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b48b8eb3ff
| Author | SHA1 | Date | |
|---|---|---|---|
 tdehaeze
|
b48b8eb3ff |
@@ -1,18 +0,0 @@
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#!/bin/bash
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# Directory containing SVG files
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INPUT_DIR="."
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# Loop through all SVG files in the directory
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for svg_file in "$INPUT_DIR"/*.svg; do
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# Check if there are SVG files in the directory
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if [ -f "$svg_file" ]; then
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# Output PDF file name
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pdf_file="../${svg_file%.svg}.pdf"
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png_file="../${svg_file%.svg}"
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||||||
# Convert SVG to PDF using Inkscape
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inkscape "$svg_file" --export-filename="$pdf_file" && \
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pdftocairo -png -singlefile -cropbox "$pdf_file" "$png_file"
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fi
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done
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Before Width: | Height: | Size: 876 KiB |
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Before Width: | Height: | Size: 703 KiB |
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Before Width: | Height: | Size: 647 KiB |
@@ -1,469 +0,0 @@
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<?xml version="1.0" encoding="UTF-8" standalone="no"?>
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<svg
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version="1.1"
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id="svg1"
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width="405.81152"
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height="284.11676"
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viewBox="0 0 405.81153 284.11676"
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sodipodi:docname="nhexa_stages_villar.svg"
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inkscape:version="1.4 (e7c3feb100, 2024-10-09)"
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xmlns:inkscape="http://www.inkscape.org/namespaces/inkscape"
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xmlns:sodipodi="http://sodipodi.sourceforge.net/DTD/sodipodi-0.dtd"
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xmlns="http://www.w3.org/2000/svg"
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xmlns:svg="http://www.w3.org/2000/svg">
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<defs
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id="defs1">
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inkscape:isstock="true"
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style="fill:context-stroke;fill-rule:evenodd;stroke:none"
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id="path12" />
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@@ -18,62 +18,55 @@ mdl = 'nano_hexapod_model';
|
|||||||
%% Colors for the figures
|
%% Colors for the figures
|
||||||
colors = colororder;
|
colors = colororder;
|
||||||
|
|
||||||
%% Frequency Vector [Hz]
|
%% Frequency Vector
|
||||||
freqs = logspace(0, 3, 1000);
|
freqs = logspace(0, 3, 1000);
|
||||||
|
|
||||||
%% Estimate the errors associated with approximate forward kinematics using the Jacobian matrix
|
% Range validity of the approximate inverse kinematics
|
||||||
stewart = initializeSimplifiedNanoHexapod('H', 100e-3);
|
|
||||||
|
|
||||||
Xrs = logspace(-6, -1, 10); % Wanted X translation of the mobile platform [m]
|
% The accuracy of the Jacobian-based forward kinematics solution was estimated through a systematic error analysis.
|
||||||
phis = linspace(-pi, pi, 100); % Tested azimutal angles [rad]
|
% For a series of platform positions along the $x\text{-axis}$, the exact strut lengths are computed using the analytical inverse kinematics equation eqref:eq:nhexa_inverse_kinematics.
|
||||||
thetas = linspace(0, pi, 100); % Tested polar angles [rad]
|
% These strut lengths are then used with the Jacobian to estimate the platform pose, from which the error between the estimated and true poses can be calculated.
|
||||||
|
|
||||||
|
% The estimation errors in the $x$, $y$, and $z$ directions are shown in Figure ref:fig:nhexa_forward_kinematics_approximate_errors.
|
||||||
|
% The results demonstrate that for displacements up to approximately $1\,\%$ of the hexapod's size (which corresponds to $100\,\mu m$ as the size of the Stewart platform is here $\approx 100\,mm$), the Jacobian approximation provides excellent accuracy.
|
||||||
|
|
||||||
|
% This finding has particular significance for the Nano-hexapod application.
|
||||||
|
% Since the maximum required stroke ($\approx 100\,\mu m$) is three orders of magnitude smaller than the stewart platform size ($\approx 100\,mm$), the Jacobian matrix can be considered constant throughout the workspace.
|
||||||
|
% It can be computed once at the rest position and used for both forward and inverse kinematics with high accuracy.
|
||||||
|
|
||||||
|
|
||||||
|
%% Estimate the errors associated with approximate forward kinematics using the Jacobian matrix
|
||||||
|
stewart = initializeSimplifiedNanoHexapod('H', 100e-3, 'MO_B', 0);
|
||||||
|
|
||||||
|
Xrs = logspace(-6, -1, 100); % Wanted X translation of the mobile platform [m]
|
||||||
|
|
||||||
% Compute the strut exact length for each X-position
|
% Compute the strut exact length for each X-position
|
||||||
Xrs_errors = zeros(1, length(Xrs)); % Maximum distance error [m]
|
Ls_exact = zeros(6, length(Xrs));
|
||||||
Rrs_errors = zeros(1, length(Xrs)); % Maximum angular error [rad]
|
|
||||||
for i = 1:length(Xrs)
|
for i = 1:length(Xrs)
|
||||||
Xrs_error_min = 0;
|
[~, L_exact(:, i)] = inverseKinematics(stewart, 'AP', [Xrs(i); 0; 0]);
|
||||||
Rrs_error_min = 0;
|
end
|
||||||
for theta = thetas
|
|
||||||
for phi = phis
|
% From the strut length, compute the stewart pose using the Jacobian matrix
|
||||||
ix = [sin(theta)*cos(phi); sin(theta)*sin(phi);cos(theta)]; % Unit vector for the displacement direction
|
Xrs_approx = zeros(6, length(Xrs));
|
||||||
[~, L_exact] = inverseKinematics(stewart, 'AP', Xrs(i)*ix); % Compute exact strut length for the wanted position
|
for i = 1:length(Xrs)
|
||||||
Xrs_approx = inv(stewart.geometry.J)*L_exact; % Approximate the position using the Jacobian
|
Xrs_approx(:, i) = inv(stewart.geometry.J)*L_exact(:, i);
|
||||||
Xrs_error = norm(Xrs(i)*ix - Xrs_approx(1:3), 2); % Compute the position estimation error
|
|
||||||
Rrs_error = norm(Xrs_approx(4:6), 2); % Compute the angular estimation error
|
|
||||||
if Xrs_error > Xrs_error_min
|
|
||||||
Xrs_error_min = Xrs_error;
|
|
||||||
end
|
|
||||||
