Renamed the tomography experiment folder
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experiment_tomography/figs
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experiment_tomography/figs
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../figs
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<body>
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<div id="org-div-home-and-up">
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<a accesskey="h" href="../index.html"> UP </a>
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||||
|
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<a accesskey="H" href="../index.html"> HOME </a>
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</div><div id="content">
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||||
<h1 class="title">Tomography Experiment</h1>
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<div id="table-of-contents">
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<h2>Table of Contents</h2>
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<div id="text-table-of-contents">
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<ul>
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<li><a href="#orgab97c4b">1. Initialize Experiment</a></li>
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<li><a href="#org26c554f">2. Run the Tomography Experiment</a></li>
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<li><a href="#orgc507e1e">3. <span class="todo TODO">TODO</span> Tests on the transformation from reference to wanted position</a>
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<ul>
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<li><a href="#org4537a86">3.1. Wanted Position of the Sample with respect to the Granite</a></li>
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<li><a href="#org6c67ae5">3.2. Measured Position of the Sample with respect to the Granite</a></li>
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<li><a href="#org69e38aa">3.3. Positioning Error with respect to the Granite</a></li>
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<li><a href="#org5246d94">3.4. Position Error Expressed in the Nano-Hexapod Frame</a></li>
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</ul>
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</li>
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</ul>
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</div>
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</div>
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<div id="outline-container-orgab97c4b" class="outline-2">
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<h2 id="orgab97c4b"><span class="section-number-2">1</span> Initialize Experiment</h2>
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<div class="outline-text-2" id="text-1">
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<p>
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We first initialize all the stages.
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</p>
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<div class="org-src-container">
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<pre class="src src-matlab"><code>initializeGround<span class="org-rainbow-delimiters-depth-1">()</span>;</code>
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<code>initializeGranite<span class="org-rainbow-delimiters-depth-1">()</span>;</code>
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<code>initializeTy<span class="org-rainbow-delimiters-depth-1">()</span>;</code>
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<code>initializeRy<span class="org-rainbow-delimiters-depth-1">()</span>;</code>
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<code>initializeRz<span class="org-rainbow-delimiters-depth-1">()</span>;</code>
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<code>initializeMicroHexapod<span class="org-rainbow-delimiters-depth-1">()</span>;</code>
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<code>initializeAxisc<span class="org-rainbow-delimiters-depth-1">()</span>;</code>
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<code>initializeMirror<span class="org-rainbow-delimiters-depth-1">()</span>;</code>
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<code>initializeNanoHexapod<span class="org-rainbow-delimiters-depth-1">(</span>struct<span class="org-rainbow-delimiters-depth-2">(</span><span class="org-string">'actuator'</span>, <span class="org-string">'piezo'</span><span class="org-rainbow-delimiters-depth-2">)</span><span class="org-rainbow-delimiters-depth-1">)</span>;</code>
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<code>initializeSample<span class="org-rainbow-delimiters-depth-1">(</span>struct<span class="org-rainbow-delimiters-depth-2">(</span><span class="org-string">'mass'</span>, <span class="org-highlight-numbers-number">1</span><span class="org-rainbow-delimiters-depth-2">)</span><span class="org-rainbow-delimiters-depth-1">)</span>;</code>
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</pre>
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</div>
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<p>
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We initialize the reference path for all the stages.
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</p>
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<div class="org-src-container">
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<pre class="src src-matlab"><code>initializeReferences<span class="org-rainbow-delimiters-depth-1">(</span>struct<span class="org-rainbow-delimiters-depth-2">(</span><span class="org-string">'Rz_type'</span>, <span class="org-string">'rotating'</span>, <span class="org-string">'Rz_period'</span>, <span class="org-highlight-numbers-number">1</span><span class="org-rainbow-delimiters-depth-2">)</span><span class="org-rainbow-delimiters-depth-1">)</span>;</code>
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</pre>
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</div>
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<p>
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And we initialize the disturbances.
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</p>
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<div class="org-src-container">
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<pre class="src src-matlab"><code>initDisturbances<span class="org-rainbow-delimiters-depth-1">()</span>;</code>
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</pre>
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</div>
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</div>
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</div>
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||||
<div id="outline-container-org26c554f" class="outline-2">
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<h2 id="org26c554f"><span class="section-number-2">2</span> Run the Tomography Experiment</h2>
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||||
<div class="outline-text-2" id="text-2">
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||||
<p>
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||||
We first load the simulation configuration
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||||
</p>
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||||
<div class="org-src-container">
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||||
<pre class="src src-matlab"><code>load<span class="org-rainbow-delimiters-depth-1">(</span><span class="org-string">'simscape/conf_simscape.mat'</span><span class="org-rainbow-delimiters-depth-1">)</span>;</code>
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</pre>
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</div>
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||||
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||||
<div class="org-src-container">
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||||
<pre class="src src-matlab"><code><span class="org-matlab-simulink-keyword">set_param</span><span class="org-rainbow-delimiters-depth-1">(</span><span class="org-variable-name">conf_simscape</span>, <span class="org-string">'StopTime'</span>, '<span class="org-highlight-numbers-number">1</span><span class="org-type">'</span><span class="org-rainbow-delimiters-depth-1">)</span>;</code>
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</pre>
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</div>
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||||
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||||
<div class="org-src-container">
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||||
<pre class="src src-matlab"><code><span class="org-matlab-simulink-keyword">set_param</span><span class="org-rainbow-delimiters-depth-1">(</span><span class="org-string">'sim_nano_station_tomo'</span>, <span class="org-string">'SimulationCommand'</span>, <span class="org-string">'start'</span><span class="org-rainbow-delimiters-depth-1">)</span>;</code>
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||||
</pre>
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||||
</div>
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||||
</div>
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||||
</div>
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||||
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||||
<div id="outline-container-orgc507e1e" class="outline-2">
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||||
<h2 id="orgc507e1e"><span class="section-number-2">3</span> <span class="todo TODO">TODO</span> Tests on the transformation from reference to wanted position</h2>
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||||
<div class="outline-text-2" id="text-3">
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||||
<ul class="org-ul">
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||||
<li class="on"><code>[X]</code> Are the rotation matrix commutable? => no</li>
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||||
<li class="on"><code>[X]</code> How to express the measured rotation errors? => screw axis coordinate seems nice (used in Taghirad's book)</li>
|
||||
<li class="off"><code>[ ]</code> Should ask Veijo how he specifies the position of the Symetrie Hexapod</li>
|
||||
<li class="off"><code>[ ]</code> Create functions for all distinct part and then include that in Simulink</li>
|
||||
<li class="off"><code>[ ]</code> How the express the orientation error?</li>
|
||||
<li class="off"><code>[ ]</code> If we use screw coordinate, can we add/subtract them?</li>
|
||||
<li class="off"><code>[ ]</code> Do some simple tests to verify that the algorithm is working fine</li>
|
||||
</ul>
|
||||
|
||||
<blockquote>
|
||||
<p>
|
||||
Rx = [1 0 0;
|
||||
0 cos(t) -sin(t);
|
||||
0 sin(t) cos(t)];
|
||||
</p>
|
||||
|
||||
<p>
|
||||
Ry = [ cos(t) 0 sin(t);
|
||||
0 1 0;
|
||||
-sin(t) 0 cos(t)];
|
||||
</p>
|
||||
|
||||
<p>
|
||||
Rz = [cos(t) -sin(t) 0;
|
||||
sin(t) cos(t) 0;
|
||||
0 0 1];
|
||||
</p>
|
||||
</blockquote>
|
||||
|
||||
<p>
|
||||
Let's define the following frames:
|
||||
</p>
|
||||
<ul class="org-ul">
|
||||
<li>\(\{W\}\) the frame that is <b>fixed to the granite</b> and its origin at the theoretical meeting point between the X-ray and the spindle axis.</li>
|
||||
<li>\(\{S\}\) the frame <b>attached to the sample</b> (in reality attached to the top platform of the nano-hexapod) with its origin at 175mm above the top platform of the nano-hexapod.
