2019-03-14 16:36:39 +01:00
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2019-03-20 15:21:12 +01:00
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2019-03-14 16:36:39 +01:00
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<title>Measurement of the ID31 Micro-Station</title>
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</head>
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<body>
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<div id="content">
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<h1 class="title">Measurement of the ID31 Micro-Station</h1>
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2019-03-20 15:21:12 +01:00
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<div id="table-of-contents">
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<h2>Table of Contents</h2>
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<div id="text-table-of-contents">
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<ul>
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<li><a href="#org6cfc943">1. Measurements of the dynamics of the station</a>
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<ul>
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<li><a href="#orge701320">1.1. Measurement 1</a></li>
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<li><a href="#org0aa014a">1.2. Measurement 2</a></li>
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<li><a href="#orgc919f50">1.3. Measurement 3</a></li>
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</ul>
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</li>
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<li><a href="#orgcc50077">2. Measurements of perturbations</a>
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<ul>
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<li><a href="#org361950d">2.1. Noise coming from the control loop of each stage</a></li>
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<li><a href="#orge980293">2.2. Static guiding error estimation</a></li>
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<li><a href="#orge36b968">2.3. Ground motion measurements</a></li>
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<li><a href="#org4b8430a">2.4. Spindle Measurements</a></li>
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</ul>
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</li>
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<li><a href="#orgb0ab8ae">3. Ressources</a></li>
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</ul>
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</div>
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</div>
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<div id="outline-container-org6cfc943" class="outline-2">
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<h2 id="org6cfc943"><span class="section-number-2">1</span> Measurements of the dynamics of the station</h2>
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<div class="outline-text-2" id="text-1">
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</div>
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<div id="outline-container-orge701320" class="outline-3">
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<h3 id="orge701320"><span class="section-number-3">1.1</span> Measurement 1</h3>
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<div class="outline-text-3" id="text-1-1">
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<p>
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<a href="2017-11-17 - Marc/index.html">Link to the analysis</a>
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</p>
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</div>
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<div id="outline-container-org0e68ec7" class="outline-4">
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<h4 id="org0e68ec7">Notes</h4>
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<div class="outline-text-4" id="text-org0e68ec7">
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<tbody>
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<tr>
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<td class="org-left"><b>Date</b></td>
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<td class="org-left">2017-11-17</td>
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</tr>
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<tr>
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<td class="org-left"><b>Sensors</b></td>
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<td class="org-left">Accelerometers</td>
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</tr>
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<tr>
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<td class="org-left"><b>Excitation</b></td>
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<td class="org-left">Instrumented Hammer</td>
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</tr>
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<tr>
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<td class="org-left"><b>Location</b></td>
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<td class="org-left">Laboratory</td>
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|
</tr>
|
|
|
|
</tbody>
|
|
|
|
</table>
|
|
|
|
|
|
|
|
<p>
|
|
|
|
Dynamics of the station is evaluated using instrumented hammer and accelerometers fixed on each stage.
|
|
|
|
</p>
|
|
|
|
</div>
|
|
|
|
</div>
|
|
|
|
|
|
|
|
<div id="outline-container-org66ede15" class="outline-4">
|
|
|
|
<h4 id="org66ede15">Goal</h4>
|
|
|
|
<div class="outline-text-4" id="text-org66ede15">
|
|
|
|
<ul class="org-ul">
|
|
|
|
<li>Obtain a first estimation of resonance frequencies</li>
|
|
|
|
</ul>
|
|
|
|
</div>
|
|
|
|
</div>
|
|
|
|
|
|
|
|
<div id="outline-container-org92c3b28" class="outline-4">
|
|
|
|
<h4 id="org92c3b28">Results</h4>
|
|
|
|
<div class="outline-text-4" id="text-org92c3b28">
|
|
|
|
<p>
|
|
|
|
Resonances have been identified at 45Hz and 75Hz.
|
|
|
|
However, the quality of the measurements are bad at low frequency.
|
|
|
|
New measurements should be done with Geophones.
