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						| @@ -604,6 +604,7 @@ The ASD contains any peaks starting from 1Hz showing the large spectral content | ||||
|  | ||||
| #+begin_important | ||||
|   A smoother motion for the translation stage (such as a sinus motion, of a filtered triangular signal) could help reducing much of the vibrations. | ||||
|   The goal is to inject no motion outside the control bandwidth. | ||||
|  | ||||
|   We should also note that away from the rapid change of velocity, the sample's vibrations are much reduced. | ||||
|   Thus, if the detector is only used in between the triangular peaks, the vibrations are expected to be much lower than those estimated. | ||||
| @@ -758,8 +759,9 @@ The results of this simulation will be compared to simulations using the NASS in | ||||
| An 3D animation of the simulation is shown in Figure [[fig:open_loop_sim]]. | ||||
|  | ||||
| A zoom in the micro-meter ranger on the sample's location is shown in Figure [[fig:open_loop_sim_zoom]] with two frames: | ||||
| - a non-rotating frame corresponding to the wanted position of the sample. | ||||
|   Note that this frame is moving with the granite. | ||||
| - a non-rotating frame corresponding to the focusing point of the X-ray. | ||||
|   It does in that case correspond to the wanted position of the sample. | ||||
|   Note that this frame is moving with the granite as the nano-focusing optics are fixed to the granite. | ||||
| - a rotating frame that corresponds to the actual pose of the sample | ||||
|  | ||||
| The motion of the sample follows the wanted motion but with vibrations in the micro-meter range as was expected. | ||||
| @@ -803,17 +805,20 @@ In the next sections, it will allows to optimally design the nano-hexapod, to de | ||||
| <<sec:nano_hexapod_design>> | ||||
|  | ||||
| ** Introduction                                                      :ignore: | ||||
| As explain before, the nano-hexapod properties (mass, stiffness, architecture, ...) will influence: | ||||
| As explain before, the nano-hexapod properties (mass, stiffness, legs' orientation, ...) will influence: | ||||
| - the effect of disturbances $G_d$ (important for the rejection of disturbances) | ||||
| - the plant dynamics $G$ (important for the control robustness properties) | ||||
|  | ||||
| Thus, we here wish to find the optimal nano-hexapod properties such that: | ||||
| - the effect of disturbances is minimized (Section [[sec:optimal_stiff_dist]]) | ||||
| - the plant uncertainty due to a change of payload mass and experimental conditions is minimized (Section [[sec:optimal_stiff_plant]]) | ||||
| - the plant has nice dynamical properties for control (Section [[sec:nano_hexapod_architecture]]) | ||||
|  | ||||
| The study presented here only consider changes in the nano-hexapod *stiffness* for two reasons: | ||||
| - the nano-hexapod mass cannot be change too much, and will anyway be negligible compare to the metrology reflector and the payload masses | ||||
| - the choice of the nano-hexapod architecture (e.g. orientations of the actuators and implementation of sensors) will be further studied in accord with the control architecture | ||||
| In this study, the effect of the nano-hexapod's mass characteristics is not taken into account because: | ||||
| 1. it cannot be changed a lot | ||||
| 2. it is quite negligible compare the to metrology reflector and the payload's masses that is fixed to nano-hexapod's top platform | ||||
