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831dc79c3e Talk ready to be recorded 2021-07-22 23:52:44 +02:00
b9642201dc Rework figures 2021-07-22 11:34:05 +02:00
656e85fa3d Update talk 2021-07-22 10:17:20 +02:00
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% Created 2021-07-22 jeu. 08:10
% Created 2021-07-22 jeu. 23:48
% Intended LaTeX compiler: pdflatex
\documentclass[aspectratio=169, t]{clean-beamer}
\usepackage[utf8]{inputenc}
@ -61,40 +61,42 @@
\maketitle
\section*{Introduction}
\begin{frame}[label={sec:orgdc51d45}]{The ID31 Micro Station}
\label{sec:org2f2f7e5}
\begin{frame}[label={sec:org7a284a6}]{The ID31 Micro Station}
\begin{center}
\includegraphics[scale=1,width=0.95\linewidth]{figs/micro_hexapod_render.pdf}
\end{center}
\begin{tikzpicture}[remember picture,overlay]
\node[anchor=north east, padding=5pt] at (current page.north east){%
\node[anchor=north east] at (current page.north east){%
\includegraphics[width=2em]{figs/icon_animation.pdf}};
\end{tikzpicture}
\end{frame}
\begin{frame}[label={sec:orgd54db4c}]{Introduction - The Nano Active Stabilization System}
\begin{frame}[label={sec:org5dbf487}]{Introduction - The Nano Active Stabilization System}
\textbf{Objective}: Improve the position accuracy from \(\approx 10\,\mu m\) down to \(\approx 10\,nm\) \newline
\textbf{Design approach}: ``Model based design'' / ``Predictive Design''
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nass-concept.pdf}
\includegraphics[scale=1,width=\linewidth]{figs/nass-concept.red.pdf}
\end{center}
\end{frame}
\begin{frame}[label={sec:org58304ff}]{Overview of the Mechatronic Approach - Model Based Design}
\begin{frame}[label={sec:org8665237}]{Overview of the Mechatronic Approach - Model Based Design}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nass_mechatronics_approach.png}
\end{center}
\end{frame}
\section{Conceptual Phase}
\begin{frame}[label={sec:org95b2a1a}]{Outline - Conceptual Phase}
\label{sec:org0e45181}
\begin{frame}[label={sec:org66fab8a}]{Outline - Conceptual Phase}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nass_mechatronics_approach_conceptual_phase.png}
\includegraphics[scale=1,width=\linewidth]{figs/nass_mechatronics_approach_conceptual_phase.pdf}
\end{center}
\end{frame}
\begin{frame}[label={sec:org612b41f}]{Feedback Control - The Control Loop}
\begin{frame}[label={sec:org5582b03}]{Feedback Control - The Control Loop}
\vspace{-1em}
\begin{center}
@ -125,7 +127,7 @@
\end{columns}
\end{frame}
\begin{frame}[label={sec:orga5ea61a}]{Noise Budgeting and Required Control Bandwidth}
\begin{frame}[label={sec:org95d167f}]{Noise Budgeting and Required Control Bandwidth}
\vspace{-1em}
\begin{center}
@ -133,7 +135,7 @@
\end{center}
\end{frame}
\begin{frame}[label={sec:orgd23064f}]{Limitation of the Controller Bandwidth?}
\begin{frame}[label={sec:orgce8e920}]{Limitation of the Controller Bandwidth?}
\begin{columns}
\begin{column}{0.6\columnwidth}
\vspace{-2em}
@ -192,7 +194,7 @@ Complex controllers
\end{columns}
\end{frame}
\begin{frame}[label={sec:org9493c8d}]{Soft or Stiff \(\nu\text{-hexapod}\) ? Interaction with the \(\mu\text{-station}\)}
