Re-read the introduction and feedback section
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							| @@ -34,7 +34,8 @@ | |||||||
| :END: | :END: | ||||||
|  |  | ||||||
| * Introduction                                                        :ignore: | * Introduction                                                        :ignore: | ||||||
| The overall objective is to design a nano-hexapod an the associated control architecture that allows the stabilization of samples down to $\approx 10nm$ in presence of disturbances and system variability. | In this document are gathered and summarized all the developments done for the design of the Nano Active Stabilization System. | ||||||
|  | This consists of a nano-hexapod and an associated control architecture that are used to stabilize samples down to the nano-meter level in presence of disturbances. | ||||||
|  |  | ||||||
|  |  | ||||||
| To understand the design challenges of such system, a short introduction to Feedback control is provided in Section [[sec:feedback_introduction]]. | To understand the design challenges of such system, a short introduction to Feedback control is provided in Section [[sec:feedback_introduction]]. | ||||||
| @@ -43,15 +44,14 @@ The mathematical tools (Power Spectral Density, Noise Budgeting, ...) that will | |||||||
|  |  | ||||||
| To be able to develop both the nano-hexapod and the control architecture in an optimal way, we need a good estimation of: | To be able to develop both the nano-hexapod and the control architecture in an optimal way, we need a good estimation of: | ||||||
| - the micro-station dynamics (Section [[sec:micro_station_dynamics]]) | - the micro-station dynamics (Section [[sec:micro_station_dynamics]]) | ||||||
| - the frequency content of the important source of disturbances in play such as vibration of stages and ground motion (Section [[sec:identification_disturbances]]) | - the frequency content of the sources of disturbances such as vibrations induced by the micro-station's stages and ground motion (Section [[sec:identification_disturbances]]) | ||||||
|  |  | ||||||
|  |  | ||||||
| We then develop a model of the system that must represent all the important physical effects in play. | A model of the micro-station is then developed and tuned using the previous estimations (Section [[sec:multi_body_model]]). | ||||||
| Such model is presented in Section [[sec:multi_body_model]]. | The nano-hexapod is further included in the model. | ||||||
|  |  | ||||||
|  |  | ||||||
| A modular model of the nano-hexapod is then included in the system. | The effects of the nano-hexapod characteristics on the system dynamics are then studied. | ||||||
| The effects of the nano-hexapod characteristics on the dynamics are then studied. |  | ||||||
| Based on that, an optimal choice of the nano-hexapod stiffness is made (Section [[sec:nano_hexapod_design]]). | Based on that, an optimal choice of the nano-hexapod stiffness is made (Section [[sec:nano_hexapod_design]]). | ||||||
|  |  | ||||||
|  |  | ||||||
| @@ -61,8 +61,9 @@ Simulations are performed to show that this design gives acceptable performance | |||||||
| * Introduction to Feedback Systems and Noise budgeting | * Introduction to Feedback Systems and Noise budgeting | ||||||
| <<sec:feedback_introduction>> | <<sec:feedback_introduction>> | ||||||
|  |  | ||||||
| In this section, we first introduce some basics of *feedback systems* (Section [[sec:feedback]]). | ** Introduction                                                      :ignore: | ||||||
| This should highlight the challenges in terms of combined performance and robustness. | In this section, some basics of *feedback systems* are first introduced (Section [[sec:feedback]]). | ||||||
|  | This should highlight the challenges of the required combined performance and robustness. | ||||||
|  |  | ||||||
|  |  | ||||||
| In Section [[sec:noise_budget]] is introduced the *dynamic error budgeting* which is a powerful tool that allows to derive the total error in a dynamic system from multiple disturbance sources. | In Section [[sec:noise_budget]] is introduced the *dynamic error budgeting* which is a powerful tool that allows to derive the total error in a dynamic system from multiple disturbance sources. | ||||||