|
||||
Its origin is \(O_S\).</li>
|
||||
<li>\(\{T\}\) the theoretical wanted frame that correspond to the wanted pose of the frame \(\{S\}\).
|
||||
\(\{T\}\) is computed from the wanted position of each stage. It is thus theoretical and does not correspond to a real position.
|
||||
The origin of \(T\) is \(O_T\) and is the wanted position of the sample.</li>
|
||||
</ul>
|
||||
|
||||
<p>
|
||||
Thus:
|
||||
</p>
|
||||
<ul class="org-ul">
|
||||
<li>the <b>measurement</b> of the position of the sample corresponds to \({}^W O_S = \begin{bmatrix} {}^WP_{x,m} & {}^WP_{y,m} & {}^WP_{z,m} \end{bmatrix}^T\) in translation and to \(\theta_m {}^W\bm{s}_m = \theta_m \cdot \begin{bmatrix} {}^Ws_{x,m} & {}^Ws_{y,m} & {}^Ws_{z,m} \end{bmatrix}^T\) in rotations</li>
|
||||
<li>the <b>wanted position</b> of the sample expressed w.r.t. the granite is \({}^W O_T = \begin{bmatrix} {}^WP_{x,r} & {}^WP_{y,r} & {}^WP_{z,r} \end{bmatrix}^T\) in translation and to \(\theta_r {}^W\bm{s}_r = \theta_r \cdot \begin{bmatrix} {}^Ws_{x,r} & {}^Ws_{y,r} & {}^Ws_{z,r} \end{bmatrix}^T\) in rotations</li>
|
||||
</ul>
|
||||
</div>
|
||||
|
||||
<div id="outline-container-org4537a86" class="outline-3">
|
||||
<h3 id="org4537a86"><span class="section-number-3">3.1</span> Wanted Position of the Sample with respect to the Granite</h3>
|
||||
<div class="outline-text-3" id="text-3-1">
|
||||
<p>
|
||||
Let's define the wanted position of each stage.
|
||||
</p>
|
||||
<div class="org-src-container">
|
||||
<pre class="src src-matlab"><code>Ty = <span class="org-highlight-numbers-number">1</span>; <span class="org-comment">% [m]</span></code>
|
||||
<code>Ry = <span class="org-highlight-numbers-number">3</span><span class="org-type">*</span><span class="org-constant">pi</span><span class="org-type">/</span><span class="org-highlight-numbers-number">180</span>; <span class="org-comment">% [rad]</span></code>
|
||||
<code>Rz = <span class="org-highlight-numbers-number">180</span><span class="org-type">*</span><span class="org-constant">pi</span><span class="org-type">/</span><span class="org-highlight-numbers-number">180</span>; <span class="org-comment">% [rad]</span></code>
|
||||
<code></code>
|
||||
<code><span class="org-comment">% Hexapod (first consider only translations)</span></code>
|
||||
<code>Thx = <span class="org-highlight-numbers-number">0</span>; <span class="org-comment">% [m]</span></code>
|
||||
<code>Thy = <span class="org-highlight-numbers-number">0</span>; <span class="org-comment">% [m]</span></code>
|
||||
<code>Thz = <span class="org-highlight-numbers-number">0</span>; <span class="org-comment">% [m]</span></code>
|
||||
</pre>
|
||||
</div>
|
||||
|
||||
<p>
|
||||
Now, we compute the corresponding wanted translation and rotation of the sample with respect to the granite frame \(\{W\}\).
|
||||
This corresponds to \({}^WO_T\) and \(\theta_m {}^Ws_m\).
|
||||
</p>
|
||||
|
||||
<p>
|
||||
To do so, we have to define the homogeneous transformation for each stage.
|
||||
</p>
|
||||
<div class="org-src-container">
|
||||
<pre class="src src-matlab"><code><span class="org-comment">% Translation Stage</span></code>
|
||||
<code>Rty = <span class="org-rainbow-delimiters-depth-1">[</span><span class="org-highlight-numbers-number">1</span> <span class="org-highlight-numbers-number">0</span> <span class="org-highlight-numbers-number">0</span> <span class="org-highlight-numbers-number">0</span>;</code>
|
||||
<code> <span class="org-highlight-numbers-number">0</span> <span class="org-highlight-numbers-number">1</span> <span class="org-highlight-numbers-number">0</span> Ty;</code>
|
||||
<code> <span class="org-highlight-numbers-number">0</span> <span class="org-highlight-numbers-number">0</span> <span class="org-highlight-numbers-number">1</span> <span class="org-highlight-numbers-number">0</span>;</code>
|
||||
<code> <span class="org-highlight-numbers-number">0</span> <span class="org-highlight-numbers-number">0</span> <span class="org-highlight-numbers-number">0</span> <span class="org-highlight-numbers-number">1</span><span class="org-rainbow-delimiters-depth-1">]</span>;</code>
|
||||
<code></code>
|
||||
<code><span class="org-comment">% Tilt Stage - Pure rotating aligned with Ob</span></code>
|
||||
<code>Rry = <span class="org-rainbow-delimiters-depth-1">[</span> cos<span class="org-rainbow-delimiters-depth-2">(</span>Ry<span class="org-rainbow-delimiters-depth-2">)</span> <span class="org-highlight-numbers-number">0</span> sin<span class="org-rainbow-delimiters-depth-2">(</span>Ry<span class="org-rainbow-delimiters-depth-2">)</span> <span class="org-highlight-numbers-number">0</span>;</code>
|
||||
<code> <span class="org-highlight-numbers-number">0</span> <span class="org-highlight-numbers-number">1</span> <span class="org-highlight-numbers-number">0</span> <span class="org-highlight-numbers-number">0</span>;</code>
|
||||
<code> <span class="org-type">-</span>sin<span class="org-rainbow-delimiters-depth-2">(</span>Ry<span class="org-rainbow-delimiters-depth-2">)</span> <span class="org-highlight-numbers-number">0</span> cos<span class="org-rainbow-delimiters-depth-2">(</span>Ry<span class="org-rainbow-delimiters-depth-2">)</span> <span class="org-highlight-numbers-number">0</span>;</code>
|
||||
<code> <span class="org-highlight-numbers-number">0</span> <span class="org-highlight-numbers-number">0</span> <span class="org-highlight-numbers-number">0</span> <span class="org-highlight-numbers-number">1</span><span class="org-rainbow-delimiters-depth-1">]</span>;</code>
|
||||
<code></code>
|
||||
<code><span class="org-comment">% Spindle - Rotation along the Z axis</span></code>
|
||||
<code>Rrz = <span class="org-rainbow-delimiters-depth-1">[</span>cos<span class="org-rainbow-delimiters-depth-2">(</span>Rz<span class="org-rainbow-delimiters-depth-2">)</span> <span class="org-type">-</span>sin<span class="org-rainbow-delimiters-depth-2">(</span>Rz<span class="org-rainbow-delimiters-depth-2">)</span> <span class="org-highlight-numbers-number">0</span> <span class="org-highlight-numbers-number">0</span> ;</code>
|
||||
<code> sin<span class="org-rainbow-delimiters-depth-2">(</span>Rz<span class="org-rainbow-delimiters-depth-2">)</span> cos<span class="org-rainbow-delimiters-depth-2">(</span>Rz<span class="org-rainbow-delimiters-depth-2">)</span> <span class="org-highlight-numbers-number">0</span> <span class="org-highlight-numbers-number">0</span> ;</code>
|
||||
<code> <span class="org-highlight-numbers-number">0</span> <span class="org-highlight-numbers-number">0</span> <span class="org-highlight-numbers-number">1</span> <span class="org-highlight-numbers-number">0</span> ;</code>
|
||||
<code> <span class="org-highlight-numbers-number">0</span> <span class="org-highlight-numbers-number">0</span> <span class="org-highlight-numbers-number">0</span> <span class="org-highlight-numbers-number">1</span> <span class="org-rainbow-delimiters-depth-1">]</span>;</code>
|
||||
<code></code>
|
||||
<code><span class="org-comment">% Micro-Hexapod (only rotations first)</span></code>
|
||||
<code>Rh = <span class="org-rainbow-delimiters-depth-1">[</span><span class="org-highlight-numbers-number">1</span> <span class="org-highlight-numbers-number">0</span> <span class="org-highlight-numbers-number">0</span> Thx ;</code>
|
||||
<code> <span class="org-highlight-numbers-number">0</span> <span class="org-highlight-numbers-number">1</span> <span class="org-highlight-numbers-number">0</span> Thy ;</code>
|
||||
<code> <span class="org-highlight-numbers-number">0</span> <span class="org-highlight-numbers-number">0</span> <span class="org-highlight-numbers-number">1</span> Thz ;</code>
|
||||
<code> <span class="org-highlight-numbers-number">0</span> <span class="org-highlight-numbers-number">0</span> <span class="org-highlight-numbers-number">0</span> <span class="org-highlight-numbers-number">1</span> <span class="org-rainbow-delimiters-depth-1">]</span>;</code>
|
||||
</pre>
|
||||
</div>
|
||||
|
||||
<p>
|
||||
We combine the individual homogeneous transformations into one homogeneous transformation for all the station.
