552 lines
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552 lines
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<meta name="author" content="
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—
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Thomas Dehaeze
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" /><meta name="description" content="Tags Inertial Sensors Reviews of position sensors (Collette {\it et al.}, 2012) Fleming, A. J., A review of nanometer resolution position sensors: operation and performance (Andrew Fleming, 2013) (Notes) Relative Position Sensors
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Table 1: Characteristics of relative measurement sensors collette11_review Technology Frequency Resolution Range T Range LVDT DC-200 Hz 10 nm rms 1-10 mm -50,100 °C Eddy current 5 kHz 0." />
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<h1 class="post-title">Position Sensors</h1>
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</header>
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<div class="post-toc" id="post-toc">
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<nav id="TableOfContents">
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<ul>
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<li><a href="#reviews-of-position-sensors">Reviews of position sensors</a></li>
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<li><a href="#relative-position-sensors">Relative Position Sensors</a>
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<ul>
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<li><a href="#strain-gauge">Strain Gauge</a></li>
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<li><a href="#capacitive-sensor">Capacitive Sensor</a></li>
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<li><a href="#inductive-sensor--eddy-current">Inductive Sensor (Eddy Current)</a></li>
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<li><a href="#inductive-sensor--lvdt">Inductive Sensor (LVDT)</a></li>
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<li><a href="#interferometers">Interferometers</a></li>
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<li><a href="#fiber-optic-displacement-sensor">Fiber Optic Displacement Sensor</a></li>
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</ul>
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</li>
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<dl>
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<dt>Tags</dt>
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<dd><a href="/zettels/inertial_sensors/">Inertial Sensors</a></dd>
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</dl>
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<h2 id="reviews-of-position-sensors">Reviews of position sensors</h2>
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<ul>
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<li><sup id="0b0b67de6dddc4d28031ab2d3b28cd3d"><a href="#collette12_compar" title="Collette, Janssens, Mokrani, Fueyo-Roza, L, Artoos, Esposito, Fernandez-Carmona, , Guinchard \& Leuxe, Comparison of new absolute displacement sensors, in in: {International Conference on Noise and Vibration Engineering
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(ISMA)}, edited by (2012)">(Collette {\it et al.}, 2012)</a></sup></li>
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<li>Fleming, A. J., A review of nanometer resolution position sensors: operation and performance <sup id="3fb5b61524290e36d639a4fac65703d0"><a href="#fleming13_review_nanom_resol_posit_sensor" title="Andrew Fleming, A Review of Nanometer Resolution Position Sensors: Operation and Performance, {Sensors and Actuators A: Physical}, v(nil), 106-126 (2013).">(Andrew Fleming, 2013)</a></sup> (<a href="/paper/fleming13_review_nanom_resol_posit_sensor/">Notes</a>)</li>
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</ul>
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<h2 id="relative-position-sensors">Relative Position Sensors</h2>
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<p><a id="table--tab:characteristics-relative-sensor"></a></p>
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<div class="table-caption">
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<span class="table-number"><a href="#table--tab:characteristics-relative-sensor">Table 1</a></span>:
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Characteristics of relative measurement sensors <a class='org-ref-reference' href="#collette11_review">collette11_review</a>
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</div>
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<table>
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<thead>
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<tr>
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<th>Technology</th>
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<th>Frequency</th>
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<th>Resolution</th>
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<th>Range</th>
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<th>T Range</th>
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</tr>
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</thead>
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<tbody>
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<tr>
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<td>LVDT</td>
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<td>DC-200 Hz</td>
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<td>10 nm rms</td>
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<td>1-10 mm</td>
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<td>-50,100 °C</td>
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</tr>
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<tr>
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<td>Eddy current</td>
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<td>5 kHz</td>
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<td>0.1-100 nm rms</td>
