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<div id="content">
<h1 class="title">Measurement of the ID31 Micro-Station</h1>
<div id="table-of-contents">
<h2>Table of Contents</h2>
<div id="text-table-of-contents">
<ul>
<li><a href="#org6cfc943">1. Measurements of the dynamics of the station</a>
<ul>
<li><a href="#orge701320">1.1. Measurement 1</a></li>
<li><a href="#org0aa014a">1.2. Measurement 2</a></li>
<li><a href="#orgc919f50">1.3. Measurement 3</a></li>
</ul>
</li>
<li><a href="#orgcc50077">2. Measurements of perturbations</a>
<ul>
<li><a href="#org361950d">2.1. Noise coming from the control loop of each stage</a></li>
<li><a href="#orge980293">2.2. Static guiding error estimation</a></li>
<li><a href="#orge36b968">2.3. Ground motion measurements</a></li>
<li><a href="#org4b8430a">2.4. Spindle Measurements</a></li>
</ul>
</li>
<li><a href="#orgb0ab8ae">3. Ressources</a></li>
</ul>
</div>
</div>
<div id="outline-container-org6cfc943" class="outline-2">
<h2 id="org6cfc943"><span class="section-number-2">1</span> Measurements of the dynamics of the station</h2>
<div class="outline-text-2" id="text-1">
</div>
<div id="outline-container-orge701320" class="outline-3">
<h3 id="orge701320"><span class="section-number-3">1.1</span> Measurement 1</h3>
<div class="outline-text-3" id="text-1-1">
<p>
<a href="2017-11-17 - Marc/index.html">Link to the analysis</a>
</p>
</div>
<div id="outline-container-org0e68ec7" class="outline-4">
<h4 id="org0e68ec7">Notes</h4>
<div class="outline-text-4" id="text-org0e68ec7">
<table border="2" cellspacing="0" cellpadding="6" rules="groups" frame="hsides">
<colgroup>
<col class="org-left" />
<col class="org-left" />
</colgroup>
<tbody>
<tr>
<td class="org-left"><b>Date</b></td>
<td class="org-left">2017-11-17</td>
</tr>
<tr>
<td class="org-left"><b>Sensors</b></td>
<td class="org-left">Accelerometers</td>
</tr>
<tr>
<td class="org-left"><b>Excitation</b></td>
<td class="org-left">Instrumented Hammer</td>
</tr>
<tr>
<td class="org-left"><b>Location</b></td>
<td class="org-left">Laboratory</td>
</tr>
</tbody>
</table>
<p>
Dynamics of the station is evaluated using instrumented hammer and accelerometers fixed on each stage.
</p>
</div>
</div>
<div id="outline-container-org66ede15" class="outline-4">
<h4 id="org66ede15">Goal</h4>
<div class="outline-text-4" id="text-org66ede15">
<ul class="org-ul">
<li>Obtain a first estimation of resonance frequencies</li>
</ul>
</div>
</div>
<div id="outline-container-org92c3b28" class="outline-4">
<h4 id="org92c3b28">Results</h4>
<div class="outline-text-4" id="text-org92c3b28">
<p>
Resonances have been identified at 45Hz and 75Hz.
However, the quality of the measurements are bad at low frequency.
New measurements should be done with Geophones.
</p>
</div>
</div>
</div>
<div id="outline-container-org0aa014a" class="outline-3">
<h3 id="org0aa014a"><span class="section-number-3">1.2</span> Measurement 2</h3>
<div class="outline-text-3" id="text-1-2">
<p>
<a href="2018-01-12 - Marc/index.html">Link to the analysis</a>
</p>
</div>
<div id="outline-container-org9788024" class="outline-4">
<h4 id="org9788024">Notes</h4>
<div class="outline-text-4" id="text-org9788024">
<table border="2" cellspacing="0" cellpadding="6" rules="groups" frame="hsides">
<colgroup>
<col class="org-left" />
<col class="org-left" />
</colgroup>
<tbody>
<tr>
<td class="org-left"><b>Date</b></td>
<td class="org-left">2018-01-12</td>
</tr>
<tr>
<td class="org-left"><b>Sensors</b></td>
<td class="org-left">Geophones</td>
</tr>
<tr>
<td class="org-left"><b>Excitation</b></td>
<td class="org-left">Instrumented Hammer</td>
</tr>
<tr>
<td class="org-left"><b>Location</b></td>
<td class="org-left">Laboratory</td>
</tr>
<tr>
<td class="org-left"><b>Notes</b></td>
<td class="org-left">Unglued Granite</td>
</tr>
</tbody>
</table>
</div>
</div>
<div id="outline-container-org42ddc37" class="outline-4">
<h4 id="org42ddc37">Goal</h4>
<div class="outline-text-4" id="text-org42ddc37">
<p>
Obtain better coherence at low frequency.
