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@@ -8,7 +8,7 @@ Tags
: [Sensor Fusion]({{< relref "sensor_fusion" >}}), [Force Sensors]({{< relref "force_sensors" >}})
Reference
: <sup id="c823f68dd2a72b9667a61b3c046b4731"><a class="reference-link" href="#fleming10_nanop_system_with_force_feedb" title="Fleming, Nanopositioning System With Force Feedback for High-Performance Tracking and Vibration Control, {IEEE/ASME Transactions on Mechatronics}, v(3), 433-447 (2010).">(Fleming, 2010)</a></sup>
: ([Fleming 2010](#org37731c2))
Author(s)
: Fleming, A.
@@ -16,7 +16,8 @@ Author(s)
Year
: 2010
Summary:
## Summary {#summary}
- The noise generated by a piezoelectric force sensor is much less than a capacitive sensor
- Dynamical model of a piezoelectric stack actuator and piezoelectric force sensor
@@ -30,7 +31,7 @@ Summary:
## Model of a multi-layer monolithic piezoelectric stack actuator {#model-of-a-multi-layer-monolithic-piezoelectric-stack-actuator}
<a id="org3f4c96b"></a>
<a id="orgae51a2c"></a>
{{< figure src="/ox-hugo/fleming10_piezo_model.png" caption="Figure 1: Schematic of a multi-layer monolithic piezoelectric stack actuator model" >}}
@@ -112,11 +113,13 @@ As piezoelectric sensors have a capacitive source impedance, the sensor noise de
The current noise density of a general purpose LM833 FET-input op-amp is \\(0.5\ pA/\sqrt{\text{Hz}}\\).
The capacitance of a piezoelectric stack is typically between \\(1 \mu F\\) and \\(100 \mu F\\).
# Bibliography
<a class="bibtex-entry" id="fleming10_nanop_system_with_force_feedb">Fleming, A., *Nanopositioning system with force feedback for high-performance tracking and vibration control*, IEEE/ASME Transactions on Mechatronics, *15(3)*, 433447 (2010). http://dx.doi.org/10.1109/tmech.2009.2028422</a> [](#c823f68dd2a72b9667a61b3c046b4731)
## Bibliography {#bibliography}
<a id="org37731c2"></a>Fleming, A.J. 2010. “Nanopositioning System with Force Feedback for High-Performance Tracking and Vibration Control.” _IEEE/ASME Transactions on Mechatronics_ 15 (3):43347. <https://doi.org/10.1109/tmech.2009.2028422>.
## Backlinks {#backlinks}
- [Actuators]({{< relref "actuators" >}})
- [Force Sensors]({{< relref "force_sensors" >}})
- [Piezoelectric Actuators]({{< relref "piezoelectric_actuators" >}})