digital-brain/content/article/butler11_posit_contr_lithog_equip.md

+++
title = "Position control in lithographic equipment"
author = ["Dehaeze Thomas"]
draft = true
+++

Tags
: [Multivariable Control]({{< relref "multivariable_control.md" >}}), [Positioning Stations]({{< relref "positioning_stations.md" >}})

Reference
: (<a href="#citeproc_bib_item_1">Butler 2011</a>)

Author(s)
: Butler, H.

Year
: 2011


## Bibliography {#bibliography}

<style>.csl-entry{text-indent: -1.5em; margin-left: 1.5em;}</style><div class="csl-bib-body">
  <div class="csl-entry"><a id="citeproc_bib_item_1"></a>Butler, Hans. 2011. “Position Control in Lithographic Equipment.” <i>IEEE Control Systems</i> 31 (5): 28–47. doi:<a href="https://doi.org/10.1109/mcs.2011.941882">10.1109/mcs.2011.941882</a>.</div>
</div>