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index.html
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@@ -3,7 +3,7 @@
"http://www.w3.org/TR/xhtml1/DTD/xhtml1-strict.dtd">
<html xmlns="http://www.w3.org/1999/xhtml" lang="en" xml:lang="en">
<head>
<!-- 2021-07-19 lun. 11:23 -->
<!-- 2021-07-28 mer. 09:43 -->
<meta http-equiv="Content-Type" content="text/html;charset=utf-8" />
<title>Mechatronics Approach for the Development of a Nano-Active-Stabilization-System</title>
<meta name="author" content="Thomas Dehaeze" />
@@ -17,7 +17,7 @@
<a accesskey="h" href="../index.html"> UP </a>
|
<a accesskey="H" href="../index.html"> HOME </a>
</div><div id="content">
</div><div id="content" class="content">
<h1 class="title">Mechatronics Approach for the Development of a Nano-Active-Stabilization-System
<br />
<span class="subtitle">Dehaeze Thomas, Bonnefoy Julien, Collette Christophe</span>
@@ -42,15 +42,26 @@ The presented development approach is foreseen to be applied more frequently to
</p>
</blockquote>
<div id="outline-container-org5135f26" class="outline-2">
<h2 id="org5135f26">Conference Paper (<a href="paper/dehaeze21_mechatronics_approach_nass.pdf">pdf</a>)</h2>
<div class="outline-text-2" id="text-org5135f26">
<div id="outline-container-org880994d" class="outline-2">
<h2 id="org880994d">Conference Paper (<a href="paper/dehaeze21_mechatronics_approach_nass.pdf">pdf</a>)</h2>
<div class="outline-text-2" id="text-org880994d">
</div>
</div>
<div id="outline-container-org18ea867" class="outline-2">
<h2 id="org18ea867">Cite this work</h2>
<div class="outline-text-2" id="text-org18ea867">
<div id="outline-container-org95479e9" class="outline-2">
<h2 id="org95479e9">Talk (<a href="talk/dehaeze21_mechatronics_approach_nass_talk.pdf">link</a>)</h2>
<div class="outline-text-2" id="text-org95479e9">
<iframe width="720"
height="540"
src="https://www.youtube.com/embed/kaplQJoqqDg"
frameborder="0" allowfullscreen> </iframe>
</div>
</div>
<div id="outline-container-orgb29f224" class="outline-2">
<h2 id="orgb29f224">Cite this work</h2>
<div class="outline-text-2" id="text-orgb29f224">
<p>
To cite this conference paper use the following bibTeX code.
</p>
@@ -75,7 +86,7 @@ You can also use the formatted citation below.
</p>
<blockquote>
<p>
Dehaeze, T., Bonnefoy, J., &amp; Collette, C., Mechatronics approach for the development of a nano-active-stabilization-system, In MEDSI&rsquo;20 (pp. ) (2021), JACoW Publishing.
Dehaeze, T., Bonnefoy, J., &amp; Collette, C., Mechatronics approach for the development of a nano-active-stabilization-system, In MEDSI&rsquo;20 (2021), JACoW Publishing.
</p>
</blockquote>
</div>
index.org
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@@ -34,7 +34,7 @@ The presented development approach is foreseen to be applied more frequently to
:UNNUMBERED: t
:END:
* Talk ([[file:talk/dehaeze21_mechatronics_approach_nass_talk.pdf][link]]) :noexport:
* Talk ([[file:talk/dehaeze21_mechatronics_approach_nass_talk.pdf][link]])
:PROPERTIES:
:UNNUMBERED: t
:END:
@@ -42,7 +42,7 @@ The presented development approach is foreseen to be applied more frequently to
#+begin_export html
<iframe width="720"
height="540"
src="https://www.youtube.com/embed/****"
src="https://www.youtube.com/embed/kaplQJoqqDg"
frameborder="0" allowfullscreen> </iframe>
#+end_export
@@ -69,5 +69,5 @@ To cite this conference paper use the following bibTeX code.
You can also use the formatted citation below.
#+begin_quote
Dehaeze, T., Bonnefoy, J., & Collette, C., Mechatronics approach for the development of a nano-active-stabilization-system, In MEDSI'20 (pp. ) (2021), JACoW Publishing.
Dehaeze, T., Bonnefoy, J., & Collette, C., Mechatronics approach for the development of a nano-active-stabilization-system, In MEDSI'20 (2021), JACoW Publishing.
