Update Content - 2022-10-27
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@@ -24,12 +24,13 @@ High precision positioning sensors include:
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## Reviews of Relative Position Sensors {#reviews-of-relative-position-sensors}
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- Fleming, A. J., A review of nanometer resolution position sensors: operation and performance (<a href="#citeproc_bib_item_2">Fleming 2013</a>) ([Notes]({{< relref "fleming13_review_nanom_resol_posit_sensor.md" >}}))
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- (<a href="#citeproc_bib_item_3">Gao et al. 2015</a>)
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Table [1](#table--tab:characteristics-relative-sensor) is taken from (<a href="#citeproc_bib_item_1">Collette et al. 2011</a>).
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<a id="table--tab:characteristics-relative-sensor"></a>
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<div class="table-caption">
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<span class="table-number"><a href="#table--tab:characteristics-relative-sensor">Table 1</a></span>:
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<span class="table-number"><a href="#table--tab:characteristics-relative-sensor">Table 1</a>:</span>
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Characteristics of relative measurement sensors
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</div>
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@@ -46,7 +47,7 @@ Table [2](#table--tab:summary-position-sensors) it taken from (<a href="#citepro
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<a id="table--tab:summary-position-sensors"></a>
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<div class="table-caption">
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<span class="table-number"><a href="#table--tab:summary-position-sensors">Table 2</a></span>:
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<span class="table-number"><a href="#table--tab:summary-position-sensors">Table 2</a>:</span>
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Summary of position sensor characteristics. The dynamic range (DNR) and resolution are approximations based on a full-scale range of 100um and a first order bandwidth of \(1 kHz\)
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</div>
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@@ -63,7 +64,7 @@ Table [2](#table--tab:summary-position-sensors) it taken from (<a href="#citepro
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Capacitive Sensors and Eddy-Current sensors are compare [here](https://www.lionprecision.com/comparing-capacitive-and-eddy-current-sensors/).
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Figure [1](#figure--fig:position-sensors-thurner15) is taken from (<a href="#citeproc_bib_item_3">Thurner et al. 2015</a>).
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Figure [1](#figure--fig:position-sensors-thurner15) is taken from (<a href="#citeproc_bib_item_4">Thurner et al. 2015</a>).
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<a id="figure--fig:position-sensors-thurner15"></a>
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@@ -75,5 +76,6 @@ Figure [1](#figure--fig:position-sensors-thurner15) is taken from (<a href="#cit
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<style>.csl-entry{text-indent: -1.5em; margin-left: 1.5em;}</style><div class="csl-bib-body">
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<div class="csl-entry"><a id="citeproc_bib_item_1"></a>Collette, C, K Artoos, M Guinchard, S Janssens, P Carmona Fernandez, and C Hauviller. 2011. “Review of Sensors for Low Frequency Seismic Vibration Measurement.” CERN.</div>
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<div class="csl-entry"><a id="citeproc_bib_item_2"></a>Fleming, Andrew J. 2013. “A Review of Nanometer Resolution Position Sensors: Operation and Performance.” <i>Sensors and Actuators a: Physical</i> 190 (nil): 106–26. doi:<a href="https://doi.org/10.1016/j.sna.2012.10.016">10.1016/j.sna.2012.10.016</a>.</div>
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<div class="csl-entry"><a id="citeproc_bib_item_3"></a>Thurner, Klaus, Francesca Paola Quacquarelli, Pierre-François Braun, Claudio Dal Savio, and Khaled Karrai. 2015. “Fiber-Based Distance Sensing Interferometry.” <i>Applied Optics</i> 54 (10). Optical Society of America: 3051–63.</div>
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<div class="csl-entry"><a id="citeproc_bib_item_3"></a>Gao, W., S.W. Kim, H. Bosse, H. Haitjema, Y.L. Chen, X.D. Lu, W. Knapp, A. Weckenmann, W.T. Estler, and H. Kunzmann. 2015. “Measurement Technologies for Precision Positioning.” <i>Cirp Annals</i> 64 (2): 773–96. doi:<a href="https://doi.org/10.1016/j.cirp.2015.05.009">10.1016/j.cirp.2015.05.009</a>.</div>
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<div class="csl-entry"><a id="citeproc_bib_item_4"></a>Thurner, Klaus, Francesca Paola Quacquarelli, Pierre-François Braun, Claudio Dal Savio, and Khaled Karrai. 2015. “Fiber-Based Distance Sensing Interferometry.” <i>Applied Optics</i> 54 (10). Optical Society of America: 3051–63.</div>
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</div>
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