Initial Commit

2020-11-20 09:24:39 +01:00 · 2020-11-20 09:24:39 +01:00 · 9dcf096c70
commit 9dcf096c70
190 changed files with 4284 additions and 0 deletions
--- a/figs/acc_components.png
+++ b/figs/acc_components.png
--- a/figs/acc_conclusion.png
+++ b/figs/acc_conclusion.png
--- a/figs/acc_intro.png
+++ b/figs/acc_intro.png
--- a/figs/acc_results.png
+++ b/figs/acc_results.png
--- a/figs/accuracy_dynamics.png
+++ b/figs/accuracy_dynamics.png
--- a/figs/aliasing_above_nyquist.png
+++ b/figs/aliasing_above_nyquist.png
--- a/figs/aliasing_below_nyquist.png
+++ b/figs/aliasing_below_nyquist.png
--- a/figs/aliasing_budget_phase.png
+++ b/figs/aliasing_budget_phase.png
--- a/figs/aliasing_budget_table.png
+++ b/figs/aliasing_budget_table.png
--- a/figs/aliasing_conclusion.png
+++ b/figs/aliasing_conclusion.png
--- a/figs/aliasing_equivalent_delay.png
+++ b/figs/aliasing_equivalent_delay.png
--- a/figs/aliasing_filter_example.png
+++ b/figs/aliasing_filter_example.png
--- a/figs/aliasing_filter_order_bode.png
+++ b/figs/aliasing_filter_order_bode.png
--- a/figs/aliasing_filter_order_table.png
+++ b/figs/aliasing_filter_order_table.png
--- a/figs/aliasing_modeling.png
+++ b/figs/aliasing_modeling.png
--- a/figs/aliasing_poles.png
+++ b/figs/aliasing_poles.png
--- a/figs/aliasing_reduce_phase_lag.png
+++ b/figs/aliasing_reduce_phase_lag.png
--- a/figs/aliasing_resonances.png
+++ b/figs/aliasing_resonances.png
--- a/figs/aliasing_sensitivity_effect.png
+++ b/figs/aliasing_sensitivity_effect.png
--- a/figs/aliasing_signals.png
+++ b/figs/aliasing_signals.png
--- a/figs/aliasing_system.png
+++ b/figs/aliasing_system.png
--- a/figs/alising_filter_introduction.png
+++ b/figs/alising_filter_introduction.png
--- a/figs/alising_much_above_nyquist.png
+++ b/figs/alising_much_above_nyquist.png
--- a/figs/alising_nature.png
+++ b/figs/alising_nature.png
--- a/figs/asml_chip_manufacturing_loop.png
+++ b/figs/asml_chip_manufacturing_loop.png
--- a/figs/asml_conclusion.png
+++ b/figs/asml_conclusion.png
--- a/figs/asml_dual_stage_scanners.png
+++ b/figs/asml_dual_stage_scanners.png
--- a/figs/asml_euv.png
+++ b/figs/asml_euv.png
--- a/figs/asml_hood_system.png
+++ b/figs/asml_hood_system.png
--- a/figs/asml_imaging_process.png
+++ b/figs/asml_imaging_process.png
--- a/figs/asml_immersion.png
+++ b/figs/asml_immersion.png
--- a/figs/asml_machine_layout.png
+++ b/figs/asml_machine_layout.png
--- a/figs/asml_machine_layout_bis.png
+++ b/figs/asml_machine_layout_bis.png
--- a/figs/asml_na_euv.png
+++ b/figs/asml_na_euv.png
--- a/figs/asml_reflection_angle.png
+++ b/figs/asml_reflection_angle.png
--- a/figs/asml_stepper_to_scanner.png
+++ b/figs/asml_stepper_to_scanner.png
--- a/figs/ball_bearing.png
+++ b/figs/ball_bearing.png
--- a/figs/ball_joint.png
+++ b/figs/ball_joint.png
--- a/figs/buckling.png
+++ b/figs/buckling.png
--- a/figs/case_1.png
+++ b/figs/case_1.png
--- a/figs/case_1_leaf_springs.png
+++ b/figs/case_1_leaf_springs.png
--- a/figs/case_1dof_rotation.png
+++ b/figs/case_1dof_rotation.png
--- a/figs/closed_box.png
+++ b/figs/closed_box.png
--- a/figs/compliant_1dof.png
+++ b/figs/compliant_1dof.png
--- a/figs/compliant_example_1.png
+++ b/figs/compliant_example_1.png
--- a/figs/constraining_dof_conventional.png
+++ b/figs/constraining_dof_conventional.png
--- a/figs/flexure_control_concept.png
+++ b/figs/flexure_control_concept.png
--- a/figs/flexure_current_control_results.png
+++ b/figs/flexure_current_control_results.png
--- a/figs/flexure_delta_robot.png
+++ b/figs/flexure_delta_robot.png
--- a/figs/flexure_delta_robot_schematic.png
+++ b/figs/flexure_delta_robot_schematic.png