#+end_quote
talk/dehaeze21_mechatronics_approach_nass_talk.org
+27 -27
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@@ -1,11 +1,11 @@
#+TITLE: Mechatronics Approach for the Development of a Nano-Active-Stabilization-System
:DRAWER:
#+AUTHOR: Dehaeze Thomas, Bonnefoy Julien and Collette Christophe
#+AUTHOR:
#+SUBTITLE: MEDSI2020, July 26-29, 2021
#+EMAIL: dehaeze.thomas@gmail.com
#+DATE:
#+LATEX_HEADER_EXTRA: \author[shortname]{Thomas Dehaeze \inst{1,2}, Julien Bonnefoy \inst{1} \and Christophe Collette \inst{2,3}}
#+LATEX_HEADER_EXTRA: \author[shortname]{Thomas Dehaeze \inst{1,2}, Julien Bonnefoy \inst{1} and Christophe Collette \inst{2,3}}
#+LATEX_HEADER_EXTRA: \institute[shortinst]{\inst{1} European Synchrotron Radiation Facility, Grenoble, France \and %
#+LATEX_HEADER_EXTRA: \inst{2} Precision Mechatronics Laboratory, University of Liege, Belgium \and %
#+LATEX_HEADER_EXTRA: \inst{3} BEAMS Department, Free University of Brussels, Belgium}
@@ -86,7 +86,7 @@ CLOSED: [2021-07-21 mer. 21:46]
\end{tikzpicture}
#+end_export
** DONE Introduction - The Nano Active Stabilization System
** DONE Introduction - The Nano Active Stabilization System (NASS)
CLOSED: [2021-07-06 mar. 22:48]
:PROPERTIES:
:UNNUMBERED: notoc
@@ -201,10 +201,10 @@ CLOSED: [2021-07-08 jeu. 09:46]
#+attr_latex: :width \linewidth
[[file:figs/control_bandwidth_2_above_res.pdf]]
#+Beamer: }\only<3>{
# #+Beamer: }\only<3>{
#+attr_latex: :width \linewidth
[[file:figs/control_bandwidth_3_next_gen.pdf]]
# #+attr_latex: :width \linewidth
# [[file:figs/control_bandwidth_3_next_gen.pdf]]
#+Beamer: }
@@ -234,13 +234,13 @@ Limited by complex dynamics\newline
Model based controller
#+end_tcolorbox
#+Beamer: }\only<3>{
# #+Beamer: }\only<3>{
#+attr_latex: :options [title=Next-Gen Systems, fontupper=\small]
#+begin_tcolorbox
Active research topic\newline
Complex controllers
#+end_tcolorbox
# #+attr_latex: :options [title=Next-Gen Systems, fontupper=\small]
# #+begin_tcolorbox
# Active research topic\newline
# Complex controllers
# #+end_tcolorbox
#+Beamer: }
@@ -273,14 +273,14 @@ CLOSED: [2021-07-09 ven. 13:37]
#+Beamer: \onslide<1->{
#+attr_latex: :width \linewidth
[[file:figs/nass_example_alone.pdf]]
[[file:figs/nass_example_alone_b.pdf]]
\vspace{-2em}
#+Beamer: }\onslide<2->{
#+attr_latex: :width \linewidth
[[file:figs/nass_example_support_uncertainty_d_L.pdf]]
[[file:figs/nass_example_support_uncertainty_d_L_b.pdf]]
#+Beamer: }
@@ -317,7 +317,7 @@ CLOSED: [2021-07-09 ven. 15:51]
#+attr_latex: :options [title=Low Authority Control]
#+begin_tcolorbox
- Collocated sensors/actuators
- Guaranteed Stability
- Guaranteed Stability, simple $K$
- Adds damping
- $\searrow$ vibration near resonances
#+end_tcolorbox
@@ -331,8 +331,8 @@ CLOSED: [2021-07-09 ven. 15:51]
#+begin_tcolorbox
- Position sensors
- Complex dynamics
- $\searrow$ vibration in the bandwidth
- Use transformation matrices
- $\searrow$ vibration in the bandwidth
#+end_tcolorbox
** DONE Multi-Body Models - Simulations
@@ -529,30 +529,30 @@ CLOSED: [2021-07-22 jeu. 10:12]
\vspace{-2em}
*** Column :BMCOL:
:PROPERTIES:
:BEAMER_col: 0.5
:BEAMER_col: 0.45
:END:
#+attr_latex: :width 0.95\linewidth
[[file:figs/received_flexible_joints.jpg]]
#+attr_latex: :width 0.95\linewidth
[[file:figs/soft_measure_flex_size.jpg]]
[[file:figs/flexible_joint_bench.pdf]]
