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content/zettels/position_sensors.md
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Tags
: [Inertial Sensors]({{< relref "inertial_sensors" >}}), [Force Sensors]({{< relref "force_sensors" >}}), [Sensor Fusion]({{< relref "sensor_fusion" >}})
: [Inertial Sensors]({{< relref "inertial_sensors" >}}), [Force Sensors]({{< relref "force_sensors" >}}), [Sensor Fusion]({{< relref "sensor_fusion" >}}), [Signal Conditioner]({{< relref "signal_conditioner" >}}), [Signal to Noise Ratio]({{< relref "signal_to_noise_ratio" >}})
## Reviews of Relative Position Sensors {#reviews-of-relative-position-sensors}
- Fleming, A. J., A review of nanometer resolution position sensors: operation and performance <sup id="3fb5b61524290e36d639a4fac65703d0"><a class="reference-link" href="#fleming13_review_nanom_resol_posit_sensor" title="Andrew Fleming, A Review of Nanometer Resolution Position Sensors: Operation and Performance, {Sensors and Actuators A: Physical}, v(nil), 106-126 (2013).">(Andrew Fleming, 2013)</a></sup> ([Notes]({{< relref "fleming13_review_nanom_resol_posit_sensor" >}}))
- Fleming, A. J., A review of nanometer resolution position sensors: operation and performance ([Fleming 2013](#orgeaf4a0a)) ([Notes]({{< relref "fleming13_review_nanom_resol_posit_sensor" >}}))
<a id="table--tab:characteristics-relative-sensor"></a>
<div class="table-caption">
@@ -44,8 +44,7 @@ Tags
| Interferometer | Meters | | 0.5 nm | >100kHz | 1 ppm FSR |
| Encoder | Meters | | 6 nm | >100kHz | 5 ppm FSR |
## Strain Gauge {#strain-gauge}
Capacitive Sensors and Eddy-Current sensors are compare [here](https://www.lionprecision.com/comparing-capacitive-and-eddy-current-sensors/).
## Capacitive Sensor {#capacitive-sensor}
@@ -55,42 +54,48 @@ Description:
- <http://www.lionprecision.com/tech-library/technotes/cap-0020-sensor-theory.html>
- <https://www.lionprecision.com/comparing-capacitive-and-eddy-current-sensors>
| Manufacturers | Links |
|----------------|-------------------------------------------------------------------------------------------------|
| Micro Sense | [link](http://www.microsense.net/products-position-sensors.htm) |
| Micro-Epsilon | [link](https://www.micro-epsilon.com/displacement-position-sensors/capacitive-sensor/) |
| PI | [link](https://www.physikinstrumente.com/en/technology/sensor-technologies/capacitive-sensors/) |
| Unipulse | [link](https://www.unipulse.com/product/ps-ia/) |
| Lion-Precision | [link](https://www.lionprecision.com/products/capacitive-sensors) |
| Manufacturers | Links | Country |
|----------------|--------------------------------------------------------------------------------------------------|---------|
| Micro Sense | [link](http://www.microsense.net/products-position-sensors.htm) | USA |
| Micro-Epsilon | [link](https://www.micro-epsilon.com/displacement-position-sensors/capacitive-sensor/) | Germany |
| PI | [link](https://www.physikinstrumente.com/en/technology/sensor-technologies/capacitive-sensors/) | Germany |
| Unipulse | [link](https://www.unipulse.com/product/ps-ia/) | Japan |
| Lion-Precision | [link](https://www.lionprecision.com/products/capacitive-sensors) | USA |
| Fogale | [link](http://www.fogale.fr/brochures.html) | USA |
| Queensgate | [link](https://www.nanopositioning.com/product-category/nanopositioning/nanopositioning-sensors) | UK |
| Capacitec | [link](https://www.capacitec.com/Displacement-Sensing-Systems) | USA |
## Inductive Sensor (Eddy Current) {#inductive-sensor--eddy-current}
| Manufacturers | Links |
|----------------|------------------------------------------------------------------------------------------|
| Micro-Epsilon | [link](https://www.micro-epsilon.com/displacement-position-sensors/eddy-current-sensor/) |
| Lion Precision | [link](https://www.lionprecision.com/products/eddy-current-sensors) |
| Manufacturers | Links | |
|----------------|-------------------------------------------------------------------------------------------|---------|
| Micro-Epsilon | [link](https://www.micro-epsilon.com/displacement-position-sensors/eddy-current-sensor/) | Germany |
| Lion Precision | [link](https://www.lionprecision.com/products/eddy-current-sensors) | USA |
| Cedrat | [link](https://www.cedrat-technologies.com/en/products/sensors/eddy-current-sensors.html) | France |
| Kaman | [link](https://www.kamansensors.com/product/smt-9700/) | USA |
| Keyence | [link](https://www.keyence.com/ss/products/measure/measurement%5Flibrary/type/inductive/) | USA |
## Inductive Sensor (LVDT) {#inductive-sensor--lvdt}
| Manufacturers | Links |
|---------------|--------------------------------------------------------------------------------------------|
| Micro-Epsilon | [link](https://www.micro-epsilon.com/displacement-position-sensors/inductive-sensor-lvdt/) |
| Keyence | [link](https://www.keyence.eu/products/measure/contact-distance-lvdt/gt2/index.jsp) |
| Manufacturers | Links | Country |
|---------------|--------------------------------------------------------------------------------------------|---------|
| Micro-Epsilon | [link](https://www.micro-epsilon.com/displacement-position-sensors/inductive-sensor-lvdt/) | Germany |
