1.3 KiB
1.3 KiB
+++ title = "A survey of control issues in nanopositioning" author = ["Dehaeze Thomas"] draft = false +++
Tags :
- Reference
- (Devasia, Eleftheriou, and Moheimani 2007)
- Author(s)
- Devasia, S., Eleftheriou, E., & Moheimani, S. R.
- Year
- 2007
- Talks about Scanning Tunneling Microscope (STM) and Scanning Probe Microscope (SPM)
- [Piezoelectric Actuators]({{< relref "piezoelectric_actuators.md" >}}): Creep, Hysteresis, Vibrations, Modeling errors
- Interesting analysis about Bandwidth-Precision-Range tradeoffs
- Control approaches for piezoelectric actuators: feedforward, Feedback, Iterative, Sensorless controls
{{< figure src="/ox-hugo/devasia07_piezoelectric_tradeoff.png" caption="<span class="figure-number">Figure 1: Tradeoffs between bandwidth, precision and range" >}}