</p>
</div>
</div>
<div id="outline-container-org51738ec" class="outline-4">
<h4 id="org51738ec">Results</h4>
<div class="outline-text-4" id="text-org51738ec">
<p>
Resonances at 42Hz, 70Hz and 125Hz have been identified.
The coherence is much better than when using accelerometers.
</p>
</div>
</div>
</div>
<div id="outline-container-orgc919f50" class="outline-3">
<h3 id="orgc919f50"><span class="section-number-3">1.3</span> Measurement 3</h3>
<div class="outline-text-3" id="text-1-3">
<p>
<a href="2018-10-12 - Marc/index.html">Link to the analysis</a>
</p>
</div>
<div id="outline-container-orgcfad1ec" class="outline-4">
<h4 id="orgcfad1ec">Notes</h4>
<div class="outline-text-4" id="text-orgcfad1ec">
<table border="2" cellspacing="0" cellpadding="6" rules="groups" frame="hsides">
<colgroup>
<col class="org-left" />
<col class="org-left" />
</colgroup>
<tbody>
<tr>
<td class="org-left"><b>Date</b></td>
<td class="org-left">2018-10-12</td>
</tr>
<tr>
<td class="org-left"><b>Sensors</b></td>
<td class="org-left">Geophones</td>
</tr>
<tr>
<td class="org-left"><b>Excitation</b></td>
<td class="org-left">Instrumented Hammer</td>
</tr>
<tr>
<td class="org-left"><b>Location</b></td>
<td class="org-left">Experimental Hutch</td>
</tr>
</tbody>
</table>
</div>
</div>
<div id="outline-container-orgb164f26" class="outline-4">
<h4 id="orgb164f26">Goal</h4>
<div class="outline-text-4" id="text-orgb164f26">
<p>
The station is now installed on the experimental hutch with a glued granite (final location).
The station is identified again.
</p>
</div>
</div>
<div id="outline-container-org36d9dac" class="outline-4">
<h4 id="org36d9dac">Results</h4>
</div>
</div>
</div>
<div id="outline-container-orgcc50077" class="outline-2">
<h2 id="orgcc50077"><span class="section-number-2">2</span> Measurements of perturbations</h2>
<div class="outline-text-2" id="text-2">
</div>
<div id="outline-container-org361950d" class="outline-3">
<h3 id="org361950d"><span class="section-number-3">2.1</span> Noise coming from the control loop of each stage</h3>
<div class="outline-text-3" id="text-2-1">
<p>
<a href="2018-10-15 - Marc/index.html">Link to the analysis</a>
</p>
</div>
2019-03-15 16:11:55 +01:00
<div id="outline-container-org84fe95c" class="outline-4">
<h4 id="org84fe95c">Notes</h4>
<div class="outline-text-4" id="text-org84fe95c">
<table border="2" cellspacing="0" cellpadding="6" rules="groups" frame="hsides">
<colgroup>
<col class="org-left" />
<col class="org-left" />
</colgroup>
<tbody>
<tr>
<td class="org-left"><b>Date</b></td>
<td class="org-left">2018-10-15</td>
</tr>
<tr>
<td class="org-left"><b>Sensors</b></td>
<td class="org-left">Geophones</td>
</tr>
<tr>
<td class="org-left"><b>Location</b></td>
<td class="org-left">Experimental Hutch</td>
</tr>
</tbody>
</table>
</div>
</div>
<div id="outline-container-orgd2c9cc0" class="outline-4">
<h4 id="orgd2c9cc0">Goal</h4>
<div class="outline-text-4" id="text-orgd2c9cc0">
<p>
The objective is to estimate how much perturbation is injected in the system by the control systems of each stages of the micro station.
</p>
<p>
Geophones are located on the structure.
Each stage is turned on and off.
The signals of the geophones are then compared when the stage is on and off.