|  | ||||
| Also, the effect of the nano-hexapod's damping properties will be studied when applying active damping techniques. | ||||
|  | ||||
| ** Optimal Stiffness to reduce the effect of disturbances | ||||
| <<sec:optimal_stiff_dist>> | ||||
| @@ -1043,6 +1048,127 @@ This show how the dynamics evolves with the stiffness and how different effects | ||||
|   In such case, the main limitation will be heavy samples with small stiffnesses. | ||||
| #+end_important | ||||
|  | ||||
| ** Nano-Hexapod Architecture | ||||
| <<sec:nano_hexapod_architecture>> | ||||
|  | ||||
| *** Introduction                                                    :ignore: | ||||
|  | ||||
| *** Kinematic Analysis - Jacobian Matrix | ||||
| :PROPERTIES: | ||||
| :UNNUMBERED: t | ||||
| :END: | ||||
|  | ||||
| The kinematic analysis of a parallel manipulator is well described in cite:taghirad13_paral: | ||||
| #+begin_quote | ||||
| Kinematic analysis refers to the study of the geometry of motion of a robot, without considering the forces an torques that cause the motion. | ||||
| In this analysis, the relation between the geometrical parameters of the manipulator with the final motion of the moving platform is derived and analyzed. | ||||
| #+end_quote | ||||
|  | ||||
|  | ||||
| From cite:taghirad13_paral: | ||||
| #+begin_quote | ||||
| The Jacobian matrix not only reveals the *relation between the joint variable velocities of a parallel manipulator to the moving platform linear and angular velocities*, it also constructs the transformation needed to find the *actuator forces from the forces and moments acting on the moving platform*. | ||||
| #+end_quote | ||||
|  | ||||
| The Jacobian matrix $\bm{\mathcal{J}}$ can be computed form the orientation of the legs and the position of the flexible joints. | ||||
|  | ||||
| If we note: | ||||
| - $\delta\bm{\mathcal{L}} = [ \delta l_1, \delta l_2, \delta l_3, \delta l_4, \delta l_5, \delta l_6 ]^T$: the vector of small legs' displacements | ||||
| - $\delta \bm{\mathcal{X}} = [\delta x, \delta y, \delta z, \delta \theta_x, \delta \theta_y, \delta \theta_z ]^T$: the vector of small mobile platform displacements | ||||
|  | ||||
| The Jacobian matrix links the two vectors: | ||||
| \begin{align*} | ||||
|   \delta\bm{\mathcal{L}} &= \bm{J} \delta\bm{\mathcal{X}} \\ | ||||
|   \delta\bm{\mathcal{X}} &= \bm{J}^{-1} \delta\bm{\mathcal{L}} | ||||
| \end{align*} | ||||
|  | ||||
|  | ||||
| If we note: | ||||
| - $\bm{\tau} = [\tau_1, \tau_2, \cdots, \tau_6]^T$: vector of actuator forces applied in each strut | ||||
| - $\bm{\mathcal{F}} = [\bm{f}, \bm{n}]^T$: external force/torque action on the mobile platform | ||||
|  | ||||
| \begin{equation*} | ||||
|   \bm{\mathcal{F}} = \bm{J}^T \bm{\tau} | ||||
| \end{equation*} | ||||
|  | ||||
|  | ||||
|  | ||||
| \begin{equation*} | ||||
|   \bm{\mathcal{F}} = \bm{K} \delta \bm{\mathcal{X}} | ||||
| \end{equation*} | ||||
|  | ||||
| \begin{equation*} | ||||
|   \bm{K} = \bm{J}^T \mathcal{K} \bm{J} | ||||
| \end{equation*} | ||||
| \begin{equation*} | ||||
|   \bm{C} = \bm{K}^{-1} = (\bm{J}^T \mathcal{K} \bm{J})^{-1} | ||||
| \end{equation*} | ||||
|  | ||||
|  | ||||
|  | ||||
| Kinematic Study https://tdehaeze.github.io/stewart-simscape/kinematic-study.html | ||||
|  | ||||
|  | ||||
| Mobility can be estimated from the architecture of the Stewart platform and the leg's stroke. | ||||
|  | ||||
|  | ||||
| Stiffness properties is estimated from the architecture and leg's stiffness | ||||