|
||||
</p>
|
||||
<div class="org-src-container">
|
||||
<pre class="src src-matlab"><code>Ttot = Rty<span class="org-type">*</span>Rry<span class="org-type">*</span>Rrz<span class="org-type">*</span>Rh;</code>
|
||||
</pre>
|
||||
</div>
|
||||
|
||||
<p>
|
||||
Using this homogeneous transformation, we can compute the wanted position and orientation of the sample with respect to the granite.
|
||||
</p>
|
||||
<div class="org-src-container">
|
||||
<pre class="src src-matlab"><code>WOr = Ttot<span class="org-type">*</span><span class="org-rainbow-delimiters-depth-1">[</span><span class="org-highlight-numbers-number">0</span>;<span class="org-highlight-numbers-number">0</span>;<span class="org-highlight-numbers-number">0</span>;<span class="org-highlight-numbers-number">1</span><span class="org-rainbow-delimiters-depth-1">]</span>;</code>
|
||||
<code>WOr = WOr<span class="org-rainbow-delimiters-depth-1">(</span><span class="org-highlight-numbers-number">1</span><span class="org-type">:</span><span class="org-highlight-numbers-number">3</span><span class="org-rainbow-delimiters-depth-1">)</span>;</code>
|
||||
</pre>
|
||||
</div>
|
||||
|
||||
<div class="org-src-container">
|
||||
<pre class="src src-matlab"><code>thetar = acos<span class="org-rainbow-delimiters-depth-1">(</span><span class="org-rainbow-delimiters-depth-2">(</span>trace<span class="org-rainbow-delimiters-depth-3">(</span>Ttot<span class="org-rainbow-delimiters-depth-4">(</span><span class="org-highlight-numbers-number">1</span><span class="org-type">:</span><span class="org-highlight-numbers-number">3</span>, <span class="org-highlight-numbers-number">1</span><span class="org-type">:</span><span class="org-highlight-numbers-number">3</span><span class="org-rainbow-delimiters-depth-4">)</span><span class="org-rainbow-delimiters-depth-3">)</span><span class="org-type">-</span><span class="org-highlight-numbers-number">1</span><span class="org-rainbow-delimiters-depth-2">)</span><span class="org-type">/</span><span class="org-highlight-numbers-number">2</span><span class="org-rainbow-delimiters-depth-1">)</span></code>
|
||||
<code><span class="org-keyword">if</span> thetar <span class="org-type">==</span> <span class="org-highlight-numbers-number">0</span></code>
|
||||
<code> WSr = <span class="org-rainbow-delimiters-depth-1">[</span><span class="org-highlight-numbers-number">0</span>; <span class="org-highlight-numbers-number">0</span>; <span class="org-highlight-numbers-number">0</span><span class="org-rainbow-delimiters-depth-1">]</span>;</code>
|
||||
<code><span class="org-keyword">else</span></code>
|
||||
<code> <span class="org-rainbow-delimiters-depth-1">[</span>V, D<span class="org-rainbow-delimiters-depth-1">]</span> = eig<span class="org-rainbow-delimiters-depth-1">(</span>Ttot<span class="org-rainbow-delimiters-depth-2">(</span><span class="org-highlight-numbers-number">1</span><span class="org-type">:</span><span class="org-highlight-numbers-number">3</span>, <span class="org-highlight-numbers-number">1</span><span class="org-type">:</span><span class="org-highlight-numbers-number">3</span><span class="org-rainbow-delimiters-depth-2">)</span><span class="org-rainbow-delimiters-depth-1">)</span>;</code>
|
||||
<code> WSr = thetar<span class="org-type">*</span>V<span class="org-rainbow-delimiters-depth-1">(</span><span class="org-type">:</span>, abs<span class="org-rainbow-delimiters-depth-2">(</span>diag<span class="org-rainbow-delimiters-depth-3">(</span>D<span class="org-rainbow-delimiters-depth-3">)</span> <span class="org-type">-</span> <span class="org-highlight-numbers-number">1</span><span class="org-rainbow-delimiters-depth-2">)</span> <span class="org-type"><</span> <span class="org-constant">eps</span><span class="org-rainbow-delimiters-depth-2">(</span><span class="org-highlight-numbers-number">1</span><span class="org-rainbow-delimiters-depth-2">)</span><span class="org-rainbow-delimiters-depth-1">)</span>;</code>
|
||||
<code><span class="org-keyword">end</span></code>
|
||||
</pre>
|
||||
</div>
|
||||
|
||||
<div class="org-src-container">
|
||||
<pre class="src src-matlab"><code>WPr = <span class="org-rainbow-delimiters-depth-1">[</span>WOr ; WSr<span class="org-rainbow-delimiters-depth-1">]</span>;</code>
|
||||
</pre>
|
||||
</div>
|
||||
</div>
|
||||
</div>
|
||||
|
||||
<div id="outline-container-org6c67ae5" class="outline-3">
|
||||
<h3 id="org6c67ae5"><span class="section-number-3">3.2</span> Measured Position of the Sample with respect to the Granite</h3>
|
||||
<div class="outline-text-3" id="text-3-2">
|
||||
<p>
|
||||
The measurement of the position of the sample using the metrology system gives the position and orientation of the sample with respect to the granite.
