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<meta http-equiv="Content-Type" content="text/html;charset=utf-8" />
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<title>Measurement of the ID31 Micro-Station</title>
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<h2>Table of Contents</h2>
<div id="text-table-of-contents">
<ul>
<li><a href="#orgedddafa">1. Measurements of the dynamics of the station</a>
<li><a href="#org3dd37ca">1. Measurements of the dynamics of the station</a>
<ul>
<li><a href="#orga36da1d">1.1. Measurement 1</a>
<li><a href="#orgc6a04a7">1.1. Measurement 1</a>
<ul>
<li><a href="#orge2e9aa5">1.1.1. Notes</a></li>
<li><a href="#orgbf085fe">1.1.2. Goal</a></li>
<li><a href="#orgb55b74a">1.1.3. Results</a></li>
<li><a href="#org3d7d31e">1.1.1. Notes</a></li>
<li><a href="#org6f222a5">1.1.2. Goal</a></li>
<li><a href="#org66caa3c">1.1.3. Results</a></li>
</ul>
</li>
<li><a href="#org4cbbced">1.2. Measurement 2</a>
<li><a href="#orga240707">1.2. Measurement 2</a>
<ul>
<li><a href="#org4f66738">1.2.1. Notes</a></li>
<li><a href="#org35b1dd8">1.2.2. Goal</a></li>
<li><a href="#org056f3eb">1.2.3. Results</a></li>
<li><a href="#org6750c68">1.2.1. Notes</a></li>
<li><a href="#org514680e">1.2.2. Goal</a></li>
<li><a href="#orga1029fa">1.2.3. Results</a></li>
</ul>
</li>
<li><a href="#org331b6c4">1.3. Measurement 3</a>
<li><a href="#org0266a1b">1.3. <span class="todo TODO">TODO</span> Measurement 3</a>
<ul>
<li><a href="#org8fff7d6">1.3.1. Notes</a></li>
<li><a href="#orgd23abf3">1.3.2. Goal</a></li>
<li><a href="#orgf4d1928">1.3.3. Results</a></li>
<li><a href="#org3a059d2">1.3.1. Notes</a></li>
<li><a href="#org8fec9e8">1.3.2. Goal</a></li>
<li><a href="#org638b982">1.3.3. Results</a></li>
</ul>
</li>
</ul>
</li>
<li><a href="#orgde6e409">2. Measurements of perturbations</a>
<ul>
<li><a href="#org126095c">2.1. Noise coming from the control loop of each stage</a>
<ul>
<li><a href="#orgab096ae">2.1.1. Notes</a></li>
<li><a href="#org47c2d2f">2.1.2. Goal</a></li>
<li><a href="#org102801f">2.1.3. Results</a></li>
</ul>
</li>
<li><a href="#org923bfac">2.2. Static guiding error estimation</a>
<ul>
<li><a href="#orga84faec">2.2.1. Notes</a></li>
<li><a href="#orgc8a8da3">2.2.2. Goal</a></li>
<li><a href="#org8326f68">2.2.3. Results</a></li>
</ul>
</li>
<li><a href="#org2a30598">2.3. Ground motion measurements</a>
<ul>
<li><a href="#orgc95c429">2.3.1. Notes</a></li>
<li><a href="#org6c05107">2.3.2. Goal</a></li>
<li><a href="#org66c202c">2.3.3. Results</a></li>
</ul>
</li>
<li><a href="#org87d61e5">2.4. Spindle Measurements</a>
<ul>
<li><a href="#org80d690f">2.4.1. Notes</a></li>
<li><a href="#orgc12a999">2.4.2. Goal</a></li>
<li><a href="#org7394e45">2.4.3. Results</a></li>
</ul>
</li>
</ul>
</li>
<li><a href="#org459eb97">3. Ressources</a></li>
<li><a href="#orge49573f">4. Other measurements</a></li>
<li><a href="#orge16cbdc">2. Measurements of perturbations</a></li>
<li><a href="#org7e1127d">3. Other</a></li>
</ul>
</div>
</div>
<div id="outline-container-orgedddafa" class="outline-2">
<h2 id="orgedddafa"><span class="section-number-2">1</span> Measurements of the dynamics of the station</h2>
<p>
This web-page gathers all the measurements done on the ID31 Micro Station.
