242 lines
9.2 KiB
HTML
242 lines
9.2 KiB
HTML
|
<!DOCTYPE html>
|
||
|
|
<html lang="en">
|
||
|
|
<head>
|
||
|
|
<meta charset="utf-8">
|
||
|
|
<meta http-equiv="X-UA-Compatible" content="IE=edge,chrome=1">
|
||
|
|
<title>An instrument for 3d x-ray nano-imaging - My digital brain</title>
|
||
|
|
<meta name="renderer" content="webkit" />
|
||
|
|
<meta name="viewport" content="width=device-width, initial-scale=1, maximum-scale=1"/>
|
||
|
|
|
||
|
|
<meta http-equiv="Cache-Control" content="no-transform" />
|
||
|
|
<meta http-equiv="Cache-Control" content="no-siteapp" />
|
||
|
|
|
||
|
|
<meta name="theme-color" content="#f8f5ec" />
|
||
|
|
<meta name="msapplication-navbutton-color" content="#f8f5ec">
|
||
|
|
<meta name="apple-mobile-web-app-capable" content="yes">
|
||
|
|
<meta name="apple-mobile-web-app-status-bar-style" content="#f8f5ec">
|
||
|
|
|
||
|
|
|
||
|
|
<meta name="author" content="
|
||
|
|
|
||
|
|
|
||
|
|
—
|
||
|
|
|
||
|
|
Thomas Dehaeze
|
||
|
|
|
||
|
|
|
||
|
|
|
||
|
|
" /><meta name="description" content="Tags Nano Active Stabilization System, Positioning Stations Reference (Holler {\it et al.}, 2012) Author(s) Holler, M., Raabe, J., Diaz, A., Guizar-Sicairos, M., Quitmann, C., Menzel, A., &amp; Bunk, O. Year 2012 Instrument similar to the NASS. Obtain position stability of 10nm (standard deviation).
|
||
|
|
|
||
|
|
Figure 1: Schematic of the tomography setup
|
||
|
|
Limited resolution due to instrumentation: The resolution of ptychographic tomography remains above 100nm due to instabilities and drifts of the scanning systems." />
|
||
|
|
<link rel="canonical" href="/paper/holler12_instr_x_ray_nano_imagin/" />
|
||
|
|
<link rel="icon" type="image/png" sizes="32x32" href="/favicon-32x32.png">
|
||
|
|
<link rel="icon" type="image/png" sizes="16x16" href="/favicon-16x16.png">
|
||
|
|
|
||
|
|
|
||
|
|
|
||
|
|
<link href="/sass/main.min.47a894bd6354cc46903f62433747958dc936e1c95c28a76ac80319bca9708ed1.css" rel="stylesheet">
|
||
|
|
|
||
|
|
|
||
|
|
|
||
|
|
|
||
|
|
</head>
|
||
|
|
<body>
|
||
|
|
<div id="mobile-navbar" class="mobile-navbar">
|
||
|
|
<div class="mobile-header-logo">
|
||
|
|
<a href="/" class="logo">Digital Brain</a>
|
||
|
|
</div>
|
||
|
|
<div class="mobile-navbar-icon">
|
||
|
|
<span></span>
|
||
|
|
<span></span>
|
||
|
|
<span></span>
|
||
|
|
</div>
|
||
|
|
</div>
|
||
|
|
<nav id="mobile-menu" class="mobile-menu slideout-menu">
|
||
|
|
<ul class="mobile-menu-list">
|
||
|
|
<a href="/">
|
||
|
|
<li class="mobile-menu-item">Home</li>
|
||
|
|
</a><a href="/zettels/">
|
||
|
|
<li class="mobile-menu-item">Zettels</li>
|
||
|
|
</a><a href="/book/">
|
||
|
|
<li class="mobile-menu-item">Books</li>
|
||
|
|
</a><a href="/paper/">
|
||
|
|
<li class="mobile-menu-item">Papers</li>
|
||
|
|
</a><a href="/search/">
|
||
|
|
<li class="mobile-menu-item">Search</li>
|
||
|
|
</a>
|
||
|
|
</ul>
|
||
|
|
</nav>
|
||
|
|
<div class="container" id="mobile-panel">
|
||
|
|
<header id="header" class="header">
|
||
|
|
<div class="logo-wrapper">
|
||
|
|
<a href="/" class="logo">Digital Brain</a>
|
||
|
|
</div>
|
||
|
|
|
||
|
|
<nav class="site-navbar">
|
||
|
|
<ul id="menu" class="menu">
|
||
|
|
<li class="menu-item">
|
||
|
|
<a class="menu-item-link" href="/">Home</a>
|
||
|
|
</li><li class="menu-item">
|
||
|
|
<a class="menu-item-link" href="/zettels/">Zettels</a>
