2020-04-20 18:58:10 +02:00
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title = "Positioning Stations"
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author = ["Thomas Dehaeze"]
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draft = false
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## Backlinks {#backlinks}
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- [Position control in lithographic equipment]({{< relref "butler11_posit_contr_lithog_equip" >}})
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- [An instrument for 3d x-ray nano-imaging]({{< relref "holler12_instr_x_ray_nano_imagin" >}})
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2020-06-03 22:43:54 +02:00
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- [Interferometric characterization of rotation stages for x-ray nanotomography]({{< relref "stankevic17_inter_charac_rotat_stages_x_ray_nanot" >}})
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2020-08-17 23:00:20 +02:00
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Tags
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<./biblio/references.bib>
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