</p>
<div id="outline-container-org3dd37ca" class="outline-2">
<h2 id="org3dd37ca"><span class="section-number-2">1</span> Measurements of the dynamics of the station</h2>
<div class="outline-text-2" id="text-1">
<ul class="org-ul">
<li><a href="dynamical-meas-granite/index.html">Dynamics from floor motion to marble motion</a></li>
</ul>
</div>
<div id="outline-container-orga36da1d" class="outline-3">
<h3 id="orga36da1d"><span class="section-number-3">1.1</span> Measurement 1</h3>
<div id="outline-container-orgc6a04a7" class="outline-3">
<h3 id="orgc6a04a7"><span class="section-number-3">1.1</span> Measurement 1</h3>
<div class="outline-text-3" id="text-1-1">
<p>
<a href="2017-11-17 - Marc/index.html">Link to the analysis</a>
</p>
</div>
<div id="outline-container-orge2e9aa5" class="outline-4">
<h4 id="orge2e9aa5"><span class="section-number-4">1.1.1</span> Notes</h4>
<div id="outline-container-org3d7d31e" class="outline-4">
<h4 id="org3d7d31e"><span class="section-number-4">1.1.1</span> Notes</h4>
<div class="outline-text-4" id="text-1-1-1">
<table border="2" cellspacing="0" cellpadding="6" rules="groups" frame="hsides">
@@ -369,8 +345,8 @@ Dynamics of the station is evaluated using instrumented hammer and accelerometer
</div>
</div>
<div id="outline-container-orgbf085fe" class="outline-4">
<h4 id="orgbf085fe"><span class="section-number-4">1.1.2</span> Goal</h4>
<div id="outline-container-org6f222a5" class="outline-4">
<h4 id="org6f222a5"><span class="section-number-4">1.1.2</span> Goal</h4>
<div class="outline-text-4" id="text-1-1-2">
<ul class="org-ul">
<li>Obtain a first estimation of resonance frequencies</li>
@@ -378,28 +354,31 @@ Dynamics of the station is evaluated using instrumented hammer and accelerometer
</div>
</div>
<div id="outline-container-orgb55b74a" class="outline-4">
<h4 id="orgb55b74a"><span class="section-number-4">1.1.3</span> Results</h4>
<div id="outline-container-org66caa3c" class="outline-4">
<h4 id="org66caa3c"><span class="section-number-4">1.1.3</span> Results</h4>
<div class="outline-text-4" id="text-1-1-3">
<p>
Resonances have been identified at 45Hz and 75Hz.
However, the quality of the measurements are bad at low frequency.
New measurements should be done with Geophones.
</p>
<div class="important">
<ul class="org-ul">
<li>Resonances have been identified at 45Hz and 75Hz</li>
<li>However, the quality of the measurements are bad at low frequency</li>
<li>New measurements should be done with Geophones</li>
</ul>
</div>
</div>
</div>
</div>
<div id="outline-container-org4cbbced" class="outline-3">
<h3 id="org4cbbced"><span class="section-number-3">1.2</span> Measurement 2</h3>
<div id="outline-container-orga240707" class="outline-3">
<h3 id="orga240707"><span class="section-number-3">1.2</span> Measurement 2</h3>
<div class="outline-text-3" id="text-1-2">
<p>
<a href="2018-01-12 - Marc/index.html">Link to the analysis</a>
</p>
</div>
<div id="outline-container-org4f66738" class="outline-4">
<h4 id="org4f66738"><span class="section-number-4">1.2.1</span> Notes</h4>
<div id="outline-container-org6750c68" class="outline-4">
<h4 id="org6750c68"><span class="section-number-4">1.2.1</span> Notes</h4>
<div class="outline-text-4" id="text-1-2-1">
<table border="2" cellspacing="0" cellpadding="6" rules="groups" frame="hsides">
@@ -439,8 +418,8 @@ New measurements should be done with Geophones.
</div>
</div>
<div id="outline-container-org35b1dd8" class="outline-4">
<h4 id="org35b1dd8"><span class="section-number-4">1.2.2</span> Goal</h4>
<div id="outline-container-org514680e" class="outline-4">
<h4 id="org514680e"><span class="section-number-4">1.2.2</span> Goal</h4>
<div class="outline-text-4" id="text-1-2-2">
<p>
Obtain better coherence at low frequency.
@@ -448,27 +427,30 @@ Obtain better coherence at low frequency.
