- Capacitive: (<ahref="#citeproc_bib_item_8">Schroer et al. 2017</a>; <ahref="#citeproc_bib_item_11">Villar et al. 2018</a>; <ahref="#citeproc_bib_item_9">Schropp et al. 2020</a>)
Only recently, high bandwidth (100Hz) have been reported with the use of voice coil actuators (<ahref="#citeproc_bib_item_5">Kelly et al. 2022</a>; <ahref="#citeproc_bib_item_2">Geraldes et al. 2023</a>).
- Spindle bellow YZ stage: (<ahref="#citeproc_bib_item_12">Wang et al. 2012</a>; <ahref="#citeproc_bib_item_8">Schroer et al. 2017</a>; <ahref="#citeproc_bib_item_9">Schropp et al. 2020</a>; <ahref="#citeproc_bib_item_2">Geraldes et al. 2023</a>)
- Spindle above YZ stage: (<ahref="#citeproc_bib_item_10">Stankevic et al. 2017</a>; <ahref="#citeproc_bib_item_4">Holler et al. 2017</a>, <ahref="#citeproc_bib_item_3">2018</a>; <ahref="#citeproc_bib_item_11">Villar et al. 2018</a>; <ahref="#citeproc_bib_item_1">Engblom and others 2018</a>; <ahref="#citeproc_bib_item_6">Nazaretski et al. 2022</a>; <ahref="#citeproc_bib_item_13">Xu et al. 2023</a>)
- Only for mapping: (<ahref="#citeproc_bib_item_7">Nazaretski et al. 2015</a>; <ahref="#citeproc_bib_item_5">Kelly et al. 2022</a>)
-> 1mm: (<ahref="#citeproc_bib_item_7">Nazaretski et al. 2015</a>; <ahref="#citeproc_bib_item_5">Kelly et al. 2022</a>; <ahref="#citeproc_bib_item_2">Geraldes et al. 2023</a>)
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