if Rrs_error > Rrs_error_min
|
|
||||||
Rrs_error_min = Rrs_error;
|
|
||||||
end
|
|
||||||
end
|
|
||||||
end
|
|
||||||
Xrs_errors(i) = Xrs_error_min;
|
|
||||||
Rrs_errors(i) = Rrs_error_min;
|
|
||||||
end
|
end
|
||||||
|
|
||||||
%% Errors associated with the use of the Jacobian matrix to solve the forward kinematic problem
|
%% Errors associated with the use of the Jacobian matrix to solve the forward kinematic problem
|
||||||
figure;
|
figure;
|
||||||
yyaxis left
|
|
||||||
hold on;
|
hold on;
|
||||||
plot(1e6*Xrs, 1e9*Xrs_errors, 'DisplayName', '$\epsilon_D$');
|
plot(1e6*Xrs, 1e9*abs(Xrs - Xrs_approx(1, :)), 'DisplayName', '$\epsilon_x$');
|
||||||
plot(1e6*Xrs, 1e6*Xrs, '--', 'DisplayName', '$0.1\%$ error');
|
plot(1e6*Xrs, 1e9*abs(Xrs_approx(2, :)), 'DisplayName', '$\epsilon_y$');
|
||||||
|
plot(1e6*Xrs, 1e9*abs(Xrs_approx(3, :)), 'DisplayName', '$\epsilon_z$');
|
||||||
|
plot(1e6*Xrs, 1e6*Xrs, 'k--', 'DisplayName', '$0.1\%$ error');
|
||||||
hold off;
|
hold off;
|
||||||
set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log');
|
set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log');
|
||||||
leg = legend('location', 'northwest', 'FontSize', 8, 'NumColumns', 1);
|
leg = legend('location', 'northwest', 'FontSize', 8, 'NumColumns', 1);
|
||||||
leg.ItemTokenSize(1) = 15;
|
leg.ItemTokenSize(1) = 15;
|
||||||
xlim([1, 1e4]); ylim([1, 1e4]);
|
xlim([1, 1e4]); ylim([1, 1e4]);
|
||||||
xlabel('Motion Stroke');
|
xlabel('$D_x$ motion');
|
||||||
ylabel('Kinematic Errors');
|
ylabel('Kinematic Errors');
|
||||||
xticks([1, 10, 100, 1000, 10000]);
|
xticks([1, 10, 100, 1000, 10000]);
|
||||||
yticks([1, 10, 100, 1000, 10000]);
|
yticks([1, 10, 100, 1000, 10000]);
|
||||||
xticklabels({'$1\mu m$', '$10\mu m$', '$100\mu m$', '$1mm$', '$10mm$'});
|
xticklabels({'$1\mu m$', '$10\mu m$', '$100\mu m$', '$1mm$', '$10mm$'});
|
||||||
yticklabels({'$1nm$', '$10nm$', '$100nm$', '$1\mu m$', '$10\mu m$'});
|
yticklabels({'$1nm$', '$10nm$', '$100nm$', '$1\mu m$', '$10\mu m$'});
|
||||||
|
|
||||||
yyaxis right
|
|
||||||
plot(1e6*Xrs, 1e9*Rrs_errors, 'DisplayName', '$\epsilon_R$');
|
|
||||||
set(gca, 'YScale', 'log');
|
|
||||||
ylim([1, 1e4]);
|
|
||||||
yticks([1, 10, 100, 1000, 10000]);
|
|
||||||
yticklabels({'$1$nrad', '$10$nrad', '$100$nrad', '$1\mu$rad', '$10\mu$rad'});
|
|
||||||
|
|||||||
+72
-3
@@ -18,9 +18,56 @@ mdl = 'nano_hexapod_model';
|
|||||||
%% Colors for the figures
|
%% Colors for the figures
|
||||||
colors = colororder;
|
colors = colororder;
|
||||||
|
|
||||||
%% Frequency Vector [Hz]
|
%% Frequency Vector
|
||||||
freqs = logspace(0, 3, 1000);
|
freqs = logspace(0, 3, 1000);
|
||||||
|
|
||||||
|
% Validation of the multi-body model
|
||||||
|
% <<ssec:nhexa_model_validation>>
|
||||||
|
|
||||||
|
% The developed multi-body model of the Stewart platform is represented schematically in Figure ref:fig:nhexa_stewart_model_input_outputs, highlighting the key inputs and outputs: actuator forces $\bm{f}$, force sensor measurements $\bm{f}_n$, and relative displacement measurements $\bm{\mathcal{L}}$.
|
||||||
|
% The frames $\{F\}$ and $\{M\}$ serve as interfaces for integration with other elements in the multi-body system.
|
||||||
|
% A three-dimensional visualization of the model is presented in Figure ref:fig:nhexa_simscape_screenshot.
|
||||||
|
|
||||||
|
% #+attr_latex: :options [b]{0.6\linewidth}
|
||||||
|
% #+begin_minipage
|
||||||
|
% #+name: fig:nhexa_stewart_model_input_outputs
|
||||||
|
% #+caption: Nano-Hexapod plant with inputs and outputs. Frames $\{F\}$ and $\{M\}$ can be connected to other elements in the multi-body models.
|
||||||
|
% #+attr_latex: :scale 1 :float nil
|
||||||
|
% [[file:figs/nhexa_stewart_model_input_outputs.png]]
|
||||||
|
% #+end_minipage
|
||||||
|
% \hfill
|
||||||
|
% #+attr_latex: :options [b]{0.35\linewidth}
|
||||||
|
% #+begin_minipage
|
||||||
|
% #+name: fig:nhexa_simscape_screenshot
|
||||||
|
% #+caption: 3D representation of the multi-body model
|
||||||
|
% #+attr_latex: :width 0.90\linewidth :float nil
|
||||||
|
% [[file:figs/nhexa_simscape_screenshot.jpg]]
|
||||||
|
% #+end_minipage
|
||||||
|
|
||||||
|
% The validation of the multi-body model is performed using the simplest Stewart platform configuration, enabling direct comparison with the analytical transfer functions derived in Section ref:ssec:nhexa_stewart_platform_dynamics.
|
||||||
|
% This configuration consists of massless universal joints at the base, massless spherical joints at the top platform, and massless struts with stiffness $k_a = 1\,\text{N}/\mu\text{m}$ and damping $c_a = 10\,\text{N}/({\text{m}/\text{s}})$.
|
||||||
|
% The geometric parameters remain as specified in Table ref:tab:nhexa_actuator_parameters.
|
||||||
|
|
||||||
|
% While the moving platform itself is considered massless, a $10\,\text{kg}$ cylindrical payload is mounted on top with a radius of $r = 110\,mm$ and a height $h = 300\,mm$.
|
||||||
|
|
||||||
|
% For the analytical model, the stiffness, damping and mass matrices are defined in eqref:eq:nhexa_analytical_matrices.
|
||||||
|
|
||||||
|
% \begin{subequations}\label{eq:nhexa_analytical_matrices}
|
||||||
|
% \begin{align}
|
||||||
|
% \bm{\mathcal{K}} &= \text{diag}(k_a,\ k_a,\ k_a,\ k_a,\ k_a,\ k_a) \\
|
||||||
|
% \bm{\mathcal{C}} &= \text{diag}(c_a,\ c_a,\ c_a,\ c_a,\ c_a,\ c_a) \\
|
||||||
|
% \bm{M} &= \text{diag}\left(m,\ m,\ m,\ \frac{1}{12}m(3r^2 + h^2),\ \frac{1}{12}m(3r^2 + h^2),\ \frac{1}{2}mr^2\right)
|
||||||
|
% \end{align}
|
||||||
|
% \end{subequations}
|
||||||
|
|
||||||
|
% The transfer functions from actuator forces to strut displacements are computed using these matrices according to equation eqref:eq:nhexa_transfer_function_struts.
|
||||||
|
% These analytical transfer functions are then compared with those extracted from the multi-body model.
|
||||||
|
% The multi-body model yields a state-space representation with 12 states, corresponding to the six degrees of freedom of the moving platform.
|
||||||
|
|
||||||
|
% Figure ref:fig:nhexa_comp_multi_body_analytical presents a comparison between the analytical and multi-body transfer functions, specifically showing the response from the first actuator force to all six strut displacements.
|
||||||
|
% The close agreement between both approaches across the frequency spectrum validates the multi-body model's accuracy in capturing the system's dynamic behavior.
|
||||||
|
|
||||||
|
|
||||||
%% Plant using Analytical Equations
|
%% Plant using Analytical Equations
|
||||||
% Stewart platform definition
|
% Stewart platform definition
|
||||||
k = 1e6; % Actuator stiffness [N/m]
|
k = 1e6; % Actuator stiffness [N/m]
|
||||||
@@ -76,7 +123,7 @@ tiledlayout(3, 1, 'TileSpacing', 'Compact', 'Padding', 'None');
|
|||||||
ax1 = nexttile([2,1]);
|
ax1 = nexttile([2,1]);
|
||||||
hold on;
|
hold on;
|
||||||
for i = 1:6
|
for i = 1:6
|
||||||
plot(freqs, abs(squeeze(freqresp(G_simscape(i,1), freqs, 'Hz'))), 'color', [colors(i,:), 0.5], 'linewidth', 2.5, ...
|
plot(freqs, abs(squeeze(freqresp(G_simscape(i,1), freqs, 'Hz'))), 'color', [colors(i,:), 0.5], ...
