tdehaeze/nass-simscape
1
0
Fork 0
Code Issues Pull Requests Releases Wiki Activity

Add a figure and some explanation about the metrology

Browse Source
This commit is contained in:
Thomas Dehaeze 2019-12-11 10:29:06 +01:00
parent 57266d56f4
commit f517139655
3 changed files with 86 additions and 54 deletions
Show Stats Download Patch File Download Diff File Expand all files Collapse all files

BIN
metrology/figs/control-schematic-nass.png Normal file
View File

Binary file not shown.
Side by Side

After

Width:  |  Height:  |  Size: 55 KiB

116
metrology/index.html
View File

@ -3,7 +3,7 @@
"http://www.w3.org/TR/xhtml1/DTD/xhtml1-strict.dtd"> "http://www.w3.org/TR/xhtml1/DTD/xhtml1-strict.dtd">
<html xmlns="http://www.w3.org/1999/xhtml" lang="en" xml:lang="en"> <html xmlns="http://www.w3.org/1999/xhtml" lang="en" xml:lang="en">
<head> <head>
<!-- 2019-12-11 mer. 09:46 --> <!-- 2019-12-11 mer. 10:28 -->
<meta http-equiv="Content-Type" content="text/html;charset=utf-8" /> <meta http-equiv="Content-Type" content="text/html;charset=utf-8" />
<meta name="viewport" content="width=device-width, initial-scale=1" /> <meta name="viewport" content="width=device-width, initial-scale=1" />
<title>Metrology</title> <title>Metrology</title>
@ -283,25 +283,25 @@ for the JavaScript code in this tag.
<h2>Table of Contents</h2> <h2>Table of Contents</h2>
<div id="text-table-of-contents"> <div id="text-table-of-contents">
<ul> <ul>
<li><a href="#orga5a431b">1. How do we measure the position of the sample with respect to the granite</a></li> <li><a href="#orgca47132">1. How do we measure the position of the sample with respect to the granite</a></li>
<li><a href="#orgad7f8a4">2. Verify that the function to compute the reference pose is correct</a> <li><a href="#orgb0ca1ab">2. Verify that the function to compute the reference pose is correct</a>
<ul> <ul>
<li><a href="#org7de1029">2.1. Prepare the Simulation</a></li> <li><a href="#org824aee5">2.1. Prepare the Simulation</a></li>
<li><a href="#org20aaa6f">2.2. Verify that the pose of the sample is the same as the computed one</a></li> <li><a href="#org3530c48">2.2. Verify that the pose of the sample is the same as the computed one</a></li>
<li><a href="#orgfb913c2">2.3. Conclusion</a></li> <li><a href="#org40ffd7b">2.3. Conclusion</a></li>
</ul> </ul>
</li> </li>
<li><a href="#org0d81df7">3. Verify that the function to convert the position error in the frame fixed to the nano-hexapod is working</a> <li><a href="#org3fda22b">3. Verify that the function to convert the position error in the frame fixed to the nano-hexapod is working</a>
<ul> <ul>
<li><a href="#orgda08fb5">3.1. Prepare the Simulation</a></li> <li><a href="#orgd4dab89">3.1. Prepare the Simulation</a></li>
<li><a href="#org5f6b52f">3.2. Compute the wanted pose of the sample in the NASS Base from the metrology and the reference</a></li> <li><a href="#orge43864b">3.2. Compute the wanted pose of the sample in the NASS Base from the metrology and the reference</a></li>
<li><a href="#org2932e43">3.3. Verify that be imposing the error motion on the nano-hexapod, we indeed have zero error at the end</a></li> <li><a href="#orgfc9d145">3.3. Verify that be imposing the error motion on the nano-hexapod, we indeed have zero error at the end</a></li>
<li><a href="#org2512205">3.4. Conclusion</a></li> <li><a href="#org4293675">3.4. Conclusion</a></li>
</ul> </ul>
</li> </li>
<li><a href="#orgefbcdda">4. Functions</a> <li><a href="#org1449831">4. Functions</a>
<ul> <ul>
<li><a href="#org5f1a2be">4.1. computeReferencePose</a></li> <li><a href="#org3a6492a">4.1. computeReferencePose</a></li>
</ul> </ul>
</li> </li>
</ul> </ul>
@ -309,30 +309,50 @@ for the JavaScript code in this tag.
</div> </div>
<p> <p>
In this document, we suppose that we are able to measure perfectly the position of the sample with respect to the granite. The global measurement and control schematic is shown in figure <a href="#orgf9367e8">1</a>.
</p>
<div id="orgf9367e8" class="figure">
