158 lines
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158 lines
15 KiB
Markdown
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title = "Positioning Stations"
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author = ["Dehaeze Thomas"]
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draft = false
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category = "Equipment"
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subcategory = "Mechanical Platforms"
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Tags
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:
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## Review {#review}
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### Sensors {#sensors}
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- Capacitive: (<a href="#citeproc_bib_item_8">Schroer et al. 2017</a>; <a href="#citeproc_bib_item_11">Villar et al. 2018</a>; <a href="#citeproc_bib_item_9">Schropp et al. 2020</a>)
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- Fiber Interferometers Interferometers:
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- Attocube FPS3010 Fabry-Pérot interferometers: (<a href="#citeproc_bib_item_7">Nazaretski et al. 2015</a>, <a href="#citeproc_bib_item_6">2022</a>; <a href="#citeproc_bib_item_10">Stankevic et al. 2017</a>; <a href="#citeproc_bib_item_1">Engblom 2018</a>)
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- Attocube IDS3010 Fabry-Pérot interferometers: (<a href="#citeproc_bib_item_4">Holler et al. 2017</a>, <a href="#citeproc_bib_item_3">2018</a>; <a href="#citeproc_bib_item_5">Kelly et al. 2022</a>)
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- PicoScale SmarAct Michelson interferometers: (<a href="#citeproc_bib_item_8">Schroer et al. 2017</a>; <a href="#citeproc_bib_item_9">Schropp et al. 2020</a>; <a href="#citeproc_bib_item_13">Xu et al. 2023</a>; <a href="#citeproc_bib_item_2">Geraldes et al. 2023</a>)
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### Actuators {#actuators}
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- Piezoelectric: (<a href="#citeproc_bib_item_7">Nazaretski et al. 2015</a>, <a href="#citeproc_bib_item_6">2022</a>; <a href="#citeproc_bib_item_4">Holler et al. 2017</a>, <a href="#citeproc_bib_item_3">2018</a>; <a href="#citeproc_bib_item_11">Villar et al. 2018</a>)
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- 3-phase linear motor: (<a href="#citeproc_bib_item_10">Stankevic et al. 2017</a>; <a href="#citeproc_bib_item_1">Engblom 2018</a>)
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- Voice Coil: (<a href="#citeproc_bib_item_5">Kelly et al. 2022</a>; <a href="#citeproc_bib_item_2">Geraldes et al. 2023</a>)
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### Bandwidth {#bandwidth}
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Rarely specificity.
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Usually slow, so that only drifts are compensated.
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Only recently, high bandwidth (100Hz) have been reported with the use of voice coil actuators (<a href="#citeproc_bib_item_5">Kelly et al. 2022</a>; <a href="#citeproc_bib_item_2">Geraldes et al. 2023</a>).
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### Degrees of Freedom {#degrees-of-freedom}
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- Full rotation for tomography:
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- Spindle bellow YZ stage: (<a href="#citeproc_bib_item_12">Wang et al. 2012</a>; <a href="#citeproc_bib_item_8">Schroer et al. 2017</a>; <a href="#citeproc_bib_item_9">Schropp et al. 2020</a>; <a href="#citeproc_bib_item_2">Geraldes et al. 2023</a>)
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- Spindle above YZ stage: (<a href="#citeproc_bib_item_10">Stankevic et al. 2017</a>; <a href="#citeproc_bib_item_4">Holler et al. 2017</a>, <a href="#citeproc_bib_item_3">2018</a>; <a href="#citeproc_bib_item_11">Villar et al. 2018</a>; <a href="#citeproc_bib_item_1">Engblom 2018</a>; <a href="#citeproc_bib_item_6">Nazaretski et al. 2022</a>; <a href="#citeproc_bib_item_13">Xu et al. 2023</a>)
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- Only for mapping: (<a href="#citeproc_bib_item_7">Nazaretski et al. 2015</a>; <a href="#citeproc_bib_item_5">Kelly et al. 2022</a>)
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**Stroke**:
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- > 1mm: (<a href="#citeproc_bib_item_7">Nazaretski et al. 2015</a>; <a href="#citeproc_bib_item_5">Kelly et al. 2022</a>; <a href="#citeproc_bib_item_2">Geraldes et al. 2023</a>)
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### Payload capabilities {#payload-capabilities}
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- Micron scale samples