|
||||
</p>
|
||||
<div class="org-src-container">
|
||||
<pre class="src src-matlab"><code><span class="org-comment">% Measurements: Xm, Ym, Zm, Rx, Ry, Rz</span></code>
|
||||
<code>Dxm = <span class="org-highlight-numbers-number">0</span>; <span class="org-comment">% [m]</span></code>
|
||||
<code>Dym = <span class="org-highlight-numbers-number">1</span>; <span class="org-comment">% [m]</span></code>
|
||||
<code>Dzm = <span class="org-highlight-numbers-number">0</span>; <span class="org-comment">% [m]</span></code>
|
||||
<code></code>
|
||||
<code>Rxm = <span class="org-highlight-numbers-number">0</span><span class="org-type">*</span><span class="org-constant">pi</span><span class="org-type">/</span><span class="org-highlight-numbers-number">180</span>; <span class="org-comment">% [rad]</span></code>
|
||||
<code>Rym = <span class="org-highlight-numbers-number">3</span><span class="org-type">*</span><span class="org-constant">pi</span><span class="org-type">/</span><span class="org-highlight-numbers-number">180</span>; <span class="org-comment">% [rad]</span></code>
|
||||
<code>Rzm = <span class="org-highlight-numbers-number">0</span><span class="org-type">*</span><span class="org-constant">pi</span><span class="org-type">/</span><span class="org-highlight-numbers-number">180</span>; <span class="org-comment">% [rad]</span></code>
|
||||
</pre>
|
||||
</div>
|
||||
|
||||
<p>
|
||||
Let's compute the corresponding orientation using screw axis.
|
||||
</p>
|
||||
<div class="org-src-container">
|
||||
<pre class="src src-matlab"><code>Trxm = <span class="org-rainbow-delimiters-depth-1">[</span><span class="org-highlight-numbers-number">1</span> <span class="org-highlight-numbers-number">0</span> <span class="org-highlight-numbers-number">0</span>;</code>
|
||||
<code> <span class="org-highlight-numbers-number">0</span> cos<span class="org-rainbow-delimiters-depth-2">(</span>Rxm<span class="org-rainbow-delimiters-depth-2">)</span> <span class="org-type">-</span>sin<span class="org-rainbow-delimiters-depth-2">(</span>Rxm<span class="org-rainbow-delimiters-depth-2">)</span>;</code>
|
||||
<code> <span class="org-highlight-numbers-number">0</span> sin<span class="org-rainbow-delimiters-depth-2">(</span>Rxm<span class="org-rainbow-delimiters-depth-2">)</span> cos<span class="org-rainbow-delimiters-depth-2">(</span>Rxm<span class="org-rainbow-delimiters-depth-2">)</span><span class="org-rainbow-delimiters-depth-1">]</span>;</code>
|
||||
<code>Trym = <span class="org-rainbow-delimiters-depth-1">[</span> cos<span class="org-rainbow-delimiters-depth-2">(</span>Rym<span class="org-rainbow-delimiters-depth-2">)</span> <span class="org-highlight-numbers-number">0</span> sin<span class="org-rainbow-delimiters-depth-2">(</span>Rym<span class="org-rainbow-delimiters-depth-2">)</span>;</code>
|
||||
<code> <span class="org-highlight-numbers-number">0</span> <span class="org-highlight-numbers-number">1</span> <span class="org-highlight-numbers-number">0</span>;</code>
|
||||
<code> <span class="org-type">-</span>sin<span class="org-rainbow-delimiters-depth-2">(</span>Rym<span class="org-rainbow-delimiters-depth-2">)</span> <span class="org-highlight-numbers-number">0</span> cos<span class="org-rainbow-delimiters-depth-2">(</span>Rym<span class="org-rainbow-delimiters-depth-2">)</span><span class="org-rainbow-delimiters-depth-1">]</span>;</code>
|
||||
<code>Trzm = <span class="org-rainbow-delimiters-depth-1">[</span>cos<span class="org-rainbow-delimiters-depth-2">(</span>Rzm<span class="org-rainbow-delimiters-depth-2">)</span> <span class="org-type">-</span>sin<span class="org-rainbow-delimiters-depth-2">(</span>Rzm<span class="org-rainbow-delimiters-depth-2">)</span> <span class="org-highlight-numbers-number">0</span>;</code>
|
||||
<code> sin<span class="org-rainbow-delimiters-depth-2">(</span>Rzm<span class="org-rainbow-delimiters-depth-2">)</span> cos<span class="org-rainbow-delimiters-depth-2">(</span>Rzm<span class="org-rainbow-delimiters-depth-2">)</span> <span class="org-highlight-numbers-number">0</span>;</code>
|
||||
<code> <span class="org-highlight-numbers-number">0</span> <span class="org-highlight-numbers-number">0</span> <span class="org-highlight-numbers-number">1</span><span class="org-rainbow-delimiters-depth-1">]</span>;</code>
|
||||
<code></code>
|
||||
<code>STw = <span class="org-rainbow-delimiters-depth-1">[</span><span class="org-rainbow-delimiters-depth-2">[</span> Trym<span class="org-type">*</span>Trxm<span class="org-type">*</span>Trzm , <span class="org-rainbow-delimiters-depth-3">[</span>Dxm; Dym; Dzm<span class="org-rainbow-delimiters-depth-3">]</span><span class="org-rainbow-delimiters-depth-2">]</span>; <span class="org-highlight-numbers-number">0</span> <span class="org-highlight-numbers-number">0</span> <span class="org-highlight-numbers-number">0</span> <span class="org-highlight-numbers-number">1</span><span class="org-rainbow-delimiters-depth-1">]</span>;</code>
|
||||
</pre>
|
||||
</div>
|
||||
|
||||
<p>
|
||||
We then obtain the orientation measurement in the form of screw coordinate \(\theta_m ({}^Ws_{x,m},\ {}^Ws_{y,m},\ {}^Ws_{z,m})^T\) where:
|
||||
</p>
|
||||
<ul class="org-ul">
|
||||
<li>\(\theta_m = \cos^{-1} \frac{\text{Tr}(R) - 1}{2}\)</li>
|
||||
<li>\({}^W\bm{s}_m\) is the eigen vector of the rotation matrix \(R\) corresponding to the eigen value \(\lambda = 1\)</li>
|
||||
</ul>
|
||||
|
||||
<div class="org-src-container">
|
||||
<pre class="src src-matlab"><code>thetam = acos<span class="org-rainbow-delimiters-depth-1">(</span><span class="org-rainbow-delimiters-depth-2">(</span>trace<span class="org-rainbow-delimiters-depth-3">(</span>STw<span class="org-rainbow-delimiters-depth-4">(</span><span class="org-highlight-numbers-number">1</span><span class="org-type">:</span><span class="org-highlight-numbers-number">3</span>, <span class="org-highlight-numbers-number">1</span><span class="org-type">:</span><span class="org-highlight-numbers-number">3</span><span class="org-rainbow-delimiters-depth-4">)</span><span class="org-rainbow-delimiters-depth-3">)</span><span class="org-type">-</span><span class="org-highlight-numbers-number">1</span><span class="org-rainbow-delimiters-depth-2">)</span><span class="org-type">/</span><span class="org-highlight-numbers-number">2</span><span class="org-rainbow-delimiters-depth-1">)</span>; <span class="org-comment">% [rad]</span></code>
|
||||
<code><span class="org-keyword">if</span> thetam <span class="org-type">==</span> <span class="org-highlight-numbers-number">0</span></code>
|
||||
<code> WSm = <span class="org-rainbow-delimiters-depth-1">[</span><span class="org-highlight-numbers-number">0</span>; <span class="org-highlight-numbers-number">0</span>; <span class="org-highlight-numbers-number">0</span><span class="org-rainbow-delimiters-depth-1">]</span>;</code>
|
||||
<code><span class="org-keyword">else</span></code>
|
||||
<code> <span class="org-rainbow-delimiters-depth-1">[</span>V, D<span class="org-rainbow-delimiters-depth-1">]</span> = eig<span class="org-rainbow-delimiters-depth-1">(</span>STw<span class="org-rainbow-delimiters-depth-2">(</span><span class="org-highlight-numbers-number">1</span><span class="org-type">:</span><span class="org-highlight-numbers-number">3</span>, <span class="org-highlight-numbers-number">1</span><span class="org-type">:</span><span class="org-highlight-numbers-number">3</span><span class="org-rainbow-delimiters-depth-2">)</span><span class="org-rainbow-delimiters-depth-1">)</span>;</code>