<p><img src="figs/control-schematic-nass.png" alt="control-schematic-nass.png" />
</p>
<p><span class="figure-number">Figure 1: </span>Global Control Schematic for the Station</p>
</div>
<p>
In this document, we develop and verify that the two green blocs are working.
</p>
<p>
We suppose that we are able to measure perfectly the position of the sample with respect to the granite.
This means that we do not care about the bloc "Compute Sample Position w.r.t. Granite" that makes the transformation from the interferometer measurements to the position of the sample.
We suppose that we can directly measure perfectly the position of the sample with respect to the granite.
</p>
<p>
Also, all the stages can be perfectly positioned. Also, all the stages can be perfectly positioned.
</p> </p>
<p> <p>
First, in section <a href="#orgbaf40ae">1</a>, is explained how the measurement of the position of the sample with respect to the granite is performed. First, in section <a href="#org485d3de">1</a>, is explained how the measurement of the position of the sample with respect to the granite is performed (using Simscape blocs).
</p> </p>
<p> <p>
In section <a href="#orgcb43c20">2</a>, we verify that the function developed to compute the wanted pose (translation and orientation) of the sample with respect to the granite can be determined from the wanted position of each stage (translation stage, tilt stage, spindle and micro-hexapod). In section <a href="#orgbbdea18">2</a>, we verify that the function developed to compute the wanted pose (translation and orientation) of the sample with respect to the granite can be determined from the wanted position of each stage (translation stage, tilt stage, spindle and micro-hexapod). This corresponds to the bloc "Compute Wanted Sample Position w.r.t. Granite" in figure <a href="#orgf9367e8">1</a>.
To do so, we impose a perfect displacement and all the stage, we perfectly measure the position of the sample with respect to the granite, and we verify that this measured position corresponds to the computed wanted pose of the sample. To do so, we impose a perfect displacement and all the stage, we perfectly measure the position of the sample with respect to the granite, and we verify that this measured position corresponds to the computed wanted pose of the sample.
</p> </p>
<p> <p>
Then, in section <a href="#org0414be5">3</a>, we introduce some positioning error in the position stages. Then, in section <a href="#orga5b1edf">3</a>, we introduce some positioning error in the micro-station's stages.
The positioning error of the sample expressed with respect to the granite frame (the one measured) is expressed in a frame connected to the NASS top platform. The positioning error of the sample expressed with respect to the granite frame (the one measured) is expressed in a frame connected to the NASS top platform (corresponding to the green bloc "Compute Sample Position Error w.r.t. NASS" in figure <a href="#orgf9367e8">1</a>).
Finally, we move the NASS such that it compensate for the positioning error that are expressed in the frame of the NASS, and we verify that the positioning error of the sample is well compensated. Then, we move the NASS such that it compensate for the positioning error that are expressed in the frame of the NASS, and we verify that the positioning error of the sample is well compensated.
</p> </p>
<div id="outline-container-orga5a431b" class="outline-2"> <div id="outline-container-orgca47132" class="outline-2">
<h2 id="orga5a431b"><span class="section-number-2">1</span> How do we measure the position of the sample with respect to the granite</h2> <h2 id="orgca47132"><span class="section-number-2">1</span> How do we measure the position of the sample with respect to the granite</h2>
<div class="outline-text-2" id="text-1"> <div class="outline-text-2" id="text-1">
<p> <p>
<a id="orgbaf40ae"></a> <a id="org485d3de"></a>
A transform sensor block gives the translation and orientation of the follower frame with respect to the base frame. A transform sensor block gives the translation and orientation of the follower frame with respect to the base frame.