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- Samples up to 500g (<a href="#citeproc_bib_item_6">Nazaretski et al. 2022</a>; <a href="#citeproc_bib_item_5">Kelly et al. 2022</a>)
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### Nano Positioning End-Station without online metrology {#nano-positioning-end-station-without-online-metrology}
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{{< figure src="/ox-hugo/endstation_id11.png" >}}
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### End-Station with integrated online metrology {#end-station-with-integrated-online-metrology}
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<div class="table-caption">
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<span class="table-number">Table 1:</span>
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End-Station with integrated online metrology
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</div>
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| Architecture | Sensors and measured DoFs | Metrology Use | Stroke, DoF | Samples | Institute, BL | Ref |
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|-------------------------------------------------------------------|------------------------------|---------------------|-------------------------|--------------|----------------|------------------------------------------------------------------------------------------------------------------|
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| Spindle / **XYZ piezo stage** / Spherical retroreflector / Sample | 3 interferometers: \\(YZ\\) | Characterization | XYZ: 100um, Rz: 180 deg | micron scale | PETRA III, P06 | (<a href="#citeproc_bib_item_8">Schroer et al. 2017</a>; <a href="#citeproc_bib_item_9">Schropp et al. 2020</a>) |
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| Spindle / Metrology Ring / **XYZ** Stage / Sample | 3 Capacitive: \\(YZR\_x\\) | Post processing | | micron scale | NSLS, X8C | (<a href="#citeproc_bib_item_12">Wang et al. 2012</a>) |
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| **XYZ piezo stage** / Spindle / Metrology Ring / Sample | 2 interferometers : \\(YZ\\) | Detector triggering | | micron scale | NSLS, HRX | (<a href="#citeproc_bib_item_13">Xu et al. 2023</a>) |
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<a id="figure--fig:endstation-schroer"></a>
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{{< figure src="/ox-hugo/endstation_schroer.png" caption="<span class='figure-number'>Figure 1: </span>Figure caption" >}}
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<a id="figure--fig:endstation-wang"></a>
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{{< figure src="/ox-hugo/endstation_wang.png" caption="<span class='figure-number'>Figure 2: </span>Figure caption" >}}
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<a id="figure--fig:endstation-xu24"></a>
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{{< figure src="/ox-hugo/endstation_xu24.png" caption="<span class='figure-number'>Figure 3: </span>Figure caption" >}}
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### End-Station with integrated feedback loops based on online metrology {#end-station-with-integrated-feedback-loops-based-on-online-metrology}
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<div class="table-caption">
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<span class="table-number">Table 2:</span>
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End-Station with integrated feedback loops based on online metrology. Stages used for feedback are indicated in bold font.
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</div>
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| Architecture | Sensors and measured DoFs | Bandwidth | Stroke, DoF | Samples | Institute, BL | Ref |
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|----------------------------------------------------------------------|----------------------------------------|-----------|--------------------------------------|------------|-------------------|--------------------------------------------------------------------------------------------------------------|
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| **XYZ piezo motors** / Mirrors / Sample | 3 interferometers: \\(XYZ\\) | 3 PID | XYZ: 3mm | light | APS | (<a href="#citeproc_bib_item_7">Nazaretski et al. 2015</a>) |
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| **Piezo Hexapod** / Spindle / Metrology Ring / Sample | 12 Capacitive: \\(XYZR\_xR\_y\\) | 10Hz | XYZ: 50um, Rx/Ry:500urad, Rz: 180deg | light | ESRF, ID16a | (<a href="#citeproc_bib_item_11">Villar et al. 2018</a>) |
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| **Piezo Tripod** / Spindle / Spherical Reference / Sample | 5 Custom interferometers: \\(YZR\_x\\) | PID | XYZ: 400um, Rz: 365 deg | light | PSI, OMNY | (<a href="#citeproc_bib_item_4">Holler et al. 2017</a>, <a href="#citeproc_bib_item_3">2018</a>) |