|
||||||
'DisplayName', sprintf('$l_%i/f_1$ - Multi-Body', i))
|
'DisplayName', sprintf('$l_%i/f_1$ - Multi-Body', i))
|
||||||
end
|
end
|
||||||
for i = 1:6
|
for i = 1:6
|
||||||
@@ -93,7 +140,7 @@ leg.ItemTokenSize(1) = 15;
|
|||||||
ax2 = nexttile;
|
ax2 = nexttile;
|
||||||
hold on;
|
hold on;
|
||||||
for i = 1:6
|
for i = 1:6
|
||||||
plot(freqs, 180/pi*angle(squeeze(freqresp(G_simscape(i,1), freqs, 'Hz'))), 'color', [colors(i,:),0.5], 'linewidth', 2.5);
|
plot(freqs, 180/pi*angle(squeeze(freqresp(G_simscape(i,1), freqs, 'Hz'))), 'color', [colors(i,:),0.5]);
|
||||||
end
|
end
|
||||||
for i = 1:6
|
for i = 1:6
|
||||||
plot(freqs, 180/pi*angle(squeeze(freqresp(G_analytical(i,1), freqs, 'Hz'))), '--', 'color', colors(i,:));
|
plot(freqs, 180/pi*angle(squeeze(freqresp(G_analytical(i,1), freqs, 'Hz'))), '--', 'color', colors(i,:));
|
||||||
@@ -107,6 +154,28 @@ yticks([-180, -90, 0, 90, 180]);
|
|||||||
linkaxes([ax1,ax2],'x');
|
linkaxes([ax1,ax2],'x');
|
||||||
xlim([freqs(1), freqs(end)]);
|
xlim([freqs(1), freqs(end)]);
|
||||||
|
|
||||||
|
% Nano Hexapod Dynamics
|
||||||
|
% <<ssec:nhexa_model_dynamics>>
|
||||||
|
|
||||||
|
% Following the validation of the multi-body model, a detailed analysis of the nano-hexapod dynamics has been performed.
|
||||||
|
% The model parameters are set according to the specifications outlined in Section ref:ssec:nhexa_model_def, with a payload mass of $10\,kg$.
|
||||||
|
% Transfer functions from actuator forces $\bm{f}$ to both strut displacements $\bm{\mathcal{L}}$ and force measurements $\bm{f}_n$ are derived from the multi-body model.
|
||||||
|
|
||||||
|
% The transfer functions relating actuator forces to strut displacements are presented in Figure ref:fig:nhexa_multi_body_plant_dL.
|
||||||
|
% Due to the system's symmetrical design and identical strut configurations, all diagonal terms (transfer functions from force $f_i$ to displacement $l_i$ of the same strut) exhibit identical behavior.
|
||||||
|
% While the system possesses six degrees of freedom, only four distinct resonance frequencies are observed in the frequency response.
|
||||||
|
% This reduction from six to four observable modes is attributed to the system's symmetry, where two pairs of resonances occur at identical frequencies.
|
||||||
|
|
||||||
|
% The system's behavior can be characterized in three frequency regions.
|
||||||
|
% At low frequencies, well below the first resonance, the plant demonstrates good decoupling between actuators, with the response dominated by the strut stiffness: $\bm{G}(j\omega) \xrightarrow[\omega \to 0]{} \bm{\mathcal{K}}^{-1}$.
|
||||||
|
% In the mid-frequency range, the system exhibits coupled dynamics through its resonant modes, reflecting the complex interactions between the platform's degrees of freedom.
|
||||||
|
% At high frequencies, above the highest resonance, the response is governed by the payload's inertia mapped to the strut coordinates: $\bm{G}(j\omega) \xrightarrow[\omega \to \infty]{} \bm{J} \bm{M}^{-T} \bm{J}^T \frac{-1}{\omega^2}$
|
||||||
|
|
||||||
|
% The force sensor transfer functions, shown in Figure ref:fig:nhexa_multi_body_plant_fm, display characteristics typical of collocated actuator-sensor pairs.
|
||||||
|
% Each actuator's transfer function to its associated force sensor exhibits alternating complex conjugate poles and zeros.
|
||||||
|
% The inclusion of parallel stiffness introduces an additional complex conjugate zero at low frequency, a feature previously observed in the three-degree-of-freedom rotating model.
|
||||||
|
|
||||||
|
|
||||||
%% Multi-Body model of the Nano-Hexapod
|
%% Multi-Body model of the Nano-Hexapod
|
||||||
% Initialize 1DoF
|
% Initialize 1DoF
|
||||||
initializeSimplifiedNanoHexapod('flex_type_F', '2dof', 'flex_type_M', '3dof', 'actuator_type', '1dof');
|
initializeSimplifiedNanoHexapod('flex_type_F', '2dof', 'flex_type_M', '3dof', 'actuator_type', '1dof');
|
||||||
|
|||||||
@@ -18,9 +18,25 @@ mdl = 'nano_hexapod_model';
|
|||||||
%% Colors for the figures
|
%% Colors for the figures
|
||||||
colors = colororder;
|
colors = colororder;
|
||||||
|
|
||||||
%% Frequency Vector [Hz]
|
%% Frequency Vector
|
||||||
freqs = logspace(0, 3, 1000);
|
freqs = logspace(0, 3, 1000);
|
||||||
|
|
||||||
|
% Control in Cartesian Space
|
||||||
|
|
||||||
|
% Alternatively, control can be implemented directly in Cartesian space, as shown in Figure ref:fig:nhexa_control_cartesian.
|
||||||
|
% Here, the controller processes Cartesian errors $\bm{\epsilon}_{\mathcal{X}}$ to generate forces and torques $\bm{\mathcal{F}}$, which are then mapped to actuator forces through the transpose of the inverse Jacobian matrix.
|
||||||
|
|
||||||
|
% The plant behavior in Cartesian space, illustrated in Figure ref:fig:nhexa_plant_frame_cartesian, reveals interesting characteristics.
|
||||||
|
% Some degrees of freedom, particularly the vertical translation and rotation about the vertical axis, exhibit simpler second-order dynamics.
|
||||||
|
% A key advantage of this approach is that control performance can be individually tuned for each direction.
|
||||||
|
% This is particularly valuable when performance requirements differ between degrees of freedom - for instance, when higher positioning accuracy is required vertically than horizontally, or when certain rotational degrees of freedom can tolerate larger errors than others.
|
||||||
|
|
||||||
|
% However, significant coupling exists between certain degrees of freedom, particularly between rotations and translations (e.g., $\epsilon_{R_x}/\mathcal{F}_y$ or $\epsilon_{D_y}/\bm\mathcal{M}_x$).
|
||||||
|
|
||||||
|
% For the conceptual validation of the nano-hexapod, control in the strut space has been selected due to its simpler implementation and the beneficial decoupling properties observed at low frequencies.
|
||||||
|
% More sophisticated control strategies will be explored during the detailed design phase.
|
||||||
|
|
||||||
|
|
||||||
%% Identify plant from actuator forces to external metrology
|
%% Identify plant from actuator forces to external metrology
|
||||||
stewart = initializeSimplifiedNanoHexapod();
|
stewart = initializeSimplifiedNanoHexapod();
|
||||||
initializeSample('type', 'cylindrical', 'm', 10, 'H', 300e-3);
|
initializeSample('type', 'cylindrical', 'm', 10, 'H', 300e-3);
|
||||||
@@ -133,6 +149,35 @@ yticks([-180, -90, 0, 90, 180]);
|
|||||||
linkaxes([ax1,ax2],'x');
|
linkaxes([ax1,ax2],'x');
|
||||||
xlim([freqs(1), freqs(end)]);
|
xlim([freqs(1), freqs(end)]);
|
||||||
|
|
||||||
|
|
||||||
|
|
||||||
|
% #+name: fig:nhexa_decentralized_iff_schematic
|
||||||
|
% #+caption: Schematic of the implemented decentralized IFF controller. The damped plant has a new inputs $\bm{f}^{\prime}$
|
||||||
|
% #+RESULTS:
|
||||||
|
% [[file:figs/nhexa_decentralized_iff_schematic.png]]
|
||||||
|
|
||||||
|
|
||||||
|
% \begin{equation}\label{eq:nhexa_kiff}
|
||||||
|
% \bm{K}_{\text{IFF}}(s) = g \cdot \begin{bmatrix}
|
||||||
|
% K_{\text{IFF}}(s) & & 0 \\
|
||||||
|
% & \ddots & \\
|
||||||
|
% 0 & & K_{\text{IFF}}(s)
|
||||||
|
% \end{bmatrix}, \quad K_{\text{IFF}}(s) = \frac{1}{s}
|
||||||
|
% \end{equation}
|
||||||
|
|
||||||
|
|
||||||
|
% In this section, the stiffness in parallel with the force sensor has been omitted since the Stewart platform is not subjected to rotation.
|
||||||
|
% The effect of this parallel stiffness will be examined in the next section when the platform is integrated into the complete NASS system.
|
||||||
|
|
||||||
|
% The Root Locus analysis, shown in Figure ref:fig:nhexa_decentralized_iff_root_locus, reveals the evolution of the closed-loop poles as the controller gain $g$ varies from $0$ to $\infty$.