</p> </p>
@ -358,18 +378,18 @@ We can then determine extract other orientation conventions such that Euler angl
</div> </div>
</div> </div>
<div id="outline-container-orgad7f8a4" class="outline-2"> <div id="outline-container-orgb0ca1ab" class="outline-2">
<h2 id="orgad7f8a4"><span class="section-number-2">2</span> Verify that the function to compute the reference pose is correct</h2> <h2 id="orgb0ca1ab"><span class="section-number-2">2</span> Verify that the function to compute the reference pose is correct</h2>
<div class="outline-text-2" id="text-2"> <div class="outline-text-2" id="text-2">
<p> <p>
<a id="orgcb43c20"></a> <a id="orgbbdea18"></a>
</p> </p>
<p> <p>
The goal here is to perfectly move the station and verify that there is no mismatch between the metrology measurement and the computation of the reference pose. The goal here is to perfectly move the station and verify that there is no mismatch between the metrology measurement and the computation of the reference pose.
</p> </p>
</div> </div>
<div id="outline-container-org7de1029" class="outline-3"> <div id="outline-container-org824aee5" class="outline-3">
<h3 id="org7de1029"><span class="section-number-3">2.1</span> Prepare the Simulation</h3> <h3 id="org824aee5"><span class="section-number-3">2.1</span> Prepare the Simulation</h3>
<div class="outline-text-3" id="text-2-1"> <div class="outline-text-3" id="text-2-1">
<p> <p>
We load the configuration. We load the configuration.
@ -454,8 +474,8 @@ And we run the simulation.
</div> </div>
</div> </div>
<div id="outline-container-org20aaa6f" class="outline-3"> <div id="outline-container-org3530c48" class="outline-3">
<h3 id="org20aaa6f"><span class="section-number-3">2.2</span> Verify that the pose of the sample is the same as the computed one</h3> <h3 id="org3530c48"><span class="section-number-3">2.2</span> Verify that the pose of the sample is the same as the computed one</h3>
<div class="outline-text-3" id="text-2-2"> <div class="outline-text-3" id="text-2-2">
<p> <p>
Let's denote: Let's denote:
@ -531,8 +551,8 @@ ans =
</div> </div>
</div> </div>
<div id="outline-container-orgfb913c2" class="outline-3"> <div id="outline-container-org40ffd7b" class="outline-3">
<h3 id="orgfb913c2"><span class="section-number-3">2.3</span> Conclusion</h3> <h3 id="org40ffd7b"><span class="section-number-3">2.3</span> Conclusion</h3>
<div class="outline-text-3" id="text-2-3"> <div class="outline-text-3" id="text-2-3">
<div class="important"> <div class="important">
<p> <p>
@ -545,11 +565,11 @@ Both the measurement and the theory gives the same result.
</div> </div>
</div> </div>
<div id="outline-container-org0d81df7" class="outline-2"> <div id="outline-container-org3fda22b" class="outline-2">
<h2 id="org0d81df7"><span class="section-number-2">3</span> Verify that the function to convert the position error in the frame fixed to the nano-hexapod is working</h2> <h2 id="org3fda22b"><span class="section-number-2">3</span> Verify that the function to convert the position error in the frame fixed to the nano-hexapod is working</h2>
<div class="outline-text-2" id="text-3"> <div class="outline-text-2" id="text-3">
<p> <p>
<a id="org0414be5"></a> <a id="orga5b1edf"></a>
</p> </p>
<p> <p>
We now introduce some positioning error in the stage. We now introduce some positioning error in the stage.
@ -560,8 +580,8 @@ This will induce a global positioning error of the sample with respect to the de
We want to verify that we are able to measure this positioning error and convert it in the frame attached to the Nano-hexapod. We want to verify that we are able to measure this positioning error and convert it in the frame attached to the Nano-hexapod.
</p> </p>
</div> </div>
<div id="outline-container-orgda08fb5" class="outline-3"> <div id="outline-container-orgd4dab89" class="outline-3">
<h3 id="orgda08fb5"><span class="section-number-3">3.1</span> Prepare the Simulation</h3> <h3 id="orgd4dab89"><span class="section-number-3">3.1</span> Prepare the Simulation</h3>