*** Column :BMCOL:
:PROPERTIES:
:BEAMER_col: 0.55
:END:
\vspace{-1.5em}
#+attr_latex: :width 0.8\linewidth
[[file:figs/flexible_joint_bench.pdf]]
\vspace{-1em}
#+attr_latex: :width 0.9\linewidth
[[file:figs/flex_joint_meas_example_F_d_lin_fit.pdf]]
#+attr_latex: :options [title=Other Measurement Benches]
#+begin_tcolorbox
- Amplifier Output Noise and Bandwidth
- Encoder Measurement Noise
- DAC Output Noise
#+end_tcolorbox
** DONE Amplified Piezoelectric Actuator - Test Bench
CLOSED: [2021-07-21 mer. 15:26]
@@ -574,7 +574,7 @@ CLOSED: [2021-07-21 mer. 15:26]
\end{tikzpicture}
#+end_export
** DONE Amplified Piezoelectric Actuator - Extracted Model
** DONE Amplified Piezoelectric Actuator - Measured FRF and Extracted Model
CLOSED: [2021-07-21 mer. 15:27]
#+attr_latex: :width \linewidth
@@ -700,7 +700,7 @@ CLOSED: [2021-07-21 mer. 17:43]
#+attr_latex: :width \linewidth
[[file:figs/mounted_nano_hexapod_picture.jpg]]
** DONE Nano-Hexapod - Identified Dynamics
** DONE Nano-Hexapod - Identified Dynamics (Diagonal elements)
CLOSED: [2021-07-22 jeu. 16:17]
\vspace{-1em}
talk/dehaeze21_mechatronics_approach_nass_talk.pdf
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talk/dehaeze21_mechatronics_approach_nass_talk.tex
+51 -65
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@@ -1,4 +1,4 @@
% Created 2021-07-22 jeu. 23:48
% Created 2021-07-27 mar. 08:42
% Intended LaTeX compiler: pdflatex
\documentclass[aspectratio=169, t]{clean-beamer}
\usepackage[utf8]{inputenc}
@@ -21,7 +21,7 @@
\usepackage{array}
\usepackage{siunitx}
\usepackage{mathtools}
\author[shortname]{Thomas Dehaeze \inst{1,2}, Julien Bonnefoy \inst{1} \and Christophe Collette \inst{2,3}}
\author[shortname]{Thomas Dehaeze \inst{1,2}, Julien Bonnefoy \inst{1} and Christophe Collette \inst{2,3}}
\institute[shortinst]{\inst{1} European Synchrotron Radiation Facility, Grenoble, France \and %
\inst{2} Precision Mechatronics Laboratory, University of Liege, Belgium \and %
\inst{3} BEAMS Department, Free University of Brussels, Belgium}
@@ -45,12 +45,11 @@
\setbeamertemplate{bibliography item}[text]
\DeclareSIUnit\rms{rms}
\usetheme{default}
\author{Dehaeze Thomas, Bonnefoy Julien and Collette Christophe}
\date{}
\title{Mechatronics Approach for the Development of a Nano-Active-Stabilization-System}
\subtitle{MEDSI2020, July 26-29, 2021}
\hypersetup{
pdfauthor={Dehaeze Thomas, Bonnefoy Julien and Collette Christophe},
pdfauthor={},
pdftitle={Mechatronics Approach for the Development of a Nano-Active-Stabilization-System},
pdfkeywords={},
pdfsubject={},
@@ -61,8 +60,8 @@
\maketitle
\section*{Introduction}
\label{sec:org2f2f7e5}
\begin{frame}[label={sec:org7a284a6}]{The ID31 Micro Station}
\label{sec:orgdabb222}
\begin{frame}[label={sec:org75433ab}]{The ID31 Micro Station}
\begin{center}
\includegraphics[scale=1,width=0.95\linewidth]{figs/micro_hexapod_render.pdf}
\end{center}
@@ -73,7 +72,7 @@
\end{tikzpicture}
\end{frame}
\begin{frame}[label={sec:org5dbf487}]{Introduction - The Nano Active Stabilization System}
\begin{frame}[label={sec:orga898a71}]{Introduction - The Nano Active Stabilization System (NASS)}
\textbf{Objective}: Improve the position accuracy from \(\approx 10\,\mu m\) down to \(\approx 10\,nm\) \newline
\textbf{Design approach}: ``Model based design'' / ``Predictive Design''
@@ -82,21 +81,21 @@
\end{center}
\end{frame}
