Update Content - 2020-09-17
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@ -18,7 +18,7 @@ Tags
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## Reviews of Relative Position Sensors {#reviews-of-relative-position-sensors}
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## Reviews of Relative Position Sensors {#reviews-of-relative-position-sensors}
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- Fleming, A. J., A review of nanometer resolution position sensors: operation and performance ([Fleming 2013](#org0e7fb0d)) ([Notes]({{< relref "fleming13_review_nanom_resol_posit_sensor" >}}))
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- Fleming, A. J., A review of nanometer resolution position sensors: operation and performance ([Fleming 2013](#org1ee8f98)) ([Notes]({{< relref "fleming13_review_nanom_resol_posit_sensor" >}}))
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<a id="table--tab:characteristics-relative-sensor"></a>
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<a id="table--tab:characteristics-relative-sensor"></a>
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<div class="table-caption">
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<div class="table-caption">
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@ -95,15 +95,16 @@ Description:
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## Interferometers {#interferometers}
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## Interferometers {#interferometers}
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| Manufacturers | Links | Country |
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| Manufacturers | Links | Country |
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|---------------|----------------------------------------------------------------------------------------------------------|---------|
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|---------------|----------------------------------------------------------------------------------------------------------|-------------|
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| Attocube | [link](http://www.attocube.com/) | Germany |
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| Attocube | [link](http://www.attocube.com/) | Germany |
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| Zygo | [link](https://www.zygo.com/?/met/markets/stageposition/zmi/) | USA |
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| Zygo | [link](https://www.zygo.com/?/met/markets/stageposition/zmi/) | USA |
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| Smaract | [link](https://www.smaract.com/interferometry) | Germany |
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| Smaract | [link](https://www.smaract.com/interferometry) | Germany |
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| Qutools | [link](https://www.qutools.com/qudis/) | Germany |
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| Qutools | [link](https://www.qutools.com/qudis/) | Germany |
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| Renishaw | [link](https://www.renishaw.com/en/fibre-optic-laser-encoder-products--6594) | UK |
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| Renishaw | [link](https://www.renishaw.com/en/fibre-optic-laser-encoder-products--6594) | UK |
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| Sios | [link](https://sios-de.com/products/length-measurement/laser-interferometer/) | Germany |
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| Sios | [link](https://sios-de.com/products/length-measurement/laser-interferometer/) | Germany |
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| Keysight | [link](https://www.keysight.com/en/pc-1000000393%3Aepsg%3Apgr/laser-heads?nid=-536900395.0&cc=FR&lc=fre) | USA |
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| Keysight | [link](https://www.keysight.com/en/pc-1000000393%3Aepsg%3Apgr/laser-heads?nid=-536900395.0&cc=FR&lc=fre) | USA |
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| Optics11 | [link](https://optics11.com/) | Netherlands |
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<div class="table-caption">
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<div class="table-caption">
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<span class="table-number">Table 3</span>:
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<span class="table-number">Table 3</span>:
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@ -116,9 +117,9 @@ Description:
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| Renishaw | 0.2 | 1 | 6 | 1 |
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| Renishaw | 0.2 | 1 | 6 | 1 |
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| Picoscale | 0.2 | 2 | 2 | 1 |
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| Picoscale | 0.2 | 2 | 2 | 1 |
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([Jang and Kim 2017](#orga6fb604))
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([Jang and Kim 2017](#org3ee30b7))
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<a id="org22624ed"></a>
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<a id="org9edecbb"></a>
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{{< figure src="/ox-hugo/position_sensor_interferometer_precision.png" caption="Figure 1: Expected precision of interferometer as a function of measured distance" >}}
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{{< figure src="/ox-hugo/position_sensor_interferometer_precision.png" caption="Figure 1: Expected precision of interferometer as a function of measured distance" >}}
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@ -135,6 +136,6 @@ Description:
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## Bibliography {#bibliography}
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## Bibliography {#bibliography}
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<a id="org0e7fb0d"></a>Fleming, Andrew J. 2013. “A Review of Nanometer Resolution Position Sensors: Operation and Performance.” _Sensors and Actuators a: Physical_ 190 (nil):106–26. <https://doi.org/10.1016/j.sna.2012.10.016>.
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<a id="org1ee8f98"></a>Fleming, Andrew J. 2013. “A Review of Nanometer Resolution Position Sensors: Operation and Performance.” _Sensors and Actuators a: Physical_ 190 (nil):106–26. <https://doi.org/10.1016/j.sna.2012.10.016>.