</div>
</div>
<div id="outline-container-org056f3eb" class="outline-4">
<h4 id="org056f3eb"><span class="section-number-4">1.2.3</span> Results</h4>
<div id="outline-container-orga1029fa" class="outline-4">
<h4 id="orga1029fa"><span class="section-number-4">1.2.3</span> Results</h4>
<div class="outline-text-4" id="text-1-2-3">
<p>
Resonances at 42Hz, 70Hz and 125Hz have been identified.
The coherence is much better than when using accelerometers.
</p>
<div class="important">
<ul class="org-ul">
<li>Resonances at 42Hz, 70Hz and 125Hz have been identified</li>
<li>The coherence is much better than when using accelerometers</li>
</ul>
</div>
</div>
</div>
</div>
<div id="outline-container-org331b6c4" class="outline-3">
<h3 id="org331b6c4"><span class="section-number-3">1.3</span> Measurement 3</h3>
<div id="outline-container-org0266a1b" class="outline-3">
<h3 id="org0266a1b"><span class="section-number-3">1.3</span> <span class="todo TODO">TODO</span> Measurement 3</h3>
<div class="outline-text-3" id="text-1-3">
<p>
<a href="2018-10-12 - Marc/index.html">Link to the analysis</a>
</p>
</div>
<div id="outline-container-org8fff7d6" class="outline-4">
<h4 id="org8fff7d6"><span class="section-number-4">1.3.1</span> Notes</h4>
<div id="outline-container-org3a059d2" class="outline-4">
<h4 id="org3a059d2"><span class="section-number-4">1.3.1</span> Notes</h4>
<div class="outline-text-4" id="text-1-3-1">
<table border="2" cellspacing="0" cellpadding="6" rules="groups" frame="hsides">
@@ -503,8 +485,8 @@ The coherence is much better than when using accelerometers.
</div>
</div>
<div id="outline-container-orgd23abf3" class="outline-4">
<h4 id="orgd23abf3"><span class="section-number-4">1.3.2</span> Goal</h4>
<div id="outline-container-org8fec9e8" class="outline-4">
<h4 id="org8fec9e8"><span class="section-number-4">1.3.2</span> Goal</h4>
<div class="outline-text-4" id="text-1-3-2">
<p>
The station is now installed on the experimental hutch with a glued granite (final location).
@@ -513,268 +495,56 @@ The station is identified again.
</div>
</div>
<div id="outline-container-orgf4d1928" class="outline-4">
<h4 id="orgf4d1928"><span class="section-number-4">1.3.3</span> Results</h4>
<div id="outline-container-org638b982" class="outline-4">
<h4 id="org638b982"><span class="section-number-4">1.3.3</span> Results</h4>
<div class="outline-text-4" id="text-1-3-3">
<div class="important">
<p>
</p>
</div>
</div>
</div>
</div>
</div>
<div id="outline-container-orgde6e409" class="outline-2">
<h2 id="orgde6e409"><span class="section-number-2">2</span> Measurements of perturbations</h2>
<div id="outline-container-orge16cbdc" class="outline-2">
<h2 id="orge16cbdc"><span class="section-number-2">2</span> Measurements of perturbations</h2>
<div class="outline-text-2" id="text-2">
</div>
<div id="outline-container-org126095c" class="outline-3">
<h3 id="org126095c"><span class="section-number-3">2.1</span> Noise coming from the control loop of each stage</h3>
<div class="outline-text-3" id="text-2-1">
<p>
<a href="2018-10-15 - Marc/index.html">Link to the analysis</a>
</p>
</div>
<div id="outline-container-orgab096ae" class="outline-4">
<h4 id="orgab096ae"><span class="section-number-4">2.1.1</span> Notes</h4>
<div class="outline-text-4" id="text-2-1-1">
<table border="2" cellspacing="0" cellpadding="6" rules="groups" frame="hsides">
<colgroup>
<col class="org-left" />
<col class="org-left" />
</colgroup>
<tbody>
<tr>
<td class="org-left"><b>Date</b></td>
<td class="org-left">2018-10-15</td>
</tr>
<tr>
<td class="org-left"><b>Sensors</b></td>
<td class="org-left">Geophones</td>
</tr>
<tr>
<td class="org-left"><b>Location</b></td>
<td class="org-left">Experimental Hutch</td>
</tr>
</tbody>
</table>
</div>
</div>
<div id="outline-container-org47c2d2f" class="outline-4">
<h4 id="org47c2d2f"><span class="section-number-4">2.1.2</span> Goal</h4>
<div class="outline-text-4" id="text-2-1-2">
<p>
The objective is to estimate how much perturbation is injected in the system by the control systems of each stages of the micro station.