|
||||||
|
% A key characteristic of force feedback control with collocated sensor-actuator pairs is observed: all closed-loop poles are bounded to the left-half plane, indicating guaranteed stability [[cite:&preumont08_trans_zeros_struc_contr_with]].
|
||||||
|
% This property is particularly valuable as the coupling is very large around resonance frequencies, enabling control of modes that would be difficult to include within the bandwidth using position feedback alone.
|
||||||
|
|
||||||
|
% The bode plot of an individual loop gain (i.e. the loop gain of $K_{\text{IFF}}(s) \cdot \frac{f_{ni}}{f_i}(s)$), presented in Figure ref:fig:nhexa_decentralized_iff_loop_gain, exhibits the typical characteristics of integral force feedback of having a phase bounded between $-90^o$ and $+90^o$.
|
||||||
|
% The loop-gain is high around the resonance frequencies, indicating that the decentralized IFF provides significant control authority over these modes.
|
||||||
|
% This high gain, combined with the bounded phase, enables effective damping of the resonant modes while maintaining stability.
|
||||||
|
|
||||||
|
|
||||||
%% Identify the IFF Plant
|
%% Identify the IFF Plant
|
||||||
stewart = initializeSimplifiedNanoHexapod('actuator_kp', 0); % Ignoring parallel stiffness for now
|
stewart = initializeSimplifiedNanoHexapod('actuator_kp', 0); % Ignoring parallel stiffness for now
|
||||||
initializeSample('type', 'cylindrical', 'm', 10, 'H', 300e-3);
|
initializeSample('type', 'cylindrical', 'm', 10, 'H', 300e-3);
|
||||||
@@ -213,6 +258,19 @@ ylim([-180, 180])
|
|||||||
linkaxes([ax1,ax2],'x');
|
linkaxes([ax1,ax2],'x');
|
||||||
xlim([1, 1e3]);
|
xlim([1, 1e3]);
|
||||||
|
|
||||||
|
|
||||||
|
|
||||||
|
% #+name: fig:nhexa_hac_iff_schematic
|
||||||
|
% #+caption: HAC-IFF control architecture with the High Authority Controller being implemented in the frame of the struts
|
||||||
|
% #+RESULTS:
|
||||||
|
% [[file:figs/nhexa_hac_iff_schematic.png]]
|
||||||
|
|
||||||
|
% The effect of decentralized IFF on the plant dynamics can be observed by comparing two sets of transfer functions.
|
||||||
|
% Figure ref:fig:nhexa_decentralized_hac_iff_plant_undamped shows the original transfer functions from actuator forces $\bm{f}$ to strut errors $\bm{\epsilon}_{\mathcal{L}}$, characterized by pronounced resonant peaks.
|
||||||
|
% When decentralized IFF is implemented, the transfer functions from modified inputs $\bm{f}^{\prime}$ to strut errors $\bm{\epsilon}_{\mathcal{L}}$, shown in Figure ref:fig:nhexa_decentralized_hac_iff_plant_damped, exhibit significantly attenuated resonances.
|
||||||
|
% This damping of structural resonances serves two purposes: it reduces vibrations in the vicinity of resonances and simplifies the design of the high authority controller by providing a simpler plant dynamics.
|
||||||
|
|
||||||
|
|
||||||
%% Identify the IFF Plant
|
%% Identify the IFF Plant
|
||||||
initializeController('type', 'iff');
|
initializeController('type', 'iff');
|
||||||
|
|
||||||
@@ -317,6 +375,44 @@ yticks([-180, -90, 0, 90, 180]);
|
|||||||
linkaxes([ax1,ax2],'x');
|
linkaxes([ax1,ax2],'x');
|
||||||
xlim([freqs(1), freqs(end)]);
|
xlim([freqs(1), freqs(end)]);
|
||||||
|
|
||||||
|
|
||||||
|
|
||||||
|
% #+name: fig:nhexa_decentralized_hac_iff_plant
|
||||||
|
% #+caption: Plant in the frame of the strut for the High Authority Controller.
|
||||||
|
% #+attr_latex: :options [htbp]
|
||||||
|
% #+begin_figure
|
||||||
|
% #+attr_latex: :caption \subcaption{\label{fig:nhexa_decentralized_hac_iff_plant_undamped}Undamped plant in the frame of the struts}
|
||||||
|
% #+attr_latex: :options {0.48\textwidth}
|
||||||
|
% #+begin_subfigure
|
||||||
|
% #+attr_latex: :width 0.95\linewidth
|
||||||
|
% [[file:figs/nhexa_decentralized_hac_iff_plant_undamped.png]]
|
||||||
|
% #+end_subfigure
|
||||||
|
% #+attr_latex: :caption \subcaption{\label{fig:nhexa_decentralized_hac_iff_plant_damped}Damped plant with Decentralized IFF}
|
||||||
|
% #+attr_latex: :options {0.48\textwidth}
|
||||||
|
% #+begin_subfigure
|
||||||
|
% #+attr_latex: :width 0.95\linewidth
|
||||||
|
% [[file:figs/nhexa_decentralized_hac_iff_plant_damped.png]]
|
||||||
|
% #+end_subfigure
|
||||||
|
% #+end_figure
|
||||||
|
|
||||||
|
% Building upon the damped plant dynamics shown in Figure ref:fig:nhexa_decentralized_hac_iff_plant_damped, a high authority controller is designed with the structure given in eqref:eq:nhexa_khac.
|
||||||
|
% The controller combines three elements: an integrator providing high gain at low frequencies, a lead compensator improving stability margins, and a low-pass filter for robustness to unmodeled high-frequency dynamics.
|
||||||
|
% The loop gain of an individual control channel is shown in Figure ref:fig:nhexa_decentralized_hac_iff_loop_gain.
|
||||||
|
|
||||||
|
% \begin{equation}\label{eq:nhexa_khac}
|
||||||
|
% \bm{K}_{\text{HAC}}(s) = \begin{bmatrix}
|
||||||
|
% K_{\text{HAC}}(s) & & 0 \\
|
||||||
|
% & \ddots & \\
|
||||||
|
% 0 & & K_{\text{HAC}}(s)
|
||||||
|
% \end{bmatrix}, \quad K_{\text{HAC}}(s) = g_0 \cdot \underbrace{\frac{\omega_c}{s}}_{\text{int}} \cdot \underbrace{\frac{1}{\sqrt{\alpha}}\frac{1 + \frac{s}{\omega_c/\sqrt{\alpha}}}{1 + \frac{s}{\omega_c\sqrt{\alpha}}}}_{\text{lead}} \cdot \underbrace{\frac{1}{1 + \frac{s}{\omega_0}}}_{\text{LPF}}
|
||||||
|
% \end{equation}
|
||||||
|
|
||||||
|
% The stability of the MIMO feedback loop is analyzed through the /characteristic loci/ method.
|
||||||
|
% Such characteristic loci, shown in Figure ref:fig:nhexa_decentralized_hac_iff_root_locus, represent the eigenvalues of the loop gain matrix $\bm{G}(j\omega)\bm{K}(j\omega)$ plotted in the complex plane as frequency varies from $0$ to $\infty$.
|
||||||
|
% For MIMO systems, this method generalizes the classical Nyquist stability criterion: with the open-loop system being stable, the closed-loop system is stable if none of the characteristic loci encircle the -1 point [[cite:&skogestad07_multiv_feedb_contr]].
|
||||||
|
% As seen in Figure ref:fig:nhexa_decentralized_hac_iff_root_locus, all loci remain to the right of the -1 point, confirming the stability of the closed-loop system. Additionally, the distance of the loci from the -1 point provides information about stability margins for the coupled system.
|
||||||
|
|
||||||
|
|
||||||
%% High Authority Controller - Mid Stiffness Nano-Hexapod
|
%% High Authority Controller - Mid Stiffness Nano-Hexapod
|
||||||
% Wanted crossover
|
% Wanted crossover
|
||||||
wc = 2*pi*20; % [rad/s]
|
wc = 2*pi*20; % [rad/s]
|
||||||
@@ -346,7 +442,6 @@ Lmimo = squeeze(freqresp(G_hac_struts*Khac, freqs, 'Hz'));
|
|||||||
for i_f = 2:length(freqs)
|
for i_f = 2:length(freqs)
|
||||||
Ldet(:, i_f) = eig(squeeze(Lmimo(:,:,i_f)));
|
Ldet(:, i_f) = eig(squeeze(Lmimo(:,:,i_f)));
|
||||||
end
|
end
|
||||||
mod_margin = min(min(abs(Ldet + ones(size(Ldet)))));
|
|
||||||
|
|
||||||
figure;
|
figure;
|
||||||
hold on;
|
hold on;
|
||||||
@@ -359,8 +454,6 @@ plot(real(squeeze(Ldet(i,:))), -imag(squeeze(Ldet(i,:))), ...