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<a id="orga6fb604"></a>Jang, Yoon-Soo, and Seung-Woo Kim. 2017. “Compensation of the Refractive Index of Air in Laser Interferometer for Distance Measurement: A Review.” _International Journal of Precision Engineering and Manufacturing_ 18 (12):1881–90. <https://doi.org/10.1007/s12541-017-0217-y>.
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<a id="org3ee30b7"></a>Jang, Yoon-Soo, and Seung-Woo Kim. 2017. “Compensation of the Refractive Index of Air in Laser Interferometer for Distance Measurement: A Review.” _International Journal of Precision Engineering and Manufacturing_ 18 (12):1881–90. <https://doi.org/10.1007/s12541-017-0217-y>.
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@ -34,11 +34,12 @@ Tags
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## Manufacturers {#manufacturers}
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## Manufacturers {#manufacturers}
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| Manufacturers | Links | Country |
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| Manufacturers | Links | Country |
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|---------------|---------------------------------------------------------------------------------------------------------------------------------------------------------------------------------|---------|
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|-----------------|---------------------------------------------------------------------------------------------------------------------------------------------------------------------------------|---------|
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| PI | [link](https://www.physikinstrumente.com/en/products/parallel-kinematic-hexapods/) | Germany |
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| PI | [link](https://www.physikinstrumente.com/en/products/parallel-kinematic-hexapods/) | Germany |
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| Newport | [link](https://www.newport.com/search/?q1=hexapod%3Arelevance%3Acompatibility%3AMETRIC%3AisObsolete%3Afalse%3A-excludeCountries%3AFR%3AnpCategory%3Ahexapods&ajax&text=hexapod) | USA |
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| Newport | [link](https://www.newport.com/search/?q1=hexapod%3Arelevance%3Acompatibility%3AMETRIC%3AisObsolete%3Afalse%3A-excludeCountries%3AFR%3AnpCategory%3Ahexapods&ajax&text=hexapod) | USA |
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| Symetrie | [link](https://symetrie.fr/en/hexapods-en/positioning-hexapods/) | France |
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| Symetrie | [link](https://symetrie.fr/en/hexapods-en/positioning-hexapods/) | France |
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| CSA Engineering | [link](https://www.csaengineering.com/products-services/hexapod-positioning-systems/hexapod-models.html) | USA |
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## Stewart Platforms at ESRF {#stewart-platforms-at-esrf}
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## Stewart Platforms at ESRF {#stewart-platforms-at-esrf}
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Papers by J.E. McInroy:
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Papers by J.E. McInroy:
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- ([O’Brien et al. 1998](#org71c69cc))
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- ([O’Brien et al. 1998](#org6990e82))
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- ([McInroy, O’Brien, and Neat 1999](#orgd9fe3c1))
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- ([McInroy, O’Brien, and Neat 1999](#org2eaf165))
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- ([McInroy 1999](#org82cce67))
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- ([McInroy 1999](#org19d227f))
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- ([McInroy and Hamann 2000](#orgc17f973))
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- ([McInroy and Hamann 2000](#org0de51ce))
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- ([Chen and McInroy 2000](#org21fffc9))
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- ([Chen and McInroy 2000](#orgfa121ee))
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- ([McInroy 2002](#org2f95611))
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- ([McInroy 2002](#org1ad3b68))
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- ([Li, Hamann, and McInroy 2001](#org247940b))
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- ([Li, Hamann, and McInroy 2001](#orga0bd81f))
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- ([Lin and McInroy 2003](#org39928ef))
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- ([Lin and McInroy 2003](#org01eae42))
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- ([Jafari and McInroy 2003](#org1e7c00b))
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- ([Jafari and McInroy 2003](#org9490dc9))
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- ([Chen and McInroy 2004](#orgc6995cb))
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- ([Chen and McInroy 2004](#org3bd3a36))
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## Bibliography {#bibliography}
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## Bibliography {#bibliography}
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<a id="orgc6995cb"></a>Chen, Y., and J.E. McInroy. 2004. “Decoupled Control of Flexure-Jointed Hexapods Using Estimated Joint-Space Mass-Inertia Matrix.” _IEEE Transactions on Control Systems Technology_ 12 (3):413–21. <https://doi.org/10.1109/tcst.2004.824339>.