\begin{frame}[label={sec:org8665237}]{Overview of the Mechatronic Approach - Model Based Design}
\begin{frame}[label={sec:org9574917}]{Overview of the Mechatronic Approach - Model Based Design}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nass_mechatronics_approach.png}
\end{center}
\end{frame}
\section{Conceptual Phase}
\label{sec:org0e45181}
\begin{frame}[label={sec:org66fab8a}]{Outline - Conceptual Phase}
\label{sec:org62eb09b}
\begin{frame}[label={sec:orgd53fdb4}]{Outline - Conceptual Phase}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nass_mechatronics_approach_conceptual_phase.pdf}
\end{center}
\end{frame}
\begin{frame}[label={sec:org5582b03}]{Feedback Control - The Control Loop}
\begin{frame}[label={sec:orgf99643e}]{Feedback Control - The Control Loop}
\vspace{-1em}
\begin{center}
@@ -127,7 +126,7 @@
\end{columns}
\end{frame}
\begin{frame}[label={sec:org95d167f}]{Noise Budgeting and Required Control Bandwidth}
\begin{frame}[label={sec:orge603014}]{Noise Budgeting and Required Control Bandwidth}
\vspace{-1em}
\begin{center}
@@ -135,7 +134,7 @@
\end{center}
\end{frame}
\begin{frame}[label={sec:orgce8e920}]{Limitation of the Controller Bandwidth?}
\begin{frame}[label={sec:org1a8d575}]{Limitation of the Controller Bandwidth?}
\begin{columns}
\begin{column}{0.6\columnwidth}
\vspace{-2em}
@@ -152,12 +151,6 @@
\includegraphics[scale=1,width=\linewidth]{figs/control_bandwidth_2_above_res.pdf}
\end{center}
}\only<3>{
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/control_bandwidth_3_next_gen.pdf}
\end{center}
}
\end{column}
@@ -182,19 +175,12 @@ Limited by complex dynamics\newline
Model based controller
\end{tcolorbox}
}\only<3>{
\begin{tcolorbox}[title=Next-Gen Systems, fontupper=\small]
Active research topic\newline
Complex controllers
\end{tcolorbox}
}
\end{column}
\end{columns}
\end{frame}
\begin{frame}[label={sec:orge61676f}]{Soft or Stiff \(\nu\text{-hexapod}\) ? Interaction with the \(\mu\text{-station}\)}
\begin{frame}[label={sec:org239155a}]{Soft or Stiff \(\nu\text{-hexapod}\) ? Interaction with the \(\mu\text{-station}\)}
\vspace{-3em}
\begin{columns}
\begin{column}{0.3\columnwidth}
@@ -217,7 +203,7 @@ Complex controllers
\onslide<1->{
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nass_example_alone.pdf}
\includegraphics[scale=1,width=\linewidth]{figs/nass_example_alone_b.pdf}
\end{center}
\vspace{-2em}
@@ -225,7 +211,7 @@ Complex controllers
}\onslide<2->{
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nass_example_support_uncertainty_d_L.pdf}
\includegraphics[scale=1,width=\linewidth]{figs/nass_example_support_uncertainty_d_L_b.pdf}
\end{center}
}
@@ -233,7 +219,7 @@ Complex controllers
\end{columns}
\end{frame}
\begin{frame}[label={sec:orgfa52d1c}]{Complexity of the Micro-Station Dynamics (Model Analysis)}
\begin{frame}[label={sec:orgeb9ee99}]{Complexity of the Micro-Station Dynamics (Model Analysis)}
\vspace{-1em}
\begin{center}
@@ -246,7 +232,7 @@ Complex controllers
\end{tikzpicture}
\end{frame}
\begin{frame}[label={sec:org82c9a46}]{Control Strategy: HAC-LAC}
\begin{frame}[label={sec:orgb8ddd28}]{Control Strategy: HAC-LAC}
\vspace{-0.5em}
\begin{center}
@@ -260,7 +246,7 @@ Complex controllers
\begin{tcolorbox}[title=Low Authority Control]
\begin{itemize}
\item Collocated sensors/actuators
\item Guaranteed Stability