|
||
|
|
</li><li class="menu-item">
|
||
|
|
<a class="menu-item-link" href="/book/">Books</a>
|
||
|
|
</li><li class="menu-item">
|
||
|
|
<a class="menu-item-link" href="/paper/">Papers</a>
|
||
|
|
</li><li class="menu-item">
|
||
|
|
<a class="menu-item-link" href="/search/">Search</a>
|
||
|
|
</li>
|
||
|
|
</ul>
|
||
|
|
</nav>
|
||
|
|
|
||
|
|
</header>
|
||
|
|
|
||
|
|
<main id="main" class="main">
|
||
|
|
<div class="content-wrapper">
|
||
|
|
<div id="content" class="content">
|
||
|
|
<article class="post">
|
||
|
|
|
||
|
|
<header class="post-header">
|
||
|
|
<h1 class="post-title">An instrument for 3d x-ray nano-imaging</h1>
|
||
|
|
</header>
|
||
|
|
|
||
|
|
<div class="post-toc" id="post-toc">
|
||
|
|
<h2 class="post-toc-title">Contents</h2>
|
||
|
|
<div class="post-toc-content">
|
||
|
|
<nav id="TableOfContents"></nav>
|
||
|
|
</div>
|
||
|
|
</div>
|
||
|
|
<div class="post-content">
|
||
|
|
<dl>
|
||
|
|
<dt>Tags</dt>
|
||
|
|
<dd><a href="/zettels/nano_active_stabilization_system/">Nano Active Stabilization System</a>, <a href="/zettels/positioning_stations/">Positioning Stations</a></dd>
|
||
|
|
<dt>Reference</dt>
|
||
|
|
<dd><sup id="66ab0e7602a1dedda963d7da60533b0d"><a href="#holler12_instr_x_ray_nano_imagin" title="Holler, Raabe, Diaz, Guizar-Sicairos, , Quitmann, Menzel \& Bunk, An Instrument for 3d X-Ray Nano-Imaging, {Review of Scientific Instruments}, v(7), 073703 (2012).">(Holler {\it et al.}, 2012)</a></sup></dd>
|
||
|
|
<dt>Author(s)</dt>
|
||
|
|
<dd>Holler, M., Raabe, J., Diaz, A., Guizar-Sicairos, M., Quitmann, C., Menzel, A., & Bunk, O.</dd>
|
||
|
|
<dt>Year</dt>
|
||
|
|
<dd>2012</dd>
|
||
|
|
</dl>
|
||
|
|
<p>Instrument similar to the NASS.
|
||
|
|
Obtain position stability of 10nm (standard deviation).</p>
|
||
|
|
<p><a id="orgba4a339"></a></p>
|
||
|
|
<figure>
|
||
|
|
<img src="/ox-hugo/holler12_station.png"
|
||
|
|
alt="Figure 1: Schematic of the tomography setup"/> <figcaption>
|
||
|
|
<p>Figure 1: Schematic of the tomography setup</p>
|
||
|
|
</figcaption>
|
||
|
|
</figure>
|
||
|
|
|
||
|
|
<ul>
|
||
|
|
<li>
|
||
|
|
<p><strong>Limited resolution due to instrumentation</strong>:
|
||
|
|
The resolution of ptychographic tomography remains above 100nm due to instabilities and drifts of the scanning systems.</p>
|
||
|
|
</li>
|
||
|
|
<li>
|
||
|
|
<p><strong>Need of a Metrology System</strong>:</p>
|
||
|
|
<blockquote>
|
||
|
|
<p>To achieve positioning accuracy and stability in the nanometer range, one cannot rely on the position encoders built into individual positioning stages.
|
||
|
|
A precise exteroceptive measurement of the relative position of the optical elements with respect to the sample is mandatory.
|
||
|
|
Thus, thermal drifts and parasitic motions can be measured and compensated for.</p>
|
||
|
|
</blockquote>
|
||
|
|
</li>
|
||
|
|
<li>
|
||
|
|
<p><strong>Interferometer System Concept</strong>:
|
||
|
|
The sample is aligned with the X-ray with the XYZ piezo stage.
|
||
|
|
As a result, the metrology sphere will be usually off center with respect to the rotation axis of the spindle.
|
||
|
|
That implies that the laser will not propagate back to the interferometer at all rotation angles.
|
||
|
|
A position sensitive detector (PSD) is used, it provides a measurement of the position of the sphere in the plane perpendicular to the laser.
