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phd-test-bench-id31/figs
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Thomas Dehaeze 49f815d187 Update report
2024-03-19 15:30:11 +01:00
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align_top_sphere_comparators.jpg
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G_cart_loop_gain_diagonal_3dof.pdf
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G_cart_loop_gain_diagonal_3dof.png
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G_cart_nyquist_diagonal_3dof.pdf
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G_cart_nyquist_diagonal_3dof.png
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id31_align_metorlogy_errors_after_align.pdf
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id31_align_metorlogy_errors_after_align.png
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id31_cart_plant_3x3.pdf
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id31_cart_plant_3x3.png
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id31_cas_effect_hac_m0.pdf
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id31_cas_effect_hac_m0.png
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id31_cas_effect_lac_m0.pdf
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id31_cas_effect_lac_m0.png
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id31_cas_m0_30rpm_ol_lac_hac.pdf
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id31_cas_m0_30rpm_ol_lac_hac.png
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id31_comp_cart_plant_reduced_model.pdf
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id31_comp_cart_plant_reduced_model.png
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id31_comp_simscape_frf_ol_enc.pdf
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id31_comp_simscape_frf_ol_enc.png
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id31_comp_simscape_frf_ol_iff.pdf
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id31_comp_simscape_frf_ol_iff.png
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id31_comp_simscape_frf_ol_int.pdf
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id31_comp_simscape_frf_ol_int.png
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id31_comp_undamped_damped_plant_m0.pdf
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id31_comp_undamped_damped_plant_m0.png
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id31_coupling_decrease_rz_align_m3.pdf
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id31_coupling_decrease_rz_align_m3.png
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id31_coupling_decrease_rz_align.pdf
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id31_coupling_decrease_rz_align.png
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id31_diffraction_tomo_1mms.pdf
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id31_diffraction_tomo_1mms.png
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id31_diffraction_tomo_velocities.pdf
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id31_diffraction_tomo_velocities.png
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id31_dirty_layer_scan_m0_large.pdf
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id31_dirty_layer_scan_m0_large.png
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id31_dirty_layer_scan_m0.pdf
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id31_dirty_layer_scan_m0.png
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id31_dz_mim_10nm_steps.pdf
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id31_dz_mim_10nm_steps.png
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id31_dz_mim_100nm_steps.pdf
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id31_dz_mim_100nm_steps.png
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id31_dz_steps_response.pdf
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id31_dz_steps_response.png
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id31_effect_mass_frf_ol_enc.pdf
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id31_effect_mass_frf_ol_enc.png
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id31_effect_mass_frf_ol_iff.pdf
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id31_effect_mass_frf_ol_iff.png
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id31_effect_mass_frf_ol_int.pdf
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id31_effect_mass_frf_ol_int.png
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id31_Ghac_6x6_plant_comp_model.pdf
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id31_Ghac_6x6_plant_comp_model.png
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id31_Ghac_effect_mass.pdf
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id31_Ghac_effect_mass.png
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id31_Ghac_plant_comp_model.pdf
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id31_Ghac_plant_comp_model.png
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id31_Giff_effect_mass.pdf
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id31_Giff_effect_mass.png
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id31_Giff_effect_rotation.pdf
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id31_Giff_effect_rotation.png
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id31_Giff_plant_comp_model.pdf
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id31_Giff_plant_comp_model.png
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id31_Giff_plant.pdf
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id31_Giff_plant.png
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id31_hac_damped_plant_estimated_simscape.pdf
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id31_hac_damped_plant_estimated_simscape.png
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id31_hac_robust_loop_gain.pdf
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id31_hac_robust_loop_gain.png
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id31_hac_robust_nyquist.pdf
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id31_hac_robust_nyquist.png
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id31_high_perf_hac_m0_loop_gain.pdf
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id31_high_perf_hac_m0_loop_gain.png
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id31_high_perf_hac_m0_nyquist.pdf
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id31_high_perf_hac_m0_nyquist.png
