31 lines
1.3 KiB
Markdown
31 lines
1.3 KiB
Markdown
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title = "A survey of control issues in nanopositioning"
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author = ["Thomas Dehaeze"]
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draft = false
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Tags
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:
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Reference
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: <sup id="8ce53b8a612ce8ae3eb616cd1ed05630"><a href="#devasia07_survey_contr_issues_nanop" title="Devasia, Eleftheriou, Moheimani \& SO Reza, A Survey of Control Issues in Nanopositioning, {IEEE Transactions on Control Systems Technology}, v(5), 802--823 (2007).">(Devasia {\it et al.}, 2007)</a></sup>
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Author(s)
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: Devasia, S., Eleftheriou, E., & Moheimani, S. R.
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Year
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: 2007
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- Talks about Scanning Tunneling Microscope (STM) and Scanning Probe Microscope (SPM)
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- Piezoelectric actuators: Creep, Hysteresis, Vibrations, Modeling errors
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- Interesting analysis about Bandwidth-Precision-Range tradeoffs
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- Control approaches for piezoelectric actuators: feedforward, Feedback, Iterative, Sensorless controls
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<a id="orga0f4b4e"></a>
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{{< figure src="/ox-hugo/devasia07_piezoelectric_tradeoff.png" caption="Figure 1: Tradeoffs between bandwidth, precision and range" >}}
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# Bibliography
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<a id="devasia07_survey_contr_issues_nanop"></a>Devasia, S., Eleftheriou, E., & Moheimani, S. R., *A survey of control issues in nanopositioning*, IEEE Transactions on Control Systems Technology, *15(5)*, 802–823 (2007). [↩](#8ce53b8a612ce8ae3eb616cd1ed05630)
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