | If the resonance of the nano-hexapod is below the first resonance of the micro-station, then the micro-station dynamics if "filtered out" and does not appears in the dynamics to be controlled. | ||||||
|  | This renders the system robust to any possible change of the micro-station dynamics. | ||||||
|  |  | ||||||
|  | If a stiff nano-hexapod is used, the control bandwidth should probably be limited to around the first micro-station's mode ($\approx 45\,[Hz]$) which will likely no give acceptable performance. | ||||||
|  | #+end_important | ||||||
|  |  | ||||||
| *** Effect of Spindle Rotating Speed | *** Effect of Spindle Rotating Speed | ||||||
| :PROPERTIES: | :PROPERTIES: | ||||||
| :UNNUMBERED: t | :UNNUMBERED: t | ||||||
| :END: | :END: | ||||||
|  |  | ||||||
|  | Let's now consider the rotation of the Spindle. | ||||||
|  |  | ||||||
|  | The plant dynamics for spindle rotation speed from 0rpm up to 60rpm are shown in Figure [[fig:opt_stiffness_wz_fx_dx]]. | ||||||
|  |  | ||||||
|  | One can see that for nano-hexapods with a stiffness above $10^5\,[N/m]$, the dynamics is mostly not changing with the spindle's rotating speed. | ||||||
|  |  | ||||||
|  | For very soft nano-hexapods, the main resonance is split into two resonances and one anti-resonance that are all moving at a function of the rotating speed. | ||||||
|  |  | ||||||
| #+name: fig:opt_stiffness_wz_fx_dx | #+name: fig:opt_stiffness_wz_fx_dx | ||||||
| #+caption: Change of dynamics from force $\mathcal{F}_x$ to displacement $\mathcal{X}_x$ for a spindle rotation speed from 0rpm to 60rpm | #+caption: Change of dynamics from force $\mathcal{F}_x$ to displacement $\mathcal{X}_x$ for a spindle rotation speed from 0rpm to 60rpm | ||||||
| [[file:figs/opt_stiffness_wz_fx_dx.png]] | [[file:figs/opt_stiffness_wz_fx_dx.png]] | ||||||
|  |  | ||||||
|  | #+begin_important | ||||||
|  | If the resonance of the nano-hexapod is (say a factor 5) above the maximum rotation speed, then the plant dynamics will be mostly not impacted by the rotation. | ||||||
|  |  | ||||||
| *** Total Uncertainty | A very soft ($k < 10^4\,[N/m]$) nano-hexapod should not be used due to the effect of the spindle's rotation. | ||||||
|  | #+end_important | ||||||
|  |  | ||||||
|  | *** Total Plant Uncertainty | ||||||
| :PROPERTIES: | :PROPERTIES: | ||||||
| :UNNUMBERED: t | :UNNUMBERED: t | ||||||
| :END: | :END: | ||||||
|  |  | ||||||
|  | Finally, let's combined all the uncertainties and display the plant dynamics "spread" for all the nano-hexapod stiffnesses (Figure [[fig:opt_stiffness_plant_dynamics_task_space]]). | ||||||
|  | This show how the dynamics evolves with the stiffness and how different effects enters the plant dynamics. | ||||||
|  |  | ||||||
| #+name: fig:opt_stiffness_plant_dynamics_task_space | #+name: fig:opt_stiffness_plant_dynamics_task_space | ||||||
| #+caption: Variability of the dynamics from $\bm{\mathcal{F}}_x$ to $\bm{\mathcal{X}}_x$ with varying nano-hexapod stiffness | #+caption: Variability of the dynamics from $\bm{\mathcal{F}}_x$ to $\bm{\mathcal{X}}_x$ with varying nano-hexapod stiffness | ||||||
| [[file:figs/opt_stiffness_plant_dynamics_task_space.gif]] | [[file:figs/opt_stiffness_plant_dynamics_task_space.gif]] | ||||||
|  |  | ||||||
|  |  | ||||||
| #+begin_important | #+begin_important | ||||||
| The leg stiffness should be at higher than $k = 10^4\,[N/m]$ such that the main resonance frequency does not shift too much when rotating. |   Let's summarize the findings: | ||||||
|  |   - the payload's mass influence the plant dynamics above the first resonance of the nano-hexapod. | ||||||
|  |     Thus a high nano-hexapod stiffness helps reducing the effect of a change of the payload's mass | ||||||
|  |   - the payload's first resonance is seen as an anti-resonance in the plant dynamics. | ||||||
|  |     As this effect will largely be variable from one payload to the other, *the payload's first resonance should be maximized* (above 300Hz if possible) for all used payloads | ||||||
|  |   - the dynamics of the nano-hexapod is not affected by the micro-station dynamics (compliance) when $k < 10^6\,[N/m]$ | ||||||
|  |   - the spindle's rotating speed has no significant influence on the plant dynamics for nano-hexapods with a stiffness $k > 10^5\,[N/m]$ | ||||||