|
|||||||
'HandleVisibility', 'off');
|
'HandleVisibility', 'off');
|
||||||
end
|
end
|
||||||
plot(-1, 0, 'kx', 'HandleVisibility', 'off');
|
plot(-1, 0, 'kx', 'HandleVisibility', 'off');
|
||||||
patch(-1 + mod_margin*cos([0:0.1:2*pi+0.1]), mod_margin*sin([0:0.1:2*pi+0.1]), colors(5,:), 'linestyle', '--', 'EdgeColor','black', 'FaceAlpha', 0.5, 'HandleVisibility', 'off');
|
|
||||||
text(-1,0.1, 'Robustness', 'FontSize', 8, 'horizontalalignment', 'center')
|
|
||||||
hold off;
|
hold off;
|
||||||
set(gca, 'XScale', 'lin'); set(gca, 'YScale', 'lin');
|
set(gca, 'XScale', 'lin'); set(gca, 'YScale', 'lin');
|
||||||
xlabel('Real Part'); ylabel('Imaginary Part');
|
xlabel('Real Part'); ylabel('Imaginary Part');
|
||||||
@@ -368,16 +461,12 @@ axis square
|
|||||||
xlim([-1.8, 0.2]); ylim([-1, 1]);
|
xlim([-1.8, 0.2]); ylim([-1, 1]);
|
||||||
|
|
||||||
%% Loop gain for the Decentralized HAC_IFF
|
%% Loop gain for the Decentralized HAC_IFF
|
||||||
i_fb = find(abs(squeeze(freqresp(G_hac_struts(1,1)*Khac(1,1), freqs, 'Hz')))<1, 1);
|
|
||||||
|
|
||||||
figure;
|
figure;
|
||||||
tiledlayout(3, 1, 'TileSpacing', 'compact', 'Padding', 'None');
|
tiledlayout(3, 1, 'TileSpacing', 'compact', 'Padding', 'None');
|
||||||
|
|
||||||
ax1 = nexttile([2,1]);
|
ax1 = nexttile([2,1]);
|
||||||
hold on;
|
hold on;
|
||||||
patch([freqs(1:i_fb), freqs(i_fb), freqs(1)], [abs(squeeze(freqresp(G_hac_struts(1,1)*Khac(1,1), [freqs(1:i_fb)], 'Hz'))); 1; 1], colors(5,:), 'EdgeColor','none', 'FaceAlpha', 0.5)
|
|
||||||
plot(freqs, abs(squeeze(freqresp(G_hac_struts(1,1)*Khac(1,1), freqs, 'Hz'))));
|
plot(freqs, abs(squeeze(freqresp(G_hac_struts(1,1)*Khac(1,1), freqs, 'Hz'))));
|
||||||
text(1.2,2.5,{'Disturbance', 'rejection'}, 'FontSize', 8)
|
|
||||||
hold off;
|
hold off;
|
||||||
set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log');
|
set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log');
|
||||||
ylabel('Loop Gain'); set(gca, 'XTickLabel',[]);
|
ylabel('Loop Gain'); set(gca, 'XTickLabel',[]);
|
||||||
|
|||||||
@@ -19,10 +19,10 @@ function [stewart] = generateGeneralConfiguration(stewart, args)
|
|||||||
|
|
||||||
arguments
|
arguments
|
||||||
stewart
|
stewart
|
||||||
args.FH (1,1) double {mustBeNumeric, mustBeNonnegative} = 15e-3
|
args.FH (1,1) double {mustBeNumeric, mustBePositive} = 15e-3
|
||||||
args.FR (1,1) double {mustBeNumeric, mustBePositive} = 115e-3;
|
args.FR (1,1) double {mustBeNumeric, mustBePositive} = 115e-3;
|
||||||
args.FTh (6,1) double {mustBeNumeric} = [-10, 10, 120-10, 120+10, 240-10, 240+10]*(pi/180);
|
args.FTh (6,1) double {mustBeNumeric} = [-10, 10, 120-10, 120+10, 240-10, 240+10]*(pi/180);
|
||||||
args.MH (1,1) double {mustBeNumeric, mustBeNonnegative} = 15e-3
|
args.MH (1,1) double {mustBeNumeric, mustBePositive} = 15e-3
|
||||||
args.MR (1,1) double {mustBeNumeric, mustBePositive} = 90e-3;
|
args.MR (1,1) double {mustBeNumeric, mustBePositive} = 90e-3;
|
||||||
args.MTh (6,1) double {mustBeNumeric} = [-60+10, 60-10, 60+10, 180-10, 180+10, -60-10]*(pi/180);
|
args.MTh (6,1) double {mustBeNumeric} = [-60+10, 60-10, 60+10, 180-10, 180+10, -60-10]*(pi/180);
|
||||||
end
|
end
|
||||||
|
|||||||
@@ -5,10 +5,10 @@ function [nano_hexapod] = initializeSimplifiedNanoHexapod(args)
|
|||||||
args.H (1,1) double {mustBeNumeric, mustBePositive} = 95e-3 % Height of the nano-hexapod [m]
|
args.H (1,1) double {mustBeNumeric, mustBePositive} = 95e-3 % Height of the nano-hexapod [m]
|
||||||
args.MO_B (1,1) double {mustBeNumeric} = 150e-3 % Height of {B} w.r.t. {M} [m]
|
args.MO_B (1,1) double {mustBeNumeric} = 150e-3 % Height of {B} w.r.t. {M} [m]
|
||||||
%% generateGeneralConfiguration
|
%% generateGeneralConfiguration
|
||||||
args.FH (1,1) double {mustBeNumeric, mustBeNonnegative} = 15e-3 % Height of fixed joints [m]
|
args.FH (1,1) double {mustBeNumeric, mustBePositive} = 15e-3 % Height of fixed joints [m]
|
||||||
args.FR (1,1) double {mustBeNumeric, mustBePositive} = 120e-3 % Radius of fixed joints [m]
|
args.FR (1,1) double {mustBeNumeric, mustBePositive} = 120e-3 % Radius of fixed joints [m]
|
||||||
args.FTh (6,1) double {mustBeNumeric} = [220, 320, 340, 80, 100, 200]*(pi/180) % Angles of fixed joints [rad]
|
args.FTh (6,1) double {mustBeNumeric} = [220, 320, 340, 80, 100, 200]*(pi/180) % Angles of fixed joints [rad]
|
||||||
args.MH (1,1) double {mustBeNumeric, mustBeNonnegative} = 15e-3 % Height of mobile joints [m]
|
args.MH (1,1) double {mustBeNumeric, mustBePositive} = 15e-3 % Height of mobile joints [m]
|
||||||
args.MR (1,1) double {mustBeNumeric, mustBePositive} = 110e-3 % Radius of mobile joints [m]
|
args.MR (1,1) double {mustBeNumeric, mustBePositive} = 110e-3 % Radius of mobile joints [m]
|
||||||
args.MTh (6,1) double {mustBeNumeric} = [255, 285, 15, 45, 135, 165]*(pi/180) % Angles of fixed joints [rad]
|
args.MTh (6,1) double {mustBeNumeric} = [255, 285, 15, 45, 135, 165]*(pi/180) % Angles of fixed joints [rad]
|
||||||
%% Actuators
|
%% Actuators
|
||||||
|
|||||||
+16
-427
@@ -10,329 +10,18 @@
|
|||||||
|
|
||||||
|
|
||||||
|
|
||||||
@article{nazaretski15_pushin_limit,
|
@article{stewart65_platf_with_six_degrees_freed,
|
||||||
author = {E. Nazaretski and K. Lauer and H. Yan and N. Bouet and J.
|
author = {Stewart, Doug},
|
||||||
Zhou and R. Conley and X. Huang and W. Xu and M. Lu and K.