| @@ -72,14 +73,17 @@ This tool will be widely used throughout this study to both predict the performa | |||||||
| <<sec:feedback>> | <<sec:feedback>> | ||||||
|  |  | ||||||
| *** Introduction                                                    :ignore: | *** Introduction                                                    :ignore: | ||||||
|  | The use of Feedback control in a motion system required to use some sensors to monitor the actual status of the system and actuators to modifies this status. | ||||||
|  |  | ||||||
| The use of feedback control as several advantages and pitfalls that are listed below (taken from cite:schmidt14_desig_high_perfor_mechat_revis_edition): | The use of feedback control as several advantages and pitfalls that are listed below (taken from cite:schmidt14_desig_high_perfor_mechat_revis_edition): | ||||||
|  |  | ||||||
| - *Advantages*: | *Advantages*: | ||||||
|   - *Reduction of the effect of disturbances*: |   - *Reduction of the effect of disturbances*: | ||||||
|     Disturbances affecting the sample vibrations are observed by the sensor signal, and therefore the feedback controller can compensate for them |     Disturbances inducing vibrations are observed by the sensor signal, and therefore the feedback controller can compensate for them | ||||||
|   - *Handling of uncertainties*: |   - *Handling of uncertainties*: | ||||||
|     Feedback controlled systems can also be designed for /robustness/, which means that the stability and performance requirements are guaranteed even for parameter variation of the controller mechatronics system |     Feedback controlled systems can also be designed for /robustness/, which means that the stability and performance requirements are guaranteed even for parameter variation of the controller mechatronics system | ||||||
| - *Pitfalls*: |  | ||||||
|  | *Pitfalls*: | ||||||
|   - *Limited reaction speed*: |   - *Limited reaction speed*: | ||||||
|     A feedback controller reacts on the difference between the reference signal (wanted motion) and the measurement (actual motion), which means that the error has to occur first /before/ the controller can correct for it. |     A feedback controller reacts on the difference between the reference signal (wanted motion) and the measurement (actual motion), which means that the error has to occur first /before/ the controller can correct for it. | ||||||
|     The limited reaction speed means that the controller will be able to compensate the positioning errors only in some frequency band, called the controller /bandwidth/ |     The limited reaction speed means that the controller will be able to compensate the positioning errors only in some frequency band, called the controller /bandwidth/ | ||||||
| @@ -91,13 +95,13 @@ The use of feedback control as several advantages and pitfalls that are listed b | |||||||
|  |  | ||||||
| *** Simplified Feedback Control Diagram for the NASS | *** Simplified Feedback Control Diagram for the NASS | ||||||
| Let's consider the block diagram shown in Figure [[fig:classical_feedback_small]] where the signals are: | Let's consider the block diagram shown in Figure [[fig:classical_feedback_small]] where the signals are: | ||||||
| - $y$: the relative position of the sample with respect to the granite (the quantity we wish to control) | - $y$: the relative position of the sample with respect to the granite (the quantity to be controlled) | ||||||
| - $d$: the disturbances affecting $y$ (ground motion, vibration of stages) | - $d$: the disturbances affecting $y$ (ground motion, stages' vibrations) | ||||||
| - $n$: the noise of the sensor measuring $y$ | - $n$: the noise of the sensor measuring $y$ | ||||||
| - $r$: the reference signal, corresponding to the wanted $y$ | - $r$: the reference signal, corresponding to the wanted $y$ | ||||||
| - $\epsilon = r - y$: the position error | - $\epsilon = r - y$: the position error | ||||||
|  |  | ||||||
| And the dynamical blocks are: | The /dynamical/ blocks are: | ||||||
| - $G$: representing the dynamics from forces/torques applied by the nano-hexapod to the relative position sample/granite $y$ | - $G$: representing the dynamics from forces/torques applied by the nano-hexapod to the relative position sample/granite $y$ | ||||||
| - $G_d$: representing how the disturbances (e.g. ground motion) are affecting the relative position sample/granite $y$ | - $G_d$: representing how the disturbances (e.g. ground motion) are affecting the relative position sample/granite $y$ | ||||||
| - $K$: representing the controller (to be designed) | - $K$: representing the controller (to be designed) | ||||||
| @@ -129,11 +133,11 @@ And the dynamical blocks are: | |||||||
| #+RESULTS: | #+RESULTS: | ||||||
| [[file:figs/classical_feedback_small.png]] | [[file:figs/classical_feedback_small.png]] | ||||||
|  |  | ||||||
| Without the use of feedback (i.e. nano-hexapod), the disturbances will induce a sample motion error equal to: | Without the use of feedback (i.e. without the nano-hexapod), the disturbances will induce a sample motion error equal to: | ||||||
| \begin{equation} | \begin{equation} | ||||||
|   y = G_d d \label{eq:open_loop_error} |   y = G_d d \label{eq:open_loop_error} | ||||||
| \end{equation} | \end{equation} | ||||||
| which is out of the specifications (micro-meter range compare to the required $\approx 10nm$). | which is, in the case of the NASS out of the specifications (micro-meter range compare to the required $\approx 10nm$). | ||||||
|  |  | ||||||
| In the next section, we see how the use of the feedback system permits to lower the effect of the disturbances $d$ on the sample motion error. | In the next section, we see how the use of the feedback system permits to lower the effect of the disturbances $d$ on the sample motion error. | ||||||
|  |  | ||||||
| @@ -159,10 +163,8 @@ From Eq. eqref:eq:closed_loop_error representing the closed-loop system behavior | |||||||
| - the measurement noise $n$ is injected and multiplied by a factor $T$ | - the measurement noise $n$ is injected and multiplied by a factor $T$ | ||||||
|  |  | ||||||
| Ideally, we would like to design the controller $K$ such that: | Ideally, we would like to design the controller $K$ such that: | ||||||
| - $|S|$ is small to limit the effect of disturbances | - $|S|$ is small to *reduce the effect of disturbances* | ||||||
| - $|T|$ is small to limit the injection of sensor noise | - $|T|$ is small to *limit the injection of sensor noise* | ||||||
|  |  | ||||||
| As shown in the next section, there is a trade-off between the disturbance reduction and the noise injection. |  | ||||||
|  |  | ||||||
| *** Trade off: Disturbance Reduction / Noise Injection | *** Trade off: Disturbance Reduction / Noise Injection | ||||||
| We have from the definition of $S$ and $T$ that: | We have from the definition of $S$ and $T$ that: | ||||||
| @@ -176,14 +178,15 @@ There is therefore a *trade-off between the disturbance rejection and the measur | |||||||
|  |  | ||||||
| Typical shapes of $|S|$ and $|T|$ as a function of frequency are shown in Figure [[fig:h-infinity-2-blocs-constrains]]. | Typical shapes of $|S|$ and $|T|$ as a function of frequency are shown in Figure [[fig:h-infinity-2-blocs-constrains]]. | ||||||
| We can observe that $|S|$ and $|T|$ exhibit different behaviors depending on the frequency band: | We can observe that $|S|$ and $|T|$ exhibit different behaviors depending on the frequency band: | ||||||
| - *At low frequency* (inside the control bandwidth): |  | ||||||
|   - $|S|$ can be made small and thus the effect of disturbances is reduced | *At low frequency* (inside the control bandwidth): | ||||||
|   - $|T| \approx 1$ and all the sensor noise is transmitted | - $|S|$ can be made small and thus the effect of disturbances is reduced | ||||||
| - *At high frequency* (outside the control bandwidth): | - $|T| \approx 1$ and all the sensor noise is transmitted | ||||||
|   - $|S| \approx 1$ and the feedback system does not reduce the effect of disturbances | *At high frequency* (outside the control bandwidth): | ||||||
|   - $|T|$ is small and thus the sensor noise is filtered | - $|S| \approx 1$ and the feedback system does not reduce the effect of disturbances | ||||||
| - *Near the crossover frequency* (between the two frequency bands): | - $|T|$ is small and thus the sensor noise is filtered | ||||||
|   - The effect of disturbances is increased | *Near the crossover frequency* (between the two frequency bands): | ||||||
|  | - The effect of disturbances is increased | ||||||
|  |  | ||||||
| #+begin_src latex :file h-infinity-2-blocs-constrains.pdf | #+begin_src latex :file h-infinity-2-blocs-constrains.pdf | ||||||
|   \begin{tikzpicture} |   \begin{tikzpicture} | ||||||
| @@ -228,16 +231,16 @@ We can observe that $|S|$ and $|T|$ exhibit different behaviors depending on the | |||||||
| *** Trade off: Robustness / Performance | *** Trade off: Robustness / Performance | ||||||
| <<sec:perf_robust_tradeoff>> | <<sec:perf_robust_tradeoff>> | ||||||
|  |  | ||||||
| As shown in the previous section, the effect of disturbances is reduced /inside/ the control bandwidth. | As shown in the previous section, the effect of disturbances is reduced *inside* the control bandwidth. | ||||||
|  |  | ||||||
| Moreover, the slope of $|S(j\omega)|$ is limited for stability reasons (not explained here), and therefore a large control bandwidth is required to obtain sufficient disturbance rejection at lower frequencies (where the disturbances have large effects). | Moreover, the slope of $|S(j\omega)|$ is limited for stability reasons (not explained here), and therefore a large control bandwidth is required to obtain sufficient disturbance rejection at lower frequencies (where the disturbances have usually large effects). | ||||||
|  |  | ||||||
| The next important question is *what effects do limit the attainable control bandwidth?* | The next important question is therefore *what limits the attainable control bandwidth?* | ||||||
|  |  | ||||||
|  |  | ||||||
| The main issue it that for stability reasons, *the behavior of the mechanical system must be known with only small uncertainty in the vicinity of the crossover frequency*. | The main issue it that for stability reasons, *the system dynamics must be known with only small uncertainty in the vicinity of the crossover frequency*. | ||||||
|  |  | ||||||
| For mechanical systems, this generally means that control bandwidth should take place before any appearing of flexible dynamics (Right part of Figure [[fig:oomen18_next_gen_loop_gain]]). | For mechanical systems, this generally means that the control bandwidth should take place before any appearing of flexible dynamics (right part of Figure [[fig:oomen18_next_gen_loop_gain]]). | ||||||
|  |  | ||||||
| #+name: fig:oomen18_next_gen_loop_gain | #+name: fig:oomen18_next_gen_loop_gain | ||||||
| #+caption: Envisaged developments in motion systems. In traditional motion systems, the control bandwidth takes place in the rigid-body region. In the next generation systemes, flexible dynamics are foreseen to occur within the control bandwidth. cite:oomen18_advan_motion_contr_precis_mechat | #+caption: Envisaged developments in motion systems. In traditional motion systems, the control bandwidth takes place in the rigid-body region. In the next generation systemes, flexible dynamics are foreseen to occur within the control bandwidth. cite:oomen18_advan_motion_contr_precis_mechat | ||||||
| @@ -250,30 +253,32 @@ For the NASS, the possible changes in the system are: | |||||||
| - a change of experimental condition: spindle's rotation speed, position of each micro-station's stage | - a change of experimental condition: spindle's rotation speed, position of each micro-station's stage | ||||||
| - a change in the micro-station dynamics (change of mechanical elements, aging effect, ...) | - a change in the micro-station dynamics (change of mechanical elements, aging effect, ...) | ||||||
|  |  | ||||||