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| **Stacked XYZ linear motors** / Spindle / XY / Cylindrical Reference | 5 interferometers: \\(XYZR\_xR\_y\\) | | XYZ: 400um, Rz: 360 deg | light | Soleil, Nanoprobe | (<a href="#citeproc_bib_item_10">Stankevic et al. 2017</a>; <a href="#citeproc_bib_item_1">Engblom 2018</a>) |
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| **XYZ piezo** / Spindle / Metrology Ring / Sample | 3 interferometers : \\(XYZ\\) | | XYZ: 100um, Rz: 360 deg | up to 500g | NSLS, SRX | (<a href="#citeproc_bib_item_6">Nazaretski et al. 2022</a>) |
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| **Parallel XYZ voice coil stage** / Sample | 3 interferometers: \\(XYZ\\) | 100Hz | XYZ: 3mm | up to 350g | Diamond, I14 | (<a href="#citeproc_bib_item_5">Kelly et al. 2022</a>) |
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| Rz / **Parallel XYZ voice coil stage** / Sample | 3 interferometers: \\(XYZ\\) | 100Hz | YZ: 3mm, Rz: +-110deg | light | LNLS, CARNAUBA | (<a href="#citeproc_bib_item_2">Geraldes et al. 2023</a>) |
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<a id="figure--fig:endstation-nazaretski"></a>
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{{< figure src="/ox-hugo/endstation_nazaretski.png" caption="<span class='figure-number'>Figure 4: </span>Figure caption" >}}
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<a id="figure--fig:endstation-villar"></a>
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{{< figure src="/ox-hugo/endstation_villar.png" caption="<span class='figure-number'>Figure 5: </span>Figure caption" >}}
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<a id="figure--fig:endstation-holler"></a>
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{{< figure src="/ox-hugo/endstation_holler.png" caption="<span class='figure-number'>Figure 6: </span>Figure caption" >}}
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<a id="figure--fig:endstation-engblom"></a>
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{{< figure src="/ox-hugo/endstation_engblom.png" caption="<span class='figure-number'>Figure 7: </span>Figure caption" >}}
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<a id="figure--fig:endstation-kelly"></a>
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{{< figure src="/ox-hugo/endstation_kelly.png" caption="<span class='figure-number'>Figure 8: </span>Figure caption" >}}
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<a id="figure--fig:endstation-geraldes"></a>
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{{< figure src="/ox-hugo/endstation_geraldes.png" caption="<span class='figure-number'>Figure 9: </span>Figure caption" >}}
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## Manufacturers {#manufacturers}
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| Manufacturers | Country |
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|------------------------------------------------------------------|---------|
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| [Kohzu](https://www.kohzuprecision.com/i/) | Japan |
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| [PI](https://www.physikinstrumente.com/en/) | USA |
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| [Attocube](https://www.attocube.com/en/products/nanopositioners) | Germany |
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| [Newport](https://www.newport.com/c/manual-positioning) | |
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| [LAB](https://www.labmotionsystems.com/products/z-stages/) | Belgium |
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## Bibliography {#bibliography}
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<style>.csl-entry{text-indent: -1.5em; margin-left: 1.5em;}</style><div class="csl-bib-body">
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<div class="csl-entry"><a id="citeproc_bib_item_1"></a>Engblom, C. 2018. “Nanoprobe Results: Metrology & Control in Stacked Closed-Loop Systems.” In <i>Proc. Of International Conference on Accelerator and Large Experimental Control Systems (ICALEPCS’17)</i>. JACoW. doi:<a href="https://doi.org/10.18429/JACoW-ICALEPCS2017-WEAPL04">10.18429/JACoW-ICALEPCS2017-WEAPL04</a>.</div>
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<div class="csl-entry"><a id="citeproc_bib_item_2"></a>Geraldes, R. R., G. B. Z. L. Moreno, F. R. Lena, E. O. Pereira, M. H. S. da Silva, G. G. Basílio, P. P. R. Proença, et al. 2023. “The High-Dynamic Cryogenic Sample Stage for SAPOTI/CARNAÚBA at Sirius/LNLS.” In <i>Proceedings of XRM2022</i>. doi:<a href="https://doi.org/10.1063/5.0168438">10.1063/5.0168438</a>.</div>