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id31_iff_loop_gain_diagonal_terms.pdf
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id31_iff_loop_gain_diagonal_terms.png
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id31_iff_ol_plant_m0.pdf
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id31_iff_ol_plant_m0.png
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id31_iff_root_locus.pdf
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id31_iff_root_locus.png
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id31_int_ol_plant_m0.pdf
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id31_int_ol_plant_m0.png
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id31_metrology_align_dx_dy.pdf
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id31_metrology_align_dx_dy.png
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id31_metrology_align_rx_ry.pdf
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id31_metrology_align_rx_ry.png
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id31_noise_budget_effect_hac_m0.pdf
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id31_noise_budget_effect_hac_m0.png
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id31_noise_budget_effect_lac_m0.pdf
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id31_noise_budget_effect_lac_m0.png
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id31_noise_budget_effect_rotation.pdf
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id31_noise_budget_effect_rotation.png
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id31_noise_budget_interf_freq_domain_m0.pdf
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id31_noise_budget_interf_freq_domain_m0.png
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id31_noise_budget_interf_time_domain_m0.pdf
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id31_noise_budget_interf_time_domain_m0.png
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id31_noise_budget_open_loop_cas_m0.pdf
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id31_noise_budget_open_loop_cas_m0.png
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id31_reflectivity_scan_Ry_100urads.pdf
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id31_reflectivity_scan_Ry_100urads.png
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id31_Rz_align_dx_dy_scans_before_calib.pdf
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id31_Rz_align_dx_dy_scans_before_calib.png
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id31_Rz_align_dx_dy_scans.pdf
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id31_Rz_align_dx_dy_scans.png
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id31_simscape_enc_ol_plant.pdf
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id31_simscape_enc_ol_plant.png
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id31_simscape_iff_ol_plant.pdf
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id31_simscape_iff_ol_plant.png
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id31_simscape_int_ol_plant.pdf
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id31_simscape_int_ol_plant.png
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id31_tomo_1rpm_robust_m0.pdf
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id31_tomo_1rpm_robust_m0.png
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id31_tomo_robust_slow_m0.pdf
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id31_tomo_robust_slow_m0.png
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id31_tomography_m0_30rpm_robust_xyz.pdf
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id31_tomography_m0_30rpm_robust_xyz.png
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id31_tomography_m0_30rpm_yz_errors.pdf
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id31_tomography_m0_30rpm_yz_errors.png
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id31_tomography_m0_30rpm.pdf
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id31_tomography_m0_30rpm.png
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id31_tomography_m3_1rpm.pdf
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id31_tomography_m3_1rpm.png
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id31_tomography_ol_cl_robust_hac_m0.pdf
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id31_tomography_ol_cl_robust_hac_m0.png
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id31_ty_scan_10ums_cl_dy_errors.pdf
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id31_ty_scan_10ums_cl_dy_errors.png
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id31_ty_scan_10ums_cl_dz_ry_errors.pdf
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id31_ty_scan_10ums_cl_dz_ry_errors.png
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id31_ty_scan_10ums_ol_dy_errors.pdf
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id31_ty_scan_10ums_ol_dy_errors.png
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id31_ty_scan_10ums_ol_dz_ry_errors.pdf
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id31_ty_scan_10ums_ol_dz_ry_errors.png
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id31_ty_scan_100ums_cl_dy_errors.pdf
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id31_ty_scan_100ums_cl_dy_errors.png
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id31_ty_scan_100ums_cl_dz_ry_errors.pdf
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id31_ty_scan_100ums_cl_dz_ry_errors.png
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LION_metrology_interferometers.pdf
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LION_metrology_interferometers.png
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LION_metrology_interferometers.svg
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LION_picture_close.jpg
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metrology_alignment_xy_map.pdf
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metrology_alignment_xy_map.png
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metrology_alignment_xz_map.pdf
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metrology_alignment_xz_map.png
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metrology_alignment_yz_map.pdf
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metrology_alignment_yz_map.png
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short_stroke_metrology_overview.jpg
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