</p>
<p>
Geophones are located on the structure.
Each stage is turned on and off.
The signals of the geophones are then compared when the stage is on and off.
</p>
</div>
</div>
<div id="outline-container-org102801f" class="outline-4">
<h4 id="org102801f"><span class="section-number-4">2.1.3</span> Results</h4>
<div class="outline-text-4" id="text-2-1-3">
<ul class="org-ul">
<li>The translation stage seems to have effect on the tilt stage at 20Hz.</li>
<li>The Tilt stage and the Hexapod control systems have no effect on the motion of the other stages.</li>
<li>The spindle stage control system seems to induce a motion of the Hexapod on the Z direction around 20Hz.</li>
<li><a href="disturbance-sr-rz/index.html">Measurement of the vibrations induced by the rotation of the slip-ring and spindle</a></li>
<li><a href="disturbance-ty-sr/index.html">Measurement of the vibrations induced by the simultaneous rotation of the slip-ring and scan of the translation stage</a></li>
<li><a href="disturbance-measurement/index.html">Disturbance Measurement - Spindle</a> TODO</li>
<li><a href="slip-ring-electrical-noise/index.html">Measurement of the electrical noise induced by the slip-ring</a></li>
<li><a href="ground-motion/index.html">Ground motion measurements</a></li>
<li><a href="static-to-dynamic/index.html">Static guiding errors - Ty</a></li>
<li><a href="static-spindle/index.html">Static guiding errors - Spindle</a></li>
<li><a href="disturbance-control-system/index.html">Disturbance induced by the control system of each stage</a></li>
<li><a href="disturbance-ty/index.html">Vibrations due to Ty scans</a></li>
<li><a href="2018-10-15 - Marc/index.html">Perturbation due to the control loop of each stage</a></li>
</ul>
</div>
</div>
</div>
<div id="outline-container-org923bfac" class="outline-3">
<h3 id="org923bfac"><span class="section-number-3">2.2</span> Static guiding error estimation</h3>
<div class="outline-text-3" id="text-2-2">
<p>
<a href="Static/index.html">Link to the analysis</a>
</p>
</div>
<div id="outline-container-orga84faec" class="outline-4">
<h4 id="orga84faec"><span class="section-number-4">2.2.1</span> Notes</h4>
<div class="outline-text-4" id="text-2-2-1">
<table border="2" cellspacing="0" cellpadding="6" rules="groups" frame="hsides">
<colgroup>
<col class="org-left" />
<col class="org-left" />
</colgroup>
<tbody>
<tr>
<td class="org-left"><b>Date</b></td>
<td class="org-left">2019-01-09</td>
</tr>
<tr>
<td class="org-left"><b>Sensors</b></td>
<td class="org-left">Interferometer</td>
</tr>
<tr>
<td class="org-left"><b>Location</b></td>
<td class="org-left">Experimental Hutch</td>
</tr>
</tbody>
</table>
<p>
Each stage is statically moved of all its stroke on after the other.
A metrology element is located at the sample position and its motion is measured in translations and rotations.
For each small displacement, the stage is stopped and the motion of the sample is recorded and averaged.
</p>
</div>
</div>
<div id="outline-container-orgc8a8da3" class="outline-4">
<h4 id="orgc8a8da3"><span class="section-number-4">2.2.2</span> Goal</h4>
<div class="outline-text-4" id="text-2-2-2">
<p>
The goal is to estimate the guiding errors of each stage.