\item Guaranteed Stability, simple \(K\)
\item Adds damping
\item \(\searrow\) vibration near resonances
\end{itemize}
@@ -272,15 +258,15 @@ Complex controllers
\begin{itemize}
\item Position sensors
\item Complex dynamics
\item \(\searrow\) vibration in the bandwidth
\item Use transformation matrices
\item \(\searrow\) vibration in the bandwidth
\end{itemize}
\end{tcolorbox}
\end{column}
\end{columns}
\end{frame}
\begin{frame}[label={sec:org8694100}]{Multi-Body Models - Simulations}
\begin{frame}[label={sec:org0579a05}]{Multi-Body Models - Simulations}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/simscape_simulation.jpg}
\end{center}
@@ -302,14 +288,14 @@ Complex controllers
\end{frame}
\section{Detail Design Phase}
\label{sec:orgff27fa3}
\begin{frame}[label={sec:orgf7e1c30}]{Outline - Detail Design Phase}
\label{sec:orga9ae877}
\begin{frame}[label={sec:org1b0984d}]{Outline - Detail Design Phase}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nass_mechatronics_approach_detailed_phase.pdf}
\end{center}
\end{frame}
\begin{frame}[label={sec:org133ceaa}]{Nano-Hexapod Overview - Key elements}
\begin{frame}[label={sec:org1f20e49}]{Nano-Hexapod Overview - Key elements}
\vspace{-1.5em}
\begin{center}
@@ -329,7 +315,7 @@ Complex controllers
\end{tcolorbox}
\end{frame}
\begin{frame}[label={sec:org276a69c}]{Choice of Actuator and Flexible Joint Design}
\begin{frame}[label={sec:orge2a3011}]{Choice of Actuator and Flexible Joint Design}
\vspace{-2em}
\begin{columns}
\begin{column}{0.5\columnwidth}
@@ -384,7 +370,7 @@ Bending Stroke & \SI{> 1}{\milli\radian} & 20\\
\end{columns}
\end{frame}
\begin{frame}[label={sec:org27824a6}]{Instrumentation}
\begin{frame}[label={sec:orgc5a1632}]{Instrumentation}
\vspace{-1em}
\begin{columns}
@@ -475,43 +461,43 @@ All elements could be chosen/design based on the models
\end{frame}
\section{Experimental Phase}
\label{sec:orgbc8949c}
\begin{frame}[label={sec:org6e7483a}]{Outline - Experimental Phase}
\label{sec:org000fc13}
\begin{frame}[label={sec:org5a3d17b}]{Outline - Experimental Phase}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nass_mechatronics_approach_experimental_phase.red.pdf}
\end{center}
\end{frame}
\begin{frame}[label={sec:org2b19437}]{Flexible Joints - Measurements}
\begin{frame}[label={sec:orge94eaf3}]{Flexible Joints - Measurements}
\vspace{-2em}
\begin{columns}
\begin{column}{0.5\columnwidth}
\begin{column}{0.45\columnwidth}
\begin{center}
\includegraphics[scale=1,width=0.95\linewidth]{figs/received_flexible_joints.jpg}
\end{center}
\begin{center}
\includegraphics[scale=1,width=0.95\linewidth]{figs/soft_measure_flex_size.jpg}
\includegraphics[scale=1,width=0.95\linewidth]{figs/flexible_joint_bench.pdf}
\end{center}
\end{column}
\begin{column}{0.55\columnwidth}
\vspace{-1.5em}
\begin{center}
\includegraphics[scale=1,width=0.8\linewidth]{figs/flexible_joint_bench.pdf}
\end{center}
\vspace{-1em}
\begin{center}
\includegraphics[scale=1,width=0.9\linewidth]{figs/flex_joint_meas_example_F_d_lin_fit.pdf}
\end{center}
\begin{tcolorbox}[title=Other Measurement Benches]
\begin{itemize}
\item Amplifier Output Noise and Bandwidth
\item Encoder Measurement Noise
\item DAC Output Noise
\end{itemize}
\end{tcolorbox}
\end{column}
\end{columns}
\end{frame}
\begin{frame}[label={sec:org96a6b68}]{Amplified Piezoelectric Actuator - Test Bench}