--- a/figs/flexure_dynamics_errors.png
+++ b/figs/flexure_dynamics_errors.png
--- a/figs/flexure_electronics_board.png
+++ b/figs/flexure_electronics_board.png
--- a/figs/flexure_equations.png
+++ b/figs/flexure_equations.png
--- a/figs/flexure_identification.png
+++ b/figs/flexure_identification.png
--- a/figs/flexure_identification_coupling.png
+++ b/figs/flexure_identification_coupling.png
--- a/figs/flexure_pivots.png
+++ b/figs/flexure_pivots.png
--- a/figs/flexure_results.png
+++ b/figs/flexure_results.png
--- a/figs/flexure_sensors.png
+++ b/figs/flexure_sensors.png
--- a/figs/flexure_steps.png
+++ b/figs/flexure_steps.png
--- a/figs/focus_background.png
+++ b/figs/focus_background.png
--- a/figs/focus_conclusion.png
+++ b/figs/focus_conclusion.png
--- a/figs/focus_control.png
+++ b/figs/focus_control.png
--- a/figs/focus_mechanical_system.png
+++ b/figs/focus_mechanical_system.png
--- a/figs/focus_optical_design.png
+++ b/figs/focus_optical_design.png
--- a/figs/focus_results.png
+++ b/figs/focus_results.png
--- a/figs/folded_leaf_springs.png
+++ b/figs/folded_leaf_springs.png
--- a/figs/frf_direction_excitation.png
+++ b/figs/frf_direction_excitation.png
--- a/figs/frf_experiment.png
+++ b/figs/frf_experiment.png
--- a/figs/frf_experiment_conclusion.png
+++ b/figs/frf_experiment_conclusion.png
--- a/figs/frf_experiment_non_optimized.png
+++ b/figs/frf_experiment_non_optimized.png
--- a/figs/frf_experiment_optimized.png
+++ b/figs/frf_experiment_optimized.png
--- a/figs/frf_introduction.png
+++ b/figs/frf_introduction.png
--- a/figs/frf_mimo.png
+++ b/figs/frf_mimo.png
--- a/figs/frf_optimization_problem.png
+++ b/figs/frf_optimization_problem.png
--- a/figs/frf_optimization_steps.png
+++ b/figs/frf_optimization_steps.png
--- a/figs/galva_background.png
+++ b/figs/galva_background.png
--- a/figs/galva_ff_conclusion.png
+++ b/figs/galva_ff_conclusion.png
--- a/figs/galva_ff_control.png
+++ b/figs/galva_ff_control.png
--- a/figs/galva_ff_dynamics.png
+++ b/figs/galva_ff_dynamics.png
--- a/figs/galva_ff_experiment.png
+++ b/figs/galva_ff_experiment.png
--- a/figs/galva_ff_feedforward_architecture.png
+++ b/figs/galva_ff_feedforward_architecture.png
--- a/figs/galva_ff_high_tracking.png
+++ b/figs/galva_ff_high_tracking.png
--- a/figs/galva_ff_low_tracking.png
+++ b/figs/galva_ff_low_tracking.png
--- a/figs/galva_ff_multi_dof.png
+++ b/figs/galva_ff_multi_dof.png
--- a/figs/galva_principle.png
+++ b/figs/galva_principle.png
--- a/figs/galva_prototype.png
+++ b/figs/galva_prototype.png
--- a/figs/galva_schematic.png
+++ b/figs/galva_schematic.png
--- a/figs/isolation_conclusion.png
+++ b/figs/isolation_conclusion.png
--- a/figs/isolation_disturbances.png
+++ b/figs/isolation_disturbances.png
--- a/figs/isolation_find_contact.png
+++ b/figs/isolation_find_contact.png
--- a/figs/isolation_improved.png
+++ b/figs/isolation_improved.png
--- a/figs/isolation_localization_problem.png
+++ b/figs/isolation_localization_problem.png
--- a/figs/isolation_nominal_disturbed_systems.png
+++ b/figs/isolation_nominal_disturbed_systems.png
--- a/figs/isolation_simulation.png
+++ b/figs/isolation_simulation.png
--- a/figs/isolation_simulation_results.png
+++ b/figs/isolation_simulation_results.png
--- a/figs/laser_scan_background.png
+++ b/figs/laser_scan_background.png
--- a/figs/leaf_springs.png
+++ b/figs/leaf_springs.png
--- a/figs/linear_bearing_leafs.png
+++ b/figs/linear_bearing_leafs.png
--- a/figs/machine_background.png
+++ b/figs/machine_background.png
--- a/figs/machine_basis_functions.png
+++ b/figs/machine_basis_functions.png
--- a/Show More
+++ b/Show More