|  | ||||
| *** Kinematic Analysis - Mobility | ||||
| :PROPERTIES: | ||||
| :UNNUMBERED: t | ||||
| :END: | ||||
|  | ||||
|  | ||||
| #+name: fig:mobility_translations_null_rotation | ||||
| #+caption: Figure caption | ||||
| [[file:figs/mobility_translations_null_rotation.png]] | ||||
|  | ||||
| *** Kinematic Study | ||||
| :PROPERTIES: | ||||
| :UNNUMBERED: t | ||||
| :END: | ||||
|  | ||||
| *** Flexible Joints | ||||
| :PROPERTIES: | ||||
| :UNNUMBERED: t | ||||
| :END: | ||||
|  | ||||
| Active Damping Study https://tdehaeze.github.io/stewart-simscape/control-active-damping.html | ||||
| Flexible Joint stiffness => not problematic for the chosen active damping technique | ||||
|  | ||||
| #+name: tab:yang19_stiffness_flexible_joints | ||||
| #+caption: Stiffness of flexible joints | ||||
| | $k_{\theta u},\ k_{\psi u}$ | $72 Nm/rad$ | | ||||
| | $k_{\theta s}$              | $51 Nm/rad$ | | ||||
| | $k_{\psi s}$                | $62 Nm/rad$ | | ||||
| | $k_{\gamma s}$              | $64 Nm/rad$ | | ||||
|  | ||||
| #+name: fig:preumont07_flexible_joints | ||||
| #+caption: Figure caption cite:preumont07_six_axis_singl_stage_activ | ||||
| [[file:figs/preumont07_flexible_joints.png]] | ||||
|  | ||||
|  | ||||
| #+name: fig:yang19_flexible_joints | ||||
| #+caption: Figure caption | ||||
| [[file:figs/yang19_flexible_joints.png]] | ||||
|  | ||||
|  | ||||
| *** Cubic Architecture | ||||
| :PROPERTIES: | ||||
| :UNNUMBERED: t | ||||
| :END: | ||||
|  | ||||
| Study of cubic architecture https://tdehaeze.github.io/stewart-simscape/cubic-configuration.html | ||||
| Has some advantages such as uniform stiffness and uniform mobility. | ||||
| It can have very nice properties in specific conditions that will not be the case for this application. | ||||
| The cubic configuration also puts much restriction on the position and orientation of each leg. | ||||
| This configuration is such not recommended. | ||||
|  | ||||
| #+name: fig:3d-cubic-stewart-aligned | ||||
| #+caption: Figure caption | ||||
| [[file:figs/3d-cubic-stewart-aligned.png]] | ||||
|  | ||||
| ** Conclusion | ||||
| #+begin_important | ||||
|   In Section [[sec:optimal_stiff_dist]], it has been concluded that a nano-hexapod stiffness below $10^5-10^6\,[N/m]$ helps reducing the high frequency vibrations induced by all sources of disturbances considered. | ||||
| @@ -1102,19 +1228,39 @@ The HAC-LAC architecture thus consisted of two cascade controllers: | ||||
| ** Active Damping and Sensors to be included in the nano-hexapod | ||||
| <<sec:lac_control>> | ||||
|  | ||||
| Active Damping can help: | ||||
| - by reducing the effect of disturbances close to the resonance of the system | ||||
| - by making the plant dynamics simpler to control for the High Authority Controller | ||||
|  | ||||
|   | ||||
| *** Introduction                                                    :ignore: | ||||
| Depending on the chosen active damping technique, either force sensors, relative motion sensors or inertial sensors should be included in each of the nano-hexapod's legs. | ||||
|  | ||||
| Because of the rotation of the hexapod, | ||||
|  | ||||
| A separate study (accessible [[https://tdehaeze.github.io/rotating-frame/index.html][here]]) about the use of all three sensors types have been done, the conclusions are: | ||||
| - the use of force sensors is to be avoided as it could introduce instability in the system due to the nano-hexapod's rotation | ||||
