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Equipment

Sensors

Inertial Sensor

Accelerometers

Micromega Dynamics link
MMF link
PCB link

Wireless Accelerometers

/tdehaeze/nass-micro-station-measurements/media/commit/1ece6fbc70e43fde63c2fcfe0652f074c5acdf65/actuators-sensors/figs/characteristics_accelerometers.png
Characteristics of commercially available accelerometers cite:collette11_review

Geophones

Sercel link
Wilcoxon link
/tdehaeze/nass-micro-station-measurements/media/commit/1ece6fbc70e43fde63c2fcfe0652f074c5acdf65/actuators-sensors/figs/characteristics_geophone.png
Characteristics of commercially available geophones cite:collette11_review

Force Sensors

PCB link

Position Sensor

/tdehaeze/nass-micro-station-measurements/media/commit/1ece6fbc70e43fde63c2fcfe0652f074c5acdf65/actuators-sensors/figs/characteristics_relative_sensor.png
Characteristics of relative measurement sensors cite:collette11_review
/tdehaeze/nass-micro-station-measurements/media/commit/1ece6fbc70e43fde63c2fcfe0652f074c5acdf65/actuators-sensors/figs/position_sensor_characteristics.png
Position sensor characteristics cite:fleming13_review_nanom_resol_posit_sensor

Strain Gauge

Capacitive Sensor

Description:

Micro Sense link
Micro-Epsilon link
PI link
Unipulse link
Lion-Precision link

Inductive Sensor (Eddy Current)

Micro-Epsilon link
Lion Precision link

Inductive Sensor (LVDT)

Micro-Epsilon link
Keyence link

Interferometers

Attocube link
Zygo link
Smaract link
Qutools link
Renishaw link
Sios link
Keysight link
Temperature ($\pm\ ^oC$) Pressure ($\pm\ hPa$) Humidity $\pm\ \% RH$ Wavelength Accuracy ($\pm\ \text{ppm}$)
Attocube 0.1 1 2 0.5
Renishaw 0.2 1 6 1
Picoscale 0.2 2 2 1
Characteristics of Environmental Units
/tdehaeze/nass-micro-station-measurements/media/commit/1ece6fbc70e43fde63c2fcfe0652f074c5acdf65/actuators-sensors/figs/interferometer_precision.png
Expected precision of interferometer as a function of measured distance. Taken from cite:jang17_compen_refrac_index_air_laser

Fiber Optic Displacement Sensor

Unipulse link

Bibliography

cite:collette12_compar cite:collette12_review cite:fleming13_review_nanom_resol_posit_sensor

Actuators

Piezoelectric

Cedrat link
PI link
Piezo System link
Noliac link

Voice Coil

Geeplus link
Maccon link
TDS PP link
H2tech link
PBA Systems link
Celera Motion link
Beikimco link
Electromate link
Magnetic Innovations link

Shaker

BKSV link
Vibration Research link
Sentek Dynamics link

https://www.bksv.com/en/products/shakers-and-exciters/LDS-shaker-systems/permanent-magnet-shakers/V201

Brushless DC Motor

cite:yedamale03_brush_dc_bldc_motor_fundam

https://www.electricaltechnology.org/2016/05/bldc-brushless-dc-motor-construction-working-principle.html

Measurement System / Acquisition System

Modal Analysis

https://dewesoft.com/applications/structural-dynamics/modal-analysis Polytec 3D Scanning Laser Vibrometer https://www.polytec.com/us/vibrometry/products/full-field-vibrometers/psv-500-scanning-vibrometer/

Control System

Dspace, Speedgoat

Positioning Stages

Hexapods

Translation/Rotation Stage

Amplifiers

Current Amplifiers

Voltage Amplifiers

ESRF Equipment

Geophones

L-28LB

/tdehaeze/nass-micro-station-measurements/media/commit/1ece6fbc70e43fde63c2fcfe0652f074c5acdf65/actuators-sensors/figs/L28LB.png
Picture of the L-28LB Geophone
Natural Frequency [Hz] 4.5
Weight [g] 140
Sensitivity [V/(m/s)] 31.3
L-28LB Parameters

We define the parameters of the geophone and we plot its bode plot (figure fig:L28LB_bode_plot).

  w0 = 4.5*2*pi; % [rad/s]
  ksi = 0.38;
  G0 = 31.3; % [V/(m/s)]
  G = G0*(s/w0)^2/((s/w0)^2 + 2*ksi*(s/w0) + 1);
  <<plt-matlab>>

/tdehaeze/nass-micro-station-measurements/media/commit/1ece6fbc70e43fde63c2fcfe0652f074c5acdf65/actuators-sensors/figs/L28LB_bode_plot.png

Bode plot of the L-28LB Geophone

L-4C

/tdehaeze/nass-micro-station-measurements/media/commit/1ece6fbc70e43fde63c2fcfe0652f074c5acdf65/actuators-sensors/figs/L4C.png
Picture of the L-4C Geophone
Natural Frequency [Hz] 1
Weight [g] 2150
Sensitivity [V/(m/s)] 276.8
L4C Parameters

The transfer function from the velocity and the measured voltage is defined below.

Its bode plot is shown on figure fig:L4C_bode_plot.

  w0 = 2*pi; % [rad/s]
  ksi = 0.28;
  G0 = 276.8; % [V/(m/s)]
  G = G0*(s/w0)^2/((s/w0)^2 + 2*ksi*(s/w0) + 1);
  <<plt-matlab>>

/tdehaeze/nass-micro-station-measurements/media/commit/1ece6fbc70e43fde63c2fcfe0652f074c5acdf65/actuators-sensors/figs/L4C_bode_plot.png

Bode plot of the L4C Geophone

L-22

Accelerometers

Pieozoelectric acc. 356b18 - 3 axis

/tdehaeze/nass-micro-station-measurements/media/commit/1ece6fbc70e43fde63c2fcfe0652f074c5acdf65/actuators-sensors/figs/356b18.jpg
Pieozoelectric acc. 356b18 - 3 axis
Sensitivity 0.102 $V/(m/s^2)$
Measurement Range 4.9 $m/s^2$ pk
Frequency Range 0.5 to 3000 Hz
resonant frequency > 20000 hz
broadband resolution 0.0005 $m/s^2$ rms
356b18 Parameters

Ceramic acc. 393B05 - 1 axis

/tdehaeze/nass-micro-station-measurements/media/commit/1ece6fbc70e43fde63c2fcfe0652f074c5acdf65/actuators-sensors/figs/393b05.jpg
Ceramic acc. 393B05 - 1 axis
Sensitivity (±10 %) 1.02 $V/(m/s^2)$
Measurement Range 4.9 $m/s^2$ pk
Frequency Range (±5 %) 0.7 to 450 Hz
resonant frequency > 2500 hz
broadband resolution 0.00004 $m/s^2$ rms
393B05 Parameters

Modal analysis

http://www.oros.com/3900-oros-modal-2.htm