|
title = {A Platform With Six Degrees of Freedom},
|
||||||
Gofron and S. Kalbfleisch and U. Wagner and C. Rau and Y. S.
|
journal = {Proceedings of the institution of mechanical engineers},
|
||||||
Chu},
|
volume = 180,
|
||||||
title = {Pushing the Limits: an Instrument for Hard X-Ray Imaging
|
|
||||||
Below 20 Nm},
|
|
||||||
journal = {Journal of Synchrotron Radiation},
|
|
||||||
volume = 22,
|
|
||||||
number = 2,
|
|
||||||
pages = {336-341},
|
|
||||||
year = 2015,
|
|
||||||
doi = {10.1107/s1600577514025715},
|
|
||||||
url = {https://doi.org/10.1107/s1600577514025715},
|
|
||||||
keywords = {nass},
|
|
||||||
}
|
|
||||||
|
|
||||||
|
|
||||||
|
|
||||||
@inproceedings{geraldes23_sapot_carnaub_sirius_lnls,
|
|
||||||
author = {Renan R. Geraldes and Gabriel B. Z. L. Moreno and Francesco
|
|
||||||
R. Lena and Erik O. Pereira and Matheus H. S. da Silva and
|
|
||||||
Gabriel G. Bas{\'i}lio and Pedro P. R. Proen{\c{c}}a and
|
|
||||||
Rodrigo C. Gomes and Cassiano S. N. C. Bueno and Sergio A. L.
|
|
||||||
Luiz and Artur C. Pinto and Bernd C. Meyer and Douglas Galante
|
|
||||||
and Carlos A. P{\'e}rez and Verônica C. Teixeira and Leonardo
|
|
||||||
M. Kofukuda and Anna P. S. Sotero and Theo A. M. Ruijl and
|
|
||||||
Walter Aarden and Piet Peters and Maryn Wijnhoven and Helio C.
|
|
||||||
N. Tolentino},
|
|
||||||
title = {The high-dynamic cryogenic sample stage for
|
|
||||||
SAPOTI/CARNA{\'U}BA at Sirius/LNLS},
|
|
||||||
booktitle = {PROCEEDINGS OF THE 15TH INTERNATIONAL CONFERENCE ON X-RAY
|
|
||||||
MICROSCOPY - XRM2022},
|
|
||||||
year = 2023,
|
|
||||||
pages = {nil},
|
|
||||||
doi = {10.1063/5.0168438},
|
|
||||||
url = {http://dx.doi.org/10.1063/5.0168438},
|
|
||||||
DATE_ADDED = {Thu May 2 18:09:04 2024},
|
|
||||||
month = {-},
|
|
||||||
}
|
|
||||||
|
|
||||||
|
|
||||||
|
|
||||||
|
|
||||||
@article{villar18_nanop_esrf_id16a_nano_imagin_beaml,
|
|
||||||
author = {F. Villar and L. Andre and R. Baker and S. Bohic and J. C.
|
|
||||||
da Silva and C. Guilloud and O. Hignette and J. Meyer and A.
|
|
||||||
Pacureanu and M. Perez and M. Salome and P. van der Linden and
|
|
||||||
Y. Yang and P. Cloetens},
|
|
||||||
title = {Nanopositioning for the Esrf Id16a Nano-Imaging Beamline},
|
|
||||||
journal = {Synchrotron Radiation News},
|
|
||||||
volume = 31,
|
|
||||||
number = 5,
|
|
||||||
pages = {9-14},
|
|
||||||
year = 2018,
|
|
||||||
doi = {10.1080/08940886.2018.1506234},
|
|
||||||
url = {http://dx.doi.org/10.1080/08940886.2018.1506234},
|
|
||||||
keywords = {esrf},
|
|
||||||
}
|
|
||||||
|
|
||||||
|
|
||||||
|
|
||||||
|
|
||||||
@article{schropp20_ptynam,
|
|
||||||
author = {Andreas Schropp and Ralph D{\"o}hrmann and Stephan Botta
|
|
||||||
and Dennis Br{\"u}ckner and Maik Kahnt and Mikhail
|
|
||||||
Lyubomirskiy and Christina Ossig and Maria Scholz and Martin
|
|
||||||
Seyrich and Michael E. Stuckelberger and Patrik Wiljes and
|
|
||||||
Felix Wittwer and Jan Garrevoet and Gerald Falkenberg and
|
|
||||||
Yakub Fam and Thomas L. Sheppard and Jan-Dierk Grunwaldt and
|
|
||||||
Christian G. Schroer},
|
|
||||||
title = {Ptynami: Ptychographic Nano-Analytical Microscope},
|
|
||||||
journal = {Journal of Applied Crystallography},
|
|
||||||
volume = 53,
|
|
||||||
number = 4,
|
|
||||||
pages = {957-971},
|
|
||||||
year = 2020,
|
|
||||||
doi = {10.1107/s1600576720008420},
|
|
||||||
url = {http://dx.doi.org/10.1107/s1600576720008420},
|
|
||||||
DATE_ADDED = {Thu May 2 16:01:03 2024},
|
|
||||||
}
|
|
||||||
|
|
||||||
|
|
||||||
|
|
||||||
@inproceedings{schroer17_ptynam,
|
|
||||||
author = {Christian G. Schroer and Martin Seyrich and Maik Kahnt and
|
|
||||||
Stephan Botta and Ralph D{\"o}hrmann and Gerald Falkenberg and
|
|
||||||
Jan Garrevoet and Mikhail Lyubomirskiy and Maria Scholz and
|
|
||||||
Andreas Schropp and Felix Wittwer},
|
|
||||||
title = {PtyNAMi: Ptychographic Nano-Analytical Microscope at PETRA
|
|
||||||
III: interferometrically tracking positions for 3D x-ray
|
|
||||||
scanning microscopy using a ball-lens retroreflector},
|
|
||||||
booktitle = {X-Ray Nanoimaging: Instruments and Methods III},
|
|
||||||
year = 2017,
|
|
||||||
doi = {10.1117/12.2273710},
|
|
||||||
url = {https://doi.org/10.1117/12.2273710},
|
|
||||||
keywords = {nass, metrology},
|
|
||||||
month = 9,
|
|
||||||
}
|
|
||||||
|
|
||||||
|
|
||||||
|
|
||||||
@article{holler17_omny_pin_versat_sampl_holder,
|
|
||||||
author = {M. Holler and J. Raabe and R. Wepf and S. H. Shahmoradian
|
|
||||||
and A. Diaz and B. Sarafimov and T. Lachat and H. Walther and
|
|
||||||
M. Vitins},
|
|
||||||
title = {Omny Pin-A Versatile Sample Holder for Tomographic
|
|
||||||
Measurements At Room and Cryogenic Temperatures},
|
|
||||||
journal = {Review of Scientific Instruments},
|
|
||||||
volume = 88,
|
|
||||||
number = 11,
|
|
||||||
pages = 113701,
|
|
||||||
year = 2017,
|
|
||||||
doi = {10.1063/1.4996092},
|
|
||||||
url = {https://doi.org/10.1063/1.4996092},
|
|
||||||
keywords = {nass},
|
|
||||||
}
|
|
||||||
|
|
||||||
|
|
||||||
|
|
||||||
@article{holler18_omny_tomog_nano_cryo_stage,
|
|
||||||
author = {M. Holler and J. Raabe and A. Diaz and M. Guizar-Sicairos
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|
||||||
and R. Wepf and M. Odstrcil and F. R. Shaik and V. Panneels
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|
||||||
and A. Menzel and B. Sarafimov and S. Maag and X. Wang and V.
|
|
||||||
Thominet and H. Walther and T. Lachat and M. Vitins and O.