\begin{frame}[label={sec:orge61676f}]{Soft or Stiff \(\nu\text{-hexapod}\) ? Interaction with the \(\mu\text{-station}\)}
\vspace{-3em}
\begin{columns}
\begin{column}{0.3\columnwidth}
@ -231,7 +233,7 @@ Complex controllers
\end{columns}
\end{frame}
\begin{frame}[label={sec:orgddab963}]{Complexity of the Micro-Station Dynamics (Model Analysis)}
\begin{frame}[label={sec:orgfa52d1c}]{Complexity of the Micro-Station Dynamics (Model Analysis)}
\vspace{-1em}
\begin{center}
@ -239,12 +241,12 @@ Complex controllers
\end{center}
\begin{tikzpicture}[remember picture,overlay]
\node[anchor=north east, padding=5pt] at (current page.north east){%
\node[anchor=north east] at (current page.north east){%
\includegraphics[width=2em]{figs/icon_animation.pdf}};
\end{tikzpicture}
\end{frame}
\begin{frame}[label={sec:org3dfae25}]{Control Strategy: HAC-LAC}
\begin{frame}[label={sec:org82c9a46}]{Control Strategy: HAC-LAC}
\vspace{-0.5em}
\begin{center}
@ -278,7 +280,7 @@ Complex controllers
\end{columns}
\end{frame}
\begin{frame}[label={sec:orgb8b73a0}]{Multi-Body Models - Simulations}
\begin{frame}[label={sec:org8694100}]{Multi-Body Models - Simulations}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/simscape_simulation.jpg}
\end{center}
@ -294,31 +296,40 @@ Complex controllers
\end{tikzpicture}
\begin{tikzpicture}[remember picture,overlay]
\node[anchor=north east, padding=5pt] at (current page.north east){%
\node[anchor=north east] at (current page.north east){%
\includegraphics[width=2em]{figs/icon_animation.pdf}};
\end{tikzpicture}
\end{frame}
\section{Detail Design Phase}
\begin{frame}[label={sec:org6378434}]{Outline - Detail Design Phase}
\label{sec:orgff27fa3}
\begin{frame}[label={sec:orgf7e1c30}]{Outline - Detail Design Phase}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nass_mechatronics_approach_detailed_phase.png}
\includegraphics[scale=1,width=\linewidth]{figs/nass_mechatronics_approach_detailed_phase.pdf}
\end{center}
\end{frame}
\begin{frame}[label={sec:orgc57fa9c}]{Nano-Hexapod Overview - Key elements}
\begin{frame}[label={sec:org133ceaa}]{Nano-Hexapod Overview - Key elements}
\vspace{-1.5em}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nano_hexapod_elements.red.pdf}
\end{center}
\begin{tcolorbox}[title=General Specifications, sidebyside]
\begin{itemize}
\item Flexible modes as high as possible
\item Only flexible elements (no backlash, play, etc.)
\end{itemize}
\tcblower
\begin{itemize}
\item Integrated Force Sensor and Displacement Sensor
\item Predictable dynamics
\end{itemize}
\end{tcolorbox}
\end{frame}
\begin{frame}[label={sec:orga847212}]{Include Flexible Elements in a Multi-Body model}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/super_element_simscape.pdf}
\end{center}
\end{frame}
\begin{frame}[label={sec:org36e74d8}]{Choice of Actuator - Amplifier Piezoelectric Actuator}
\begin{frame}[label={sec:org276a69c}]{Choice of Actuator and Flexible Joint Design}
\vspace{-2em}
\begin{columns}
\begin{column}{0.5\columnwidth}
@ -328,7 +339,7 @@ Complex controllers
\toprule
\textbf{Characteristic} & \textbf{Specs} & \textbf{Doc.}\\
