Rename few figures to match the "prefix"
@ -19,7 +19,7 @@
|
|||||||
# 3: dvi conversion, as specified by the $dvipdf variable (useless)
|
# 3: dvi conversion, as specified by the $dvipdf variable (useless)
|
||||||
# 4: lualatex, as specified by the $lualatex variable (best)
|
# 4: lualatex, as specified by the $lualatex variable (best)
|
||||||
# 5: xelatex, as specified by the $xelatex variable (second best)
|
# 5: xelatex, as specified by the $xelatex variable (second best)
|
||||||
$pdf_mode = 1;
|
$pdf_mode = 4;
|
||||||
|
|
||||||
# Treat undefined references and citations as well as multiply defined references as
|
# Treat undefined references and citations as well as multiply defined references as
|
||||||
# ERRORS instead of WARNINGS.
|
# ERRORS instead of WARNINGS.
|
||||||
@ -39,12 +39,12 @@ $pdf_mode = 1;
|
|||||||
$warnings_as_errors = 0;
|
$warnings_as_errors = 0;
|
||||||
|
|
||||||
# Show used CPU time. Looks like: https://tex.stackexchange.com/a/312224/120853
|
# Show used CPU time. Looks like: https://tex.stackexchange.com/a/312224/120853
|
||||||
$show_time = 1;
|
$show_time = 0;
|
||||||
|
|
||||||
# Default is 5; we seem to need more owed to the complexity of the document.
|
# Default is 5; we seem to need more owed to the complexity of the document.
|
||||||
# Actual documents probably don't need this many since they won't use all features,
|
# Actual documents probably don't need this many since they won't use all features,
|
||||||
# plus won't be compiling from cold each time.
|
# plus won't be compiling from cold each time.
|
||||||
$max_repeat=7;
|
$max_repeat=10;
|
||||||
|
|
||||||
# --shell-escape option (execution of code outside of latex) is required for the
|
# --shell-escape option (execution of code outside of latex) is required for the
|
||||||
#'svg' package.
|
#'svg' package.
|
||||||
@ -65,7 +65,8 @@ $max_repeat=7;
|
|||||||
set_tex_cmds("--shell-escape -interaction=nonstopmode --synctex=1 %O %S");
|
set_tex_cmds("--shell-escape -interaction=nonstopmode --synctex=1 %O %S");
|
||||||
|
|
||||||
# Use default pdf viewer
|
# Use default pdf viewer
|
||||||
$pdf_previewer = 'zathura';
|
$pdf_update_method = 1;
|
||||||
|
$pdf_previewer = "zathura %O %S";
|
||||||
|
|
||||||
# option 2 is same as 1 (run biber when necessary), but also deletes the
|
# option 2 is same as 1 (run biber when necessary), but also deletes the
|
||||||
# regeneratable bbl-file in a clenaup (`latexmk -c`). Do not use if original
|
# regeneratable bbl-file in a clenaup (`latexmk -c`). Do not use if original
|
||||||
|
Before Width: | Height: | Size: 65 KiB After Width: | Height: | Size: 65 KiB |
Before Width: | Height: | Size: 64 KiB After Width: | Height: | Size: 64 KiB |
Before Width: | Height: | Size: 79 KiB After Width: | Height: | Size: 79 KiB |
Before Width: | Height: | Size: 338 KiB After Width: | Height: | Size: 338 KiB |
Before Width: | Height: | Size: 237 KiB After Width: | Height: | Size: 237 KiB |
Before Width: | Height: | Size: 26 KiB After Width: | Height: | Size: 26 KiB |
Before Width: | Height: | Size: 54 KiB After Width: | Height: | Size: 54 KiB |
Before Width: | Height: | Size: 22 KiB After Width: | Height: | Size: 22 KiB |
Before Width: | Height: | Size: 44 KiB After Width: | Height: | Size: 44 KiB |
@ -95,6 +95,9 @@
|
|||||||
org-ref-acronyms-before-parsing))
|
org-ref-acronyms-before-parsing))
|
||||||
#+END_SRC
|
#+END_SRC
|
||||||
|
|
||||||
|
* Notes :noexport:
|
||||||
|
Prefix is =uniaxial=
|
||||||
|
|
||||||
* Introduction :ignore:
|
* Introduction :ignore:
|
||||||
|
|
||||||
In this report, a uniaxial model of the Nano Active Stabilization System (NASS) is developed and used to have a first idea of the challenges involved in this complex system.
|
In this report, a uniaxial model of the Nano Active Stabilization System (NASS) is developed and used to have a first idea of the challenges involved in this complex system.
|
||||||
@ -291,14 +294,14 @@ Conclusion remarks are given in Section ref:sec:uniaxial_conclusion.
|
|||||||
** Introduction :ignore:
|
** Introduction :ignore:
|
||||||
|
|
||||||
In this section, a uni-axial model of the micro-station is tuned in order to match measurements made on the micro-station
|
In this section, a uni-axial model of the micro-station is tuned in order to match measurements made on the micro-station
|
||||||
The measurement setup is shown in Figure ref:fig:micro_station_first_meas_dynamics where several geophones are fixed to the micro-station and an instrumented hammer is used to inject forces on different stages of the micro-station.
|
The measurement setup is shown in Figure ref:fig:uniaxial_ustation_first_meas_dynamics where several geophones are fixed to the micro-station and an instrumented hammer is used to inject forces on different stages of the micro-station.
|
||||||
|
|
||||||
From the measured frequency response functions (FRF), the model can be tuned to approximate the uniaxial dynamics of the micro-station.
|
From the measured frequency response functions (FRF), the model can be tuned to approximate the uniaxial dynamics of the micro-station.
|
||||||
|
|
||||||
#+name: fig:micro_station_first_meas_dynamics
|
#+name: fig:uniaxial_ustation_first_meas_dynamics
|
||||||
#+caption: Experimental Setup for the first dynamical measurements on the Micro-Station. Geophones are fixed to the micro-station, and the granite as well as the micro-hexapod's top platform are impact with an instrumented hammer
|
#+caption: Experimental Setup for the first dynamical measurements on the Micro-Station. Geophones are fixed to the micro-station, and the granite as well as the micro-hexapod's top platform are impact with an instrumented hammer
|
||||||
#+attr_latex: :width \linewidth
|
#+attr_latex: :width \linewidth
|
||||||
[[file:figs/micro_station_first_meas_dynamics.jpg]]
|
[[file:figs/uniaxial_ustation_first_meas_dynamics.jpg]]
|
||||||
|
|
||||||
** Matlab Init :noexport:ignore:
|
** Matlab Init :noexport:ignore:
|
||||||
#+begin_src matlab :tangle no :exports none :results silent :noweb yes :var current_dir=(file-name-directory buffer-file-name)
|
#+begin_src matlab :tangle no :exports none :results silent :noweb yes :var current_dir=(file-name-directory buffer-file-name)
|
||||||
@ -333,7 +336,7 @@ freqs = logspace(0, 3, 1000);
|
|||||||
|
|
||||||
** Measured dynamics
|
** Measured dynamics
|
||||||
|
|
||||||
The measurement setup is schematically shown in Figure ref:fig:micro_station_meas_dynamics_schematic where:
|
The measurement setup is schematically shown in Figure ref:fig:uniaxial_ustation_meas_dynamics_schematic where:
|
||||||
- Two hammer hits are performed, one on the Granite (force $F_g$), and one on the micro-hexapod's top platform (force $F_h$)
|
- Two hammer hits are performed, one on the Granite (force $F_g$), and one on the micro-hexapod's top platform (force $F_h$)
|
||||||
- The inertial motion of the granite $x_g$ and the micro-hexapod's top platform $x_h$ are measured using geophones.
|
- The inertial motion of the granite $x_g$ and the micro-hexapod's top platform $x_h$ are measured using geophones.
|
||||||
|
|
||||||
@ -342,7 +345,7 @@ From the forces applied by the instrumented hammer and the responses of the geop
|
|||||||
- from $F_g$ to $d_h$ (or from $F_h$ to $d_g$)
|
- from $F_g$ to $d_h$ (or from $F_h$ to $d_g$)
|
||||||
- from $F_g$ to $d_g$
|
- from $F_g$ to $d_g$
|
||||||
|
|
||||||
#+begin_src latex :file micro_station_meas_dynamics_schematic.pdf :results file raw silent
|
#+begin_src latex :file uniaxial_ustation_meas_dynamics_schematic.pdf :results file raw silent
|
||||||
\begin{tikzpicture}
|
\begin{tikzpicture}
|
||||||
% Parameters
|
% Parameters
|
||||||
\def\blockw{6.0cm}
|
\def\blockw{6.0cm}
|
||||||
@ -486,11 +489,11 @@ From the forces applied by the instrumented hammer and the responses of the geop
|
|||||||
#+name: fig:micro_station_uniaxial_model
|
#+name: fig:micro_station_uniaxial_model
|
||||||
#+caption: Schematic of the Micro-Station measurement setup and uniaxial model.
|
#+caption: Schematic of the Micro-Station measurement setup and uniaxial model.