<div class="outline-text-3" id="text-3-1"> <div class="outline-text-3" id="text-3-1">
<p> <p>
We load the configuration. We load the configuration.
@ -644,8 +664,8 @@ And we run the simulation.
</div> </div>
</div> </div>
<div id="outline-container-org5f6b52f" class="outline-3"> <div id="outline-container-orge43864b" class="outline-3">
<h3 id="org5f6b52f"><span class="section-number-3">3.2</span> Compute the wanted pose of the sample in the NASS Base from the metrology and the reference</h3> <h3 id="orge43864b"><span class="section-number-3">3.2</span> Compute the wanted pose of the sample in the NASS Base from the metrology and the reference</h3>
<div class="outline-text-3" id="text-3-2"> <div class="outline-text-3" id="text-3-2">
<p> <p>
Now that we have introduced some positioning error, the computed wanted pose and the measured pose will not be the same. Now that we have introduced some positioning error, the computed wanted pose and the measured pose will not be the same.
@ -780,8 +800,8 @@ Rz = <span class="org-rainbow-delimiters-depth-1">[</span>cos<span class="org-ra
</div> </div>
</div> </div>
<div id="outline-container-org2932e43" class="outline-3"> <div id="outline-container-orgfc9d145" class="outline-3">
<h3 id="org2932e43"><span class="section-number-3">3.3</span> Verify that be imposing the error motion on the nano-hexapod, we indeed have zero error at the end</h3> <h3 id="orgfc9d145"><span class="section-number-3">3.3</span> Verify that be imposing the error motion on the nano-hexapod, we indeed have zero error at the end</h3>
<div class="outline-text-3" id="text-3-3"> <div class="outline-text-3" id="text-3-3">
<p> <p>
We now keep the wanted pose but we impose a displacement of the nano hexapod corresponding to the measured position error. We now keep the wanted pose but we impose a displacement of the nano hexapod corresponding to the measured position error.
@ -875,8 +895,8 @@ Verify that the pose error is small.
</div> </div>
</div> </div>
<div id="outline-container-org2512205" class="outline-3"> <div id="outline-container-org4293675" class="outline-3">
<h3 id="org2512205"><span class="section-number-3">3.4</span> Conclusion</h3> <h3 id="org4293675"><span class="section-number-3">3.4</span> Conclusion</h3>
<div class="outline-text-3" id="text-3-4"> <div class="outline-text-3" id="text-3-4">
<div class="important"> <div class="important">
<p> <p>
@ -888,15 +908,15 @@ Indeed, we are able to convert the position error in the frame of the NASS and t
</div> </div>
</div> </div>
<div id="outline-container-orgefbcdda" class="outline-2"> <div id="outline-container-org1449831" class="outline-2">
<h2 id="orgefbcdda"><span class="section-number-2">4</span> Functions</h2> <h2 id="org1449831"><span class="section-number-2">4</span> Functions</h2>
<div class="outline-text-2" id="text-4"> <div class="outline-text-2" id="text-4">
</div> </div>
<div id="outline-container-org5f1a2be" class="outline-3"> <div id="outline-container-org3a6492a" class="outline-3">
<h3 id="org5f1a2be"><span class="section-number-3">4.1</span> computeReferencePose</h3> <h3 id="org3a6492a"><span class="section-number-3">4.1</span> computeReferencePose</h3>
<div class="outline-text-3" id="text-4-1"> <div class="outline-text-3" id="text-4-1">
<p> <p>
<a id="orgc7ee76b"></a> <a id="org81bf206"></a>
</p> </p>
<p> <p>
@ -989,7 +1009,7 @@ This Matlab function is accessible <a href="src/computeReferencePose.m">here</a>
</div> </div>
<div id="postamble" class="status"> <div id="postamble" class="status">
<p class="author">Author: Dehaeze Thomas</p> <p class="author">Author: Dehaeze Thomas</p>
<p class="date">Created: 2019-12-11 mer. 09:46</p> <p class="date">Created: 2019-12-11 mer. 10:28</p>
<p class="validation"><a href="http://validator.w3.org/check?uri=referer">Validate</a></p> <p class="validation"><a href="http://validator.w3.org/check?uri=referer">Validate</a></p>
</div> </div>
</body> </body>