|
|
|
|
</p>
|
|
|
|
</div>
|
|
|
|
</div>
|
|
|
|
</div>
|
|
|
|
|
|
|
|
<div id="outline-container-org0aa014a" class="outline-3">
|
|
|
|
<h3 id="org0aa014a"><span class="section-number-3">1.2</span> Measurement 2</h3>
|
|
|
|
<div class="outline-text-3" id="text-1-2">
|
|
|
|
<p>
|
|
|
|
<a href="2018-01-12 - Marc/index.html">Link to the analysis</a>
|
|
|
|
</p>
|
|
|
|
</div>
|
|
|
|
|
|
|
|
<div id="outline-container-org9788024" class="outline-4">
|
|
|
|
<h4 id="org9788024">Notes</h4>
|
|
|
|
<div class="outline-text-4" id="text-org9788024">
|
|
|
|
<table border="2" cellspacing="0" cellpadding="6" rules="groups" frame="hsides">
|
|
|
|
|
|
|
|
|
|
|
|
<colgroup>
|
|
|
|
<col class="org-left" />
|
|
|
|
|
|
|
|
<col class="org-left" />
|
|
|
|
</colgroup>
|
|
|
|
<tbody>
|
|
|
|
<tr>
|
|
|
|
<td class="org-left"><b>Date</b></td>
|
|
|
|
<td class="org-left">2018-01-12</td>
|
|
|
|
</tr>
|
|
|
|
|
|
|
|
<tr>
|
|
|
|
<td class="org-left"><b>Sensors</b></td>
|
|
|
|
<td class="org-left">Geophones</td>
|
|
|
|
</tr>
|
|
|
|
|
|
|
|
<tr>
|
|
|
|
<td class="org-left"><b>Excitation</b></td>
|
|
|
|
<td class="org-left">Instrumented Hammer</td>
|
|
|
|
</tr>
|
|
|
|
|
|
|
|
<tr>
|
|
|
|
<td class="org-left"><b>Location</b></td>
|
|
|
|
<td class="org-left">Laboratory</td>
|
|
|
|
</tr>
|
|
|
|
|
|
|
|
<tr>
|
|
|
|
<td class="org-left"><b>Notes</b></td>
|
|
|
|
<td class="org-left">Unglued Granite</td>
|
|
|
|
</tr>
|
|
|
|
</tbody>
|
|
|
|
</table>
|
|
|
|
</div>
|
|
|
|
</div>
|
|
|
|
|
|
|
|
<div id="outline-container-org42ddc37" class="outline-4">
|
|
|
|
<h4 id="org42ddc37">Goal</h4>
|
|
|
|
<div class="outline-text-4" id="text-org42ddc37">
|
|
|
|
<p>
|
|
|
|
Obtain better coherence at low frequency.
|
|
|
|
</p>
|
|
|
|
</div>
|
|
|
|
</div>
|
|
|
|
|
|
|
|
<div id="outline-container-org51738ec" class="outline-4">
|
|
|
|
<h4 id="org51738ec">Results</h4>
|
|
|
|
<div class="outline-text-4" id="text-org51738ec">
|
|
|
|
<p>
|
|
|
|
Resonances at 42Hz, 70Hz and 125Hz have been identified.
|
|
|
|
The coherence is much better than when using accelerometers.
|
|
|
|
</p>
|
|
|
|
</div>
|
|
|
|
</div>
|
|
|
|
</div>
|
|
|
|
|
|
|
|
<div id="outline-container-orgc919f50" class="outline-3">
|
|
|
|
<h3 id="orgc919f50"><span class="section-number-3">1.3</span> Measurement 3</h3>
|
|
|
|
<div class="outline-text-3" id="text-1-3">
|
|
|
|
<p>
|
|
|
|
<a href="2018-10-12 - Marc/index.html">Link to the analysis</a>
|
|
|
|
</p>
|
|
|
|
</div>
|
|
|
|
|
|
|
|
<div id="outline-container-orgcfad1ec" class="outline-4">
|
|
|
|
<h4 id="orgcfad1ec">Notes</h4>
|
|
|
|
<div class="outline-text-4" id="text-orgcfad1ec">
|
|
|
|
<table border="2" cellspacing="0" cellpadding="6" rules="groups" frame="hsides">
|
|
|
|
|
|
|
|
|
|
|
|
<colgroup>
|
|
|
|
<col class="org-left" />
|
|
|
|
|
|
|
|
<col class="org-left" />
|
|
|
|
</colgroup>
|
|
|
|
<tbody>
|
|
|
|
<tr>
|
|
|
|
<td class="org-left"><b>Date</b></td>
|
|
|
|
<td class="org-left">2018-10-12</td>
|
|
|
|
</tr>
|
|
|
|
|
|
|
|
<tr>
|
|
|
|
<td class="org-left"><b>Sensors</b></td>
|
|
|
|
<td class="org-left">Geophones</td>
|
|
|
|
</tr>
|
|
|
|
|
|
|
|
<tr>
|
|
|
|
<td class="org-left"><b>Excitation</b></td>
|
|
|
|
<td class="org-left">Instrumented Hammer</td>
|
|
|
|
</tr>
|
|
|
|
|
|
|
|
<tr>
|
|
|
|
<td class="org-left"><b>Location</b></td>
|
|
|
|
<td class="org-left">Experimental Hutch</td>
|
|
|
|
</tr>
|
|
|
|
</tbody>
|
|
|
|
</table>
|
|
|
|
</div>
|
|
|
|
</div>
|
|
|
|
|
|
|
|
<div id="outline-container-orgb164f26" class="outline-4">
|
|
|
|
<h4 id="orgb164f26">Goal</h4>
|
|
|
|
<div class="outline-text-4" id="text-orgb164f26">
|
|
|
|
<p>
|
|
|
|
The station is now installed on the experimental hutch with a glued granite (final location).