</p>
</div>
</div>
<div id="outline-container-org8326f68" class="outline-4">
<h4 id="org8326f68"><span class="section-number-4">2.2.3</span> Results</h4>
</div>
</div>
<div id="outline-container-org2a30598" class="outline-3">
<h3 id="org2a30598"><span class="section-number-3">2.3</span> Ground motion measurements</h3>
<div class="outline-text-3" id="text-2-3">
<p>
<a href="Ground Motion/index.html">Link to the analysis</a>
</p>
</div>
<div id="outline-container-orgc95c429" class="outline-4">
<h4 id="orgc95c429"><span class="section-number-4">2.3.1</span> Notes</h4>
<div class="outline-text-4" id="text-2-3-1">
<table border="2" cellspacing="0" cellpadding="6" rules="groups" frame="hsides">
<colgroup>
<col class="org-left" />
<col class="org-left" />
</colgroup>
<tbody>
<tr>
<td class="org-left"><b>Date</b></td>
<td class="org-left">2014-10</td>
</tr>
<tr>
<td class="org-left"><b>Sensors</b></td>
<td class="org-left">Geophone</td>
</tr>
<tr>
<td class="org-left"><b>Location</b></td>
<td class="org-left">ID31 Floor</td>
</tr>
</tbody>
</table>
</div>
</div>
<div id="outline-container-org6c05107" class="outline-4">
<h4 id="org6c05107"><span class="section-number-4">2.3.2</span> Goal</h4>
<div class="outline-text-4" id="text-2-3-2">
<p>
The objective is to obtain the Power Spectral Density of the ground motion at the ID31 floor.
</p>
</div>
</div>
<div id="outline-container-org66c202c" class="outline-4">
<h4 id="org66c202c"><span class="section-number-4">2.3.3</span> Results</h4>
</div>
</div>
<div id="outline-container-org87d61e5" class="outline-3">
<h3 id="org87d61e5"><span class="section-number-3">2.4</span> Spindle Measurements</h3>
<div class="outline-text-3" id="text-2-4">
<p>
<a href="Spindle/index.html">Link to the analysis</a>
</p>
</div>
<div id="outline-container-org80d690f" class="outline-4">
<h4 id="org80d690f"><span class="section-number-4">2.4.1</span> Notes</h4>
<div class="outline-text-4" id="text-2-4-1">
<table border="2" cellspacing="0" cellpadding="6" rules="groups" frame="hsides">
<colgroup>
<col class="org-left" />
<col class="org-right" />
</colgroup>
<tbody>
<tr>
<td class="org-left"><b>Date</b></td>
<td class="org-right">2017-04-25</td>
</tr>
<tr>
<td class="org-left"><b>Location</b></td>
<td class="org-right">PEL Lab</td>
</tr>
</tbody>
</table>
</div>
</div>
<div id="outline-container-orgc12a999" class="outline-4">
<h4 id="orgc12a999"><span class="section-number-4">2.4.2</span> Goal</h4>
<div class="outline-text-4" id="text-2-4-2">
<p>
The goal is to estimate all the error motions induced by the Spindle
</p>
</div>
</div>
<div id="outline-container-org7394e45" class="outline-4">
<h4 id="org7394e45"><span class="section-number-4">2.4.3</span> Results</h4>
</div>
</div>
</div>
<div id="outline-container-org459eb97" class="outline-2">
<h2 id="org459eb97"><span class="section-number-2">3</span> Ressources</h2>
<div id="outline-container-org7e1127d" class="outline-2">
<h2 id="org7e1127d"><span class="section-number-2">3</span> Other</h2>
<div class="outline-text-2" id="text-3">
<p>
<a href="actuators-sensors/index.html">Actuators and Sensors</a>
</p>
</div>
</div>
<div id="outline-container-orge49573f" class="outline-2">
<h2 id="orge49573f"><span class="section-number-2">4</span> Other measurements</h2>
<div class="outline-text-2" id="text-4">
<ul class="org-ul">
<li><a href="huddle-test-geophones/index.html">Huddle Test - Geophones</a></li>
<li><a href="disturbance-measurement/index.html">Disturbance Measurement</a></li>
<li><a href="slip-ring-test/index.html">Slip Ring - Noise measurement</a></li>
<li><a href="instrumentation/index.html">Measurement on the instrumentation</a></li>
<li><a href="slip-ring-electrical-noise/index.html">Slip Ring - Noise measurement</a></li>
<li><a href="static-measurements/index.html">Control System Measurement</a></li>
<li><a href="actuators-sensors/index.html">Actuators and Sensors</a></li>
<li><a href="equipment/equipment.html">Equipment used for the measurements</a></li>
<li><a href="src/index.html">Matlab functions used for the data analysis</a></li>
</ul>
</div>
</div>
</div>
<div id="postamble" class="status">
<p class="author">Author: Thomas Dehaeze</p>
<p class="date">Created: 2019-05-10 ven. 09:12</p>
<p class="date">Created: 2019-05-14 mar. 23:02</p>
<p class="validation"><a href="http://validator.w3.org/check?uri=referer">Validate</a></p>
</div>
</body>