| - the use of inertial sensor should not be used as it would tends to decouple the motion of the sample from the motion of the granite (which is not wanted). | ||||
|   It would also be difficult to apply in a robust way due to the non-collocation with the actuators | ||||
| - relative motion sensors can be used to damped the nano-hexapod's modes in a robust way but may increase the sensibility to stages vibrations | ||||
|  | ||||
| *** Effect of the Spindle's Rotation | ||||
| :PROPERTIES: | ||||
| :UNNUMBERED: t | ||||
| :END: | ||||
|  | ||||
| #+name: fig:dvf_root_locus_ws | ||||
| #+caption: Figure caption | ||||
| [[file:figs/dvf_root_locus_ws.png]] | ||||
|  | ||||
| #+name: fig:iff_root_locus_ws | ||||
| #+caption: Figure caption | ||||
| [[file:figs/iff_root_locus_ws.png]] | ||||
|  | ||||
| *** Relative Direct Velocity Feedback Architecture | ||||
| :PROPERTIES: | ||||
| :UNNUMBERED: t | ||||
| :END: | ||||
|  | ||||
| Active Damping can help: | ||||
| - by reducing the effect of disturbances close to the resonance of the system | ||||
| - by making the plant dynamics simpler to control for the High Authority Controller | ||||
|  | ||||
|  | ||||
| *Relative motion sensors* are then included in each of the nano-hexapod's leg and a decentralized direct velocity feedback control architecture is applied (Figure [[fig:control_architecture_dvf]]). | ||||
|  | ||||
| @@ -1135,6 +1281,10 @@ The force applied in each leg being proportional to the relative velocity of the | ||||
| The DVF gain is here chosen in such a way that the suspension modes of the nano-hexapod are critically damped whatever the sample mass. | ||||
| This may not be the optimal choice as will be further explained. | ||||
|  | ||||
| *** Effect of Active Damping on the Primary Plant Dynamics | ||||
| :PROPERTIES: | ||||
| :UNNUMBERED: t | ||||
| :END: | ||||
|  | ||||
| The plant dynamics before (solid curves) and after (dashed curves) the Low Authority Control implementation are compared in Figure [[fig:opt_stiff_primary_plant_damped_L]]. | ||||
| It is clear that the use of the DVF reduces the dynamical spread of the plant dynamics between 5Hz up too 100Hz. | ||||
| @@ -1144,6 +1294,11 @@ This will make the primary controller more robust and easier to develop. | ||||
| #+caption: Primary plant in the space of the legs with (dashed) and without (solid) Direct Velocity Feedback | ||||
| [[file:figs/opt_stiff_primary_plant_damped_L.png]] | ||||
|  | ||||
| *** Effect of Active Damping on the Sensibility to Disturbances | ||||
| :PROPERTIES: | ||||
| :UNNUMBERED: t | ||||
| :END: | ||||
|  | ||||
| The change of sensibility to disturbances with the use of DVF is shown in Figure [[fig:opt_stiff_sensibility_dist_dvf]]. | ||||
| It is shown that the DVF control lowers the sensibility to disturbances in the vicinity of the nano-hexapod resonance but increases the sensibility at higher frequencies. | ||||
|  | ||||
| @@ -1250,14 +1405,24 @@ An animation of the experiment is shown in Figure [[fig:closed_loop_sim_zoom]] a | ||||
| [[file:figs/closed_loop_sim_zoom.gif]] | ||||
|  | ||||
| ** Simulation of More Complex Experiments | ||||
| *** Introduction                                                    :ignore: | ||||
|  | ||||
| *** Micro-Hexapod offset | ||||
| :PROPERTIES: | ||||
| :UNNUMBERED: t | ||||
| :END: | ||||
|  | ||||
| #+name: fig:tomography_dh_offset | ||||
| #+caption: Figure caption | ||||
