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PhDthesis were categorized as articles.
Add "fron matter" to specify zettels category
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Thomas Dehaeze
2021-09-29 22:30:09 +02:00
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content/inproceedings/heertjes20_contr.md
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title = "Control of wafer scanners: methods and developments"
author = ["Thomas Dehaeze"]
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draft = true
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Tags
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Reference
: ([Heertjes et al. 2020](#org38a977c))
: ([Heertjes et al. 2020](#org3f3475f))
Author(s)
: Heertjes, Marcel Fran\ccois, Butler, H., Dirkx, N., van der Meulen, S., Ahlawat, R., O'Brien, K., Simonelli, J., …
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## Bibliography {#bibliography}
<a id="org38a977c"></a>Heertjes, Marcel François, Hans Butler, NJ Dirkx, SH van der Meulen, R Ahlawat, K O’Brien, J Simonelli, KT Teng, and Y Zhao. 2020. “Control of Wafer Scanners: Methods and Developments.” In _2020 American Control Conference (ACC)_, 3686–3703. IEEE.
<a id="org3f3475f"></a>Heertjes, Marcel François, Hans Butler, NJ Dirkx, SH van der Meulen, R Ahlawat, K O’Brien, J Simonelli, KT Teng, and Y Zhao. 2020. “Control of Wafer Scanners: Methods and Developments.” In _2020 American Control Conference (ACC)_, 3686–3703. IEEE.