|
||||
<code> WSm = thetam<span class="org-type">*</span>V<span class="org-rainbow-delimiters-depth-1">(</span><span class="org-type">:</span>, abs<span class="org-rainbow-delimiters-depth-2">(</span>diag<span class="org-rainbow-delimiters-depth-3">(</span>D<span class="org-rainbow-delimiters-depth-3">)</span> <span class="org-type">-</span> <span class="org-highlight-numbers-number">1</span><span class="org-rainbow-delimiters-depth-2">)</span> <span class="org-type"><</span> <span class="org-constant">eps</span><span class="org-rainbow-delimiters-depth-2">(</span><span class="org-highlight-numbers-number">1</span><span class="org-rainbow-delimiters-depth-2">)</span><span class="org-rainbow-delimiters-depth-1">)</span>;</code>
|
||||
<code><span class="org-keyword">end</span></code>
|
||||
</pre>
|
||||
</div>
|
||||
|
||||
<div class="org-src-container">
|
||||
<pre class="src src-matlab"><code>WPm = <span class="org-rainbow-delimiters-depth-1">[</span>Dxm ; Dym ; Dzm ; WSm<span class="org-rainbow-delimiters-depth-1">]</span>;</code>
|
||||
</pre>
|
||||
</div>
|
||||
</div>
|
||||
</div>
|
||||
|
||||
<div id="outline-container-org69e38aa" class="outline-3">
|
||||
<h3 id="org69e38aa"><span class="section-number-3">3.3</span> Positioning Error with respect to the Granite</h3>
|
||||
<div class="outline-text-3" id="text-3-3">
|
||||
<p>
|
||||
The wanted position expressed with respect to the granite is \({}^WO_T\) and the measured position with respect to the granite is \({}^WO_S\), thus the <b>position error</b> expressed in \(\{W\}\) is
|
||||
\[ {}^W E = {}^W O_T - {}^W O_S \]
|
||||
The same is true for rotations:
|
||||
\[ \theta_\epsilon {}^W\bm{s}_\epsilon = \theta_r {}^W\bm{s}_r - \theta_m {}^W\bm{s}_m \]
|
||||
</p>
|
||||
|
||||
<div class="org-src-container">
|
||||
<pre class="src src-matlab"><code>WPe = WPr <span class="org-type">-</span> WPm;</code>
|
||||
</pre>
|
||||
</div>
|
||||
|
||||
<blockquote>
|
||||
<p>
|
||||
Now we want to express this error in a frame attached to the <b>base of the nano-hexapod</b> with its origin at the same point where the Jacobian of the nano-hexapod is computed (175mm above the top platform + 90mm of total height of the nano-hexapod).
|
||||
</p>
|
||||
|
||||
<p>
|
||||
Or maybe should we want to express this error with respect to the <b>top platform of the nano-hexapod</b>?
|
||||
We are measuring the position of the top-platform, and we don't know exactly the position of the bottom platform.
|
||||
We could compute the position of the bottom platform in two ways:
|
||||
</p>
|
||||
<ul class="org-ul">
|
||||
<li>from the encoders of each stage</li>
|
||||
<li>from the measurement of the nano-hexapod top platform + the internal metrology in the nano-hexapod (capacitive sensors e.g)</li>
|
||||
</ul>
|
||||
|
||||
<p>
|
||||
A third option is to say that the maximum stroke of the nano-hexapod is so small that the error should no change to much by the change of base.
|
||||
</p>
|
||||
</blockquote>
|
||||
</div>
|
||||
</div>
|
||||
|
||||
<div id="outline-container-org5246d94" class="outline-3">
|
||||
<h3 id="org5246d94"><span class="section-number-3">3.4</span> Position Error Expressed in the Nano-Hexapod Frame</h3>
|
||||
<div class="outline-text-3" id="text-3-4">
|
||||
<p>
|
||||
We now want the position error to be expressed in \(\{S\}\) (the frame attach to the sample):
|
||||
\[ {}^S E = {}^S T_W \cdot {}^W E \]
|
||||
</p>
|
||||
|
||||
<p>
|
||||
Thus we need to compute the homogeneous transformation \({}^ST_W\).
|
||||
Fortunately, this homogeneous transformation can be computed from the measurement of the sample position and orientation with respect to the granite.
|
||||
</p>
|
||||
<div class="org-src-container">
|
||||
<pre class="src src-matlab"><code>Trxm = <span class="org-rainbow-delimiters-depth-1">[</span><span class="org-highlight-numbers-number">1</span> <span class="org-highlight-numbers-number">0</span> <span class="org-highlight-numbers-number">0</span>;</code>
|
||||
<code> <span class="org-highlight-numbers-number">0</span> cos<span class="org-rainbow-delimiters-depth-2">(</span>Rxm<span class="org-rainbow-delimiters-depth-2">)</span> <span class="org-type">-</span>sin<span class="org-rainbow-delimiters-depth-2">(</span>Rxm<span class="org-rainbow-delimiters-depth-2">)</span>;</code>
|
||||
<code> <span class="org-highlight-numbers-number">0</span> sin<span class="org-rainbow-delimiters-depth-2">(</span>Rxm<span class="org-rainbow-delimiters-depth-2">)</span> cos<span class="org-rainbow-delimiters-depth-2">(</span>Rxm<span class="org-rainbow-delimiters-depth-2">)</span><span class="org-rainbow-delimiters-depth-1">]</span>;</code>
|
||||
<code>Trym = <span class="org-rainbow-delimiters-depth-1">[</span> cos<span class="org-rainbow-delimiters-depth-2">(</span>Rym<span class="org-rainbow-delimiters-depth-2">)</span> <span class="org-highlight-numbers-number">0</span> sin<span class="org-rainbow-delimiters-depth-2">(</span>Rym<span class="org-rainbow-delimiters-depth-2">)</span>;</code>
|
||||
<code> <span class="org-highlight-numbers-number">0</span> <span class="org-highlight-numbers-number">1</span> <span class="org-highlight-numbers-number">0</span>;</code>
|
||||
<code> <span class="org-type">-</span>sin<span class="org-rainbow-delimiters-depth-2">(</span>Rym<span class="org-rainbow-delimiters-depth-2">)</span> <span class="org-highlight-numbers-number">0</span> cos<span class="org-rainbow-delimiters-depth-2">(</span>Rym<span class="org-rainbow-delimiters-depth-2">)</span><span class="org-rainbow-delimiters-depth-1">]</span>;</code>
|
||||
<code>Trzm = <span class="org-rainbow-delimiters-depth-1">[</span>cos<span class="org-rainbow-delimiters-depth-2">(</span>Rzm<span class="org-rainbow-delimiters-depth-2">)</span> <span class="org-type">-</span>sin<span class="org-rainbow-delimiters-depth-2">(</span>Rzm<span class="org-rainbow-delimiters-depth-2">)</span> <span class="org-highlight-numbers-number">0</span>;</code>
|
||||
<code> sin<span class="org-rainbow-delimiters-depth-2">(</span>Rzm<span class="org-rainbow-delimiters-depth-2">)</span> cos<span class="org-rainbow-delimiters-depth-2">(</span>Rzm<span class="org-rainbow-delimiters-depth-2">)</span> <span class="org-highlight-numbers-number">0</span>;</code>
|
||||
<code> <span class="org-highlight-numbers-number">0</span> <span class="org-highlight-numbers-number">0</span> <span class="org-highlight-numbers-number">1</span><span class="org-rainbow-delimiters-depth-1">]</span>;</code>
|
||||
<code></code>
|
||||
<code>STw = <span class="org-rainbow-delimiters-depth-1">[</span><span class="org-rainbow-delimiters-depth-2">[</span> Trym<span class="org-type">*</span>Trxm<span class="org-type">*</span>Trzm , <span class="org-rainbow-delimiters-depth-3">[</span>Dxm; Dym; Dzm<span class="org-rainbow-delimiters-depth-3">]</span><span class="org-rainbow-delimiters-depth-2">]</span>; <span class="org-highlight-numbers-number">0</span> <span class="org-highlight-numbers-number">0</span> <span class="org-highlight-numbers-number">0</span> <span class="org-highlight-numbers-number">1</span><span class="org-rainbow-delimiters-depth-1">]</span>;</code>
|
||||
</pre>
|
||||
</div>
|
||||
|
||||
<p>
|
||||
Translation Error.