\begin{frame}[label={sec:org518f2db}]{Amplified Piezoelectric Actuator - Test Bench}
\vspace{-1em}
\begin{center}
@@ -530,13 +516,13 @@ All elements could be chosen/design based on the models
\end{tikzpicture}
\end{frame}
\begin{frame}[label={sec:orge87ad99}]{Amplified Piezoelectric Actuator - Extracted Model}
\begin{frame}[label={sec:org749c413}]{Amplified Piezoelectric Actuator - Measured FRF and Extracted Model}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/apa_comp_model_frf.pdf}
\end{center}
\end{frame}
\begin{frame}[label={sec:org7af7fba}]{Amplified Piezoelectric Actuator - Integral Force Feedback}
\begin{frame}[label={sec:org1d672c7}]{Amplified Piezoelectric Actuator - Integral Force Feedback}
\vspace{-3em}
\begin{columns}
\begin{column}{0.62\columnwidth}
@@ -557,7 +543,7 @@ All elements could be chosen/design based on the models
\end{columns}
\end{frame}
\begin{frame}[label={sec:orgc496afb}]{Strut - Mounting Tool}
\begin{frame}[label={sec:org7b5008c}]{Strut - Mounting Tool}
\vspace{-2.5em}
\begin{columns}
\begin{column}{0.63\columnwidth}
@@ -578,7 +564,7 @@ All elements could be chosen/design based on the models
\end{column}
\end{columns}
\end{frame}
\begin{frame}[label={sec:orgaec0a8a}]{Strut - Dynamical Measurements}
\begin{frame}[label={sec:orgc1ecd2e}]{Strut - Dynamical Measurements}
\vspace{-1em}
\begin{center}
@@ -598,7 +584,7 @@ All elements could be chosen/design based on the models
\end{tikzpicture}
\end{frame}
\begin{frame}[label={sec:org965cd42}]{Strut - Encoders Output and Spurious Modes}
\begin{frame}[label={sec:org8ce2d42}]{Strut - Encoders Output and Spurious Modes}
\vspace{-3em}
\begin{columns}
\begin{column}{0.43\columnwidth}
@@ -624,7 +610,7 @@ All elements could be chosen/design based on the models
\end{columns}
\end{frame}
\begin{frame}[label={sec:orgda21de8}]{Nano-Hexapod Mounting Tool}
\begin{frame}[label={sec:orgb6be716}]{Nano-Hexapod Mounting Tool}
\begin{center}
\includegraphics[scale=1,width=0.9\linewidth]{figs/nano_hexapod_mounting.JPG}
\end{center}
@@ -635,7 +621,7 @@ All elements could be chosen/design based on the models
\end{tikzpicture}
\end{frame}
\begin{frame}[label={sec:org79abb20}]{Mounted Nano-Hexapod}
\begin{frame}[label={sec:org281520e}]{Mounted Nano-Hexapod}
\vspace{-1em}
\begin{center}
@@ -643,7 +629,7 @@ All elements could be chosen/design based on the models
\end{center}
\end{frame}
\begin{frame}[label={sec:orgf59950c}]{Nano-Hexapod - Identified Dynamics}
\begin{frame}[label={sec:org351990a}]{Nano-Hexapod - Identified Dynamics (Diagonal elements)}
\vspace{-1em}
\begin{center}
@@ -651,7 +637,7 @@ All elements could be chosen/design based on the models
\end{center}
\end{frame}
\begin{frame}[label={sec:org00f7894}]{Nano-Hexapod - Damped Dynamics}
\begin{frame}[label={sec:org18b6334}]{Nano-Hexapod - Damped Dynamics}
\vspace{-1em}
\begin{center}
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\begin{frame}[label={sec:org89187a0}]{The Nano-Hexapod on top of the Micro-Station}
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\section{Conclusion}
\label{sec:orgcce0f41}
\begin{frame}[label={sec:org905c81b}]{Conclusion}
\label{sec:org5c1e008}
\begin{frame}[label={sec:orgd50b8eb}]{Conclusion}
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\textbf{Mechatronics Approach}:
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