|
||||||
#+begin_figure
|
#+begin_figure
|
||||||
#+attr_latex: :caption \subcaption{\label{fig:micro_station_meas_dynamics_schematic}Measurement setup - Schematic}
|
#+attr_latex: :caption \subcaption{\label{fig:uniaxial_ustation_meas_dynamics_schematic}Measurement setup - Schematic}
|
||||||
#+attr_latex: :options {0.69\textwidth}
|
#+attr_latex: :options {0.69\textwidth}
|
||||||
#+begin_subfigure
|
#+begin_subfigure
|
||||||
#+attr_latex: :scale 1
|
#+attr_latex: :scale 1
|
||||||
[[file:figs/micro_station_meas_dynamics_schematic.png]]
|
[[file:figs/uniaxial_ustation_meas_dynamics_schematic.png]]
|
||||||
#+end_subfigure
|
#+end_subfigure
|
||||||
#+attr_latex: :caption \subcaption{\label{fig:uniaxial_model_micro_station}Uniaxial model of the micro-station}
|
#+attr_latex: :caption \subcaption{\label{fig:uniaxial_model_micro_station}Uniaxial model of the micro-station}
|
||||||
#+attr_latex: :options {0.29\textwidth}
|
#+attr_latex: :options {0.29\textwidth}
|
||||||
@ -1139,11 +1142,11 @@ save('./mat/uniaxial_plants.mat', 'G_vc_light', 'G_md_light', 'G_pz_light', ...
|
|||||||
<<sec:uniaxial_disturbances>>
|
<<sec:uniaxial_disturbances>>
|
||||||
** Introduction :ignore:
|
** Introduction :ignore:
|
||||||
|
|
||||||
In order to measure disturbances, two geophones are used, on located on the floor and on on the micro-hexapod's top platform (see Figure ref:fig:micro_station_meas_disturbances).
|
In order to measure disturbances, two geophones are used, on located on the floor and on on the micro-hexapod's top platform (see Figure ref:fig:uniaxial_ustation_meas_disturbances).
|
||||||
|
|
||||||
The geophone on the floor is used to measured the floor motion $x_f$ while the geophone on the micro-hexapod is used to measure vibrations introduced by scanning of the $T_y$ stage and $R_z$ stage.
|
The geophone on the floor is used to measured the floor motion $x_f$ while the geophone on the micro-hexapod is used to measure vibrations introduced by scanning of the $T_y$ stage and $R_z$ stage.
|
||||||
|
|
||||||
#+begin_src latex :file micro_station_meas_disturbances.pdf
|
#+begin_src latex :file uniaxial_ustation_meas_disturbances.pdf
|
||||||
\begin{tikzpicture}
|
\begin{tikzpicture}
|
||||||
% Parameters
|
% Parameters
|
||||||
\def\blockw{6.0cm}
|
\def\blockw{6.0cm}
|
||||||
@ -1279,15 +1282,15 @@ The geophone on the floor is used to measured the floor motion $x_f$ while the g
|
|||||||
\end{tikzpicture}
|
\end{tikzpicture}
|
||||||
#+end_src
|
#+end_src
|
||||||
|
|
||||||
#+name: fig:micro_station_meas_disturbances
|
#+name: fig:uniaxial_ustation_meas_disturbances
|
||||||
#+caption: Disturbance measurement setup - Schematic
|
#+caption: Disturbance measurement setup - Schematic
|
||||||
#+RESULTS:
|
#+RESULTS:
|
||||||
[[file:figs/micro_station_meas_disturbances.png]]
|
[[file:figs/uniaxial_ustation_meas_disturbances.png]]
|
||||||
|
|
||||||
#+name: fig:micro_station_dynamical_id_setup
|
#+name: fig:uniaxial_ustation_dynamical_id_setup
|
||||||
#+caption: Two geophones are used to measure the micro-station vibrations induced by the scanning of the $T_y$ and $R_z$ stages
|
#+caption: Two geophones are used to measure the micro-station vibrations induced by the scanning of the $T_y$ and $R_z$ stages
|
||||||
#+attr_latex: :width 0.6\linewidth
|
#+attr_latex: :width 0.6\linewidth
|
||||||
[[file:figs/micro_station_dynamical_id_setup.jpg]]
|
[[file:figs/uniaxial_ustation_dynamical_id_setup.jpg]]
|
||||||
|
|
||||||
** Matlab Init :noexport:ignore:
|
** Matlab Init :noexport:ignore:
|
||||||
#+begin_src matlab :tangle no :exports none :results silent :noweb yes :var current_dir=(file-name-directory buffer-file-name)
|
#+begin_src matlab :tangle no :exports none :results silent :noweb yes :var current_dir=(file-name-directory buffer-file-name)
|
||||||
@ -1375,7 +1378,7 @@ with:
|
|||||||
psd_xf = psd_V.*abs(squeeze(freqresp(G_geo, f, 'Hz'))).^2; % [m^2/Hz]
|
psd_xf = psd_V.*abs(squeeze(freqresp(G_geo, f, 'Hz'))).^2; % [m^2/Hz]
|
||||||
#+end_src
|
#+end_src
|
||||||
|
|
||||||
The amplitude spectral density $\Gamma_{x_f}$ of the measured displacement $x_f$ is shown in Figure ref:fig:asd_floor_motion_id31.
|
The amplitude spectral density $\Gamma_{x_f}$ of the measured displacement $x_f$ is shown in Figure ref:fig:uniaxial_asd_floor_motion_id31.
|
||||||
|
|
||||||
#+begin_src matlab :exports none :results none
|
#+begin_src matlab :exports none :results none
|
||||||
%% Amplitude Spectral Density of the measured Floor motion on ID31
|
%% Amplitude Spectral Density of the measured Floor motion on ID31
|
||||||
@ -1390,13 +1393,13 @@ legend('location', 'northeast', 'FontSize', 8, 'NumColumns', 1);
|
|||||||
#+end_src
|
#+end_src
|
||||||
|
|
||||||
#+begin_src matlab :tangle no :exports results :results file replace
|
#+begin_src matlab :tangle no :exports results :results file replace
|
||||||
exportFig('figs/asd_floor_motion_id31.pdf', 'width', 'wide', 'height', 'normal');
|
exportFig('figs/uniaxial_asd_floor_motion_id31.pdf', 'width', 'wide', 'height', 'normal');
|
||||||
#+end_src
|
#+end_src
|
||||||
|
|
||||||
#+name: fig:asd_floor_motion_id31
|
#+name: fig:uniaxial_asd_floor_motion_id31
|
||||||
#+caption: Amplitude Spectral Density of the measured Floor motion on ID31
|
#+caption: Amplitude Spectral Density of the measured Floor motion on ID31
|
||||||
#+RESULTS:
|
#+RESULTS:
|
||||||
[[file:figs/asd_floor_motion_id31.png]]
|
[[file:figs/uniaxial_asd_floor_motion_id31.png]]
|
||||||
|
|
||||||
** Stage Vibration
|
** Stage Vibration
|
||||||
During Spindle rotation (here at 6rpm), the granite velocity and micro-hexapod's top platform velocity are measured with the geophones.
|
During Spindle rotation (here at 6rpm), the granite velocity and micro-hexapod's top platform velocity are measured with the geophones.
|
||||||
@ -1420,7 +1423,7 @@ win = hanning(ceil(2*Fs)); % Hanning window
|
|||||||
[psd_off, ~] = pwelch(spindle_off.vh-spindle_off.vg, win, [], [], Fs); % [(m/s)^2/Hz]
|
[psd_off, ~] = pwelch(spindle_off.vh-spindle_off.vg, win, [], [], Fs); % [(m/s)^2/Hz]
|
||||||
#+end_src
|
#+end_src
|
||||||
|
|
||||||
It is then integrated to obtain the Amplitude Spectral Density of the relative motion which is compared with a non-rotating case (Figure ref:fig:asd_vibration_spindle_rotation).
|
It is then integrated to obtain the Amplitude Spectral Density of the relative motion which is compared with a non-rotating case (Figure ref:fig:uniaxial_asd_vibration_spindle_rotation).
|
||||||
It is shown that the spindle rotation induces vibrations in a wide frequency spectrum.
|
It is shown that the spindle rotation induces vibrations in a wide frequency spectrum.
|
||||||
|
|
||||||
#+begin_src matlab :exports none :results none
|
#+begin_src matlab :exports none :results none
|
||||||
@ -1437,13 +1440,13 @@ xlim([1, 500]); ylim([1e-12, 1e-7])
|
|||||||
#+end_src
|
#+end_src
|
||||||
|
|
||||||
#+begin_src matlab :tangle no :exports results :results file replace
|
#+begin_src matlab :tangle no :exports results :results file replace
|
||||||
exportFig('figs/asd_vibration_spindle_rotation.pdf', 'width', 'wide', 'height', 'normal');
|
exportFig('figs/uniaxial_asd_vibration_spindle_rotation.pdf', 'width', 'wide', 'height', 'normal');
|
||||||
#+end_src
|
#+end_src
|
||||||
|
|
||||||
#+name: fig:asd_vibration_spindle_rotation
|
#+name: fig:uniaxial_asd_vibration_spindle_rotation
|
||||||
#+caption: Amplitude Spectral Density of the relative motion measured between the granite and the micro-hexapod's top platform during Spindle rotating
|
#+caption: Amplitude Spectral Density of the relative motion measured between the granite and the micro-hexapod's top platform during Spindle rotating
|
||||||
#+RESULTS:
|
#+RESULTS:
|
||||||
[[file:figs/asd_vibration_spindle_rotation.png]]
|
[[file:figs/uniaxial_asd_vibration_spindle_rotation.png]]
|
||||||
|
|
||||||
In order to compute the equivalent disturbance force $f_t$ that induces such motion, the transfer function from $f_t$ to the relative motion of the hexapod's top platform and the granite is extracted from the model.