|
|
|
|
The station is identified again.
|
|
|
|
</p>
|
|
|
|
</div>
|
|
|
|
</div>
|
|
|
|
|
|
|
|
<div id="outline-container-org36d9dac" class="outline-4">
|
|
|
|
<h4 id="org36d9dac">Results</h4>
|
|
|
|
</div>
|
|
|
|
</div>
|
|
|
|
</div>
|
|
|
|
|
|
|
|
<div id="outline-container-orgcc50077" class="outline-2">
|
|
|
|
<h2 id="orgcc50077"><span class="section-number-2">2</span> Measurements of perturbations</h2>
|
|
|
|
<div class="outline-text-2" id="text-2">
|
|
|
|
</div>
|
|
|
|
<div id="outline-container-org361950d" class="outline-3">
|
|
|
|
<h3 id="org361950d"><span class="section-number-3">2.1</span> Noise coming from the control loop of each stage</h3>
|
|
|
|
<div class="outline-text-3" id="text-2-1">
|
|
|
|
<p>
|
|
|
|
<a href="2018-10-15 - Marc/index.html">Link to the analysis</a>
|
|
|
|
</p>
|
|
|
|
</div>
|
2019-03-15 16:11:55 +01:00
|
|
|
|
2019-03-20 15:21:12 +01:00
|
|
|
<div id="outline-container-org84fe95c" class="outline-4">
|
|
|
|
<h4 id="org84fe95c">Notes</h4>
|
|
|
|
<div class="outline-text-4" id="text-org84fe95c">
|
|
|
|
<table border="2" cellspacing="0" cellpadding="6" rules="groups" frame="hsides">
|
|
|
|
|
|
|
|
|
|
|
|
<colgroup>
|
|
|
|
<col class="org-left" />
|
|
|
|
|
|
|
|
<col class="org-left" />
|
|
|
|
</colgroup>
|
|
|
|
<tbody>
|
|
|
|
<tr>
|
|
|
|
<td class="org-left"><b>Date</b></td>
|
|
|
|
<td class="org-left">2018-10-15</td>
|
|
|
|
</tr>
|
|
|
|
|
|
|
|
<tr>
|
|
|
|
<td class="org-left"><b>Sensors</b></td>
|
|
|
|
<td class="org-left">Geophones</td>
|
|
|
|
</tr>
|
|
|
|
|
|
|
|
<tr>
|
|
|
|
<td class="org-left"><b>Location</b></td>
|
|
|
|
<td class="org-left">Experimental Hutch</td>
|
|
|
|
</tr>
|
|
|
|
</tbody>
|
|
|
|
</table>
|
|
|
|
</div>
|
|
|
|
</div>
|
|
|
|
|
|
|
|
<div id="outline-container-orgd2c9cc0" class="outline-4">
|
|
|
|
<h4 id="orgd2c9cc0">Goal</h4>
|
|
|
|
<div class="outline-text-4" id="text-orgd2c9cc0">
|
|
|
|
<p>
|
|
|
|
The objective is to estimate how much perturbation is injected in the system by the control systems of each stages of the micro station.
|
|
|
|
</p>
|
|
|
|
|
|
|
|
<p>
|
|
|
|
Geophones are located on the structure.
|
|
|
|
Each stage is turned on and off.
|
|
|
|
The signals of the geophones are then compared when the stage is on and off.
