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PhDthesis were categorized as articles.
Add "fron matter" to specify zettels category
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Thomas Dehaeze
2021-09-29 22:30:09 +02:00
parent 5c68a218ca
commit 158dfe302f
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content/article/butler11_posit_contr_lithog_equip.md
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title = "Position control in lithographic equipment"
author = ["Thomas Dehaeze"]
draft = false
draft = true
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Tags
: [Multivariable Control]({{< relref "multivariable_control" >}}), [Positioning Stations]({{< relref "positioning_stations" >}})
: [Multivariable Control]({{<relref "multivariable_control.md#" >}}), [Positioning Stations]({{<relref "positioning_stations.md#" >}})
Reference
: ([Butler 2011](#org338ffef))
: ([Butler 2011](#org9e15931))
Author(s)
: Butler, H.
@@ -20,4 +20,4 @@ Year
## Bibliography {#bibliography}
<a id="org338ffef"></a>Butler, Hans. 2011. “Position Control in Lithographic Equipment.” _IEEE Control Systems_ 31 (5):28–47. <https://doi.org/10.1109/mcs.2011.941882>.
<a id="org9e15931"></a>Butler, Hans. 2011. “Position Control in Lithographic Equipment.” _IEEE Control Systems_ 31 (5):28–47. <https://doi.org/10.1109/mcs.2011.941882>.