|
In order to compute the equivalent disturbance force $f_t$ that induces such motion, the transfer function from $f_t$ to the relative motion of the hexapod's top platform and the granite is extracted from the model.
|
||||||
#+begin_src matlab :exports none
|
#+begin_src matlab :exports none
|
||||||
@ -1477,7 +1480,7 @@ with:
|
|||||||
psd_ft = (psd_vft./(2*pi*f).^2)./abs(squeeze(freqresp(G('Dh', 'ft') - G('Dg', 'ft'), f, 'Hz'))).^2;
|
psd_ft = (psd_vft./(2*pi*f).^2)./abs(squeeze(freqresp(G('Dh', 'ft') - G('Dg', 'ft'), f, 'Hz'))).^2;
|
||||||
#+end_src
|
#+end_src
|
||||||
|
|
||||||
The obtained amplitude spectral density of the disturbance force $f_t$ is shown in Figure ref:fig:asd_disturbance_force.
|
The obtained amplitude spectral density of the disturbance force $f_t$ is shown in Figure ref:fig:uniaxial_asd_disturbance_force.
|
||||||
#+begin_src matlab :exports none :results none
|
#+begin_src matlab :exports none :results none
|
||||||
%% Estimated disturbance force ft from measurement and uniaxial model
|
%% Estimated disturbance force ft from measurement and uniaxial model
|
||||||
figure;
|
figure;
|
||||||
@ -1491,13 +1494,13 @@ legend('location', 'northeast', 'FontSize', 8, 'NumColumns', 1);
|
|||||||
#+end_src
|
#+end_src
|
||||||
|
|
||||||
#+begin_src matlab :tangle no :exports results :results file replace
|
#+begin_src matlab :tangle no :exports results :results file replace
|
||||||
exportFig('figs/asd_disturbance_force.pdf', 'width', 'wide', 'height', 'normal');
|
exportFig('figs/uniaxial_asd_disturbance_force.pdf', 'width', 'wide', 'height', 'normal');
|
||||||
#+end_src
|
#+end_src
|
||||||
|
|
||||||
#+name: fig:asd_disturbance_force
|
#+name: fig:uniaxial_asd_disturbance_force
|
||||||
#+caption: Estimated disturbance force ft from measurement and uniaxial model
|
#+caption: Estimated disturbance force ft from measurement and uniaxial model
|
||||||
#+RESULTS:
|
#+RESULTS:
|
||||||
[[file:figs/asd_disturbance_force.png]]
|
[[file:figs/uniaxial_asd_disturbance_force.png]]
|
||||||
|
|
||||||
The vibrations induced by the $T_y$ stage are not considered here because:
|
The vibrations induced by the $T_y$ stage are not considered here because:
|
||||||
- the induced vibrations have less amplitude than the vibrations induced by the $R_z$ stage
|
- the induced vibrations have less amplitude than the vibrations induced by the $R_z$ stage
|
||||||
|
@ -1,4 +1,4 @@
|
|||||||
% Created 2023-07-03 Mon 17:24
|
% Created 2024-03-21 Thu 18:24
|
||||||
% Intended LaTeX compiler: pdflatex
|
% Intended LaTeX compiler: pdflatex
|
||||||
\documentclass[a4paper, 10pt, DIV=12, parskip=full, bibliography=totoc]{scrreprt}
|
\documentclass[a4paper, 10pt, DIV=12, parskip=full, bibliography=totoc]{scrreprt}
|
||||||
|
|
||||||
@ -12,7 +12,7 @@
|
|||||||
pdftitle={Nano Active Stabilization System - Uniaxial Model},
|
pdftitle={Nano Active Stabilization System - Uniaxial Model},
|
||||||
pdfkeywords={},
|
pdfkeywords={},
|
||||||
pdfsubject={},
|
pdfsubject={},
|
||||||
pdfcreator={Emacs 28.2 (Org mode 9.5.2)},
|
pdfcreator={Emacs 29.2 (Org mode 9.7)},
|
||||||
pdflang={English}}
|
pdflang={English}}
|
||||||
\usepackage{biblatex}
|
\usepackage{biblatex}
|
||||||
|
|
||||||
@ -22,7 +22,6 @@
|
|||||||
\tableofcontents
|
\tableofcontents
|
||||||
|
|
||||||
\clearpage
|
\clearpage
|
||||||
|
|
||||||
In this report, a uniaxial model of the Nano Active Stabilization System (NASS) is developed and used to have a first idea of the challenges involved in this complex system.
|
In this report, a uniaxial model of the Nano Active Stabilization System (NASS) is developed and used to have a first idea of the challenges involved in this complex system.
|
||||||
Note that in this document, only the vertical direction is considered (which is the most stiff), but other directions were considered as well and yields similar conclusions.
|
Note that in this document, only the vertical direction is considered (which is the most stiff), but other directions were considered as well and yields similar conclusions.
|
||||||
The model is schematically shown in Figure \ref{fig:uniaxial_overview_model_sections} where the colors are representing the studied parts in different sections.
|
The model is schematically shown in Figure \ref{fig:uniaxial_overview_model_sections} where the colors are representing the studied parts in different sections.
|
||||||
@ -42,10 +41,10 @@ Once the system is well damped, a feedback position controller is applied, and t
|
|||||||
|
|
||||||
Two key effects that may limit that positioning performances are then considered: the limited micro-station compliance (Section \ref{sec:uniaxial_support_compliance}) and the presence of dynamics between the nano-hexapod and the sample's point of interest (Section \ref{sec:uniaxial_payload_dynamics}).
|
Two key effects that may limit that positioning performances are then considered: the limited micro-station compliance (Section \ref{sec:uniaxial_support_compliance}) and the presence of dynamics between the nano-hexapod and the sample's point of interest (Section \ref{sec:uniaxial_payload_dynamics}).
|
||||||
|
|
||||||
Conclusion remarks are given in Section \ref{sec:conclusion}.
|
Conclusion remarks are given in Section \ref{sec:uniaxial_conclusion}.
|
||||||
|
|
||||||
\begin{table}[htbp]
|
\begin{table}[htbp]
|
||||||
\caption{\label{tab:section_matlab_code}Report sections and corresponding Matlab files}
|
\caption{\label{tab:uniaxial_section_matlab_code}Report sections and corresponding Matlab files}
|
||||||
\centering
|
\centering
|
||||||
\begin{tabularx}{0.6\linewidth}{lX}
|
\begin{tabularx}{0.6\linewidth}{lX}
|
||||||
\toprule
|
\toprule
|
||||||
@ -68,22 +67,21 @@ Section \ref{sec:uniaxial_payload_dynamics} & \texttt{uniaxial\_8\_payload\_dyna
|
|||||||
\includegraphics[scale=1]{figs/uniaxial_overview_model_sections.png}
|
\includegraphics[scale=1]{figs/uniaxial_overview_model_sections.png}
|
||||||
\caption{\label{fig:uniaxial_overview_model_sections}Uniaxial Micro-Station model in blue (Section \ref{sec:micro_station_model}), Nano-Hexapod models in red (Section \ref{sec:nano_station_model}), Disturbances in yellow (Section \ref{sec:uniaxial_disturbances}), Active Damping in green (Section \ref{sec:uniaxial_active_damping}), Position control in purple (Section \ref{sec:uniaxial_position_control}) and Sample dynamics in cyan (Section \ref{sec:uniaxial_payload_dynamics})}
|
\caption{\label{fig:uniaxial_overview_model_sections}Uniaxial Micro-Station model in blue (Section \ref{sec:micro_station_model}), Nano-Hexapod models in red (Section \ref{sec:nano_station_model}), Disturbances in yellow (Section \ref{sec:uniaxial_disturbances}), Active Damping in green (Section \ref{sec:uniaxial_active_damping}), Position control in purple (Section \ref{sec:uniaxial_position_control}) and Sample dynamics in cyan (Section \ref{sec:uniaxial_payload_dynamics})}
|
||||||
\end{figure}
|
\end{figure}
|
||||||
|
|
||||||
\chapter{Micro Station Model}
|
\chapter{Micro Station Model}
|
||||||
\label{sec:micro_station_model}
|
\label{sec:micro_station_model}
|
||||||
In this section, a uni-axial model of the micro-station is tuned in order to match measurements made on the micro-station
|
In this section, a uni-axial model of the micro-station is tuned in order to match measurements made on the micro-station
|
||||||
The measurement setup is shown in Figure \ref{fig:micro_station_first_meas_dynamics} where several geophones are fixed to the micro-station and an instrumented hammer is used to inject forces on different stages of the micro-station.
|
The measurement setup is shown in Figure \ref{fig:uniaxial_ustation_first_meas_dynamics} where several geophones are fixed to the micro-station and an instrumented hammer is used to inject forces on different stages of the micro-station.
|
||||||
|
|
||||||
From the measured frequency response functions (FRF), the model can be tuned to approximate the uniaxial dynamics of the micro-station.
|
From the measured frequency response functions (FRF), the model can be tuned to approximate the uniaxial dynamics of the micro-station.