|  |  | ||||||
|  |   Concerning the plant dynamic uncertainty, the resonance frequency of the nano-hexapod should be between 5Hz (way above the maximum rotating speed) and 50Hz (before the first micro-station resonance) for all the considered payloads. | ||||||
|  |   This corresponds to an optimal nano-hexapod leg stiffness in the range $10^5 - 10^6\,[N/m]$. | ||||||
|  |  | ||||||
|  |   In such case, the main limitation will be heavy samples with small stiffnesses. | ||||||
| #+end_important | #+end_important | ||||||
|  |  | ||||||
|  |  | ||||||
| #+begin_important |  | ||||||
| It is usually a good idea to maximize the mass, damping and stiffness of the isolation platform in order to be less sensible to the payload dynamics. |  | ||||||
| The best thing to do is to have a stiff isolation platform. |  | ||||||
|  |  | ||||||
|  |  | ||||||
| The dynamics of the nano-hexapod is not affected by the micro-station dynamics (compliance) when the stiffness of the legs is less than $10^6\,[N/m]$. When the nano-hexapod is stiff ($k > 10^7\,[N/m]$), the compliance of the micro-station appears in the primary plant. |  | ||||||
| #+end_important |  | ||||||
|  |  | ||||||
|  |  | ||||||
|  |  | ||||||
|  |  | ||||||
| Determination of the optimal stiffness based on all the effects: |  | ||||||
| - https://tdehaeze.github.io/nass-simscape/uncertainty_optimal_stiffness.html |  | ||||||
|  |  | ||||||
|  |  | ||||||
| The main performance limitation are payload variability |  | ||||||
| #+begin_question |  | ||||||
|   Main problem: heavy samples with small stiffness. |  | ||||||
|   The first resonance frequency of the sample will limit the performance. |  | ||||||
| #+end_question |  | ||||||
|  |  | ||||||
| #+begin_conclusion |  | ||||||
|  |  | ||||||
| #+end_conclusion |  | ||||||
|  |  | ||||||
| It is preferred that *one* controller is working for all the payloads. |  | ||||||
| If not possible, the alternative would be to develop an adaptive controller that depends on the payload mass/inertia. |  | ||||||
|  |  | ||||||
| ** Conclusion | ** Conclusion | ||||||
|  | #+begin_important | ||||||
|  |   In Section [[sec:optimal_stiff_dist]], it has been concluded that a nano-hexapod stiffness | ||||||
|  |   Section [[sec:optimal_stiff_plant]] | ||||||
|  |  | ||||||
|  |   A stiffness of $10^5\,[N/m]$ will be used. | ||||||
|  | #+end_important | ||||||
|  |  | ||||||
|  |  | ||||||
|  | #+begin_important | ||||||
|  | It is preferred that *one* controller is working for all the payloads. | ||||||
|  | If not possible, the alternative would be to develop an adaptive controller that depends on the payload mass/inertia. | ||||||
|  | #+end_important | ||||||
|  |  | ||||||
|  | A more detailed study of the determination of the optimal stiffness based on all the effects is available [[https://tdehaeze.github.io/nass-simscape/uncertainty_optimal_stiffness.html][here]]. | ||||||
|  |  | ||||||
| * Robust Control Architecture | * Robust Control Architecture | ||||||
| <<sec:robust_control_architecture>> | <<sec:robust_control_architecture>> | ||||||
| @@ -919,6 +1018,7 @@ If not possible, the alternative would be to develop an adaptive controller that | |||||||
| ** Introduction                                                      :ignore: | ** Introduction                                                      :ignore: | ||||||
| https://tdehaeze.github.io/nass-simscape/optimal_stiffness_control.html | https://tdehaeze.github.io/nass-simscape/optimal_stiffness_control.html | ||||||
|  |  | ||||||
|  | stiffness 10^5 | ||||||
|  |  | ||||||
| ** Active Damping and Sensors to be included | ** Active Damping and Sensors to be included | ||||||
| Ways to damp: | Ways to damp: | ||||||
| @@ -963,6 +1063,7 @@ Common metrology frame for the nano-focusing optics and the measurement of the s | |||||||
| Cable forces? | Cable forces? | ||||||
|  |  | ||||||
| Slip-Ring noise? | Slip-Ring noise? | ||||||
|  |  | ||||||
| * Bibliography                                                        :ignore: | * Bibliography                                                        :ignore: | ||||||
| bibliographystyle:unsrt | bibliographystyle:unsrt | ||||||
| bibliography:ref.bib | bibliography:ref.bib | ||||||
|   | |||||||
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