| #+caption: Top View of a tomography experiment with a 10mm offset imposed by the micro-hexapod | ||||
| [[file:figs/tomography_dh_offset.gif]] | ||||
|  | ||||
| *** Simultaneous Translation Scans | ||||
| :PROPERTIES: | ||||
| :UNNUMBERED: t | ||||
| :END: | ||||
|  | ||||
| #+name: fig:ty_scans | ||||
| #+caption: Figure caption | ||||
| #+caption: Top View of a tomography experiment combined with translation scans | ||||
| [[file:figs/ty_scans.gif]] | ||||
|  | ||||
| ** Conclusion | ||||
| @@ -1281,6 +1446,8 @@ A more complete study of the control of the NASS is performed [[https://tdehaeze | ||||
| * General Conclusion and Further notes | ||||
| <<sec:conclusion_and_further_notes>> | ||||
|  | ||||
| ** Nano-Hexapod Specifications | ||||
|  | ||||
| ** General Conclusion | ||||
|  | ||||
|  | ||||
| @@ -1291,8 +1458,10 @@ This should not be significant. | ||||
|  | ||||
| ** Further Work | ||||
|  | ||||
| ** Cable Forces | ||||
|  | ||||
| ** Using soft mounts for the | ||||
|  | ||||
| ** Using soft mounts for the Granite | ||||
| <<sec:soft_granite>> | ||||
|  | ||||
| #+name: fig:opt_stiff_soft_granite_Dw | ||||
|   | ||||
							
								
								
									
										37
									
								
								ref.bib
									
									
									
									
									
								
							
							
						
						| @@ -3,7 +3,6 @@ | ||||
|   title = {The Design of High Performance Mechatronics - 2nd Revised Edition}, | ||||
|   year = {2014}, | ||||
|   publisher = {Ios Press}, | ||||
|   tags = {favorite}, | ||||
| } | ||||
|  | ||||
| @article{oomen18_advan_motion_contr_precis_mechat, | ||||
| @@ -16,7 +15,6 @@ | ||||
|   year = {2018}, | ||||
|   doi = {10.1541/ieejjia.7.127}, | ||||
|   url = {https://doi.org/10.1541/ieejjia.7.127}, | ||||
|   tags = {favorite}, | ||||
| } | ||||
|  | ||||
| @book{preumont18_vibrat_contr_activ_struc_fourt_edition, | ||||
| @@ -28,5 +26,40 @@ | ||||
|   doi = {10.1007/978-3-319-72296-2}, | ||||
|   pages = {nil}, | ||||
|   series = {Solid Mechanics and Its Applications}, | ||||
| } | ||||
|  | ||||
| @book{taghirad13_paral, | ||||
|   author = {Taghirad, Hamid}, | ||||
|   title = {Parallel robots : mechanics and control}, | ||||
|   year = {2013}, | ||||
|   publisher = {CRC Press}, | ||||
|   address = {Boca Raton, FL}, | ||||
|   isbn = {9781466555778}, | ||||
|   tags = {favorite, parallel robot}, | ||||
| } | ||||
|  | ||||
| @article{yang19_dynam_model_decoup_contr_flexib, | ||||
|   author = {Yang, XiaoLong and Wu, HongTao and Chen, Bai and Kang, ShengZheng and Cheng, ShiLi}, | ||||
|   title = {Dynamic Modeling and Decoupled Control of a Flexible Stewart Platform for Vibration Isolation}, | ||||
|   journal = {Journal of Sound and Vibration}, | ||||
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|   pages = {398-412}, | ||||
|   year = {2019}, | ||||
|   doi = {10.1016/j.jsv.2018.10.007}, | ||||
|   url = {https://doi.org/10.1016/j.jsv.2018.10.007}, | ||||
|   issn = {0022-460X}, | ||||
|   month = {Jan}, | ||||
|   publisher = {Elsevier BV}, | ||||
| } | ||||
|  | ||||
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|   title = {A Six-Axis Single-Stage Active Vibration Isolator Based on Stewart Platform}, | ||||
|   journal = {Journal of Sound and Vibration}, | ||||
|   volume = {300}, | ||||
|   number = {3-5}, | ||||
|   pages = {644-661}, | ||||
|   year = {2007}, | ||||
|   doi = {10.1016/j.jsv.2006.07.050}, | ||||
|   url = {https://doi.org/10.1016/j.jsv.2006.07.050}, | ||||
| } | ||||
|   | ||||