\midrule
Axial Stiff. & \SI{\approx 1}{\newton/\micro\meter} & \SI{1.8}{\newton/\micro\meter}\\
Axial Stiff. & \SI{\approx 2}{\newton/\micro\meter} & \SI{1.8}{\newton/\micro\meter}\\
Sufficient Stroke & \SI{> 100}{\micro\meter} & \SI{368}{\micro\meter}\\
Height & \SI{< 50}{\milli\meter} & \SI{30}{\milli\meter}\\
High Resolution & \SI{< 5}{\nano\meter} & \SI{3}{\nano\meter}\\
@ -347,133 +358,160 @@ High Resolution & \SI{< 5}{\nano\meter} & \SI{3}{\nano\meter}\\
\end{column}
\begin{column}{0.5\columnwidth}
\scriptsize
\begin{center}
\begin{tabularx}{0.9\linewidth}{cccc}
\toprule
\textbf{Characteristic} & \textbf{Specs} & \textbf{FEM}\\
\midrule
Axial Stiff. & \SI{> 100}{\newton/\micro\meter} & 94\\
Bending Stiff. & \SI{< 100}{\newton\meter/\radian} & 5\\
Torsion Stiff. & \SI{< 500}{\newton\meter/\radian} & 260\\
Bending Stroke & \SI{> 1}{\milli\radian} & 20\\
\bottomrule
\end{tabularx}
\end{center}
\normalsize
\vspace{-1em}
\begin{columns}
\begin{column}{0.4\columnwidth}
\begin{figure}[htbp]
\centering
\includegraphics[scale=1,width=0.8\linewidth]{figs/2dof_apa_model.pdf}
\caption{2-DoF Model}
\end{figure}
\end{column}
\begin{column}{0.6\columnwidth}
\vspace{-1.6em}
\begin{figure}[htbp]
\centering
\includegraphics[scale=1,width=0.9\linewidth]{figs/mesh_APA_schematic.pdf}
\caption{APA Finite Element Model}
\end{figure}
\end{column}
\end{columns}
\begin{figure}[htbp]
\centering
\includegraphics[scale=1,width=\linewidth]{figs/mode_shapes_annotated.pdf}
\caption{Flexible Modes due to limited APA stiffness}
\includegraphics[scale=1,width=0.9\linewidth]{figs/flexible_joint_picture.jpg}
\caption{Picture of the joint}
\end{figure}
\end{column}
\end{columns}
\end{frame}
\begin{frame}[label={sec:orgaefb8a2}]{Flexible Joints - Specifications and Optimization (\href{https://research.tdehaeze.xyz/test-bench-nass-flexible-joints/}{link})}
\vspace{-2em}
\begin{frame}[label={sec:org27824a6}]{Instrumentation}
\vspace{-1em}
\begin{columns}
\begin{column}{0.75\columnwidth}
\scriptsize
\begin{column}{0.33\columnwidth}
\begin{figure}[htbp]
\centering
\includegraphics[scale=1,height=2.2cm]{figs/amplifier_PD200.jpg}
\caption{PiezoDrive - PD200 Amplifier}
\end{figure}
\vspace{-1em}
\tiny
\begin{center}
\begin{tabularx}{\linewidth}{ccccc}
\begin{tabularx}{0.75\linewidth}{lc}
\toprule
\textbf{Goal} & \textbf{Stiffness} & \textbf{Specs} & \textbf{FEM} & \textbf{Measured}\\
\textbf{Characteristics} & \textbf{Manual}\\
\midrule
High DVF Damping & Axial & \SI{> 100}{\newton/\micro\meter} & 94 & \\
Low Coupling & Bending & \SI{< 100}{\newton\meter/\radian} & 5 & 3.8\\
Low Coupling & Torsion & \SI{< 500}{\newton\meter/\radian} & 260 & \\
Sufficient Stroke & Bending Stroke & \SI{> 1}{\milli\radian} & 20 & 18\\
Gain & \num{20}\\
Noise & \SI{0.7}{\milli\volt\rms}\\
Small Signal BW & \SI{7.4}{\kilo\hertz}\\
Large Signal BW & \SI{300}{\hertz}\\
\bottomrule
\end{tabularx}
\end{center}
\normalsize
\end{column}
\begin{column}{0.25\columnwidth}
\vspace{-3em}
\begin{column}{0.33\columnwidth}
\begin{figure}[htbp]
\centering
\includegraphics[scale=1,width=\linewidth]{figs/flexible_joint_dimensions.pdf}