|
||||
</p>
|
||||
<div class="org-src-container">
|
||||
<pre class="src src-matlab"><code>SEm = STw <span class="org-type">*</span> <span class="org-rainbow-delimiters-depth-1">[</span>WPe<span class="org-rainbow-delimiters-depth-2">(</span><span class="org-highlight-numbers-number">1</span><span class="org-type">:</span><span class="org-highlight-numbers-number">3</span><span class="org-rainbow-delimiters-depth-2">)</span>; <span class="org-highlight-numbers-number">1</span><span class="org-rainbow-delimiters-depth-1">]</span>;</code>
|
||||
<code>SEm = SEm<span class="org-rainbow-delimiters-depth-1">(</span><span class="org-highlight-numbers-number">1</span><span class="org-type">:</span><span class="org-highlight-numbers-number">3</span><span class="org-rainbow-delimiters-depth-1">)</span>;</code>
|
||||
</pre>
|
||||
</div>
|
||||
|
||||
<p>
|
||||
Rotation Error.
|
||||
</p>
|
||||
<div class="org-src-container">
|
||||
<pre class="src src-matlab"><code>SEr = STw <span class="org-type">*</span> <span class="org-rainbow-delimiters-depth-1">[</span>WPe<span class="org-rainbow-delimiters-depth-2">(</span><span class="org-highlight-numbers-number">4</span><span class="org-type">:</span><span class="org-highlight-numbers-number">6</span><span class="org-rainbow-delimiters-depth-2">)</span>; <span class="org-highlight-numbers-number">0</span><span class="org-rainbow-delimiters-depth-1">]</span>;</code>
|
||||
<code>SEr = SEr<span class="org-rainbow-delimiters-depth-1">(</span><span class="org-highlight-numbers-number">1</span><span class="org-type">:</span><span class="org-highlight-numbers-number">3</span><span class="org-rainbow-delimiters-depth-1">)</span>;</code>
|
||||
</pre>
|
||||
</div>
|
||||
|
||||
<div class="org-src-container">
|
||||
<pre class="src src-matlab"><code>Etot = <span class="org-rainbow-delimiters-depth-1">[</span>SEm ; SEr<span class="org-rainbow-delimiters-depth-1">]</span></code>
|
||||
</pre>
|
||||
</div>
|
||||
</div>
|
||||
</div>
|
||||
</div>
|
||||
</div>
|
||||
<div id="postamble" class="status">
|
||||
<p class="author">Author: Dehaeze Thomas</p>
|
||||
<p class="date">Created: 2019-12-04 mer. 21:55</p>
|
||||
<p class="validation"><a href="http://validator.w3.org/check?uri=referer">Validate</a></p>
|
||||
</div>
|
||||
</body>
|
||||
</html>
|
||||
346
experiment_tomography/index.org
Normal file
346
experiment_tomography/index.org
Normal file
@@ -0,0 +1,346 @@
|
||||
#+TITLE: Tomography Experiment
|
||||
:DRAWER:
|
||||
#+STARTUP: overview
|
||||
|
||||
#+LANGUAGE: en
|
||||
#+EMAIL: dehaeze.thomas@gmail.com
|
||||
#+AUTHOR: Dehaeze Thomas
|
||||
|
||||
#+HTML_LINK_HOME: ../index.html
|
||||
#+HTML_LINK_UP: ../index.html
|
||||
|
||||
# #+HTML_HEAD: <link rel="stylesheet" type="text/css" href="../css/htmlize.css"/>
|
||||
# #+HTML_HEAD: <link rel="stylesheet" type="text/css" href="../css/readtheorg.css"/>
|
||||
# #+HTML_HEAD: <link rel="stylesheet" type="text/css" href="../css/zenburn.css"/>
|
||||
# #+HTML_HEAD: <script type="text/javascript" src="../js/jquery.min.js"></script>
|
||||
# #+HTML_HEAD: <script type="text/javascript" src="../js/bootstrap.min.js"></script>
|
||||
# #+HTML_HEAD: <script type="text/javascript" src="../js/jquery.stickytableheaders.min.js"></script>
|
||||
# #+HTML_HEAD: <script type="text/javascript" src="../js/readtheorg.js"></script>
|
||||
|
||||
#+HTML_MATHJAX: align: center tagside: right font: TeX
|
||||
|
||||
#+PROPERTY: header-args:matlab :session *MATLAB*
|
||||
#+PROPERTY: header-args:matlab+ :comments org
|
||||
#+PROPERTY: header-args:matlab+ :results none
|
||||
#+PROPERTY: header-args:matlab+ :exports both
|
||||
#+PROPERTY: header-args:matlab+ :eval no-export
|
||||
#+PROPERTY: header-args:matlab+ :output-dir figs
|
||||
#+PROPERTY: header-args:matlab+ :tangle matlab/modal_frf_coh.m
|
||||
#+PROPERTY: header-args:matlab+ :mkdirp yes
|
||||
|
||||
#+PROPERTY: header-args:shell :eval no-export
|
||||
|
||||
#+PROPERTY: header-args:latex :headers '("\\usepackage{tikz}" "\\usepackage{import}" "\\import{$HOME/Cloud/thesis/latex/}{config.tex}")
|
||||
#+PROPERTY: header-args:latex+ :imagemagick t :fit yes
|
||||
#+PROPERTY: header-args:latex+ :iminoptions -scale 100% -density 150
|
||||
#+PROPERTY: header-args:latex+ :imoutoptions -quality 100
|
||||
#+PROPERTY: header-args:latex+ :results raw replace :buffer no
|
||||
#+PROPERTY: header-args:latex+ :eval no-export
|
||||
#+PROPERTY: header-args:latex+ :exports both
|
||||
#+PROPERTY: header-args:latex+ :mkdirp yes
|
||||
#+PROPERTY: header-args:latex+ :output-dir figs
|
||||
:END:
|
||||
|
||||
* Matlab Init :noexport:ignore:
|
||||
#+begin_src matlab :tangle no :exports none :results silent :noweb yes :var current_dir=(file-name-directory buffer-file-name)
|
||||
<<matlab-dir>>
|
||||
#+end_src
|
||||
|
||||
#+begin_src matlab :exports none :results silent :noweb yes
|
||||
<<matlab-init>>
|
||||
#+end_src
|
||||
|
||||
#+begin_src matlab :tangle no
|
||||
simulinkproject('../');
|
||||
#+end_src
|
||||
|
||||
#+begin_src matlab
|
||||
open 'simscape/sim_nano_station_tomo.slx'
|
||||
#+end_src
|
||||
|
||||
* Initialize Experiment
|
||||
We first initialize all the stages.