|
|
|
|
</p>
|
|
|
|
</div>
|
|
|
|
</div>
|
|
|
|
|
|
|
|
<div id="outline-container-org2d2e023" class="outline-4">
|
|
|
|
<h4 id="org2d2e023">Results</h4>
|
|
|
|
<div class="outline-text-4" id="text-org2d2e023">
|
2019-03-15 16:11:55 +01:00
|
|
|
<ul class="org-ul">
|
2019-03-20 15:21:12 +01:00
|
|
|
<li>The translation stage seems to have effect on the tilt stage at 20Hz.</li>
|
|
|
|
<li>The Tilt stage and the Hexapod control systems have no effect on the motion of the other stages.</li>
|
|
|
|
<li>The spindle stage control system seems to induce a motion of the Hexapod on the Z direction around 20Hz.</li>
|
2019-03-15 16:11:55 +01:00
|
|
|
</ul>
|
|
|
|
</div>
|
2019-03-20 15:21:12 +01:00
|
|
|
</div>
|
|
|
|
</div>
|
|
|
|
|
|
|
|
<div id="outline-container-orge980293" class="outline-3">
|
|
|
|
<h3 id="orge980293"><span class="section-number-3">2.2</span> Static guiding error estimation</h3>
|
|
|
|
<div class="outline-text-3" id="text-2-2">
|
|
|
|
<p>
|
|
|
|
<a href="Static/index.html">Link to the analysis</a>
|
|
|
|
</p>
|
|
|
|
</div>
|
|
|
|
|
|
|
|
<div id="outline-container-org315d127" class="outline-4">
|
|
|
|
<h4 id="org315d127">Notes</h4>
|
|
|
|
<div class="outline-text-4" id="text-org315d127">
|
|
|
|
<table border="2" cellspacing="0" cellpadding="6" rules="groups" frame="hsides">
|
|
|
|
|
|
|
|
|
|
|
|
<colgroup>
|
|
|
|
<col class="org-left" />
|
|
|
|
|
|
|
|
<col class="org-left" />
|
|
|
|
</colgroup>
|
|
|
|
<tbody>
|
|
|
|
<tr>
|
|
|
|
<td class="org-left"><b>Date</b></td>
|
|
|
|
<td class="org-left">2019-01-09</td>
|
|
|
|
</tr>
|
|
|
|
|
|
|
|
<tr>
|
|
|
|
<td class="org-left"><b>Sensors</b></td>
|
|
|
|
<td class="org-left">Interferometer</td>
|
|
|
|
</tr>
|
|
|
|
|
|
|
|
<tr>
|
|
|
|
<td class="org-left"><b>Location</b></td>
|
|
|
|
<td class="org-left">Experimental Hutch</td>
|
|
|
|
</tr>
|
|
|
|
</tbody>
|
|
|
|
</table>
|
|
|
|
|
|
|
|
<p>
|
|
|
|
Each stage is statically moved of all its stroke on after the other.
|
|
|
|
A metrology element is located at the sample position and its motion is measured in translations and rotations.
|
|
|
|
For each small displacement, the stage is stopped and the motion of the sample is recorded and averaged.
|
|
|
|
</p>
|
|
|
|
</div>
|
|
|
|
</div>
|
|
|
|
|
|
|
|
<div id="outline-container-orgc6d7758" class="outline-4">
|
|
|
|
<h4 id="orgc6d7758">Goal</h4>
|
|
|
|
<div class="outline-text-4" id="text-orgc6d7758">
|
|
|
|
<p>
|
|
|
|
The goal is to estimate the guiding errors of each stage.