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<td>0.5-55 mm</td>
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<td>-50,100 °C</td>
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</tr>
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<tr>
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<td>Capacitive</td>
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<td>DC-100 kHz</td>
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<td>0.05-50 nm rms</td>
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<td>50 nm - 1 cm</td>
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<td>-40,100 °C</td>
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</tr>
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<tr>
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<td>Interferometer</td>
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<td>300 kHz</td>
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<td>0.1 nm rms</td>
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<td>10 cm</td>
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<td>-250,100 °C</td>
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</tr>
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<tr>
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<td>Encoder</td>
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<td>DC-1 MHz</td>
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<td>1 nm rms</td>
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<td>7-27 mm</td>
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<td>0,40 °C</td>
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</tr>
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<tr>
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<td>Bragg Fibers</td>
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<td>DC-150 Hz</td>
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<td>0.3 nm rms</td>
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<td>3.5 cm</td>
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<td>-30,80 °C</td>
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</tr>
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</tbody>
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</table>
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<p><a id="table--tab:summary-position-sensors"></a></p>
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<div class="table-caption">
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<span class="table-number"><a href="#table--tab:summary-position-sensors">Table 2</a></span>:
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Summary of position sensor characteristics. The dynamic range (DNR) and resolution are approximations based on a full-scale range of \(100 \mu m\) and a first order bandwidth of \(1 kHz\) <a class='org-ref-reference' href="#fleming13_review_nanom_resol_posit_sensor">fleming13_review_nanom_resol_posit_sensor</a>
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</div>
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<table>
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<thead>
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<tr>
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<th>Sensor Type</th>
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<th>Range</th>
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<th>DNR</th>
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<th>Resolution</th>
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<th>Max. BW</th>
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<th>Accuracy</th>
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</tr>
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</thead>
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<tbody>
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<tr>
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<td>Metal foil</td>
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<td>\(10-500 \mu m\)</td>
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<td>230 ppm</td>
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<td>23 nm</td>
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<td>1-10 kHz</td>
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<td>1% FSR</td>
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</tr>
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<tr>
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<td>Piezoresistive</td>
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<td>\(1-500 \mu m\)</td>
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<td>5 ppm</td>
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<td>0.5 nm</td>
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<td>>100 kHz</td>
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<td>1% FSR</td>
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</tr>
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<tr>
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<td>Capacitive</td>
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<td>\(10 \mu m\) to \(10 mm\)</td>
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<td>24 ppm</td>
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<td>2.4 nm</td>
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<td>100 kHz</td>
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<td>0.1% FSR</td>
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</tr>
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<tr>
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<td>Electrothermal</td>
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<td>\(10 \mu m\) to \(1 mm\)</td>
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<td>100 ppm</td>
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<td>10 nm</td>
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<td>10 kHz</td>
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<td>1% FSR</td>
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</tr>
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<tr>
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<td>Eddy current</td>
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<td>\(100 \mu m\) to \(80 mm\)</td>