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<a id="org3bd3a36"></a>Chen, Y., and J.E. McInroy. 2004. “Decoupled Control of Flexure-Jointed Hexapods Using Estimated Joint-Space Mass-Inertia Matrix.” _IEEE Transactions on Control Systems Technology_ 12 (3):413–21. <https://doi.org/10.1109/tcst.2004.824339>.
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<a id="org21fffc9"></a>Chen, Yixin, and J.E. McInroy. 2000. “Identification and Decoupling Control of Flexure Jointed Hexapods.” In _Proceedings 2000 ICRA. Millennium Conference. IEEE International Conference on Robotics and Automation. Symposia Proceedings (Cat. No.00CH37065)_, nil. <https://doi.org/10.1109/robot.2000.844878>.
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<a id="orgfa121ee"></a>Chen, Yixin, and J.E. McInroy. 2000. “Identification and Decoupling Control of Flexure Jointed Hexapods.” In _Proceedings 2000 ICRA. Millennium Conference. IEEE International Conference on Robotics and Automation. Symposia Proceedings (Cat. No.00CH37065)_, nil. <https://doi.org/10.1109/robot.2000.844878>.
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<a id="org1e7c00b"></a>Jafari, F., and J.E. McInroy. 2003. “Orthogonal Gough-Stewart Platforms for Micromanipulation.” _IEEE Transactions on Robotics and Automation_ 19 (4). Institute of Electrical and Electronics Engineers (IEEE):595–603. <https://doi.org/10.1109/tra.2003.814506>.
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<a id="org9490dc9"></a>Jafari, F., and J.E. McInroy. 2003. “Orthogonal Gough-Stewart Platforms for Micromanipulation.” _IEEE Transactions on Robotics and Automation_ 19 (4). Institute of Electrical and Electronics Engineers (IEEE):595–603. <https://doi.org/10.1109/tra.2003.814506>.
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<a id="org39928ef"></a>Lin, Haomin, and J.E. McInroy. 2003. “Adaptive Sinusoidal Disturbance Cancellation for Precise Pointing of Stewart Platforms.” _IEEE Transactions on Control Systems Technology_ 11 (2):267–72. <https://doi.org/10.1109/tcst.2003.809248>.
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<a id="org01eae42"></a>Lin, Haomin, and J.E. McInroy. 2003. “Adaptive Sinusoidal Disturbance Cancellation for Precise Pointing of Stewart Platforms.” _IEEE Transactions on Control Systems Technology_ 11 (2):267–72. <https://doi.org/10.1109/tcst.2003.809248>.
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<a id="org247940b"></a>Li, Xiaochun, Jerry C. Hamann, and John E. McInroy. 2001. “Simultaneous Vibration Isolation and Pointing Control of Flexure Jointed Hexapods.” In _Smart Structures and Materials 2001: Smart Structures and Integrated Systems_, nil. <https://doi.org/10.1117/12.436521>.
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<a id="orga0bd81f"></a>Li, Xiaochun, Jerry C. Hamann, and John E. McInroy. 2001. “Simultaneous Vibration Isolation and Pointing Control of Flexure Jointed Hexapods.” In _Smart Structures and Materials 2001: Smart Structures and Integrated Systems_, nil. <https://doi.org/10.1117/12.436521>.
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<a id="org82cce67"></a>McInroy, J.E. 1999. “Dynamic Modeling of Flexure Jointed Hexapods for Control Purposes.” In _Proceedings of the 1999 IEEE International Conference on Control Applications (Cat. No.99CH36328)_, nil. <https://doi.org/10.1109/cca.1999.806694>.
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<a id="org19d227f"></a>McInroy, J.E. 1999. “Dynamic Modeling of Flexure Jointed Hexapods for Control Purposes.” In _Proceedings of the 1999 IEEE International Conference on Control Applications (Cat. No.99CH36328)_, nil. <https://doi.org/10.1109/cca.1999.806694>.
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<a id="org2f95611"></a>———. 2002. “Modeling and Design of Flexure Jointed Stewart Platforms for Control Purposes.” _IEEE/ASME Transactions on Mechatronics_ 7 (1):95–99. <https://doi.org/10.1109/3516.990892>.
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<a id="org1ad3b68"></a>———. 2002. “Modeling and Design of Flexure Jointed Stewart Platforms for Control Purposes.” _IEEE/ASME Transactions on Mechatronics_ 7 (1):95–99. <https://doi.org/10.1109/3516.990892>.
