Update Content - 2022-03-15
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title = "Fundamental principles of engineering nanometrology"
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author = ["Thomas Dehaeze"]
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author = ["Dehaeze Thomas"]
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keywords = ["Metrology"]
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draft = false
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Tags
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: [Metrology]({{<relref "metrology.md#" >}})
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: [Metrology]({{< relref "metrology.md" >}})
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Reference
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: ([Leach 2014](#org27b4df3))
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: (<a href="#citeproc_bib_item_1">Leach 2014</a>)
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Author(s)
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: Leach, R.
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@@ -64,8 +64,8 @@ The second order nature means that cosine error quickly diminish as the alignmen
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## Latest advances in displacement interferometry {#latest-advances-in-displacement-interferometry}
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Commercial interferometers
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=> fused silica optics housed in Invar mounts
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=> all the optical components are mounted to one central optic to reduce the susceptibility to thermal variations
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=> fused silica optics housed in Invar mounts
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=> all the optical components are mounted to one central optic to reduce the susceptibility to thermal variations
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One advantage that homodyme systems have over heterodyne systems is their ability to readily have the source fibre delivered to the interferometer.
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This type of angular interferometer is used to measure small angles (less than \\(10deg\\)).
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## Bibliography {#bibliography}
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<a id="org27b4df3"></a>Leach, Richard. 2014. _Fundamental Principles of Engineering Nanometrology_. Elsevier. <https://doi.org/10.1016/c2012-0-06010-3>.
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<style>.csl-entry{text-indent: -1.5em; margin-left: 1.5em;}</style><div class="csl-bib-body">
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<div class="csl-entry"><a id="citeproc_bib_item_1"></a>Leach, Richard. 2014. <i>Fundamental Principles of Engineering Nanometrology</i>. Elsevier. doi:<a href="https://doi.org/10.1016/c2012-0-06010-3">10.1016/c2012-0-06010-3</a>.</div>
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</div>
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