| Keyence | [link](https://www.keyence.eu/products/measure/contact-distance-lvdt/gt2/index.jsp) | USA |
## Interferometers {#interferometers}
| Manufacturers | Links |
|---------------|----------------------------------------------------------------------------------------------------------|
| Attocube | [link](http://www.attocube.com/) |
| Zygo | [link](https://www.zygo.com/?/met/markets/stageposition/zmi/) |
| Smaract | [link](https://www.smaract.com/interferometry) |
| Qutools | [link](https://www.qutools.com/qudis/) |
| Renishaw | [link](https://www.renishaw.com/en/fibre-optic-laser-encoder-products--6594) |
| Sios | [link](https://sios-de.com/products/length-measurement/laser-interferometer/) |
| Keysight | [link](https://www.keysight.com/en/pc-1000000393%3Aepsg%3Apgr/laser-heads?nid=-536900395.0&cc=FR&lc=fre) |
| Manufacturers | Links | Country |
|---------------|----------------------------------------------------------------------------------------------------------|---------|
| Attocube | [link](http://www.attocube.com/) | Germany |
| Zygo | [link](https://www.zygo.com/?/met/markets/stageposition/zmi/) | USA |
| Smaract | [link](https://www.smaract.com/interferometry) | Germany |
| Qutools | [link](https://www.qutools.com/qudis/) | Germany |
| Renishaw | [link](https://www.renishaw.com/en/fibre-optic-laser-encoder-products--6594) | UK |
| Sios | [link](https://sios-de.com/products/length-measurement/laser-interferometer/) | Germany |
| Keysight | [link](https://www.keysight.com/en/pc-1000000393%3Aepsg%3Apgr/laser-heads?nid=-536900395.0&cc=FR&lc=fre) | USA |
<div class="table-caption">
<span class="table-number">Table 3</span>:
@@ -103,31 +108,33 @@ Description:
| Renishaw | 0.2 | 1 | 6 | 1 |
| Picoscale | 0.2 | 2 | 2 | 1 |
<sup id="7658b1219a4458a62ae8c6f51b767542"><a class="reference-link" href="#jang17_compen_refrac_index_air_laser" title="Yoon-Soo Jang \&amp; Seung-Woo Kim, Compensation of the Refractive Index of Air in Laser Interferometer for Distance Measurement: a Review, {International Journal of Precision Engineering and
Manufacturing}, v(12), 1881-1890 (2017).">(Yoon-Soo Jang \& Seung-Woo Kim, 2017)</a></sup>
([Jang and Kim 2017](#org5a2485c))
<a id="org0399c13"></a>
<a id="orgdc4dc3c"></a>
{{< figure src="/ox-hugo/position_sensor_interferometer_precision.png" caption="Figure 1: Expected precision of interferometer as a function of measured distance" >}}
## Fiber Optic Displacement Sensor {#fiber-optic-displacement-sensor}
## Linear Encoders {#linear-encoders}
| Manufacturers | Links |
|---------------|----------------------------------------------------|
| Unipulse | [link](https://www.unipulse.com/product/atw200-2/) |
| Manufacturers | Links | Country |
|----------------|-----------------------------------------------------------------------|---------|
| Heidenhain | [link](https://www.heidenhain.com/en%5FUS/products/linear-encoders/) | Germany |
| MicroE Systems | [link](https://www.celeramotion.com/microe/products/linear-encoders/) | USA |
| Renishaw | [link](https://www.renishaw.com/en/browse-encoder-range--6440) | UK |
# Bibliography
<a class="bibtex-entry" id="fleming13_review_nanom_resol_posit_sensor">Fleming, A. J., *A review of nanometer resolution position sensors: operation and performance*, Sensors and Actuators A: Physical, *190(nil)*, 106–126 (2013). http://dx.doi.org/10.1016/j.sna.2012.10.016</a> [↩](#3fb5b61524290e36d639a4fac65703d0)
<a class="bibtex-entry" id="collette11_review">Collette, C., Artoos, K., Guinchard, M., Janssens, S., Carmona Fernandez, P., & Hauviller, C., *Review of sensors for low frequency seismic vibration measurement* (2011).</a> [↩](#642a18d86de4e062c6afb0f5f20501c4)
## Bibliography {#bibliography}
<a class="bibtex-entry" id="jang17_compen_refrac_index_air_laser">Jang, Y., & Kim, S., *Compensation of the refractive index of air in laser interferometer for distance measurement: a review*, International Journal of Precision Engineering and Manufacturing, *18(12)*, 1881–1890 (2017). http://dx.doi.org/10.1007/s12541-017-0217-y</a> [↩](#7658b1219a4458a62ae8c6f51b767542)
<a id="orgeaf4a0a"></a>Fleming, Andrew J. 2013. “A Review of Nanometer Resolution Position Sensors: Operation and Performance.” _Sensors and Actuators a: Physical_ 190 (nil):106–26. <https://doi.org/10.1016/j.sna.2012.10.016>.
<a id="org5a2485c"></a>Jang, Yoon-Soo, and Seung-Woo Kim. 2017. “Compensation of the Refractive Index of Air in Laser Interferometer for Distance Measurement: A Review.” _International Journal of Precision Engineering and Manufacturing_ 18 (12):1881–90. <https://doi.org/10.1007/s12541-017-0217-y>.
## Backlinks {#backlinks}
- [A review of nanometer resolution position sensors: operation and performance]({{< relref "fleming13_review_nanom_resol_posit_sensor" >}})
- [Measurement technologies for precision positioning]({{< relref "gao15_measur_techn_precis_posit" >}})
- [Collocated Control]({{< relref "collocated_control" >}})
- [Inertial Sensors]({{< relref "inertial_sensors" >}})
- [Sensors]({{< relref "sensors" >}})
- [Collocated Control]({{< relref "collocated_control" >}})