</p>
</div>
</div>
<div id="outline-container-org2d2e023" class="outline-4">
<h4 id="org2d2e023">Results</h4>
<div class="outline-text-4" id="text-org2d2e023">
2019-03-15 16:11:55 +01:00
<ul class="org-ul">
<li>The translation stage seems to have effect on the tilt stage at 20Hz.</li>
<li>The Tilt stage and the Hexapod control systems have no effect on the motion of the other stages.</li>
<li>The spindle stage control system seems to induce a motion of the Hexapod on the Z direction around 20Hz.</li>
2019-03-15 16:11:55 +01:00
</ul>
</div>
</div>
</div>
<div id="outline-container-orge980293" class="outline-3">
<h3 id="orge980293"><span class="section-number-3">2.2</span> Static guiding error estimation</h3>
<div class="outline-text-3" id="text-2-2">
<p>
<a href="Static/index.html">Link to the analysis</a>
</p>
</div>
<div id="outline-container-org315d127" class="outline-4">
<h4 id="org315d127">Notes</h4>
<div class="outline-text-4" id="text-org315d127">
<table border="2" cellspacing="0" cellpadding="6" rules="groups" frame="hsides">
<colgroup>
<col class="org-left" />
<col class="org-left" />
</colgroup>
<tbody>
<tr>
<td class="org-left"><b>Date</b></td>
<td class="org-left">2019-01-09</td>
</tr>
<tr>
<td class="org-left"><b>Sensors</b></td>
<td class="org-left">Interferometer</td>
</tr>
<tr>
<td class="org-left"><b>Location</b></td>
<td class="org-left">Experimental Hutch</td>
</tr>
</tbody>
</table>
<p>
Each stage is statically moved of all its stroke on after the other.
A metrology element is located at the sample position and its motion is measured in translations and rotations.
For each small displacement, the stage is stopped and the motion of the sample is recorded and averaged.
</p>
</div>
</div>
<div id="outline-container-orgc6d7758" class="outline-4">
<h4 id="orgc6d7758">Goal</h4>
<div class="outline-text-4" id="text-orgc6d7758">
<p>
The goal is to estimate the guiding errors of each stage.
</p>
</div>
</div>
<div id="outline-container-org96cddfc" class="outline-4">
<h4 id="org96cddfc">Results</h4>
</div>
</div>
<div id="outline-container-orge36b968" class="outline-3">
<h3 id="orge36b968"><span class="section-number-3">2.3</span> Ground motion measurements</h3>
<div class="outline-text-3" id="text-2-3">
<p>
<a href="Ground Motion/index.html">Link to the analysis</a>
</p>
</div>
<div id="outline-container-org72d83c7" class="outline-4">
<h4 id="org72d83c7">Notes</h4>
<div class="outline-text-4" id="text-org72d83c7">
<table border="2" cellspacing="0" cellpadding="6" rules="groups" frame="hsides">
<colgroup>
<col class="org-left" />
<col class="org-left" />
</colgroup>
<tbody>
<tr>
<td class="org-left"><b>Date</b></td>
<td class="org-left">2014-10</td>
</tr>
<tr>
<td class="org-left"><b>Sensors</b></td>
<td class="org-left">Geophone</td>
</tr>
<tr>
<td class="org-left"><b>Location</b></td>
<td class="org-left">ID31 Floor</td>
</tr>
</tbody>
</table>
</div>
</div>
<div id="outline-container-org8e77733" class="outline-4">
<h4 id="org8e77733">Goal</h4>
<div class="outline-text-4" id="text-org8e77733">
<p>
The objective is to obtain the Power Spectral Density of the ground motion at the ID31 floor.
</p>
</div>
</div>
<div id="outline-container-org762ad60" class="outline-4">
<h4 id="org762ad60">Results</h4>
</div>
</div>
<div id="outline-container-org4b8430a" class="outline-3">
<h3 id="org4b8430a"><span class="section-number-3">2.4</span> Spindle Measurements</h3>
<div class="outline-text-3" id="text-2-4">
<p>
<a href="Spindle/index.html">Link to the analysis</a>
</p>
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<h4 id="org33418cf">Notes</h4>
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<td class="org-left"><b>Date</b></td>
<td class="org-right">2017-04-25</td>
</tr>
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<td class="org-left"><b>Location</b></td>
<td class="org-right">PEL Lab</td>
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<h4 id="orgbd90070">Goal</h4>
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<p>
The goal is to estimate all the error motions induced by the Spindle
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<h4 id="orgff9b253">Results</h4>
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<h2 id="orgb0ab8ae"><span class="section-number-2">3</span> Ressources</h2>
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<p>
<a href="actuators-sensors/index.html">Actuators and Sensors</a>
</p>
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2019-03-14 16:36:39 +01:00
<div id="postamble" class="status">
<p class="author">Author: Thomas Dehaeze</p>
<p class="date">Created: 2019-03-20 mer. 15:20</p>
2019-03-14 16:36:39 +01:00
<p class="validation"><a href="http://validator.w3.org/check?uri=referer">Validate</a></p>
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