|
||||
#+begin_src matlab
|
||||
initializeGround();
|
||||
initializeGranite();
|
||||
initializeTy();
|
||||
initializeRy();
|
||||
initializeRz();
|
||||
initializeMicroHexapod();
|
||||
initializeAxisc();
|
||||
initializeMirror();
|
||||
initializeNanoHexapod(struct('actuator', 'piezo'));
|
||||
initializeSample(struct('mass', 1));
|
||||
#+end_src
|
||||
|
||||
We initialize the reference path for all the stages.
|
||||
#+begin_src matlab
|
||||
initializeReferences(struct('Rz_type', 'rotating', 'Rz_period', 1));
|
||||
#+end_src
|
||||
|
||||
And we initialize the disturbances.
|
||||
#+begin_src matlab
|
||||
initDisturbances();
|
||||
#+end_src
|
||||
|
||||
* Run the Tomography Experiment
|
||||
We first load the simulation configuration
|
||||
#+begin_src matlab
|
||||
load('mat/conf_simscape.mat');
|
||||
#+end_src
|
||||
|
||||
#+begin_src matlab
|
||||
set_param(conf_simscape, 'StopTime', '1');
|
||||
#+end_src
|
||||
|
||||
#+begin_src matlab
|
||||
set_param('sim_nano_station_tomo', 'SimulationCommand', 'start');
|
||||
#+end_src
|
||||
|
||||
* TODO Tests on the transformation from reference to wanted position
|
||||
- [X] Are the rotation matrix commutable? => no
|
||||
- [X] How to express the measured rotation errors? => screw axis coordinate seems nice (used in Taghirad's book)
|
||||
- [ ] Should ask Veijo how he specifies the position of the Symetrie Hexapod
|
||||
- [ ] Create functions for all distinct part and then include that in Simulink
|
||||
- [ ] How the express the orientation error?
|
||||
- [ ] If we use screw coordinate, can we add/subtract them?
|
||||
- [ ] Do some simple tests to verify that the algorithm is working fine
|
||||
|
||||
** Introduction :ignore:
|
||||
#+begin_quote
|
||||
Rx = [1 0 0;
|
||||
0 cos(t) -sin(t);
|
||||
0 sin(t) cos(t)];
|
||||
|
||||
Ry = [ cos(t) 0 sin(t);
|
||||
0 1 0;
|
||||
-sin(t) 0 cos(t)];
|
||||
|
||||
Rz = [cos(t) -sin(t) 0;
|
||||
sin(t) cos(t) 0;
|
||||
0 0 1];
|
||||
#+end_quote
|
||||
|
||||
Let's define the following frames:
|
||||
- $\{W\}$ the frame that is *fixed to the granite* and its origin at the theoretical meeting point between the X-ray and the spindle axis.
|
||||
- $\{S\}$ the frame *attached to the sample* (in reality attached to the top platform of the nano-hexapod) with its origin at 175mm above the top platform of the nano-hexapod.
|
||||
Its origin is $O_S$.
|
||||
- $\{T\}$ the theoretical wanted frame that correspond to the wanted pose of the frame $\{S\}$.
|
||||
$\{T\}$ is computed from the wanted position of each stage. It is thus theoretical and does not correspond to a real position.
|
||||
The origin of $T$ is $O_T$ and is the wanted position of the sample.
|
||||
|
||||
Thus:
|
||||
- the *measurement* of the position of the sample corresponds to ${}^W O_S = \begin{bmatrix} {}^WP_{x,m} & {}^WP_{y,m} & {}^WP_{z,m} \end{bmatrix}^T$ in translation and to $\theta_m {}^W\bm{s}_m = \theta_m \cdot \begin{bmatrix} {}^Ws_{x,m} & {}^Ws_{y,m} & {}^Ws_{z,m} \end{bmatrix}^T$ in rotations
|
||||
- the *wanted position* of the sample expressed w.r.t. the granite is ${}^W O_T = \begin{bmatrix} {}^WP_{x,r} & {}^WP_{y,r} & {}^WP_{z,r} \end{bmatrix}^T$ in translation and to $\theta_r {}^W\bm{s}_r = \theta_r \cdot \begin{bmatrix} {}^Ws_{x,r} & {}^Ws_{y,r} & {}^Ws_{z,r} \end{bmatrix}^T$ in rotations
|
||||
|
||||
** Wanted Position of the Sample with respect to the Granite
|
||||
Let's define the wanted position of each stage.
|
||||
#+begin_src matlab
|
||||
Ty = 0; % [m]
|
||||
Ry = 3*pi/180; % [rad]
|
||||
Rz = 180*pi/180; % [rad]
|
||||
|
||||
% Hexapod (first consider only translations)
|
||||
Thx = 0; % [m]
|
||||
Thy = 0; % [m]
|
||||
Thz = 0; % [m]
|
||||
#+end_src
|
||||
|
||||
Now, we compute the corresponding wanted translation and rotation of the sample with respect to the granite frame $\{W\}$.
|
||||
This corresponds to ${}^WO_T$ and $\theta_m {}^Ws_m$.
|
||||
|
||||
To do so, we have to define the homogeneous transformation for each stage.
|
||||
#+begin_src matlab
|
||||
% Translation Stage
|
||||
Rty = [1 0 0 0;
|
||||
0 1 0 Ty;
|
||||
0 0 1 0;
|
||||
0 0 0 1];
|
||||
|
||||
% Tilt Stage - Pure rotating aligned with Ob
|
||||
Rry = [ cos(Ry) 0 sin(Ry) 0;
|
||||
0 1 0 0;
|
||||
-sin(Ry) 0 cos(Ry) 0;
|
||||
0 0 0 1];
|
||||
|
||||
% Spindle - Rotation along the Z axis
|
||||
Rrz = [cos(Rz) -sin(Rz) 0 0 ;
|
||||
sin(Rz) cos(Rz) 0 0 ;
|
||||
0 0 1 0 ;
|
||||
0 0 0 1 ];
|
||||
|
||||
% Micro-Hexapod (only rotations first)
|
||||
Rh = [1 0 0 Thx ;
|
||||
0 1 0 Thy ;
|
||||
0 0 1 Thz ;
|
||||
0 0 0 1 ];
|
||||
#+end_src
|
||||
|
||||
We combine the individual homogeneous transformations into one homogeneous transformation for all the station.
|
||||
#+begin_src matlab
|
||||
Ttot = Rty*Rry*Rrz*Rh;
|
||||
#+end_src
|
||||
|
||||
Using this homogeneous transformation, we can compute the wanted position and orientation of the sample with respect to the granite.
|
||||
|
||||
Translation.
|
||||
#+begin_src matlab
|
||||
WOr = Ttot*[0;0;0;1];
|
||||
WOr = WOr(1:3);
|
||||
#+end_src
|
||||
|
||||
Rotation.