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<td>10 ppm</td>
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<td>1 nm</td>
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<td>40 kHz</td>
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<td>0.1% FSR</td>
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</tr>
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<tr>
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<td>LVDT</td>
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<td>\(0.5-500 mm\)</td>
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<td>10 ppm</td>
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<td>5 nm</td>
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<td>1 kHz</td>
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<td>0.25% FSR</td>
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</tr>
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<tr>
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<td>Interferometer</td>
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<td>Meters</td>
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<td></td>
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<td>0.5 nm</td>
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<td>>100kHz</td>
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<td>1 ppm FSR</td>
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</tr>
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<tr>
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<td>Encoder</td>
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<td>Meters</td>
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<td></td>
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<td>6 nm</td>
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<td>>100kHz</td>
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<td>5 ppm FSR</td>
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</tr>
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</tbody>
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</table>
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<h3 id="strain-gauge">Strain Gauge</h3>
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<h3 id="capacitive-sensor">Capacitive Sensor</h3>
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<p>Description:</p>
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<ul>
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<li><a href="http://www.lionprecision.com/tech-library/technotes/cap-0020-sensor-theory.html">http://www.lionprecision.com/tech-library/technotes/cap-0020-sensor-theory.html</a></li>
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<li><a href="https://www.lionprecision.com/comparing-capacitive-and-eddy-current-sensors">https://www.lionprecision.com/comparing-capacitive-and-eddy-current-sensors</a></li>
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</ul>
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<table>
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<thead>
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<tr>
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<th></th>
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<th></th>
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</tr>
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</thead>
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<tbody>
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<tr>
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<td>Micro Sense</td>
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<td><a href="http://www.microsense.net/products-position-sensors.htm">link</a></td>
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</tr>
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<tr>
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<td>Micro-Epsilon</td>
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<td><a href="https://www.micro-epsilon.com/displacement-position-sensors/capacitive-sensor/">link</a></td>
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</tr>
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<tr>
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<td>PI</td>
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<td><a href="https://www.physikinstrumente.com/en/technology/sensor-technologies/capacitive-sensors/">link</a></td>
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</tr>
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<tr>
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<td>Unipulse</td>
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<td><a href="https://www.unipulse.com/product/ps-ia/">link</a></td>
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</tr>
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<tr>
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<td>Lion-Precision</td>
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<td><a href="https://www.lionprecision.com/products/capacitive-sensors">link</a></td>
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</tr>
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</tbody>
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</table>
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<h3 id="inductive-sensor--eddy-current">Inductive Sensor (Eddy Current)</h3>
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<table>
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<thead>
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<tr>
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<th></th>
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<th></th>
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</tr>
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</thead>
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|
|
<tbody>
|
|||
|
|
<tr>
|
|||
|
|
<td>Micro-Epsilon</td>
|
|||
|
|
<td><a href="https://www.micro-epsilon.com/displacement-position-sensors/eddy-current-sensor/">link</a></td>
|
|||
|
|
</tr>
|
|||
|
|
<tr>
|
|||
|
|
<td>Lion Precision</td>
|
|||
|
|
<td><a href="https://www.lionprecision.com/products/eddy-current-sensors">link</a></td>