|
||||||
|
|
||||||
\begin{figure}[htbp]
|
\begin{figure}[htbp]
|
||||||
\centering
|
\centering
|
||||||
\includegraphics[scale=1,width=\linewidth]{figs/micro_station_first_meas_dynamics.jpg}
|
\includegraphics[scale=1,width=\linewidth]{figs/uniaxial_ustation_first_meas_dynamics.jpg}
|
||||||
\caption{\label{fig:micro_station_first_meas_dynamics}Experimental Setup for the first dynamical measurements on the Micro-Station. Geophones are fixed to the micro-station, and the granite as well as the micro-hexapod's top platform are impact with an instrumented hammer}
|
\caption{\label{fig:uniaxial_ustation_first_meas_dynamics}Experimental Setup for the first dynamical measurements on the Micro-Station. Geophones are fixed to the micro-station, and the granite as well as the micro-hexapod's top platform are impact with an instrumented hammer}
|
||||||
\end{figure}
|
\end{figure}
|
||||||
\section{Measured dynamics}
|
\section{Measured dynamics}
|
||||||
|
|
||||||
The measurement setup is schematically shown in Figure \ref{fig:micro_station_meas_dynamics_schematic} where:
|
The measurement setup is schematically shown in Figure \ref{fig:uniaxial_ustation_meas_dynamics_schematic} where:
|
||||||
\begin{itemize}
|
\begin{itemize}
|
||||||
\item Two hammer hits are performed, one on the Granite (force \(F_g\)), and one on the micro-hexapod's top platform (force \(F_h\))
|
\item Two hammer hits are performed, one on the Granite (force \(F_g\)), and one on the micro-hexapod's top platform (force \(F_h\))
|
||||||
\item The inertial motion of the granite \(x_g\) and the micro-hexapod's top platform \(x_h\) are measured using geophones.
|
\item The inertial motion of the granite \(x_g\) and the micro-hexapod's top platform \(x_h\) are measured using geophones.
|
||||||
@ -99,9 +97,9 @@ From the forces applied by the instrumented hammer and the responses of the geop
|
|||||||
\begin{figure}
|
\begin{figure}
|
||||||
\begin{subfigure}{0.69\textwidth}
|
\begin{subfigure}{0.69\textwidth}
|
||||||
\begin{center}
|
\begin{center}
|
||||||
\includegraphics[scale=1,scale=1]{figs/micro_station_meas_dynamics_schematic.png}
|
\includegraphics[scale=1,scale=1]{figs/uniaxial_ustation_meas_dynamics_schematic.png}
|
||||||
\end{center}
|
\end{center}
|
||||||
\subcaption{\label{fig:micro_station_meas_dynamics_schematic}Measurement setup - Schematic}
|
\subcaption{\label{fig:uniaxial_ustation_meas_dynamics_schematic}Measurement setup - Schematic}
|
||||||
\end{subfigure}
|
\end{subfigure}
|
||||||
\begin{subfigure}{0.29\textwidth}
|
\begin{subfigure}{0.29\textwidth}
|
||||||
\begin{center}
|
\begin{center}
|
||||||
@ -113,7 +111,6 @@ From the forces applied by the instrumented hammer and the responses of the geop
|
|||||||
\end{figure}
|
\end{figure}
|
||||||
|
|
||||||
Due to the bad coherence at low frequency, the frequency response functions will only be shown between 20 and 200Hz (solid lines in Figure \ref{fig:uniaxial_comp_frf_meas_model}).
|
Due to the bad coherence at low frequency, the frequency response functions will only be shown between 20 and 200Hz (solid lines in Figure \ref{fig:uniaxial_comp_frf_meas_model}).
|
||||||
|
|
||||||
\section{Uniaxial Model}
|
\section{Uniaxial Model}
|
||||||
The uni-axial model of the micro-station is shown in Figure \ref{fig:uniaxial_model_micro_station}, with:
|
The uni-axial model of the micro-station is shown in Figure \ref{fig:uniaxial_model_micro_station}, with:
|
||||||
\begin{itemize}
|
\begin{itemize}
|
||||||
@ -142,7 +139,6 @@ More accurate models will be used later on.
|
|||||||
\includegraphics[scale=1]{figs/uniaxial_comp_frf_meas_model.png}
|
\includegraphics[scale=1]{figs/uniaxial_comp_frf_meas_model.png}
|
||||||
\caption{\label{fig:uniaxial_comp_frf_meas_model}Comparison of the measured FRF and identified ones from the uni-axial model}
|
\caption{\label{fig:uniaxial_comp_frf_meas_model}Comparison of the measured FRF and identified ones from the uni-axial model}
|
||||||
\end{figure}
|
\end{figure}
|
||||||
|
|
||||||
\chapter{Nano-Hexapod Model}
|
\chapter{Nano-Hexapod Model}
|
||||||
\label{sec:nano_station_model}
|
\label{sec:nano_station_model}
|
||||||
A model of the nano-hexapod and sample is now added on top of the uni-axial model of the micro-station (Figure \ref{fig:uniaxial_model_micro_station-nass}).
|
A model of the nano-hexapod and sample is now added on top of the uni-axial model of the micro-station (Figure \ref{fig:uniaxial_model_micro_station-nass}).
|
||||||
@ -173,7 +169,6 @@ The parameters for the nano-hexapod and sample are:
|
|||||||
\end{itemize}
|
\end{itemize}
|
||||||
|
|
||||||
As a first example, let's choose a nano-hexapod stiffness of \(10\,N/\mu m\) and a sample mass of 10kg.
|
As a first example, let's choose a nano-hexapod stiffness of \(10\,N/\mu m\) and a sample mass of 10kg.
|
||||||
|
|
||||||
\section{Obtained Dynamic Response}
|
\section{Obtained Dynamic Response}
|
||||||
The sensitivity to disturbances (i.e. \(x_f\), \(f_t\) and \(f_s\)) are shown in Figure \ref{fig:uniaxial_sensitivity_dist_first_params}.
|
The sensitivity to disturbances (i.e. \(x_f\), \(f_t\) and \(f_s\)) are shown in Figure \ref{fig:uniaxial_sensitivity_dist_first_params}.
|
||||||
The \emph{plant} (i.e. the transfer function from actuator force \(f\) to measured displacement \(d\)) is shown in Figure \ref{fig:uniaxial_plant_first_params}.
|
The \emph{plant} (i.e. the transfer function from actuator force \(f\) to measured displacement \(d\)) is shown in Figure \ref{fig:uniaxial_plant_first_params}.
|
||||||
@ -195,20 +190,20 @@ For further analysis, 9 configurations are considered: three nano-hexapod stiffn
|
|||||||
\end{figure}
|
\end{figure}
|
||||||
\chapter{Disturbance Identification}
|
\chapter{Disturbance Identification}
|
||||||
\label{sec:uniaxial_disturbances}
|
\label{sec:uniaxial_disturbances}
|
||||||
In order to measure disturbances, two geophones are used, on located on the floor and on on the micro-hexapod's top platform (see Figure \ref{fig:micro_station_meas_disturbances}).
|
In order to measure disturbances, two geophones are used, on located on the floor and on on the micro-hexapod's top platform (see Figure \ref{fig:uniaxial_ustation_meas_disturbances}).
|
||||||
|
|
||||||
The geophone on the floor is used to measured the floor motion \(x_f\) while the geophone on the micro-hexapod is used to measure vibrations introduced by scanning of the \(T_y\) stage and \(R_z\) stage.
|
The geophone on the floor is used to measured the floor motion \(x_f\) while the geophone on the micro-hexapod is used to measure vibrations introduced by scanning of the \(T_y\) stage and \(R_z\) stage.
|
||||||
|
|
||||||
\begin{figure}[htbp]
|
\begin{figure}[htbp]
|
||||||
\centering
|
\centering
|
||||||
\includegraphics[scale=1]{figs/micro_station_meas_disturbances.png}
|
\includegraphics[scale=1]{figs/uniaxial_ustation_meas_disturbances.png}
|
||||||
\caption{\label{fig:micro_station_meas_disturbances}Disturbance measurement setup - Schematic}
|
\caption{\label{fig:uniaxial_ustation_meas_disturbances}Disturbance measurement setup - Schematic}
|
||||||
\end{figure}
|
\end{figure}
|
||||||
|
|
||||||
\begin{figure}[htbp]
|
\begin{figure}[htbp]
|
||||||
\centering
|
\centering
|
||||||
\includegraphics[scale=1,width=0.6\linewidth]{figs/micro_station_dynamical_id_setup.jpg}
|
\includegraphics[scale=1,width=0.6\linewidth]{figs/uniaxial_ustation_dynamical_id_setup.jpg}
|
||||||
\caption{\label{fig:micro_station_dynamical_id_setup}Two geophones are used to measure the micro-station vibrations induced by the scanning of the \(T_y\) and \(R_z\) stages}
|
\caption{\label{fig:uniaxial_ustation_dynamical_id_setup}Two geophones are used to measure the micro-station vibrations induced by the scanning of the \(T_y\) and \(R_z\) stages}
|
||||||
\end{figure}
|
\end{figure}
|
||||||
\section{Ground Motion}
|
\section{Ground Motion}
|
||||||
The geophone fixed to the floor to measure the floor motion.
|
The geophone fixed to the floor to measure the floor motion.
|
||||||
@ -227,25 +222,24 @@ with:
|
|||||||
\item \(\omega\) is here to integrate and have the displacement instead of the velocity
|
\item \(\omega\) is here to integrate and have the displacement instead of the velocity
|
||||||
\end{itemize}
|
\end{itemize}
|
||||||
|
|
||||||
The amplitude spectral density \(\Gamma_{x_f}\) of the measured displacement \(x_f\) is shown in Figure \ref{fig:asd_floor_motion_id31}.