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<div class="csl-entry"><a id="citeproc_bib_item_3"></a>Holler, M., J. Raabe, A. Diaz, M. Guizar-Sicairos, R. Wepf, M. Odstrcil, F. R. Shaik, et al. 2018. “Omny-a Tomography Nano Cryo Stage.” <i>Review of Scientific Instruments</i> 89 (4): 043706. doi:<a href="https://doi.org/10.1063/1.5020247">10.1063/1.5020247</a>.</div>
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<div class="csl-entry"><a id="citeproc_bib_item_4"></a>Holler, M., J. Raabe, R. Wepf, S. H. Shahmoradian, A. Diaz, B. Sarafimov, T. Lachat, H. Walther, and M. Vitins. 2017. “Omny Pin-a Versatile Sample Holder for Tomographic Measurements at Room and Cryogenic Temperatures.” <i>Review of Scientific Instruments</i> 88 (11): 113701. doi:<a href="https://doi.org/10.1063/1.4996092">10.1063/1.4996092</a>.</div>
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<div class="csl-entry"><a id="citeproc_bib_item_5"></a>Kelly, J., A. Male, N. Rubies, D. Mahoney, J. M. Walker, M. A. Gomez-Gonzalez, G. Wilkin, J. E. Parker, and P. D. Quinn. 2022. “The Delta Robot-a Long Travel Nano-Positioning Stage for Scanning X-Ray Microscopy.” <i>Review of Scientific Instruments</i> 93 (4). doi:<a href="https://doi.org/10.1063/5.0084806">10.1063/5.0084806</a>.</div>
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<div class="csl-entry"><a id="citeproc_bib_item_6"></a>Nazaretski, E., D. S. Coburn, W. Xu, J. Ma, H. Xu, R. Smith, X. Huang, et al. 2022. “A New Kirkpatrick-Baez-Based Scanning Microscope for the Submicron Resolution X-Ray Spectroscopy (SRX) Beamline at Nsls-Ii.” <i>Journal of Synchrotron Radiation</i> 29 (5): 1284–91. doi:<a href="https://doi.org/10.1107/s1600577522007056">10.1107/s1600577522007056</a>.</div>
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<div class="csl-entry"><a id="citeproc_bib_item_7"></a>Nazaretski, E., K. Lauer, H. Yan, N. Bouet, J. Zhou, R. Conley, X. Huang, et al. 2015. “Pushing the Limits: An Instrument for Hard X-Ray Imaging below 20 Nm.” <i>Journal of Synchrotron Radiation</i> 22 (2): 336–41. doi:<a href="https://doi.org/10.1107/s1600577514025715">10.1107/s1600577514025715</a>.</div>
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<div class="csl-entry"><a id="citeproc_bib_item_8"></a>Schroer, C. G., M. Seyrich, M. Kahnt, S. Botta, R. Döhrmann, G. Falkenberg, J. Garrevoet, et al. 2017. “PtyNAMi: Ptychographic Nano-Analytical Microscope at PETRA III: Interferometrically Tracking Positions for 3D X-Ray Scanning Microscopy Using a Ball-Lens Retroreflector.” In <i>X-Ray Nanoimaging: Instruments and Methods III</i>. doi:<a href="https://doi.org/10.1117/12.2273710">10.1117/12.2273710</a>.</div>
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<div class="csl-entry"><a id="citeproc_bib_item_9"></a>Schropp, A., R. Döhrmann, S. Botta, D. Brückner, M. Kahnt, M. Lyubomirskiy, C. Ossig, et al. 2020. “Ptynami: Ptychographic Nano-Analytical Microscope.” <i>Journal of Applied Crystallography</i> 53 (4): 957–71. doi:<a href="https://doi.org/10.1107/s1600576720008420">10.1107/s1600576720008420</a>.</div>
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<div class="csl-entry"><a id="citeproc_bib_item_10"></a>Stankevic, T., C. Engblom, F. Langlois, F. Alves, A. Lestrade, N. Jobert, G. Cauchon, U. Vogt, and S. Kubsky. 2017. “Interferometric Characterization of Rotation Stages for X-Ray Nanotomography.” <i>Review of Scientific Instruments</i> 88 (5): 053703. doi:<a href="https://doi.org/10.1063/1.4983405">10.1063/1.4983405</a>.</div>
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<div class="csl-entry"><a id="citeproc_bib_item_11"></a>Villar, F., L. Andre, R. Baker, S. Bohic, J. C. da Silva, C. Guilloud, O. Hignette, et al. 2018. “Nanopositioning for the Esrf Id16a Nano-Imaging Beamline.” <i>Synchrotron Radiation News</i> 31 (5): 9–14. doi:<a href="https://doi.org/10.1080/08940886.2018.1506234">10.1080/08940886.2018.1506234</a>.</div>
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<div class="csl-entry"><a id="citeproc_bib_item_12"></a>Wang, J., Y.-c. K. Chen, Q. Yuan, A. Tkachuk, C. Erdonmez, B. Hornberger, and M. Feser. 2012. “Automated Markerless Full Field Hard X-Ray Microscopic Tomography at Sub-50 Nm 3-Dimension Spatial Resolution.” <i>Applied Physics Letters</i> 100 (14): 143107. doi:<a href="https://doi.org/10.1063/1.3701579">10.1063/1.3701579</a>.</div>
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<div class="csl-entry"><a id="citeproc_bib_item_13"></a>Xu, W., H. Xu, D. Gavrilov, X. Huang, H. Yan, Y. S. Chu, and E. Nazaretski. 2023. “High-speed fly-scan capabilities for x-ray microscopy systems at NSLS-II.” In <i>X-Ray Nanoimaging: Instruments and Methods VI</i>. doi:<a href="https://doi.org/10.1117/12.2675940">10.1117/12.2675940</a>.</div>
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</div>
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