|
|||
|
|
</tr>
|
|||
|
|
</tbody>
|
|||
|
|
</table>
|
|||
|
|
<h3 id="inductive-sensor--lvdt">Inductive Sensor (LVDT)</h3>
|
|||
|
|
<table>
|
|||
|
|
<thead>
|
|||
|
|
<tr>
|
|||
|
|
<th></th>
|
|||
|
|
<th></th>
|
|||
|
|
</tr>
|
|||
|
|
</thead>
|
|||
|
|
<tbody>
|
|||
|
|
<tr>
|
|||
|
|
<td>Micro-Epsilon</td>
|
|||
|
|
<td><a href="https://www.micro-epsilon.com/displacement-position-sensors/inductive-sensor-lvdt/">link</a></td>
|
|||
|
|
</tr>
|
|||
|
|
<tr>
|
|||
|
|
<td>Keyence</td>
|
|||
|
|
<td><a href="https://www.keyence.eu/products/measure/contact-distance-lvdt/gt2/index.jsp">link</a></td>
|
|||
|
|
</tr>
|
|||
|
|
</tbody>
|
|||
|
|
</table>
|
|||
|
|
<h3 id="interferometers">Interferometers</h3>
|
|||
|
|
<table>
|
|||
|
|
<thead>
|
|||
|
|
<tr>
|
|||
|
|
<th></th>
|
|||
|
|
<th></th>
|
|||
|
|
</tr>
|
|||
|
|
</thead>
|
|||
|
|
<tbody>
|
|||
|
|
<tr>
|
|||
|
|
<td>Attocube</td>
|
|||
|
|
<td><a href="http://www.attocube.com/">link</a></td>
|
|||
|
|
</tr>
|
|||
|
|
<tr>
|
|||
|
|
<td>Zygo</td>
|
|||
|
|
<td><a href="https://www.zygo.com/?/met/markets/stageposition/zmi/">link</a></td>
|
|||
|
|
</tr>
|
|||
|
|
<tr>
|
|||
|
|
<td>Smaract</td>
|
|||
|
|
<td><a href="https://www.smaract.com/interferometry">link</a></td>
|
|||
|
|
</tr>
|
|||
|
|
<tr>
|
|||
|
|
<td>Qutools</td>
|
|||
|
|
<td><a href="https://www.qutools.com/qudis/">link</a></td>
|
|||
|
|
</tr>
|
|||
|
|
<tr>
|
|||
|
|
<td>Renishaw</td>
|
|||
|
|
<td><a href="https://www.renishaw.com/en/fibre-optic-laser-encoder-products--6594">link</a></td>
|
|||
|
|
</tr>
|
|||
|
|
<tr>
|
|||
|
|
<td>Sios</td>
|
|||
|
|
<td><a href="https://sios-de.com/products/length-measurement/laser-interferometer/">link</a></td>
|
|||
|
|
</tr>
|
|||
|
|
<tr>
|
|||
|
|
<td>Keysight</td>
|
|||
|
|
<td><a href="https://www.keysight.com/en/pc-1000000393%3Aepsg%3Apgr/laser-heads?nid=-536900395.0&cc=FR&lc=fre">link</a></td>
|
|||
|
|
</tr>
|
|||
|
|
</tbody>
|
|||
|
|
</table>
|
|||
|
|
<div class="table-caption">
|
|||
|
|
<span class="table-number">Table 3</span>:
|
|||
|
|
Characteristics of Environmental Units
|
|||
|
|
</div>
|
|||
|
|
<table>
|
|||
|
|
<thead>
|
|||
|
|
<tr>
|
|||
|
|
<th></th>
|
|||
|
|
<th>Temperature (\(\pm\ ^oC\))</th>
|
|||
|
|
<th>Pressure (\(\pm\ hPa\))</th>
|
|||
|
|
<th>Humidity \(\pm\% RH\)</th>
|
|||
|
|
<th>Wavelength Accuracy (\(\pm\ \text{ppm}\))</th>
|
|||
|
|
</tr>
|
|||
|
|
</thead>
|
|||
|
|
<tbody>
|
|||
|
|
<tr>
|
|||
|
|
<td>Attocube</td>
|
|||
|
|
<td>0.1</td>
|
|||
|
|
<td>1</td>
|
|||
|
|
<td>2</td>
|
|||
|
|
<td>0.5</td>
|
|||
|
|
</tr>
|
|||
|
|
<tr>
|
|||
|
|
<td>Renishaw</td>
|
|||
|
|
<td>0.2</td>
|
|||
|
|
<td>1</td>
|
|||
|
|
<td>6</td>
|
|||
|
|
<td>1</td>
|
|||
|
|
</tr>
|
|||
|
|
<tr>
|
|||
|
|
<td>Picoscale</td>
|
|||
|
|
<td>0.2</td>
|
|||
|
|
<td>2</td>
|
|||
|
|
<td>2</td>
|
|||
|
|
<td>1</td>
|
|||
|
|
</tr>
|
|||
|
|
</tbody>
|
|||
|
|
</table>
|
|||
|
|
<p><sup id="7658b1219a4458a62ae8c6f51b767542"><a href="#jang17_compen_refrac_index_air_laser" title="Yoon-Soo Jang \& Seung-Woo Kim, Compensation of the Refractive Index of Air in Laser Interferometer for Distance Measurement: a Review, {International Journal of Precision Engineering and
|
|||
|
|
Manufacturing}, v(12), 1881-1890 (2017).">(Yoon-Soo Jang & Seung-Woo Kim, 2017)</a></sup></p>
|
|||
|
|
<p><a id="orge1e204f"></a></p>
|
|||
|
|
<figure>
|
|||
|
|
<img src="/ox-hugo/position_sensor_interferometer_precision.png"
|
|||
|
|
alt="Figure 1: Expected precision of interferometer as a function of measured distance"/> <figcaption>
|
|||
|
|
<p>Figure 1: Expected precision of interferometer as a function of measured distance</p>
|
|||
|
|
</figcaption>
|
|||
|
|
</figure>
|
|||
|
|
|
|||
|
|
<h3 id="fiber-optic-displacement-sensor">Fiber Optic Displacement Sensor</h3>
|
|||
|
|
<table>
|
|||
|
|
<thead>
|
|||
|
|
<tr>
|
|||
|
|
<th></th>
|
|||
|
|
<th></th>
|
|||
|
|
</tr>
|
|||
|
|
</thead>
|
|||
|
|
<tbody>
|
|||
|
|
<tr>
|
|||
|
|
<td>Unipulse</td>
|
|||
|
|
<td><a href="https://www.unipulse.com/product/atw200-2/">link</a></td>
|
|||
|
|
</tr>
|
|||
|
|
</tbody>
|
|||
|
|
</table>
|
|||
|
|
<h1 id="bibliography">Bibliography</h1>
|
|||
|
|
<p><a id="collette12_compar"></a>Collette, C., Janssens, S., Mokrani, B., Fueyo-Roza, L., Artoos, K., Esposito, M., Fernandez-Carmona, P., …, <em>Comparison of new absolute displacement sensors</em>, In , International Conference on Noise and Vibration Engineering (ISMA) (pp. ) (2012). : . <a href="#0b0b67de6dddc4d28031ab2d3b28cd3d">↩</a></p>
|
|||
|
|
<p><a id="fleming13_review_nanom_resol_posit_sensor"></a>Fleming, A. J., <em>A review of nanometer resolution position sensors: operation and performance</em>, Sensors and Actuators A: Physical, <em>190(nil)</em>, 106–126 (2013). <a href="http://dx.doi.org/10.1016/j.sna.2012.10.016">http://dx.doi.org/10.1016/j.sna.2012.10.016</a> <a href="#3fb5b61524290e36d639a4fac65703d0">↩</a></p>
|
|||
|
|
<p><a id="collette11_review"></a>Collette, C., Artoos, K., Guinchard, M., Janssens, S., Carmona Fernandez, P., & Hauviller, C., <em>Review of sensors for low frequency seismic vibration measurement</em> (2011). <a href="#642a18d86de4e062c6afb0f5f20501c4">↩</a></p>
|
|||
|
|
<p><a id="jang17_compen_refrac_index_air_laser"></a>Jang, Y., & Kim, S., <em>Compensation of the refractive index of air in laser interferometer for distance measurement: a review</em>, International Journal of Precision Engineering and Manufacturing, <em>18(12)</em>, 1881–1890 (2017). <a href="http://dx.doi.org/10.1007/s12541-017-0217-y">http://dx.doi.org/10.1007/s12541-017-0217-y</a> <a href="#7658b1219a4458a62ae8c6f51b767542">↩</a></p>
|
|||
|
|
<h2 id="backlinks">Backlinks</h2>
|
|||
|
|
<ul>
|
|||
|
|
<li><a href="/paper/gao15_measur_techn_precis_posit/">Measurement technologies for precision positioning</a></li>
|
|||
|
|
<li><a href="/paper/fleming13_review_nanom_resol_posit_sensor/">A review of nanometer resolution position sensors: operation and performance</a></li>
|
|||
|
|
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|
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