|
The amplitude spectral density \(\Gamma_{x_f}\) of the measured displacement \(x_f\) is shown in Figure \ref{fig:uniaxial_asd_floor_motion_id31}.
|
||||||
|
|
||||||
\begin{figure}[htbp]
|
\begin{figure}[htbp]
|
||||||
\centering
|
\centering
|
||||||
\includegraphics[scale=1]{figs/asd_floor_motion_id31.png}
|
\includegraphics[scale=1]{figs/uniaxial_asd_floor_motion_id31.png}
|
||||||
\caption{\label{fig:asd_floor_motion_id31}Amplitude Spectral Density of the measured Floor motion on ID31}
|
\caption{\label{fig:uniaxial_asd_floor_motion_id31}Amplitude Spectral Density of the measured Floor motion on ID31}
|
||||||
\end{figure}
|
\end{figure}
|
||||||
|
|
||||||
\section{Stage Vibration}
|
\section{Stage Vibration}
|
||||||
During Spindle rotation (here at 6rpm), the granite velocity and micro-hexapod's top platform velocity are measured with the geophones.
|
During Spindle rotation (here at 6rpm), the granite velocity and micro-hexapod's top platform velocity are measured with the geophones.
|
||||||
|
|
||||||
The Power Spectral Density of the relative velocity between the hexapod and the granite is computed.
|
The Power Spectral Density of the relative velocity between the hexapod and the granite is computed.
|
||||||
It is then integrated to obtain the Amplitude Spectral Density of the relative motion which is compared with a non-rotating case (Figure \ref{fig:asd_vibration_spindle_rotation}).
|
It is then integrated to obtain the Amplitude Spectral Density of the relative motion which is compared with a non-rotating case (Figure \ref{fig:uniaxial_asd_vibration_spindle_rotation}).
|
||||||
It is shown that the spindle rotation induces vibrations in a wide frequency spectrum.
|
It is shown that the spindle rotation induces vibrations in a wide frequency spectrum.
|
||||||
|
|
||||||
\begin{figure}[htbp]
|
\begin{figure}[htbp]
|
||||||
\centering
|
\centering
|
||||||
\includegraphics[scale=1]{figs/asd_vibration_spindle_rotation.png}
|
\includegraphics[scale=1]{figs/uniaxial_asd_vibration_spindle_rotation.png}
|
||||||
\caption{\label{fig:asd_vibration_spindle_rotation}Amplitude Spectral Density of the relative motion measured between the granite and the micro-hexapod's top platform during Spindle rotating}
|
\caption{\label{fig:uniaxial_asd_vibration_spindle_rotation}Amplitude Spectral Density of the relative motion measured between the granite and the micro-hexapod's top platform during Spindle rotating}
|
||||||
\end{figure}
|
\end{figure}
|
||||||
|
|
||||||
In order to compute the equivalent disturbance force \(f_t\) that induces such motion, the transfer function from \(f_t\) to the relative motion of the hexapod's top platform and the granite is extracted from the model.
|
In order to compute the equivalent disturbance force \(f_t\) that induces such motion, the transfer function from \(f_t\) to the relative motion of the hexapod's top platform and the granite is extracted from the model.
|
||||||
@ -259,11 +253,11 @@ with:
|
|||||||
\item \(G_{\text{model}}\) the transfer function (extracted from the uniaxial model) from \(f_t\) to the relative motion between the micro-hexapod's top platform and the granite
|
\item \(G_{\text{model}}\) the transfer function (extracted from the uniaxial model) from \(f_t\) to the relative motion between the micro-hexapod's top platform and the granite
|
||||||
\end{itemize}
|
\end{itemize}
|
||||||
|
|
||||||
The obtained amplitude spectral density of the disturbance force \(f_t\) is shown in Figure \ref{fig:asd_disturbance_force}.
|
The obtained amplitude spectral density of the disturbance force \(f_t\) is shown in Figure \ref{fig:uniaxial_asd_disturbance_force}.
|
||||||
\begin{figure}[htbp]
|
\begin{figure}[htbp]
|
||||||
\centering
|
\centering
|
||||||
\includegraphics[scale=1]{figs/asd_disturbance_force.png}
|
\includegraphics[scale=1]{figs/uniaxial_asd_disturbance_force.png}
|
||||||
\caption{\label{fig:asd_disturbance_force}Estimated disturbance force ft from measurement and uniaxial model}
|
\caption{\label{fig:uniaxial_asd_disturbance_force}Estimated disturbance force ft from measurement and uniaxial model}
|
||||||
\end{figure}
|
\end{figure}
|
||||||
|
|
||||||
The vibrations induced by the \(T_y\) stage are not considered here because:
|
The vibrations induced by the \(T_y\) stage are not considered here because:
|
||||||
@ -271,7 +265,6 @@ The vibrations induced by the \(T_y\) stage are not considered here because:
|
|||||||
\item the induced vibrations have less amplitude than the vibrations induced by the \(R_z\) stage
|
\item the induced vibrations have less amplitude than the vibrations induced by the \(R_z\) stage
|
||||||
\item it can be scanned at lower velocities if the induced vibrations are an issue
|
\item it can be scanned at lower velocities if the induced vibrations are an issue
|
||||||
\end{itemize}
|
\end{itemize}
|
||||||
|
|
||||||
\chapter{Open-Loop Dynamic Noise Budgeting}
|
\chapter{Open-Loop Dynamic Noise Budgeting}
|
||||||
\label{sec:uniaxial_noise_budgeting}
|
\label{sec:uniaxial_noise_budgeting}
|
||||||
Now that we have a model of the NASS and an estimation of the power spectral density of the disturbances, it is possible to perform an \emph{open-loop dynamic noise budgeting}.
|
Now that we have a model of the NASS and an estimation of the power spectral density of the disturbances, it is possible to perform an \emph{open-loop dynamic noise budgeting}.
|
||||||
@ -301,7 +294,6 @@ From Figure \ref{fig:uniaxial_sensitivity_disturbances_nano_hexapod_stiffnesses}
|
|||||||
\includegraphics[scale=1]{figs/uniaxial_sensitivity_disturbances_nano_hexapod_stiffnesses.png}
|
\includegraphics[scale=1]{figs/uniaxial_sensitivity_disturbances_nano_hexapod_stiffnesses.png}
|
||||||
\caption{\label{fig:uniaxial_sensitivity_disturbances_nano_hexapod_stiffnesses}Sensitivity to disturbances for three different nano-hexpod stiffnesses}
|
\caption{\label{fig:uniaxial_sensitivity_disturbances_nano_hexapod_stiffnesses}Sensitivity to disturbances for three different nano-hexpod stiffnesses}
|
||||||
\end{figure}
|
\end{figure}
|
||||||
|
|
||||||
\section{Open-Loop Dynamic Noise Budgeting}
|
\section{Open-Loop Dynamic Noise Budgeting}
|
||||||
Now, the power spectral density of the disturbances is taken into account to estimate the residual motion \(d\) in each case.
|
Now, the power spectral density of the disturbances is taken into account to estimate the residual motion \(d\) in each case.
|
||||||
|
|
||||||
@ -323,7 +315,6 @@ The conclusion is that the sample's mass has little effect on the cumulative amp
|
|||||||
\includegraphics[scale=1]{figs/uniaxial_cas_d_disturbances_payload_masses.png}
|
\includegraphics[scale=1]{figs/uniaxial_cas_d_disturbances_payload_masses.png}
|
||||||
\caption{\label{fig:uniaxial_cas_d_disturbances_payload_masses}Cumulative Amplitude Spectrum of the relative motion d due to all disturbances, for two sample masses}
|
\caption{\label{fig:uniaxial_cas_d_disturbances_payload_masses}Cumulative Amplitude Spectrum of the relative motion d due to all disturbances, for two sample masses}
|
||||||
\end{figure}
|
\end{figure}
|
||||||
|
|
||||||
\section{Conclusion}
|
\section{Conclusion}
|
||||||
|
|
||||||
\begin{important}
|
\begin{important}
|
||||||
@ -338,7 +329,6 @@ This can be explained by the fact that for frequencies larger than the suspensio
|
|||||||
|
|
||||||
This gives a first advantage to having a soft nano-hexapod.
|
This gives a first advantage to having a soft nano-hexapod.
|
||||||
\end{important}
|
\end{important}
|
||||||
|
|
||||||
\chapter{Active Damping}
|
\chapter{Active Damping}
|
||||||
\label{sec:uniaxial_active_damping}
|
\label{sec:uniaxial_active_damping}
|
||||||
In this section, three active damping are applied on the nano-hexapod (see Figure \ref{fig:uniaxial_active_damping_strategies}): Integral Force Feedback (IFF) \cite{preumont91_activ}, Relative Damping Control (RDC) \cite[Chapter 7.2]{preumont18_vibrat_contr_activ_struc_fourt_edition} and Direct Velocity Feedback (DVF) \cite{karnopp74_vibrat_contr_using_semi_activ_force_gener,serrand00_multic_feedb_contr_isolat_base_excit_vibrat,preumont02_force_feedb_versus_accel_feedb}.
|
In this section, three active damping are applied on the nano-hexapod (see Figure \ref{fig:uniaxial_active_damping_strategies}): Integral Force Feedback (IFF) \cite{preumont91_activ}, Relative Damping Control (RDC) \cite[Chapter 7.2]{preumont18_vibrat_contr_activ_struc_fourt_edition} and Direct Velocity Feedback (DVF) \cite{karnopp74_vibrat_contr_using_semi_activ_force_gener,serrand00_multic_feedb_contr_isolat_base_excit_vibrat,preumont02_force_feedb_versus_accel_feedb}.