|
||||
#+begin_src matlab
|
||||
thetar = acos((trace(Ttot(1:3, 1:3))-1)/2)
|
||||
if thetar == 0
|
||||
WSr = [0; 0; 0];
|
||||
else
|
||||
[V, D] = eig(Ttot(1:3, 1:3));
|
||||
WSr = thetar*V(:, abs(diag(D) - 1) < eps(1));
|
||||
end
|
||||
#+end_src
|
||||
|
||||
#+begin_src matlab
|
||||
WPr = [WOr ; WSr];
|
||||
#+end_src
|
||||
|
||||
** Measured Position of the Sample with respect to the Granite
|
||||
The measurement of the position of the sample using the metrology system gives the position and orientation of the sample with respect to the granite.
|
||||
#+begin_src matlab
|
||||
% Measurements: Xm, Ym, Zm, Rx, Ry, Rz
|
||||
Dxm = 0; % [m]
|
||||
Dym = 0; % [m]
|
||||
Dzm = 0; % [m]
|
||||
|
||||
Rxm = 0*pi/180; % [rad]
|
||||
Rym = 0*pi/180; % [rad]
|
||||
Rzm = 180*pi/180; % [rad]
|
||||
#+end_src
|
||||
|
||||
Let's compute the corresponding orientation using screw axis.
|
||||
#+begin_src matlab
|
||||
Trxm = [1 0 0;
|
||||
0 cos(Rxm) -sin(Rxm);
|
||||
0 sin(Rxm) cos(Rxm)];
|
||||
Trym = [ cos(Rym) 0 sin(Rym);
|
||||
0 1 0;
|
||||
-sin(Rym) 0 cos(Rym)];
|
||||
Trzm = [cos(Rzm) -sin(Rzm) 0;
|
||||
sin(Rzm) cos(Rzm) 0;
|
||||
0 0 1];
|
||||
|
||||
STw = [[ Trym*Trxm*Trzm , [Dxm; Dym; Dzm]]; 0 0 0 1];
|
||||
#+end_src
|
||||
|
||||
We then obtain the orientation measurement in the form of screw coordinate $\theta_m ({}^Ws_{x,m},\ {}^Ws_{y,m},\ {}^Ws_{z,m})^T$ where:
|
||||
- $\theta_m = \cos^{-1} \frac{\text{Tr}(R) - 1}{2}$
|
||||
- ${}^W\bm{s}_m$ is the eigen vector of the rotation matrix $R$ corresponding to the eigen value $\lambda = 1$
|
||||
|
||||
#+begin_src matlab
|
||||
thetam = acos((trace(STw(1:3, 1:3))-1)/2); % [rad]
|
||||
if thetam == 0
|
||||
WSm = [0; 0; 0];
|
||||
else
|
||||
[V, D] = eig(STw(1:3, 1:3));
|
||||
WSm = thetam*V(:, abs(diag(D) - 1) < eps(1));
|
||||
end
|
||||
#+end_src
|
||||
|
||||
#+begin_src matlab
|
||||
WPm = [Dxm ; Dym ; Dzm ; WSm];
|
||||
#+end_src
|
||||
|
||||
** Positioning Error with respect to the Granite
|
||||
The wanted position expressed with respect to the granite is ${}^WO_T$ and the measured position with respect to the granite is ${}^WO_S$, thus the *position error* expressed in $\{W\}$ is
|
||||
\[ {}^W E = {}^W O_T - {}^W O_S \]
|
||||
The same is true for rotations:
|
||||
\[ \theta_\epsilon {}^W\bm{s}_\epsilon = \theta_r {}^W\bm{s}_r - \theta_m {}^W\bm{s}_m \]
|
||||
|
||||
#+begin_src matlab
|
||||
WPe = WPr - WPm;
|
||||
#+end_src
|
||||
|
||||
#+begin_quote
|
||||
Now we want to express this error in a frame attached to the *base of the nano-hexapod* with its origin at the same point where the Jacobian of the nano-hexapod is computed (175mm above the top platform + 90mm of total height of the nano-hexapod).
|
||||
|
||||
Or maybe should we want to express this error with respect to the *top platform of the nano-hexapod*?
|
||||
We are measuring the position of the top-platform, and we don't know exactly the position of the bottom platform.
|
||||
We could compute the position of the bottom platform in two ways:
|
||||
- from the encoders of each stage
|
||||
- from the measurement of the nano-hexapod top platform + the internal metrology in the nano-hexapod (capacitive sensors e.g)
|
||||
|
||||
A third option is to say that the maximum stroke of the nano-hexapod is so small that the error should no change to much by the change of base.
|
||||
#+end_quote
|
||||
|
||||
** Position Error Expressed in the Nano-Hexapod Frame
|
||||
We now want the position error to be expressed in $\{S\}$ (the frame attach to the sample) for control:
|
||||
\[ {}^S E = {}^S T_W \cdot {}^W E \]
|
||||
|
||||
Thus we need to compute the homogeneous transformation ${}^ST_W$.
|
||||
Fortunately, this homogeneous transformation can be computed from the measurement of the sample position and orientation with respect to the granite.
|
||||
#+begin_src matlab
|
||||
Trxm = [1 0 0;
|
||||
0 cos(Rxm) -sin(Rxm);
|
||||
0 sin(Rxm) cos(Rxm)];
|
||||
Trym = [ cos(Rym) 0 sin(Rym);
|
||||
0 1 0;
|
||||
-sin(Rym) 0 cos(Rym)];
|
||||
Trzm = [cos(Rzm) -sin(Rzm) 0;
|
||||
sin(Rzm) cos(Rzm) 0;
|
||||
0 0 1];
|
||||
|
||||
STw = [[ Trym*Trxm*Trzm , [Dxm; Dym; Dzm]]; 0 0 0 1];
|
||||
#+end_src
|
||||
|
||||
Translation Error.
|
||||
#+begin_src matlab
|
||||
SEm = STw * [WPe(1:3); 0];
|
||||
SEm = SEm(1:3);
|
||||
#+end_src
|
||||
|
||||
Rotation Error.
|
||||
#+begin_src matlab
|
||||
SEr = STw * [WPe(4:6); 0];
|
||||
SEr = SEr(1:3);
|
||||
#+end_src
|
||||
|
||||
#+begin_src matlab
|
||||
Etot = [SEm ; SEr]
|
||||
#+end_src
|
||||
** Another try
|
||||
Let's denote:
|
||||
- $\{W\}$ the initial fixed frame
|
||||
- $\{R\}$ the reference frame corresponding to the wanted pose of the sample
|
||||
- $\{M\}$ the frame corresponding to the measured pose of the sample
|
||||
|
||||
We have then computed:
|
||||
- ${}^WT_R$
|
||||
- ${}^WT_M$
|
||||
|
||||
We have:
|
||||
\begin{align}
|
||||
{}^MT_R &= {}^MT_W {}^WT_R \\
|
||||
&= {}^WT_M^t {}^WT_R
|
||||
\end{align}
|
||||
|
||||
#+begin_src matlab
|
||||
MTr = STw'*Ttot;
|
||||
#+end_src
|
||||
|
||||
Position error:
|
||||
#+begin_src matlab
|
||||
MTr(1:3, 1:4)*[0; 0; 0; 1]
|
||||
#+end_src
|
||||
|
||||
Orientation error:
|
||||
#+begin_src matlab
|
||||
MTr(1:3, 1:3)
|
||||
#+end_src
|
||||
|
||||
** Verification
|
||||
How can we verify that the computation is correct?
|
||||
Options:
|
||||
- Test with simscape multi-body
|
||||
- Impose motion on each stage
|
||||
- Measure the position error w.r.t. the NASS
|
||||
- Compare with the computation
|
||||
Reference in New Issue
Block a user