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<a id="orgc17f973"></a>McInroy, J.E., and J.C. Hamann. 2000. “Design and Control of Flexure Jointed Hexapods.” _IEEE Transactions on Robotics and Automation_ 16 (4):372–81. <https://doi.org/10.1109/70.864229>.
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<a id="org0de51ce"></a>McInroy, J.E., and J.C. Hamann. 2000. “Design and Control of Flexure Jointed Hexapods.” _IEEE Transactions on Robotics and Automation_ 16 (4):372–81. <https://doi.org/10.1109/70.864229>.
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<a id="orgd9fe3c1"></a>McInroy, J.E., J.F. O’Brien, and G.W. Neat. 1999. “Precise, Fault-Tolerant Pointing Using a Stewart Platform.” _IEEE/ASME Transactions on Mechatronics_ 4 (1):91–95. <https://doi.org/10.1109/3516.752089>.
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<a id="org2eaf165"></a>McInroy, J.E., J.F. O’Brien, and G.W. Neat. 1999. “Precise, Fault-Tolerant Pointing Using a Stewart Platform.” _IEEE/ASME Transactions on Mechatronics_ 4 (1):91–95. <https://doi.org/10.1109/3516.752089>.
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<a id="org71c69cc"></a>O’Brien, J.F., J.E. McInroy, D. Bodtke, M. Bruch, and J.C. Hamann. 1998. “Lessons Learned in Nonlinear Systems and Flexible Robots Through Experiments on a 6 Legged Platform.” In _Proceedings of the 1998 American Control Conference. ACC (IEEE Cat. No.98CH36207)_, nil. <https://doi.org/10.1109/acc.1998.703532>.
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<a id="org6990e82"></a>O’Brien, J.F., J.E. McInroy, D. Bodtke, M. Bruch, and J.C. Hamann. 1998. “Lessons Learned in Nonlinear Systems and Flexible Robots Through Experiments on a 6 Legged Platform.” In _Proceedings of the 1998 American Control Conference. ACC (IEEE Cat. No.98CH36207)_, nil. <https://doi.org/10.1109/acc.1998.703532>.
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### Backlinks {#backlinks}
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Backlinks:
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- [Element and system design for active and passive vibration isolation]({{< relref "zuo04_elemen_system_desig_activ_passiv_vibrat_isolat" >}})
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- [Element and system design for active and passive vibration isolation]({{< relref "zuo04_elemen_system_desig_activ_passiv_vibrat_isolat" >}})
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- [A six-axis single-stage active vibration isolator based on stewart platform]({{< relref "preumont07_six_axis_singl_stage_activ" >}})
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- [A six-axis single-stage active vibration isolator based on stewart platform]({{< relref "preumont07_six_axis_singl_stage_activ" >}})
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## Vibration Isolating Pads {#vibration-isolating-pads}
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|--------------|----------------------------------|
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| ACE | [link](https://www.ace-ace.com/) |
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## Vibration Isolation Tables {#vibration-isolation-tables}
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## Vibration Isolation Tables {#vibration-isolation-tables}
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|--------------|-----------------------------------------------------------|
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|-------------------|----------------------------------------------------------------------------------|
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| TMC | [link](https://www.techmfg.com/products/stacis/stacisiii) |
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| TMC | [link](https://www.techmfg.com/products/stacis/stacisiii) |
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| Newport | [link](https://www.newport.com/f/guardian-active-isolation-workstations) |
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| Thorlabs | [link](https://www.thorlabs.com/navigation.cfm?guide%5FID=42) |
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| IDE | [link](https://www.ideworld.com/en/active%5Fvibration%5Fisolation.html) |
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| Harvard Apparatus | [link](https://www.warneronline.com/labmate-vibraplane-workstations-9100-series) |
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| Herzan | [link](https://www.herzan.com/products/active-vibration-control/avi-series.html) |
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| Standa | [link](http://www.standa.lt/products/catalog/optical%5Ftables?item=335) |
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| Table Stable | [link](http://www.tablestable.com/en/products/list/2/) |
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| Accurion | [link](https://www.halcyonics.com/active-vibration-isolation-products) |
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| Vibiso | [link](https://vibiso.com/?page%5Fid=3433) |
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<./biblio/references.bib>
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<./biblio/references.bib>
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