|
||
|
|
The interferometer is positionned on top of a translation stage. The PSD information is used to close the loop so that the interferometer follows the displacement of the metrology sphere.</p>
|
||
|
|
</li>
|
||
|
|
<li>
|
||
|
|
<p><strong>Feedback Loop</strong>: Using the signals from the 2 interferometers, the loop is closed to compensate low frequency vibrations and thermal drifts.</p>
|
||
|
|
</li>
|
||
|
|
</ul>
|
||
|
|
<h1 id="bibliography">Bibliography</h1>
|
||
|
|
<p><a id="holler12_instr_x_ray_nano_imagin"></a>Holler, M., Raabe, J., Diaz, A., Guizar-Sicairos, M., Quitmann, C., Menzel, A., & Bunk, O., <em>An instrument for 3d x-ray nano-imaging</em>, Review of Scientific Instruments, <em>83(7)</em>, 073703 (2012). <a href="http://dx.doi.org/10.1063/1.4737624">http://dx.doi.org/10.1063/1.4737624</a> <a href="#66ab0e7602a1dedda963d7da60533b0d">↩</a></p>
|
||
|
|
|
||
|
|
</div>
|
||
|
|
|
||
|
|
<footer class="post-footer">
|
||
|
|
|
||
|
|
<nav class="post-nav">
|
||
|
|
<a class="prev" href="/paper/poel10_explor_activ_hard_mount_vibrat/">
|
||
|
|
<i class="iconfont icon-left"></i>
|
||
|
|
<span class="prev-text nav-default">An exploration of active hard mount vibration isolation for precision equipment</span>
|
||
|
|
<span class="prev-text nav-mobile">Prev</span>
|
||
|
|
</a>
|
||
|
|
<a class="next" href="/paper/geng95_intel_contr_system_multip_degree/">
|
||
|
|
<span class="next-text nav-default">An intelligent control system for multiple degree-of-freedom vibration isolation</span>
|
||
|
|
<span class="next-text nav-mobile">Next</span>
|
||
|
|
<i class="iconfont icon-right"></i>
|
||
|
|
</a>
|
||
|
|
</nav>
|
||
|
|
</footer>
|
||
|
|
</article>
|
||
|
|
</div>
|
||
|
|
</div>
|
||
|
|
</main>
|
||
|
|
|
||
|
|
<footer id="footer" class="footer">
|
||
|
|
<div class="social-links">
|
||
|
|
<a href="mailto:dehaeze.thomas@gmail.com" class="iconfont icon-email" title="email"></a>
|
||
|
|
<a href="https://github.com/tdehaeze/" class="iconfont icon-github" title="github"></a>
|
||
|
|
<a href="/index.xml" type="application/rss+xml" class="iconfont icon-rss" title="rss"></a>
|
||
|
|
</div>
|
||
|
|
|
||
|
|
<div class="copyright">
|
||
|
|
<span class="power-by">
|
||
|
|
Powered by <a class="hexo-link" href="https://gohugo.io">Hugo</a>
|
||
|
|
</span>
|
||
|
|
|
||
|
|
<span class="copyright-year">
|
||
|
|
©
|
||
|
|
2020
|
||
|
|
<span class="heart">
|
||
|
|
<i class="iconfont icon-heart"></i>
|
||
|
|
</span>
|
||
|
|
<span class="author">Thomas Dehaeze</span>
|
||
|
|
</span>
|
||
|
|
</div>
|
||
|
|
|
||
|
|
</footer>
|
||
|
|
|
||
|
|
<div class="back-to-top" id="back-to-top">
|
||
|
|
<i class="iconfont icon-up"></i>
|
||
|
|
</div>
|
||
|
|
</div>
|
||
|
|
|
||
|
|
<script src="https://cdn.jsdelivr.net/npm/jquery@3.2.1/dist/jquery.min.js" integrity="sha256-hwg4gsxgFZhOsEEamdOYGBf13FyQuiTwlAQgxVSNgt4=" crossorigin="anonymous"></script>
|
||
|
|
<script src="https://cdn.jsdelivr.net/npm/slideout@1.0.1/dist/slideout.min.js" integrity="sha256-t+zJ/g8/KXIJMjSVQdnibt4dlaDxc9zXr/9oNPeWqdg=" crossorigin="anonymous"></script>
|
||
|
|
|
||
|
|
|
||
|
|
<script type="text/javascript" src="/js/main.4bada4f824623eea2eb7cfd5cf8c1d99c3dd797297e7e8cbc59a41da450bb334.js"></script>
|
||
|
|
|
||
|
|
|
||
|
|
<script type="text/javascript">
|
||
|
|
window.MathJax = {
|
||
|
|
loader: {
|
||
|
|
load: ['[tex]/ams']
|
||
|
|
},
|
||
|
|
tex: {
|
||
|
|
inlineMath: [
|
||
|
|
['$','$'], ['\\(','\\)']
|
||
|
|
],
|
||
|
|
tags: 'ams',
|
||
|
|
packages: {'[+]': ['ams']},
|
||
|
|
}
|
||
|
|
};
|
||
|
|
</script>
|
||
|
|
|
||
|
|
<script async src="https://cdn.jsdelivr.net/npm/mathjax@3/es5/tex-mml-chtml.js" crossorigin="anonymous"></script>
|
||
|
|
|
||
|
|
<script src="https://cdnjs.cloudflare.com/ajax/libs/fuse.js/3.2.0/fuse.min.js"></script>
|
||
|
|
<script src="https://cdnjs.cloudflare.com/ajax/libs/mark.js/8.11.1/jquery.mark.min.js"></script>
|
||
|
|
<script type="text/javascript" src="/lib/search/search.js"></script>
|
||
|
|
|
||
|
|
|
||
|
|
|
||
|
|
|
||
|
|
</body>
|
||
|
|
</html>
|