|
|
||||||
Bunk},
|
|
||||||
title = {Omny-A Tomography Nano Cryo Stage},
|
|
||||||
journal = {Review of Scientific Instruments},
|
|
||||||
volume = 89,
|
|
||||||
number = 4,
|
|
||||||
pages = 043706,
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|
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year = 2018,
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|
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doi = {10.1063/1.5020247},
|
|
||||||
url = {https://doi.org/10.1063/1.5020247},
|
|
||||||
keywords = {nass},
|
|
||||||
}
|
|
||||||
|
|
||||||
|
|
||||||
|
|
||||||
@article{stankevic17_inter_charac_rotat_stages_x_ray_nanot,
|
|
||||||
author = {Tomas Stankevic and Christer Engblom and Florent Langlois
|
|
||||||
and Filipe Alves and Alain Lestrade and Nicolas Jobert and
|
|
||||||
Gilles Cauchon and Ulrich Vogt and Stefan Kubsky},
|
|
||||||
title = {Interferometric Characterization of Rotation Stages for
|
|
||||||
X-Ray Nanotomography},
|
|
||||||
journal = {Review of Scientific Instruments},
|
|
||||||
volume = 88,
|
|
||||||
number = 5,
|
|
||||||
pages = 053703,
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|
||||||
year = 2017,
|
|
||||||
doi = {10.1063/1.4983405},
|
|
||||||
url = {https://doi.org/10.1063/1.4983405},
|
|
||||||
keywords = {nass, metrology},
|
|
||||||
}
|
|
||||||
|
|
||||||
|
|
||||||
|
|
||||||
@inproceedings{engblom18_nanop_resul,
|
|
||||||
author = {C. Engblom and others},
|
|
||||||
title = {Nanoprobe Results: Metrology \& Control in Stacked
|
|
||||||
Closed-Loop Systems},
|
|
||||||
booktitle = {Proc. of International Conference on Accelerator and Large
|
|
||||||
Experimental Control Systems (ICALEPCS'17)},
|
|
||||||
year = 2018,
|
|
||||||
doi = {10.18429/JACoW-ICALEPCS2017-WEAPL04},
|
|
||||||
url = {https://doi.org/10.18429/JACoW-ICALEPCS2017-WEAPL04},
|
|
||||||
isbn = {978-3-95450-193-9},
|
|
||||||
month = {Jan.},
|
|
||||||
publisher = {JACoW},
|
|
||||||
keywords = {nass},
|
|
||||||
}
|
|
||||||
|
|
||||||
|
|
||||||
|
|
||||||
@article{nazaretski22_new_kirkp_baez_based_scann,
|
|
||||||
author = {E. Nazaretski and D. S. Coburn and W. Xu and J. Ma and H.
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|
||||||
Xu and R. Smith and X. Huang and Y. Yang and L. Huang and M.
|
|
||||||
Idir and A. Kiss and Y. S. Chu},
|
|
||||||
title = {A New Kirkpatrick-Baez-Based Scanning Microscope for the
|
|
||||||
Submicron Resolution X-Ray Spectroscopy (SRX) Beamline At
|
|
||||||
Nsls-Ii},
|
|
||||||
journal = {Journal of Synchrotron Radiation},
|
|
||||||
volume = 29,
|
|
||||||
number = 5,
|
|
||||||
pages = {1284-1291},
|
|
||||||
year = 2022,
|
|
||||||
doi = {10.1107/s1600577522007056},
|
|
||||||
url = {http://dx.doi.org/10.1107/s1600577522007056},
|
|
||||||
DATE_ADDED = {Thu May 2 16:33:47 2024},
|
|
||||||
}
|
|
||||||
|
|
||||||
|
|
||||||
|
|
||||||
|
|
||||||
@article{kelly22_delta_robot_long_travel_nano,
|
|
||||||
author = {Jon Kelly and Andrew Male and Nicholas Rubies and David
|
|
||||||
Mahoney and Jessica M. Walker and Miguel A. Gomez-Gonzalez and
|
|
||||||
Guy Wilkin and Julia E. Parker and Paul D. Quinn},
|
|
||||||
title = {The Delta Robot-A Long Travel Nano-Positioning Stage for
|
|
||||||
Scanning X-Ray Microscopy},
|
|
||||||
journal = {Review of Scientific Instruments},
|
|
||||||
volume = 93,
|
|
||||||
number = 4,
|
|
||||||
pages = {nil},
|
|
||||||
year = 2022,
|
|
||||||
doi = {10.1063/5.0084806},
|
|
||||||
url = {http://dx.doi.org/10.1063/5.0084806},
|
|
||||||
DATE_ADDED = {Thu May 2 20:27:54 2024},
|
|
||||||
}
|
|
||||||
|
|
||||||
|
|
||||||
|
|
||||||
|
|
||||||
@inproceedings{dehaeze18_sampl_stabil_for_tomog_exper,
|
|
||||||
author = {Thomas Dehaeze and M. Magnin Mattenet and Christophe
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|
||||||
Collette},
|
|
||||||
title = {Sample Stabilization For Tomography Experiments In Presence
|
|
||||||
Of Large Plant Uncertainty},
|
|
||||||
booktitle = {MEDSI'18},
|
|
||||||
year = 2018,
|
|
||||||
number = 10,
|
|
||||||
pages = {153--157},
|
|
||||||
doi = {10.18429/JACoW-MEDSI2018-WEOAMA02},
|
|
||||||
url = {https://doi.org/10.18429/JACoW-MEDSI2018-WEOAMA02},
|
|
||||||
address = {Geneva, Switzerland},
|
|
||||||
isbn = {978-3-95450-207-3},
|
|
||||||
keywords = {nass, esrf},
|
|
||||||
language = {english},
|
|
||||||
month = {Dec},
|
|
||||||
publisher = {JACoW Publishing},
|
|
||||||
series = {Mechanical Engineering Design of Synchrotron Radiation
|
|
||||||
Equipment and Instrumentation},
|
|
||||||
venue = {Paris, France},
|
|
||||||
}
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|
||||||
|
|
||||||
|
|
||||||
|
|
||||||
@inproceedings{dehaeze21_mechat_approac_devel_nano_activ_stabil_system,
|
|
||||||
author = {Dehaeze, T. and Bonnefoy, J. and Collette, C.},
|
|
||||||
title = {Mechatronics Approach for the Development of a
|
|
||||||
Nano-Active-Stabilization-System},
|
|
||||||
booktitle = {MEDSI'20},
|
|
||||||
year = 2021,
|
|
||||||
language = {english},
|
|
||||||
publisher = {JACoW Publishing},
|
|
||||||
series = {Mechanical Engineering Design of Synchrotron Radiation
|
|
||||||
Equipment and Instrumentation},
|
|
||||||
venue = {Chicago, USA},
|
|
||||||
keywords = {nass, esrf},
|
|
||||||
}
|
|
||||||
|
|
||||||
|
|
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|
|
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@article{dong07_desig_precis_compl_paral_posit,
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|
||||||
author = {W. Dong and L.N. Sun and Z.J. Du},
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|
||||||
title = {Design of a Precision Compliant Parallel Positioner Driven
|
|
||||||
By Dual Piezoelectric Actuators},
|
|
||||||
journal = {Sensors and Actuators A: Physical},
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|
||||||
volume = 135,
|
|
||||||
number = 1,
|
number = 1,
|
||||||
pages = {250-256},
|
pages = {371--386},
|
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year = 2007,
|
year = 1965,
|
||||||
doi = {10.1016/j.sna.2006.07.011},
|
publisher = {Sage Publications Sage UK: London, England},
|
||||||
url = {https://doi.org/10.1016/j.sna.2006.07.011},
|
|
||||||
keywords = {parallel robot, flexure},
|
|
||||||
}
|
}
|
||||||
|
|
||||||
|
|
||||||
|
|
||||||
@article{shen19_dynam_analy_flexur_nanop_stage,
|
|
||||||
author = {Yiping Shen and Xin Luo and Songlai Wang and Xuejun Li},
|
|
||||||
title = {Dynamic Analysis of a 5‐dof Flexure‐based Nanopositioning
|
|
||||||
Stage},
|
|
||||||
journal = {Mathematical Problems in Engineering},
|
|
||||||
volume = 2019,
|
|
||||||
number = 1,
|
|
||||||
pages = {nil},
|
|
||||||
year = 2019,
|
|
||||||
doi = {10.1155/2019/8501583},
|
|
||||||