|
||||||
@ -374,8 +364,6 @@ The mechanical equivalent of this strategy is to add a dashpot in series with th
|
|||||||
\includegraphics[scale=1]{figs/uniaxial_active_damping_iff_equiv.png}
|
\includegraphics[scale=1]{figs/uniaxial_active_damping_iff_equiv.png}
|
||||||
\caption{\label{fig:uniaxial_active_damping_iff_equiv}Integral Force Feedback is equivalent as to add a damper in series with the stiffness (the initial damping is here neglected for simplicity)}
|
\caption{\label{fig:uniaxial_active_damping_iff_equiv}Integral Force Feedback is equivalent as to add a damper in series with the stiffness (the initial damping is here neglected for simplicity)}
|
||||||
\end{figure}
|
\end{figure}
|
||||||
|
|
||||||
|
|
||||||
\paragraph{Relative Damping Control (RDC)}
|
\paragraph{Relative Damping Control (RDC)}
|
||||||
For the Relative Damping Control strategy, a relative motion sensor that measures the motion of the actuator is used (see Figure \ref{fig:uniaxial_active_damping_rdc_equiv}, left).
|
For the Relative Damping Control strategy, a relative motion sensor that measures the motion of the actuator is used (see Figure \ref{fig:uniaxial_active_damping_rdc_equiv}, left).
|
||||||
|
|
||||||
@ -391,7 +379,6 @@ The mechanical equivalent is to add a dashpot in parallel with the actuator with
|
|||||||
\includegraphics[scale=1]{figs/uniaxial_active_damping_rdc_equiv.png}
|
\includegraphics[scale=1]{figs/uniaxial_active_damping_rdc_equiv.png}
|
||||||
\caption{\label{fig:uniaxial_active_damping_rdc_equiv}Relative Damping Control is equivalent as adding a damper in parallel with the actuator/relative motion sensor}
|
\caption{\label{fig:uniaxial_active_damping_rdc_equiv}Relative Damping Control is equivalent as adding a damper in parallel with the actuator/relative motion sensor}
|
||||||
\end{figure}
|
\end{figure}
|
||||||
|
|
||||||
\paragraph{Direct Velocity Feedback (DVF)}
|
\paragraph{Direct Velocity Feedback (DVF)}
|
||||||
Finally, the Direct Velocity Feedback strategy consists of using an inertial sensor (usually a geophone), that measured the ``absolute'' velocity of the body fixed on top of the actuator (se Figure \ref{fig:uniaxial_active_damping_dvf_equiv}, left).
|
Finally, the Direct Velocity Feedback strategy consists of using an inertial sensor (usually a geophone), that measured the ``absolute'' velocity of the body fixed on top of the actuator (se Figure \ref{fig:uniaxial_active_damping_dvf_equiv}, left).
|
||||||
|
|
||||||
@ -408,7 +395,6 @@ This is usually refers to as ``\emph{sky hook damper}''.
|
|||||||
\includegraphics[scale=1]{figs/uniaxial_active_damping_dvf_equiv.png}
|
\includegraphics[scale=1]{figs/uniaxial_active_damping_dvf_equiv.png}
|
||||||
\caption{\label{fig:uniaxial_active_damping_dvf_equiv}Direct velocity Feedback using an inertial sensor is equivalent to a ``sky hook damper''}
|
\caption{\label{fig:uniaxial_active_damping_dvf_equiv}Direct velocity Feedback using an inertial sensor is equivalent to a ``sky hook damper''}
|
||||||
\end{figure}
|
\end{figure}
|
||||||
|
|
||||||
\section{Plant Dynamics for Active Damping}
|
\section{Plant Dynamics for Active Damping}
|
||||||
The plant dynamics for all three active damping techniques are shown in Figure \ref{fig:uniaxial_plant_active_damping_techniques}.
|
The plant dynamics for all three active damping techniques are shown in Figure \ref{fig:uniaxial_plant_active_damping_techniques}.
|
||||||
All have \textbf{alternating poles and zeros} meaning that the phase do not vary by more than \(\pm 90\,\text{deg}\) which makes the design of a robust controller very easy.
|
All have \textbf{alternating poles and zeros} meaning that the phase do not vary by more than \(\pm 90\,\text{deg}\) which makes the design of a robust controller very easy.
|
||||||
@ -424,7 +410,6 @@ Therefore, it is expected that the micro-station dynamics might impact the achie
|
|||||||
\includegraphics[scale=1]{figs/uniaxial_plant_active_damping_techniques.png}
|
\includegraphics[scale=1]{figs/uniaxial_plant_active_damping_techniques.png}
|
||||||
\caption{\label{fig:uniaxial_plant_active_damping_techniques}Plant dynamics for the three active damping techniques (IFF: right, RDC: middle, DVF: left), for three nano-hexapod stiffnesses (\(k_n = 0.01\,N/\mu m\) in blue, \(k_n = 1\,N/\mu m\) in red and \(k_n = 100\,N/\mu m\) in yellow) and three sample's masses (\(m_s = 1\,kg\): solid curves, \(m_s = 25\,kg\): dot-dashed curves, and \(m_s = 50\,kg\): dashed curves).}
|
\caption{\label{fig:uniaxial_plant_active_damping_techniques}Plant dynamics for the three active damping techniques (IFF: right, RDC: middle, DVF: left), for three nano-hexapod stiffnesses (\(k_n = 0.01\,N/\mu m\) in blue, \(k_n = 1\,N/\mu m\) in red and \(k_n = 100\,N/\mu m\) in yellow) and three sample's masses (\(m_s = 1\,kg\): solid curves, \(m_s = 25\,kg\): dot-dashed curves, and \(m_s = 50\,kg\): dashed curves).}
|
||||||
\end{figure}
|
\end{figure}
|
||||||
|
|
||||||
\section{Achievable Damping - Root Locus}
|
\section{Achievable Damping - Root Locus}
|
||||||
\label{ssec:uniaxial_active_damping_achievable_damping}
|
\label{ssec:uniaxial_active_damping_achievable_damping}
|
||||||
The Root Locus are computed for the three nano-hexapod stiffnesses and for the three active damping techniques.
|
The Root Locus are computed for the three nano-hexapod stiffnesses and for the three active damping techniques.
|
||||||
@ -452,7 +437,6 @@ The micro-station and the nano-hexapod masses are connected through a large damp
|
|||||||
\includegraphics[scale=1]{figs/uniaxial_root_locus_damping_techniques_micro_station_mode.png}
|
\includegraphics[scale=1]{figs/uniaxial_root_locus_damping_techniques_micro_station_mode.png}
|
||||||
\caption{\label{fig:uniaxial_root_locus_damping_techniques_micro_station_mode}Root Locus for the three damping techniques applied with the soft nano-hexapod. It is shown that the RDC active damping technique has some authority on one mode of the micro-station. This mode corresponds to the suspension mode of the micro-hexapod.}
|
\caption{\label{fig:uniaxial_root_locus_damping_techniques_micro_station_mode}Root Locus for the three damping techniques applied with the soft nano-hexapod. It is shown that the RDC active damping technique has some authority on one mode of the micro-station. This mode corresponds to the suspension mode of the micro-hexapod.}
|
||||||
\end{figure}
|
\end{figure}
|
||||||
|
|
||||||
\section{Change of sensitivity to disturbances}
|
\section{Change of sensitivity to disturbances}
|
||||||
\label{ssec:uniaxial_active_damping_sensitivity_disturbances}
|
\label{ssec:uniaxial_active_damping_sensitivity_disturbances}
|
||||||
|
|
||||||
@ -473,7 +457,6 @@ Conclusions from Figure \ref{fig:uniaxial_sensitivity_dist_active_damping} are:
|
|||||||
\includegraphics[scale=1]{figs/uniaxial_sensitivity_dist_active_damping.png}
|
\includegraphics[scale=1]{figs/uniaxial_sensitivity_dist_active_damping.png}
|
||||||
\caption{\label{fig:uniaxial_sensitivity_dist_active_damping}Change of sensitivity to disturbance with all three active damping strategies}
|
\caption{\label{fig:uniaxial_sensitivity_dist_active_damping}Change of sensitivity to disturbance with all three active damping strategies}
|
||||||
\end{figure}
|
\end{figure}
|
||||||
|
|
||||||
\section{Noise Budgeting after Active Damping}
|
\section{Noise Budgeting after Active Damping}
|
||||||
\label{ssec:uniaxial_active_damping_noise_budget}
|
\label{ssec:uniaxial_active_damping_noise_budget}
|
||||||
Cumulative Amplitude Spectrum of the distance \(d\) with all three active damping techniques are compared in Figure \ref{fig:uniaxial_cas_active_damping}.
|
Cumulative Amplitude Spectrum of the distance \(d\) with all three active damping techniques are compared in Figure \ref{fig:uniaxial_cas_active_damping}.