24
metrology/index.org
View File

@ -42,17 +42,28 @@
:END: :END:
* Introduction :ignore: * Introduction :ignore:
In this document, we suppose that we are able to measure perfectly the position of the sample with respect to the granite. The global measurement and control schematic is shown in figure [[fig:control-schematic-nass]].
#+name: fig:control-schematic-nass
#+caption: Global Control Schematic for the Station
[[file:figs/control-schematic-nass.png]]
In this document, we develop and verify that the two green blocs are working.
We suppose that we are able to measure perfectly the position of the sample with respect to the granite.
This means that we do not care about the bloc "Compute Sample Position w.r.t. Granite" that makes the transformation from the interferometer measurements to the position of the sample.
We suppose that we can directly measure perfectly the position of the sample with respect to the granite.
Also, all the stages can be perfectly positioned. Also, all the stages can be perfectly positioned.
First, in section [[sec:measurement_principle]], is explained how the measurement of the position of the sample with respect to the granite is performed. First, in section [[sec:measurement_principle]], is explained how the measurement of the position of the sample with respect to the granite is performed (using Simscape blocs).
In section [[sec:compute_reference]], we verify that the function developed to compute the wanted pose (translation and orientation) of the sample with respect to the granite can be determined from the wanted position of each stage (translation stage, tilt stage, spindle and micro-hexapod). In section [[sec:compute_reference]], we verify that the function developed to compute the wanted pose (translation and orientation) of the sample with respect to the granite can be determined from the wanted position of each stage (translation stage, tilt stage, spindle and micro-hexapod). This corresponds to the bloc "Compute Wanted Sample Position w.r.t. Granite" in figure [[fig:control-schematic-nass]].
To do so, we impose a perfect displacement and all the stage, we perfectly measure the position of the sample with respect to the granite, and we verify that this measured position corresponds to the computed wanted pose of the sample. To do so, we impose a perfect displacement and all the stage, we perfectly measure the position of the sample with respect to the granite, and we verify that this measured position corresponds to the computed wanted pose of the sample.
Then, in section [[sec:compute_pos_error]], we introduce some positioning error in the position stages. Then, in section [[sec:compute_pos_error]], we introduce some positioning error in the micro-station's stages.
The positioning error of the sample expressed with respect to the granite frame (the one measured) is expressed in a frame connected to the NASS top platform. The positioning error of the sample expressed with respect to the granite frame (the one measured) is expressed in a frame connected to the NASS top platform (corresponding to the green bloc "Compute Sample Position Error w.r.t. NASS" in figure [[fig:control-schematic-nass]]).
Finally, we move the NASS such that it compensate for the positioning error that are expressed in the frame of the NASS, and we verify that the positioning error of the sample is well compensated. Then, we move the NASS such that it compensate for the positioning error that are expressed in the frame of the NASS, and we verify that the positioning error of the sample is well compensated.
* How do we measure the position of the sample with respect to the granite * How do we measure the position of the sample with respect to the granite
<<sec:measurement_principle>> <<sec:measurement_principle>>
@ -445,6 +456,7 @@ Verify that the pose error is small.
Indeed, we are able to convert the position error in the frame of the NASS and then compensate these errors with the NASS. Indeed, we are able to convert the position error in the frame of the NASS and then compensate these errors with the NASS.
#+end_important #+end_important
* Verify that we are able to compensate the errors using the nano-hexapod :noexport:
* Functions * Functions
** computeReferencePose ** computeReferencePose
:PROPERTIES: :PROPERTIES: