Add some comments on modal analysis

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Thomas Dehaeze 2020-04-27 14:47:37 +02:00
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3 changed files with 40 additions and 7 deletions

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@ -371,18 +371,32 @@ To estimate the PSD of the position error $\epsilon$ and thus the RMS residual m
<<sec:micro_station_dynamics>>
** Introduction :ignore:
As explained before, it is very important to have a good estimation of the micro-station dynamics as it will be coupled with the dynamics of the nano-hexapod and thus is very important for both the design of the nano-hexapod and the controller.
As explained before, it is very important to have a good estimation of the micro-station dynamics as it will be coupled with the dynamics of the nano-hexapod and thus is very important for both the design of the nano-hexapod and controller.
The estimated dynamics will also be used to tune the developed multi-body model of the micro-station with which the simulations will be performed.
All the measurements performed on the micro-station are detailed in [[https://tdehaeze.github.io/meas-analysis/][this]] document and summarized in the following sections.
The general procedure to identify the dynamics of the micro-station is shown in Figure [[fig:vibration_analysis_procedure]].
The steps are:
1. extract a Response Model (Frequency Response Functions) from measurements
2. convert the Response Model into a Modal Model (Natural Frequencies and Mode Shapes)
3. extract a Spatial Model from the Modal Model (Mass/Damping/Stiffness matrices)
#+name: fig:vibration_analysis_procedure
#+caption: Vibration Analysis Procedure
[[file:figs/vibration_analysis_procedure.png]]
The extraction of the Spatial Model (3rd step) was not performed as it requires a lot of time and was not judge necessary.
** Setup
<<sec:id_setup>>
To measure the dynamics of such complicated system, it as been chosen to perform a full modal analysis.
To measure the dynamics of such complicated system, it as been chosen to perform a modal analysis.
To limit the number of degrees of freedom to be measured, we suppose that in the frequency range of interest (DC-300Hz), each of the positioning stage is behaving as a solid body.
To limit the number of degrees of freedom to be measured, we suppose that in the frequency range of interest (DC-300Hz), each of the positioning stage is behaving as a *solid body*.
Thus, to fully describe the dynamics of the station, we (only) need to measure 6 degrees of freedom on each of the positioning stage (that is 36 degrees of freedom for the 6 solid bodies).
@ -402,9 +416,9 @@ The measurement thus consists of:
- 3 on top of the spindle
- 4 on top of the hexapod
In total, 69 degrees of freedom are measured (23 tri axis accelerometers) which is way more that what was required.
In total, 69 degrees of freedom are measured (23 tri axis accelerometers) which is more that what was required.
We chose to have some redundancy in the measurement to be able to verify that the solid-body assumption was correct for each of the stage.
We chose to have some redundancy in the measurement to be able to verify that the solid-body assumption is correct for each of the stage.
#+name: fig:hammer_z
#+caption: Example of one hammer impact
@ -422,7 +436,7 @@ From the measurements, we obtain all the transfer functions from forces applied
Modal shapes and natural frequencies are then computed. Example of mode shapes are shown in Figures [[fig:mode1]] [[fig:mode6]].
#+name: fig:mode1
#+caption: First mode
#+caption: First mode that shows a suspension mode, probably due to bad leveling of one Airloc
[[file:figs/mode1.gif]]
#+name: fig:mode6
@ -434,8 +448,25 @@ We then reduce the number of degrees of freedom from 69 (23 accelerometers with
From the reduced transfer function matrix, we can re-synthesize the response at the 69 measured degrees of freedom and we find that we have an exact match.
This confirms the fact that the stages are indeed behaving as a *solid body* in the frequency band of interest.
#+begin_important
This confirms the fact that the stages are indeed behaving as a solid body in the frequency band of interest.
This thus means that a multi-body model can be used to represent the dynamics of the micro-station.
#+end_important
Many Frequency Response Functions (FRF) are obtained from the measurements.
Examples of FRF are shown in Figure [[fig:frf_all_bodies_one_direction]].
These FRF will be used to compare the dynamics of the multi-body model with the micro-station dynamics.
#+name: fig:frf_all_bodies_one_direction
#+caption: Frequency Response Function from forces applied by the Hammer in the X direction to the acceleration of each solid body in the X direction
[[file:figs/frf_all_bodies_one_direction.png]]
** Conclusion
#+begin_important
The modal analysis of the micro-station confirmed the fact that a multi-body model should be able to correctly represents the micro-station dynamics.
In Section [[sec:multi_body_model]], the obtained Frequency Response Functions will be used to compare the model dynamics with the micro-station dynamics.
#+end_important
* Identification of the Disturbances
<<sec:identification_disturbances>>
@ -594,6 +625,7 @@ The detector requirement would be:
- Resolution of $\approx 100nm$ (to be discussed)
** Conclusion
#+begin_important
Main disturbance sources have been identified.
These disturbances will then be included in the multi-body model.
@ -604,6 +636,7 @@ If heavy/stiff cables are to be fixed to the sample, this should be quantified a
Having better estimation of the disturbances would allows to more precisely estimate the attainable performances.
This should however not change the conclusion of this study nor significantly change the nano-hexapod design.
#+end_important
* Multi Body Model
<<sec:multi_body_model>>