url = {http://dx.doi.org/10.1155/2019/8501583},
|
|
||||||
}
|
|
||||||
|
|
||||||
|
|
||||||
|
|
||||||
|
|
||||||
@article{kenton12_desig_contr_three_axis_serial,
|
|
||||||
author = {Brian J. Kenton and Kam K. Leang},
|
|
||||||
title = {Design and Control of a Three-Axis Serial-Kinematic
|
|
||||||
High-Bandwidth Nanopositioner},
|
|
||||||
journal = {IEEE/ASME Transactions on Mechatronics},
|
|
||||||
volume = 17,
|
|
||||||
number = 2,
|
|
||||||
pages = {356-369},
|
|
||||||
year = 2012,
|
|
||||||
doi = {10.1109/tmech.2011.2105499},
|
|
||||||
url = {http://dx.doi.org/10.1109/TMECH.2011.2105499},
|
|
||||||
}
|
|
||||||
|
|
||||||
|
|
||||||
@inproceedings{abu02_stiff_soft_stewar_platf_activ,
|
|
||||||
author = {Abu Hanieh, Ahmed and Horodinca, Mihaita and Preumont,
|
|
||||||
Andre},
|
|
||||||
title = {Stiff and Soft Stewart Platforms for Active Damping and
|
|
||||||
Active Isolation of Vibrations},
|
|
||||||
booktitle = {Actuator 2002, 8th International Conference on New
|
|
||||||
Actuators},
|
|
||||||
year = 2002,
|
|
||||||
keywords = {parallel robot},
|
|
||||||
}
|
|
||||||
|
|
||||||
|
|
||||||
|
|
||||||
@phdthesis{hanieh03_activ_stewar,
|
|
||||||
author = {Hanieh, Ahmed Abu},
|
|
||||||
keywords = {parallel robot},
|
|
||||||
school = {Universit{\'e} Libre de Bruxelles, Brussels, Belgium},
|
|
||||||
title = {Active isolation and damping of vibrations via Stewart
|
|
||||||
platform},
|
|
||||||
year = 2003,
|
|
||||||
}
|
|
||||||
|
|
||||||
|
|
||||||
|
|
||||||
@article{preumont07_six_axis_singl_stage_activ,
|
@article{preumont07_six_axis_singl_stage_activ,
|
||||||
author = {A. Preumont and M. Horodinca and I. Romanescu and B. de
|
author = {A. Preumont and M. Horodinca and I. Romanescu and B. de
|
||||||
Marneffe and M. Avraam and A. Deraemaeker and F. Bossens and
|
Marneffe and M. Avraam and A. Deraemaeker and F. Bossens and
|
||||||
@@ -351,102 +40,14 @@
|
|||||||
|
|
||||||
|
|
||||||
|
|
||||||
@article{furutani04_nanom_cuttin_machin_using_stewar,
|
@book{skogestad07_multiv_feedb_contr,
|
||||||
author = {Katsushi Furutani and Michio Suzuki and Ryusei Kudoh},
|
author = {Skogestad, Sigurd and Postlethwaite, Ian},
|
||||||
title = {Nanometre-Cutting Machine Using a Stewart-Platform Parallel
|
title = {Multivariable Feedback Control: Analysis and Design -
|
||||||
Mechanism},
|
Second Edition},
|
||||||
journal = {Measurement Science and Technology},
|
year = 2007,
|
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volume = 15,
|
publisher = {John Wiley},
|
||||||
number = 2,
|
isbn = 978-0470011683,
|
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pages = {467-474},
|
keywords = {favorite},
|
||||||
year = 2004,
|
|
||||||
doi = {10.1088/0957-0233/15/2/022},
|
|
||||||
url = {https://doi.org/10.1088/0957-0233/15/2/022},
|
|
||||||
keywords = {parallel robot, cubic configuration},
|
|
||||||
}
|
|
||||||
|
|
||||||
|
|
||||||
|
|
||||||
@book{preumont18_vibrat_contr_activ_struc_fourt_edition,
|
|
||||||
author = {Andre Preumont},
|
|
||||||
title = {Vibration Control of Active Structures - Fourth Edition},
|
|
||||||
year = 2018,
|
|
||||||
publisher = {Springer International Publishing},
|
|
||||||
url = {https://doi.org/10.1007/978-3-319-72296-2},
|
|
||||||
doi = {10.1007/978-3-319-72296-2},
|
|
||||||
keywords = {favorite, parallel robot},
|
|
||||||
series = {Solid Mechanics and Its Applications},
|
|
||||||
}
|
|
||||||
|
|
||||||
|
|
||||||
|
|
||||||
@article{stewart65_platf_with_six_degrees_freed,
|
|
||||||
author = {Stewart, Doug},
|
|
||||||
title = {A Platform With Six Degrees of Freedom},
|
|
||||||
journal = {Proceedings of the institution of mechanical engineers},
|
|
||||||
volume = 180,
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|
||||||
number = 1,
|
|
||||||
pages = {371--386},
|
|
||||||
year = 1965,
|
|
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publisher = {Sage Publications Sage UK: London, England},
|
|
||||||
}
|
|
||||||
|
|
||||||
|
|
||||||
|
|
||||||
|
|
||||||
@article{afzali-far16_inert_matrix_hexap_strut_joint_space,
|
|
||||||
author = {Afzali-Far, Behrouz and Per Lidstr{\"o}m},
|
|
||||||
title = {On the Inertia Matrix of Hexapod Struts in the Joint-Space},
|
|
||||||
journal = {To be submitted},
|
|
||||||
year = 2016,
|
|
||||||
keywords = {parallel robot},
|
|
||||||
}
|
|
||||||
|
|
||||||
|
|
||||||
|
|
||||||
@article{chen04_decoup_contr_flexur_joint_hexap,
|
|
||||||
author = {Y. Chen and J.E. McInroy},
|
|
||||||
title = {Decoupled Control of Flexure-Jointed Hexapods Using
|
|
||||||
Estimated Joint-Space Mass-Inertia Matrix},
|
|
||||||
journal = {IEEE Transactions on Control Systems Technology},
|
|
||||||
volume = 12,
|
|
||||||
number = 3,
|
|
||||||
pages = {413-421},
|
|
||||||
year = 2004,
|
|
||||||
doi = {10.1109/tcst.2004.824339},
|
|
||||||
url = {https://doi.org/10.1109/tcst.2004.824339},
|
|
||||||
keywords = {parallel robot},
|
|
||||||
}
|
|
||||||
|
|
||||||
|
|
||||||
|
|
||||||
@article{mcinroy00_desig_contr_flexur_joint_hexap,
|
|
||||||
author = {J.E. McInroy and J.C. Hamann},
|
|
||||||
title = {Design and Control of Flexure Jointed Hexapods},
|
|
||||||
journal = {IEEE Transactions on Robotics and Automation},
|
|
||||||
volume = 16,
|
|
||||||
number = 4,
|
|
||||||
pages = {372-381},
|
|
||||||
year = 2000,
|
|
||||||
doi = {10.1109/70.864229},
|
|
||||||
url = {https://doi.org/10.1109/70.864229},
|
|
||||||
keywords = {parallel robot},
|
|
||||||
}
|
|
||||||
|
|
||||||
|
|
||||||
|
|
||||||
@article{mcinroy02_model_desig_flexur_joint_stewar,
|
|
||||||
author = {J.E. McInroy},
|
|
||||||
title = {Modeling and Design of Flexure Jointed Stewart Platforms
|
|
||||||
for Control Purposes},
|
|
||||||
journal = {IEEE/ASME Transactions on Mechatronics},
|
|
||||||
volume = 7,
|
|
||||||
number = 1,
|
|
||||||
pages = {95-99},
|
|
||||||
year = 2002,
|
|
||||||
doi = {10.1109/3516.990892},
|
|
||||||
url = {https://doi.org/10.1109/3516.990892},
|
|
||||||
keywords = {parallel robot, flexure},
|
|
||||||
}
|
}
|
||||||
|
|
||||||
|
|
||||||
@@ -463,15 +64,3 @@
|
|||||||
year = 2008,
|
year = 2008,
|
||||||
}
|
}
|
||||||
|
|
||||||
|
|
||||||
|
|
||||||
@book{skogestad07_multiv_feedb_contr,
|
|
||||||
author = {Skogestad, Sigurd and Postlethwaite, Ian},
|
|
||||||
title = {Multivariable Feedback Control: Analysis and Design -
|
|
||||||
Second Edition},
|
|
||||||
year = 2007,
|
|
||||||
publisher = {John Wiley},
|
|
||||||
isbn = 978-0470011683,
|
|
||||||
keywords = {favorite},
|
|
||||||
}
|
|
||||||
|
|
||||||
|
|||||||
+240
-427
File diff suppressed because it is too large
Load Diff
Binary file not shown.
+260
-360
File diff suppressed because it is too large
Load Diff
Reference in New Issue
Block a user