|
||||||
@ -486,7 +469,6 @@ Compared to the open-loop case, the active damping helps to lower the vibrations
|
|||||||
\includegraphics[scale=1]{figs/uniaxial_cas_active_damping.png}
|
\includegraphics[scale=1]{figs/uniaxial_cas_active_damping.png}
|
||||||
\caption{\label{fig:uniaxial_cas_active_damping}Comparison of the cumulative amplitude spectrum (CAS) of the distance \(d\) for all three active damping techniques (OL in black, IFF in blue, RDC in red and DVF in yellow).}
|
\caption{\label{fig:uniaxial_cas_active_damping}Comparison of the cumulative amplitude spectrum (CAS) of the distance \(d\) for all three active damping techniques (OL in black, IFF in blue, RDC in red and DVF in yellow).}
|
||||||
\end{figure}
|
\end{figure}
|
||||||
|
|
||||||
\section{Obtained Closed Loop Response}
|
\section{Obtained Closed Loop Response}
|
||||||
The transfer functions from the plant input \(f\) to the relative displacement \(d\) while the active damping is implemented are shown in Figure \ref{fig:uniaxial_damped_plant_three_active_damping_techniques}.
|
The transfer functions from the plant input \(f\) to the relative displacement \(d\) while the active damping is implemented are shown in Figure \ref{fig:uniaxial_damped_plant_three_active_damping_techniques}.
|
||||||
All three active damping techniques yield similar damped plants.
|
All three active damping techniques yield similar damped plants.
|
||||||
@ -503,7 +485,6 @@ The damped plants are shown in Figure \ref{fig:uniaxial_damped_plant_change_samp
|
|||||||
\includegraphics[scale=1]{figs/uniaxial_damped_plant_change_sample_mass.png}
|
\includegraphics[scale=1]{figs/uniaxial_damped_plant_change_sample_mass.png}
|
||||||
\caption{\label{fig:uniaxial_damped_plant_change_sample_mass}Damped plant \(d/f\) - Robustness to change of sample's mass for all three active damping techniques. Grey curves are the open-loop (i.e. undamped) plants.}
|
\caption{\label{fig:uniaxial_damped_plant_change_sample_mass}Damped plant \(d/f\) - Robustness to change of sample's mass for all three active damping techniques. Grey curves are the open-loop (i.e. undamped) plants.}
|
||||||
\end{figure}
|
\end{figure}
|
||||||
|
|
||||||
\section{Robustness to change of payload's mass}
|
\section{Robustness to change of payload's mass}
|
||||||
\label{ssec:uniaxial_active_damping_robustness}
|
\label{ssec:uniaxial_active_damping_robustness}
|
||||||
|
|
||||||
@ -517,7 +498,6 @@ We can see that having heavier samples yields larger damping for IFF and smaller
|
|||||||
\includegraphics[scale=1]{figs/uniaxial_active_damping_robustness_mass_root_locus.png}
|
\includegraphics[scale=1]{figs/uniaxial_active_damping_robustness_mass_root_locus.png}
|
||||||
\caption{\label{fig:uniaxial_active_damping_robustness_mass_root_locus}Active Damping Robustness to change of sample's mass - Root Locus for all three damping techniques with 3 different sample's masses}
|
\caption{\label{fig:uniaxial_active_damping_robustness_mass_root_locus}Active Damping Robustness to change of sample's mass - Root Locus for all three damping techniques with 3 different sample's masses}
|
||||||
\end{figure}
|
\end{figure}
|
||||||
|
|
||||||
\section{Conclusion}
|
\section{Conclusion}
|
||||||
|
|
||||||
\begin{important}
|
\begin{important}
|
||||||
@ -549,7 +529,6 @@ Conclusions for Active Damping:
|
|||||||
\bottomrule
|
\bottomrule
|
||||||
\end{tabularx}
|
\end{tabularx}
|
||||||
\end{table}
|
\end{table}
|
||||||
|
|
||||||
\chapter{Position Feedback Controller}
|
\chapter{Position Feedback Controller}
|
||||||
\label{sec:uniaxial_position_control}
|
\label{sec:uniaxial_position_control}
|
||||||
The High Authority Control - Low Authority Control (HAC-LAC) architecture is shown in Figure \ref{fig:uniaxial_hac_lac_architecture}.
|
The High Authority Control - Low Authority Control (HAC-LAC) architecture is shown in Figure \ref{fig:uniaxial_hac_lac_architecture}.
|
||||||
@ -595,7 +574,6 @@ Such effect will be explained in Section \ref{sec:uniaxial_support_compliance}.
|
|||||||
\includegraphics[scale=1]{figs/uniaxial_hac_iff_damped_plants_masses.png}
|
\includegraphics[scale=1]{figs/uniaxial_hac_iff_damped_plants_masses.png}
|
||||||
\caption{\label{fig:uniaxial_hac_iff_damped_plants_masses}Obtained damped plant using Integral Force Feedback for three sample's masses}
|
\caption{\label{fig:uniaxial_hac_iff_damped_plants_masses}Obtained damped plant using Integral Force Feedback for three sample's masses}
|
||||||
\end{figure}
|
\end{figure}
|
||||||
|
|
||||||
\section{Position Feedback Controller}
|
\section{Position Feedback Controller}
|
||||||
\label{ssec:uniaxial_position_control_design}
|
\label{ssec:uniaxial_position_control_design}
|
||||||
|
|
||||||
@ -677,7 +655,6 @@ The goal is just to have a first estimation of the attainable performance.
|
|||||||
\includegraphics[scale=1]{figs/uniaxial_loop_gain_hac.png}
|
\includegraphics[scale=1]{figs/uniaxial_loop_gain_hac.png}
|
||||||
\caption{\label{fig:uniaxial_loop_gain_hac}Loop Gain - High Authority Controller for all three nano-hexapod stiffnesses (soft one in blue, moderately stiff in red and very stiff in yellow) and all sample masses (corresponding to the three curves of each color)}
|
\caption{\label{fig:uniaxial_loop_gain_hac}Loop Gain - High Authority Controller for all three nano-hexapod stiffnesses (soft one in blue, moderately stiff in red and very stiff in yellow) and all sample masses (corresponding to the three curves of each color)}
|
||||||
\end{figure}
|
\end{figure}
|
||||||
|
|
||||||
\section{Closed-Loop Noise Budgeting}
|
\section{Closed-Loop Noise Budgeting}
|
||||||
\label{ssec:uniaxial_position_control_cl_noise_budget}
|
\label{ssec:uniaxial_position_control_cl_noise_budget}
|
||||||
|
|
||||||
@ -700,7 +677,6 @@ Obtained root mean square values of the distance \(d\) are better for the soft n
|
|||||||
\includegraphics[scale=1]{figs/uniaxial_cas_hac_lac.png}
|
\includegraphics[scale=1]{figs/uniaxial_cas_hac_lac.png}
|
||||||
\caption{\label{fig:uniaxial_cas_hac_lac}Cumulative Amplitude Spectrum for all three nano-hexapod stiffnesses - Comparison of OL, IFF and HAC-LAC cases}
|
\caption{\label{fig:uniaxial_cas_hac_lac}Cumulative Amplitude Spectrum for all three nano-hexapod stiffnesses - Comparison of OL, IFF and HAC-LAC cases}
|
||||||
\end{figure}
|
\end{figure}
|
||||||
|
|
||||||
\section{Conclusion}
|
\section{Conclusion}
|
||||||
\begin{important}
|
\begin{important}
|
||||||
Based on the open-loop noise budgeting made in Section \ref{sec:uniaxial_noise_budgeting}, the closed-loop bandwidth required to obtain acceptable vibration levels was estimated.
|
Based on the open-loop noise budgeting made in Section \ref{sec:uniaxial_noise_budgeting}, the closed-loop bandwidth required to obtain acceptable vibration levels was estimated.
|
||||||
@ -710,7 +686,6 @@ In this section, feedback controllers were design in such a way that the require
|
|||||||
The attainable vibration control performances were estimated for the three nano-hexapod stiffnesses and were found to be close to the required values.
|
The attainable vibration control performances were estimated for the three nano-hexapod stiffnesses and were found to be close to the required values.
|
||||||
A slight advantage can be given to the soft nano-hexapod as it requires less feedback bandwidth while giving better stability results.
|
A slight advantage can be given to the soft nano-hexapod as it requires less feedback bandwidth while giving better stability results.
|
||||||
\end{important}
|
\end{important}
|
||||||
|
|
||||||
\chapter{Effect of limited micro-station compliance}
|
\chapter{Effect of limited micro-station compliance}
|
||||||
\label{sec:uniaxial_support_compliance}
|
\label{sec:uniaxial_support_compliance}
|
||||||
In this section, the impact of the compliance of the support (i.e. the micro-station) on the dynamics of the plant to control will be studied.
|
In this section, the impact of the compliance of the support (i.e. the micro-station) on the dynamics of the plant to control will be studied.
|
||||||
@ -754,7 +729,6 @@ When neglecting the support compliance, large feedback bandwidth can be achieve
|
|||||||
\includegraphics[scale=1]{figs/uniaxial_effect_support_compliance_neglected.png}
|
\includegraphics[scale=1]{figs/uniaxial_effect_support_compliance_neglected.png}
|
||||||
\caption{\label{fig:uniaxial_effect_support_compliance_neglected}Obtained transfer functions from \(F\) to \(L^{\prime}\) when neglecing support compliance}
|
\caption{\label{fig:uniaxial_effect_support_compliance_neglected}Obtained transfer functions from \(F\) to \(L^{\prime}\) when neglecing support compliance}
|
||||||
\end{figure}
|
\end{figure}
|
||||||
|
|
||||||
\section{Effect of support compliance on \(L/F\)}
|
\section{Effect of support compliance on \(L/F\)}
|
||||||
|
|
||||||
Let's now add some support compliance and use the model shown in Figure \ref{fig:uniaxial_support_compliance_test_system}.
