Update Content - 2020-09-04
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@@ -4,13 +4,13 @@ author = ["Thomas Dehaeze"]
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### Backlinks {#backlinks}
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Backlinks:
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- [A review of nanometer resolution position sensors: operation and performance]({{< relref "fleming13_review_nanom_resol_posit_sensor" >}})
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- [Measurement technologies for precision positioning]({{< relref "gao15_measur_techn_precis_posit" >}})
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- [Inertial Sensors]({{< relref "inertial_sensors" >}})
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- [Sensors]({{< relref "sensors" >}})
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- [Collocated Control]({{< relref "collocated_control" >}})
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- [Inertial Sensors]({{< relref "inertial_sensors" >}})
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Tags
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: [Inertial Sensors]({{< relref "inertial_sensors" >}}), [Force Sensors]({{< relref "force_sensors" >}}), [Sensor Fusion]({{< relref "sensor_fusion" >}}), [Signal Conditioner]({{< relref "signal_conditioner" >}}), [Signal to Noise Ratio]({{< relref "signal_to_noise_ratio" >}})
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@@ -18,7 +18,7 @@ Tags
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## Reviews of Relative Position Sensors {#reviews-of-relative-position-sensors}
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- Fleming, A. J., A review of nanometer resolution position sensors: operation and performance ([Fleming 2013](#orgdd1b6d5)) ([Notes]({{< relref "fleming13_review_nanom_resol_posit_sensor" >}}))
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- Fleming, A. J., A review of nanometer resolution position sensors: operation and performance ([Fleming 2013](#org0e7fb0d)) ([Notes]({{< relref "fleming13_review_nanom_resol_posit_sensor" >}}))
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<a id="table--tab:characteristics-relative-sensor"></a>
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<div class="table-caption">
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@@ -116,9 +116,9 @@ Description:
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| Renishaw | 0.2 | 1 | 6 | 1 |
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| Picoscale | 0.2 | 2 | 2 | 1 |
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([Jang and Kim 2017](#orgbcf1569))
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([Jang and Kim 2017](#orga6fb604))
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<a id="orgf2b5520"></a>
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<a id="org22624ed"></a>
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{{< figure src="/ox-hugo/position_sensor_interferometer_precision.png" caption="Figure 1: Expected precision of interferometer as a function of measured distance" >}}
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@@ -130,10 +130,11 @@ Description:
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| Heidenhain | [link](https://www.heidenhain.com/en%5FUS/products/linear-encoders/) | Germany |
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| MicroE Systems | [link](https://www.celeramotion.com/microe/products/linear-encoders/) | USA |
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| Renishaw | [link](https://www.renishaw.com/en/browse-encoder-range--6440) | UK |
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| Celera Motion | [link](https://www.celeramotion.com/microe/) | USA |
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## Bibliography {#bibliography}
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<a id="orgdd1b6d5"></a>Fleming, Andrew J. 2013. “A Review of Nanometer Resolution Position Sensors: Operation and Performance.” _Sensors and Actuators a: Physical_ 190 (nil):106–26. <https://doi.org/10.1016/j.sna.2012.10.016>.
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<a id="org0e7fb0d"></a>Fleming, Andrew J. 2013. “A Review of Nanometer Resolution Position Sensors: Operation and Performance.” _Sensors and Actuators a: Physical_ 190 (nil):106–26. <https://doi.org/10.1016/j.sna.2012.10.016>.
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<a id="orgbcf1569"></a>Jang, Yoon-Soo, and Seung-Woo Kim. 2017. “Compensation of the Refractive Index of Air in Laser Interferometer for Distance Measurement: A Review.” _International Journal of Precision Engineering and Manufacturing_ 18 (12):1881–90. <https://doi.org/10.1007/s12541-017-0217-y>.
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<a id="orga6fb604"></a>Jang, Yoon-Soo, and Seung-Woo Kim. 2017. “Compensation of the Refractive Index of Air in Laser Interferometer for Distance Measurement: A Review.” _International Journal of Precision Engineering and Manufacturing_ 18 (12):1881–90. <https://doi.org/10.1007/s12541-017-0217-y>.
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