|
|
|
|
</p>
|
|
|
|
</div>
|
|
|
|
</div>
|
|
|
|
|
|
|
|
<div id="outline-container-org96cddfc" class="outline-4">
|
|
|
|
<h4 id="org96cddfc">Results</h4>
|
|
|
|
</div>
|
|
|
|
</div>
|
|
|
|
|
|
|
|
<div id="outline-container-orge36b968" class="outline-3">
|
|
|
|
<h3 id="orge36b968"><span class="section-number-3">2.3</span> Ground motion measurements</h3>
|
|
|
|
<div class="outline-text-3" id="text-2-3">
|
|
|
|
<p>
|
|
|
|
<a href="Ground Motion/index.html">Link to the analysis</a>
|
|
|
|
</p>
|
|
|
|
</div>
|
|
|
|
|
|
|
|
<div id="outline-container-org72d83c7" class="outline-4">
|
|
|
|
<h4 id="org72d83c7">Notes</h4>
|
|
|
|
<div class="outline-text-4" id="text-org72d83c7">
|
|
|
|
<table border="2" cellspacing="0" cellpadding="6" rules="groups" frame="hsides">
|
|
|
|
|
|
|
|
|
|
|
|
<colgroup>
|
|
|
|
<col class="org-left" />
|
|
|
|
|
|
|
|
<col class="org-left" />
|
|
|
|
</colgroup>
|
|
|
|
<tbody>
|
|
|
|
<tr>
|
|
|
|
<td class="org-left"><b>Date</b></td>
|
|
|
|
<td class="org-left">2014-10</td>
|
|
|
|
</tr>
|
|
|
|
|
|
|
|
<tr>
|
|
|
|
<td class="org-left"><b>Sensors</b></td>
|
|
|
|
<td class="org-left">Geophone</td>
|
|
|
|
</tr>
|
|
|
|
|
|
|
|
<tr>
|
|
|
|
<td class="org-left"><b>Location</b></td>
|
|
|
|
<td class="org-left">ID31 Floor</td>
|
|
|
|
</tr>
|
|
|
|
</tbody>
|
|
|
|
</table>
|
|
|
|
</div>
|
|
|
|
</div>
|
|
|
|
|
|
|
|
<div id="outline-container-org8e77733" class="outline-4">
|
|
|
|
<h4 id="org8e77733">Goal</h4>
|
|
|
|
<div class="outline-text-4" id="text-org8e77733">
|
|
|
|
<p>
|
|
|
|
The objective is to obtain the Power Spectral Density of the ground motion at the ID31 floor.
|
|
|
|
</p>
|
|
|
|
</div>
|
|
|
|
</div>
|
|
|
|
|
|
|
|
<div id="outline-container-org762ad60" class="outline-4">
|
|
|
|
<h4 id="org762ad60">Results</h4>
|
|
|
|
</div>
|
|
|
|
</div>
|
|
|
|
|
|
|
|
<div id="outline-container-org4b8430a" class="outline-3">
|
|
|
|
<h3 id="org4b8430a"><span class="section-number-3">2.4</span> Spindle Measurements</h3>
|
|
|
|
<div class="outline-text-3" id="text-2-4">
|
|
|
|
<p>
|
|
|
|
<a href="Spindle/index.html">Link to the analysis</a>
|
|
|
|
</p>
|
|
|
|
</div>
|
|
|
|
|
|
|
|
<div id="outline-container-org33418cf" class="outline-4">
|
|
|
|
<h4 id="org33418cf">Notes</h4>
|
|
|
|
<div class="outline-text-4" id="text-org33418cf">
|
|
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<table border="2" cellspacing="0" cellpadding="6" rules="groups" frame="hsides">
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<colgroup>
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<col class="org-left" />
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<col class="org-right" />
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</colgroup>
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<tbody>
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<tr>
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<td class="org-left"><b>Date</b></td>
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<td class="org-right">2017-04-25</td>
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</tr>
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<tr>
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<td class="org-left"><b>Location</b></td>
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<td class="org-right">PEL Lab</td>
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</tr>
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</tbody>
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</table>
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</div>
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</div>
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<div id="outline-container-orgbd90070" class="outline-4">
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<h4 id="orgbd90070">Goal</h4>
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<div class="outline-text-4" id="text-orgbd90070">
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<p>
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The goal is to estimate all the error motions induced by the Spindle
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</p>
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</div>
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</div>
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<div id="outline-container-orgff9b253" class="outline-4">
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<h4 id="orgff9b253">Results</h4>
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</div>
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</div>
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</div>
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<div id="outline-container-orgb0ab8ae" class="outline-2">
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<h2 id="orgb0ab8ae"><span class="section-number-2">3</span> Ressources</h2>
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<div class="outline-text-2" id="text-3">
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<p>
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<a href="actuators-sensors/index.html">Actuators and Sensors</a>
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</p>
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</div>
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</div>
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</div>
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2019-03-14 16:36:39 +01:00
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<div id="postamble" class="status">
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<p class="author">Author: Thomas Dehaeze</p>
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2019-03-20 15:21:12 +01:00
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<p class="date">Created: 2019-03-20 mer. 15:20</p>
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2019-03-14 16:36:39 +01:00
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<p class="validation"><a href="http://validator.w3.org/check?uri=referer">Validate</a></p>
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</div>
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</body>
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</html>
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