\caption{Dimensions after optimization}
\includegraphics[scale=1,height=2.2cm]{figs/encoder_vionic.jpg}
\caption{Renishaw - Vionic Encoder}
\end{figure}
\vspace{-1em}
\tiny
\begin{center}
\begin{tabularx}{0.85\linewidth}{lc}
\toprule
\textbf{Characteristics} & \textbf{Manual}\\
\midrule
Range & Ruler length\\
Resolution & \SI{2.5}{\nano\meter}\\
Sub-Divisional Error & \SI{<\pm 15}{\nano\meter}\\
Bandwidth & \SI{>5}{kHz}\\
\bottomrule
\end{tabularx}
\end{center}
\normalsize
\end{column}
\begin{column}{0.33\columnwidth}
\begin{figure}[htbp]
\centering
\includegraphics[scale=1,height=2.2cm]{figs/Speedgoat-Performance-Real-Time-Target-Machine.jpg}
\caption{Speedgoat - Target Machine}
\end{figure}
\vspace{-1em}
\tiny
\begin{center}
\begin{tabularx}{0.8\linewidth}{lc}
\toprule
\textbf{Characteristics} & \textbf{Manual}\\
\midrule
ADC (x16) & 16bit, \SI{\pm 10}{V}\\
DAC (x8) & 16bit, \SI{\pm 10}{V}\\
Digital I/O (x30) & \SI{<\pm 15}{\nano\meter}\\
Sampling Freq. & \SI{>10}{kHz}\\
\bottomrule
\end{tabularx}
\end{center}
\normalsize
\end{column}
\end{columns}
\vspace{-3em}
\vspace{1em}
\begin{columns}
\begin{column}{0.45\columnwidth}
\begin{figure}[htbp]
\centering
\includegraphics[scale=1,width=\linewidth]{figs/location_top_flexible_joints.pdf}
\caption{Positioning of the top joint}
\end{figure}
\end{column}
\begin{column}{0.55\columnwidth}
\vspace{2em}
\begin{figure}[htbp]
\centering
\includegraphics[scale=1,width=\linewidth]{figs/simscape_model_flexible_joint.pdf}
\caption{Simscape Model}
\end{figure}
\end{column}
\end{columns}
\end{frame}
\begin{frame}[label={sec:org1666f90}]{Instrumentation}
\begin{itemize}
\item PD200 amplifier
\item Encoders
\item Speedgoat, DAC, ADC
\item PEPU
\item Attocube
\end{itemize}
\begin{tcolorbox}
\begin{center}
All elements could be chosen/design based on the models
\end{center}
\end{tcolorbox}
\end{frame}
\section{Experimental Phase}
\begin{frame}[label={sec:org8c075cc}]{Outline - Experimental Phase}
\label{sec:orgbc8949c}
\begin{frame}[label={sec:org6e7483a}]{Outline - Experimental Phase}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nass_mechatronics_approach_experimental_phase.png}
\includegraphics[scale=1,width=\linewidth]{figs/nass_mechatronics_approach_experimental_phase.red.pdf}
\end{center}
\end{frame}
\begin{frame}[label={sec:org57e9067}]{Flexible Joints - Measurements}
\begin{frame}[label={sec:org2b19437}]{Flexible Joints - Measurements}
\vspace{-2em}
\begin{columns}
\begin{column}{0.45\columnwidth}
\begin{figure}[htbp]
\centering
\includegraphics[scale=1,width=\linewidth]{figs/flexible_joint_bench.pdf}
\caption{Measurement bench}
\end{figure}
\begin{column}{0.5\columnwidth}
\begin{center}
\includegraphics[scale=1,width=0.95\linewidth]{figs/received_flexible_joints.jpg}
\end{center}
\begin{center}
\includegraphics[scale=1,width=0.95\linewidth]{figs/soft_measure_flex_size.jpg}
\end{center}
\end{column}
\begin{column}{0.55\columnwidth}
\begin{figure}[htbp]
\centering
\includegraphics[scale=1,width=\linewidth]{figs/flex_joint_meas_example_F_d_lin_fit.pdf}
\caption{Measured displacement and force}