|
Let's now add some support compliance and use the model shown in Figure \ref{fig:uniaxial_support_compliance_test_system}.
|
||||||
@ -773,7 +747,6 @@ If a soft nano-hexapod is used, the support dynamics appears in the dynamics bet
|
|||||||
\includegraphics[scale=1]{figs/uniaxial_effect_support_compliance_dynamics.png}
|
\includegraphics[scale=1]{figs/uniaxial_effect_support_compliance_dynamics.png}
|
||||||
\caption{\label{fig:uniaxial_effect_support_compliance_dynamics}Effect of the support compliance on the transfer functions from \(F\) to \(L\)}
|
\caption{\label{fig:uniaxial_effect_support_compliance_dynamics}Effect of the support compliance on the transfer functions from \(F\) to \(L\)}
|
||||||
\end{figure}
|
\end{figure}
|
||||||
|
|
||||||
\section{Effect of support compliance on \(d/F\)}
|
\section{Effect of support compliance on \(d/F\)}
|
||||||
|
|
||||||
When the motion to be controlled is the relative displacement \(d\) between the granite and the nano-hexapod's top platform, the effect of the support compliance on the plant dynamics is opposite than what was previously observed.
|
When the motion to be controlled is the relative displacement \(d\) between the granite and the nano-hexapod's top platform, the effect of the support compliance on the plant dynamics is opposite than what was previously observed.
|
||||||
@ -785,7 +758,6 @@ On the contrary, if a ``stiff'' nano-hexapod is used, the support dynamics appea
|
|||||||
\includegraphics[scale=1]{figs/uniaxial_effect_support_compliance_dynamics_d.png}
|
\includegraphics[scale=1]{figs/uniaxial_effect_support_compliance_dynamics_d.png}
|
||||||
\caption{\label{fig:uniaxial_effect_support_compliance_dynamics_d}Effect of the support compliance on the transfer functions from \(F\) to \(d\)}
|
\caption{\label{fig:uniaxial_effect_support_compliance_dynamics_d}Effect of the support compliance on the transfer functions from \(F\) to \(d\)}
|
||||||
\end{figure}
|
\end{figure}
|
||||||
|
|
||||||
\section{Conclusion}
|
\section{Conclusion}
|
||||||
\begin{important}
|
\begin{important}
|
||||||
In order to study the impact of the support compliance on the plant dynamics, simple models shown in Figure \ref{fig:uniaxial_support_compliance_models} were used.
|
In order to study the impact of the support compliance on the plant dynamics, simple models shown in Figure \ref{fig:uniaxial_support_compliance_models} were used.
|
||||||
@ -809,9 +781,9 @@ Note that observations made in this section are also affected by the ratio betwe
|
|||||||
\bottomrule
|
\bottomrule
|
||||||
\end{tabularx}
|
\end{tabularx}
|
||||||
\end{table}
|
\end{table}
|
||||||
|
|
||||||
\chapter{Effect of Payload Dynamics}
|
\chapter{Effect of Payload Dynamics}
|
||||||
\label{sec:uniaxial_payload_dynamics}
|
\label{sec:uniaxial_payload_dynamics}
|
||||||
|
|
||||||
Up to this section, the sample was modelled as a mass rigidly fixed to the nano-hexapod (as shown in Figure \ref{fig:uniaxial_paylaod_dynamics_rigid_schematic}).
|
Up to this section, the sample was modelled as a mass rigidly fixed to the nano-hexapod (as shown in Figure \ref{fig:uniaxial_paylaod_dynamics_rigid_schematic}).
|
||||||
However, such sample may present internal dynamics and its fixation to the nano-hexapod may have limited stiffness.
|
However, such sample may present internal dynamics and its fixation to the nano-hexapod may have limited stiffness.
|
||||||
|
|
||||||
@ -832,7 +804,6 @@ To study the effect of the sample dynamics, models shown in Figure \ref{fig:unia
|
|||||||
\end{subfigure}
|
\end{subfigure}
|
||||||
\caption{\label{fig:uniaxial_payload_dynamics_models}Models used to study the effect of payload dynamics}
|
\caption{\label{fig:uniaxial_payload_dynamics_models}Models used to study the effect of payload dynamics}
|
||||||
\end{figure}
|
\end{figure}
|
||||||
|
|
||||||
\section{Impact on the plant dynamics}
|
\section{Impact on the plant dynamics}
|
||||||
\label{ssec:uniaxial_payload_dynamics_effect_dynamics}
|
\label{ssec:uniaxial_payload_dynamics_effect_dynamics}
|
||||||
|
|
||||||
@ -877,7 +848,6 @@ The general conclusion is that the stiffer the nano-hexapod, the less it is impa
|
|||||||
|
|
||||||
This is why high-bandwidth soft positioning stages are usually restricted to constant and calibrated payloads (CD-player, lithography machines, isolation system for gravitational wave detectors, \ldots{}), while stiff positioning systems can more easily accept various payloads.
|
This is why high-bandwidth soft positioning stages are usually restricted to constant and calibrated payloads (CD-player, lithography machines, isolation system for gravitational wave detectors, \ldots{}), while stiff positioning systems can more easily accept various payloads.
|
||||||
\end{important}
|
\end{important}
|
||||||
|
|
||||||
\section{Impact on the positioning stability}
|
\section{Impact on the positioning stability}
|
||||||
\label{ssec:uniaxial_payload_dynamics_effect_stability}
|
\label{ssec:uniaxial_payload_dynamics_effect_stability}
|
||||||
|
|
||||||
@ -920,7 +890,6 @@ What happens is that above \(\omega_s\), even though the motion \(d\) can be con
|
|||||||
\end{subfigure}
|
\end{subfigure}
|
||||||
\caption{\label{fig:uniaxial_sample_flexibility_noise_budget}Cumulative Amplitude Spectrum of the distances \(d\) and \(y\). The effect of the sample's flexibility does not affects much \(d\) but is detrimental to the stability of \(y\). A sample mass \(m_s = 1\,\text{kg}\) is used for the simulations.}
|
\caption{\label{fig:uniaxial_sample_flexibility_noise_budget}Cumulative Amplitude Spectrum of the distances \(d\) and \(y\). The effect of the sample's flexibility does not affects much \(d\) but is detrimental to the stability of \(y\). A sample mass \(m_s = 1\,\text{kg}\) is used for the simulations.}
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\end{figure}
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\end{figure}
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\section{Conclusion}
|
\section{Conclusion}
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||||||
\begin{important}
|
\begin{important}
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||||||
Payload dynamics is usually a major concern when designing a positioning system.
|
Payload dynamics is usually a major concern when designing a positioning system.
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||||||
@ -934,9 +903,8 @@ Having some flexibility between the measurement point and the point of interest
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|||||||
|
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It will be therefore important to take special care when designing sampling environments, especially is a soft nano-hexapod is used.
|
It will be therefore important to take special care when designing sampling environments, especially is a soft nano-hexapod is used.
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||||||
\end{important}
|
\end{important}
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||||||
|
|
||||||
\chapter{Conclusion}
|
\chapter{Conclusion}
|
||||||
\label{sec:conclusion}
|
\label{sec:uniaxial_conclusion}
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||||||
|
|
||||||
In this study, a uniaxial model of the nano-active-stabilization-system has been tuned both from dynamical measurements (Section \ref{sec:micro_station_model}) and from disturbances measurements (Section \ref{sec:uniaxial_disturbances}).
|
In this study, a uniaxial model of the nano-active-stabilization-system has been tuned both from dynamical measurements (Section \ref{sec:micro_station_model}) and from disturbances measurements (Section \ref{sec:uniaxial_disturbances}).
|
||||||
|
|
||||||
@ -948,6 +916,5 @@ These controllers were shown to be robust to the change of sample's masses, and
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|||||||
It has been found that having a soft nano-hexapod makes the plant dynamics easier to control (because decoupled from the micro-station dynamics, see Section \ref{sec:uniaxial_support_compliance}) and requires less position feedback bandwidth to fulfill the requirements.
|
It has been found that having a soft nano-hexapod makes the plant dynamics easier to control (because decoupled from the micro-station dynamics, see Section \ref{sec:uniaxial_support_compliance}) and requires less position feedback bandwidth to fulfill the requirements.
|
||||||
The moderately stiff nano-hexapod (\(k_n = 1\,N/\mu m\)) is requiring a bit more position feedback bandwidth, but it still seems to give acceptable results.
|
The moderately stiff nano-hexapod (\(k_n = 1\,N/\mu m\)) is requiring a bit more position feedback bandwidth, but it still seems to give acceptable results.
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||||||
However, the stiff nano-hexapod is the most complex to control and gives the worst positioning performance.
|
However, the stiff nano-hexapod is the most complex to control and gives the worst positioning performance.
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||||||
|
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||||||
\printbibliography[heading=bibintoc,title={Bibliography}]
|
\printbibliography[heading=bibintoc,title={Bibliography}]
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\end{document}
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\end{document}
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||||||
|
@ -25,8 +25,6 @@
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% \renewcommand*{\bibfont}{\footnotesize}
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% \renewcommand*{\bibfont}{\footnotesize}
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\usepackage{fontawesome}
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\usepackage{caption}
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\usepackage{caption}
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\usepackage{subcaption}
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\usepackage{subcaption}
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