| The nano-hexapod and the control architecture have to be developed such that the feedback system remains stable and exhibit acceptable performance for all these possible changes in the system. | The nano-hexapod and the control architecture have to be developed in such a way that the feedback system remains stable and exhibit acceptable performance for all these possible changes in the system. | ||||||
|  |  | ||||||
| This problem of *robustness* represent one of the main challenge for the design of the NASS. | This problem of *robustness* represent one of the main challenge for the design of the NASS. | ||||||
|  |  | ||||||
| # High performance mechatronics systems (e.g. Wafer stages, or Atomic Force Microscopes) are usually developed in such a way that their mechanical behavior is extremely well known up to high frequency and such that the experimental conditions are usually be carefully controlled. |  | ||||||
|  |  | ||||||
| ** Dynamic error budgeting | ** Dynamic error budgeting | ||||||
| <<sec:noise_budget>> | <<sec:noise_budget>> | ||||||
|  |  | ||||||
| *** Introduction                                                    :ignore: | *** Introduction                                                    :ignore: | ||||||
| The dynamic error budgeting is a powerful tool to study the effect of multiple error sources and to see how the feedback system does reduce the effect | The dynamic error budgeting is a powerful tool to study the effects of multiple error sources (i.e. disturbances and measurement noise) and to predict how much these effects are reduced by a feedback system. | ||||||
|  |  | ||||||
| To understand how to use and understand it, the Power Spectral Density and the Cumulative Power Spectrum are first introduced. | The dynamic error budgeting uses two important mathematical functions: the *Power Spectral Density* and the *Cumulative Power Spectrum*. | ||||||
| Then, is shown how does multiple error sources are combined and modified by dynamical systems. |  | ||||||
|  |  | ||||||
| Finally, | After these two functions are introduced (in Sections [[sec:psd]] and [[sec:cps]]), is shown how do multiple error sources are combined and modified by dynamical systems (in Section [[sec:psd_lti_system]] and [[sec:psd_combined_signals]]). | ||||||
|  |  | ||||||
|  | Finally, the dynamic noise budgeting for the NASS is derived in Section [[sec:dynamic_noise_budget]]. | ||||||
|  |  | ||||||
| *** Power Spectral Density | *** Power Spectral Density | ||||||
|  | <<sec:psd>> | ||||||
|  |  | ||||||
| The *Power Spectral Density* (PSD) $S_{xx}(f)$ of the time domain signal $x(t)$ is defined as the Fourier transform of the autocorrelation function: | The *Power Spectral Density* (PSD) $S_{xx}(f)$ of the time domain signal $x(t)$ is defined as the Fourier transform of the autocorrelation function: | ||||||
| \[ S_{xx}(\omega) = \int_{-\infty}^{\infty} R_{xx}(\tau) e^{-j \omega \tau} d\tau \ \frac{[\text{unit of } x]^2}{\text{Hz}} \] | \[ S_{xx}(\omega) = \int_{-\infty}^{\infty} R_{xx}(\tau) e^{-j \omega \tau} d\tau \quad \frac{[\text{unit of } x]^2}{\text{Hz}} \] | ||||||
|  |  | ||||||
| The PSD $S_{xx}(\omega)$ represents the *distribution of the (average) signal power over frequency*. | The PSD $S_{xx}(\omega)$ represents the *distribution of the (average) signal power over frequency*. | ||||||
|  |  | ||||||
| Thus, the total power in the signal can be obtained by integrating these infinitesimal contributions, the Root Mean Square (RMS) value of the signal $x(t)$ is then: | Thus, the total power in the signal can be obtained by integrating these infinitesimal contributions. | ||||||
|  | The Root Mean Square (RMS) value of the signal $x(t)$ is then: | ||||||
| \begin{equation} | \begin{equation} | ||||||
|   x_{\text{rms}} = \sqrt{\int_{0}^{\infty} S_{xx}(\omega) d\omega} |   x_{\text{rms}} = \sqrt{\int_{0}^{\infty} S_{xx}(\omega) d\omega} | ||||||
| \end{equation} | \end{equation} | ||||||
| @@ -284,6 +289,8 @@ One can also integrate the infinitesimal power $S_{xx}(\omega)d\omega$ over a fi | |||||||
| \end{equation} | \end{equation} | ||||||