\end{figure}
\vspace{-1.5em}
\begin{center}
\includegraphics[scale=1,width=0.8\linewidth]{figs/flexible_joint_bench.pdf}
\end{center}
\vspace{-1em}
\begin{center}
\includegraphics[scale=1,width=0.9\linewidth]{figs/flex_joint_meas_example_F_d_lin_fit.pdf}
\end{center}
\end{column}
\end{columns}
\end{frame}
\begin{frame}[label={sec:org230d623}]{Amplified Piezoelectric Actuator - Test Bench}
\begin{frame}[label={sec:org96a6b68}]{Amplified Piezoelectric Actuator - Test Bench}
\vspace{-1em}
\begin{center}
@ -492,16 +530,18 @@ Sufficient Stroke & Bending Stroke & \SI{> 1}{\milli\radian} & 20 & 18\\
\end{tikzpicture}
\end{frame}
\begin{frame}[label={sec:org9368c73}]{Amplified Piezoelectric Actuator - Extracted Model}
\begin{frame}[label={sec:orge87ad99}]{Amplified Piezoelectric Actuator - Extracted Model}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/apa_comp_model_frf.pdf}
\end{center}
\end{frame}
\begin{frame}[label={sec:orga3a7c76}]{Amplified Piezoelectric Actuator - Integral Force Feedback}
\begin{frame}[label={sec:org7af7fba}]{Amplified Piezoelectric Actuator - Integral Force Feedback}
\vspace{-3em}
\begin{columns}
\begin{column}{0.62\columnwidth}
\vspace{1em}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/test_bench_apa300ml_iff.pdf}
\end{center}
@ -517,7 +557,7 @@ Sufficient Stroke & Bending Stroke & \SI{> 1}{\milli\radian} & 20 & 18\\
\end{columns}
\end{frame}
\begin{frame}[label={sec:org4e8f560}]{Strut - Mounting Tool}
\begin{frame}[label={sec:orgc496afb}]{Strut - Mounting Tool}
\vspace{-2.5em}
\begin{columns}
\begin{column}{0.63\columnwidth}
@ -532,13 +572,13 @@ Sufficient Stroke & Bending Stroke & \SI{> 1}{\milli\radian} & 20 & 18\\
\end{center}
\begin{tikzpicture}[remember picture,overlay]
\node[anchor=north east, padding=5pt] at (current page.north east){%
\node[anchor=north east] at (current page.north east){%
\includegraphics[width=2em]{figs/icon_animation.pdf}};
\end{tikzpicture}
\end{column}
\end{columns}
\end{frame}
\begin{frame}[label={sec:orge547304}]{Strut - Dynamical Measurements}
\begin{frame}[label={sec:orgaec0a8a}]{Strut - Dynamical Measurements}
\vspace{-1em}
\begin{center}
@ -558,16 +598,16 @@ Sufficient Stroke & Bending Stroke & \SI{> 1}{\milli\radian} & 20 & 18\\
\end{tikzpicture}
\end{frame}
\begin{frame}[label={sec:org76a12db}]{Strut - Encoders Output and Spurious Modes}
\begin{frame}[label={sec:org965cd42}]{Strut - Encoders Output and Spurious Modes}
\vspace{-3em}
\begin{columns}
\begin{column}{0.45\columnwidth}
\begin{column}{0.43\columnwidth}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/frf_model_encoder_strut.pdf}
\includegraphics[scale=1,width=\linewidth]{figs/frf_struts_enc_int.pdf}
\end{center}
\end{column}
\begin{column}{0.55\columnwidth}
\begin{column}{0.57\columnwidth}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/meas_spur_res_struts_2_encoder.jpg}
\end{center}
@ -577,33 +617,25 @@ Sufficient Stroke & Bending Stroke & \SI{> 1}{\milli\radian} & 20 & 18\\
\end{center}
\begin{tikzpicture}[remember picture,overlay]
\node[anchor=north east, padding=5pt] at (current page.north east){%
