tdehaeze/digital-brain
1
0
Fork 0
Code Issues Pull Requests Releases Wiki Activity

Update Content - 2021-05-02

Browse Source
This commit is contained in:
Thomas Dehaeze
2021-05-02 20:37:00 +02:00
parent 699e8a7905
commit f975b4bd90
77 changed files with 1212 additions and 666 deletions
Download Patch File Download Diff File Expand all files Collapse all files

5
content/article/butler11_posit_contr_lithog_equip.md
View File

@@ -8,7 +8,7 @@ Tags
: [Multivariable Control]({{< relref "multivariable_control" >}}), [Positioning Stations]({{< relref "positioning_stations" >}})
Reference
: ([Butler 2011](#org79c48f7))
: ([Butler 2011](#org10c4eb8))
Author(s)
: Butler, H.
@@ -17,6 +17,7 @@ Year
: 2011
## Bibliography {#bibliography}
<a id="org79c48f7"></a>Butler, Hans. 2011. “Position Control in Lithographic Equipment.” _IEEE Control Systems_ 31 (5):28–47. <https://doi.org/10.1109/mcs.2011.941882>.
<a id="org10c4eb8"></a>Butler, Hans. 2011. “Position Control in Lithographic Equipment.” _IEEE Control Systems_ 31 (5):28–47. <https://doi.org/10.1109/mcs.2011.941882>.