\node[anchor=north east] at (current page.north east){%
\includegraphics[width=2em]{figs/icon_animation.pdf}};
\end{tikzpicture}
\end{column}
\end{columns}
\end{frame}
\begin{frame}[label={sec:org416c1db}]{Strut - Extracted Model}
\vspace{-1em}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/strut_meas_frf_model_int_force.pdf}
\end{center}
\end{frame}
\begin{frame}[label={sec:orgd58b991}]{Nano-Hexapod Mounting Tool}
\begin{frame}[label={sec:orgda21de8}]{Nano-Hexapod Mounting Tool}
\begin{center}
\includegraphics[scale=1,width=0.9\linewidth]{figs/nano_hexapod_mounting.JPG}
\end{center}
\begin{tikzpicture}[remember picture,overlay]
\node[anchor=north east, padding=5pt] at (current page.north east){%
\node[anchor=north east] at (current page.north east){%
\includegraphics[width=2em]{figs/icon_animation.pdf}};
\end{tikzpicture}
\end{frame}
\begin{frame}[label={sec:orgb957064}]{Mounted Nano-Hexapod}
\begin{frame}[label={sec:org79abb20}]{Mounted Nano-Hexapod}
\vspace{-1em}
\begin{center}
@ -611,19 +643,23 @@ Sufficient Stroke & Bending Stroke & \SI{> 1}{\milli\radian} & 20 & 18\\
\end{center}
\end{frame}
\begin{frame}[label={sec:org92c51de}]{Nano-Hexapod - Identified Dynamics}
Diagonal + off-diagonal transfer function from Va to De (comp with model)
\begin{frame}[label={sec:orgf59950c}]{Nano-Hexapod - Identified Dynamics}
\vspace{-1em}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nano_hexapod_enc_iff_bode_plot.pdf}
\end{center}
\end{frame}
\begin{frame}[label={sec:orgafcfc6b}]{Nano-Hexapod - Force Sensors}
Diagonal + off-diagonal transfer function from Va to Vs
\begin{frame}[label={sec:org00f7894}]{Nano-Hexapod - Damped Dynamics}
\vspace{-1em}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nano_hexapod_damped_bode_plot.pdf}
\end{center}
\end{frame}
\begin{frame}[label={sec:org2608c34}]{Nano-Hexapod - Damped Dynamics}
Damped and Undamped, Diagonal + off-diagonal transfer function from Va to De
\end{frame}
\begin{frame}[label={sec:org9e7c6f4}]{The Nano-Hexapod on top of the Micro-Station}
\begin{frame}[label={sec:org89187a0}]{The Nano-Hexapod on top of the Micro-Station}
\vspace{-0.5em}
\only<1>{
@ -642,6 +678,42 @@ Damped and Undamped, Diagonal + off-diagonal transfer function from Va to De
\end{frame}
\section{Conclusion}
\begin{frame}[label={sec:orgee0f6f0}]{Conclusion}
\label{sec:orgcce0f41}
\begin{frame}[label={sec:org905c81b}]{Conclusion}
\begin{columns}
\begin{column}{0.4\columnwidth}
\textbf{Mechatronics Approach}:
\begin{itemize}
\item Use of several models
\item Predictive design
\item Beneficial in terms of: cost, delays, performances
\end{itemize}
\vspace{0.5em}
\textbf{Future Work}:
\begin{itemize}
\item Optimal/Robust control
\item Control Test Bench
\item Implementation on ID31
\end{itemize}
\end{column}
\begin{column}{0.6\columnwidth}
\vspace{-3em}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nass_ref_tracking_results.pdf}
\end{center}
\end{column}
\end{columns}
\begin{tcolorbox}[title=Many thanks to, sidebyside]
Philipp Brumund, Ludovic Ducotte\newline
Jose-Maria Clement, Marc Lesourd
\tcblower
Youness Benyakhlef, Pierrick Got\newline
Damien Coulon and the whole team
\end{tcolorbox}
\end{frame}
\end{document}

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@ -286,3 +286,90 @@
#+RESULTS:
[[file:figs/mass_spring_damper_hac_lac.png]]
* Mass Spring Damper Model - Bis
#+begin_src latex :file mass_spring_damper_nass.pdf
\begin{tikzpicture}
% ====================
% Parameters
% ====================
\def\bracs{0.05} % Brace spacing vertically
\def\brach{-12pt} % Brace shift horizontaly
% ====================
% ====================
% Ground
% ====================
\draw (-0.9, 0) -- (0.9, 0);
\draw[dashed] (0.9, 0) -- ++(0.5, 0);
\draw[->] (1.3, 0) -- ++(0, 0.4) node[right]{$w$};
% ====================
% ====================
% Granite
\begin{scope}[shift={(0, 0)}]
\draw[fill=white] (-0.9, 1.2) rectangle (0.9, 2.0) node[pos=0.5]{$\scriptstyle\text{granite}$};
\draw[spring] (-0.7, 0) -- ++(0, 1.2);
\draw[damper] ( 0, 0) -- ++(0, 1.2);
\draw[dashed] ( 0.9, 2.0) -- ++(2.0, 0) coordinate(xg);
% \draw[decorate, decoration={brace, amplitude=8pt}, xshift=\brach] %
% (-0.9, \bracs) -- ++(0, 2.0) node[midway,rotate=90,anchor=south,yshift=10pt]{Granite};
\end{scope}
% ====================
% ====================
% Stages
\begin{scope}[shift={(0, 2.0)}]
\draw[fill=white] (-0.9, 1.2) rectangle (0.9, 2.0) node[pos=0.5]{$\scriptstyle\mu\text{-station}$};
\coordinate (mustation) at (0.9, 1.6);
\draw[spring] (-0.7, 0) -- ++(0, 1.2);
\draw[damper] ( 0, 0) -- ++(0, 1.2);
\draw[actuator] ( 0.7, 0) -- ++(0, 1.2) node[midway, right=0.1](ft){$f_t$};
% \draw[decorate, decoration={brace, amplitude=8pt}, xshift=\brach] %
% (-0.9, \bracs) -- ++(0, 2.0) node[midway,rotate=90,anchor=south,yshift=10pt]{$\mu\text{-station}$};
\end{scope}
% ====================
% ====================
% NASS
\begin{scope}[shift={(0, 4.0)}]
\draw[fill=white] (-0.9, 1.2) rectangle (0.9, 2.0) node[pos=0.5]{$\scriptstyle\nu\text{-hexapod}$};
\draw[dashed] (0.9, 2.0) -- ++(2.0, 0) coordinate(xnpos);
\draw[spring] (-0.7, 0) -- ++(0, 1.2) node[midway, left=0.1]{};
\draw[damper] ( 0, 0) -- ++(0, 1.2) node[midway, left=0.2]{};
\draw[actuator] ( 0.7, 0) -- ++(0, 1.2) coordinate[midway, right=0.1](f);
% \draw[decorate, decoration={brace, amplitude=8pt}, xshift=\brach] %
% (-0.9, \bracs) -- ++(0, 2.2) node[midway,rotate=90,anchor=south,yshift=10pt]{$\nu\text{-hexapod}$};
\end{scope}
% ====================
% ====================
% Measured Displacement
\draw[<->, dashed] ($(xg)+(-0.1, 0)$) node[above left](d){$d$} -- ($(xnpos)+(-0.1, 0)$);
% ====================
% ====================
% IFF Control
% \node[block={2em}{1.5em}, right=0.6 of fsensn] (iff) {$K_{\scriptscriptstyle IFF}$};
% \node[addb] (ctrladd) at (f-|iff) {};
\node[block={2em}{1.5em}, right=0.6 of mustation] (ctrl) {$K$};
% \draw[->] (fsensn.east) -- node[midway, above]{$\tau_m$} (iff.west);
% \draw[->] (iff.south) -- (ctrladd.north);
% \draw[->] (ctrladd.west) -- (f.east) node[above right]{$u$};
\draw[->] (d.west) -| (ctrl.south);
\draw[->] (ctrl.north) |- (f) node[above right]{$u$};
% ====================
\end{tikzpicture}
#+end_src
#+RESULTS:
[[file:figs/mass_spring_damper_nass.png]]