|  |  | ||||||
| *** Cumulative Power Spectrum | *** Cumulative Power Spectrum | ||||||
|  | <<sec:cps>> | ||||||
|  |  | ||||||
| The *Cumulative Power Spectrum* is the cumulative integral of the Power Spectral Density starting from $0\ \text{Hz}$ with increasing frequency: | The *Cumulative Power Spectrum* is the cumulative integral of the Power Spectral Density starting from $0\ \text{Hz}$ with increasing frequency: | ||||||
| \begin{equation} | \begin{equation} | ||||||
|   CPS_x(f) = \int_0^f S_{xx}(\nu) d\nu \quad [\text{unit of } x]^2 |   CPS_x(f) = \int_0^f S_{xx}(\nu) d\nu \quad [\text{unit of } x]^2 | ||||||
| @@ -297,10 +304,13 @@ An alternative definition of the Cumulative Power Spectrum can be used where the | |||||||
| \end{equation} | \end{equation} | ||||||
| And thus $CPS_x(f)$ represents the power in the signal $x$ for frequencies above $f$. | And thus $CPS_x(f)$ represents the power in the signal $x$ for frequencies above $f$. | ||||||
|  |  | ||||||
|  | The cumulative | ||||||
|  |  | ||||||
| The Cumulative Power Spectrum will be used to determine in which frequency band the effect of disturbances should be reduced, and thus the approximate required control bandwidth. | The Cumulative Power Spectrum is generally shown as a function of frequency, and is used to determine at which frequencies the effect of disturbances must be reduced, and thus the approximate required control bandwidth. | ||||||
|  |  | ||||||
|  | *** Modification of a signal's PSD when going through a dynamical system | ||||||
|  | <<sec:psd_lti_system>> | ||||||
|  |  | ||||||
| *** Modification of a signal's PSD when going through an LTI system |  | ||||||
| Let's consider a signal $u$ with a PSD $S_{uu}$ going through a LTI system $G(s)$ that outputs a signal $y$ with a PSD (Figure [[fig:psd_lti_system]]). | Let's consider a signal $u$ with a PSD $S_{uu}$ going through a LTI system $G(s)$ that outputs a signal $y$ with a PSD (Figure [[fig:psd_lti_system]]). | ||||||
|  |  | ||||||
| #+begin_src latex :file psd_lti_system.pdf | #+begin_src latex :file psd_lti_system.pdf | ||||||
| @@ -323,6 +333,8 @@ The Power Spectral Density of the output signal $y$ can be computed using: | |||||||
| \end{equation} | \end{equation} | ||||||
|  |  | ||||||
| *** PSD of combined signals | *** PSD of combined signals | ||||||
|  | <<sec:psd_combined_signals>> | ||||||
|  |  | ||||||
| Let's consider a signal $y$ that is the sum of two *uncorrelated* signals $u$ and $v$ (Figure [[fig:psd_sum]]). | Let's consider a signal $y$ that is the sum of two *uncorrelated* signals $u$ and $v$ (Figure [[fig:psd_sum]]). | ||||||
|  |  | ||||||
| We have that the PSD of $y$ is equal to sum of the PSD and $u$ and the PSD of $v$ (can be easily shown from the definition of the PSD): | We have that the PSD of $y$ is equal to sum of the PSD and $u$ and the PSD of $v$ (can be easily shown from the definition of the PSD): | ||||||
| @@ -345,6 +357,8 @@ We have that the PSD of $y$ is equal to sum of the PSD and $u$ and the PSD of $v | |||||||
| [[file:figs/psd_sum.png]] | [[file:figs/psd_sum.png]] | ||||||
|  |  | ||||||
| *** Dynamic Noise Budgeting | *** Dynamic Noise Budgeting | ||||||
|  | <<sec:dynamic_noise_budget>> | ||||||
|  |  | ||||||
| Let's consider the Feedback architecture in Figure [[fig:classical_feedback_small]] where the position error $\epsilon$ is equal to: | Let's consider the Feedback architecture in Figure [[fig:classical_feedback_small]] where the position error $\epsilon$ is equal to: | ||||||
| \[ \epsilon = S r + T n - G_d S d \] | \[ \epsilon = S r + T n - G_d S d \] | ||||||
|  |  | ||||||
| @@ -360,9 +374,10 @@ And we can compute the RMS value of the residual motion using: | |||||||
|  |  | ||||||
| To estimate the PSD of the position error $\epsilon$ and thus the RMS residual motion (in closed-loop), we need to determine: | To estimate the PSD of the position error $\epsilon$ and thus the RMS residual motion (in closed-loop), we need to determine: | ||||||
| - The Power Spectral Densities of the signals affecting the system: | - The Power Spectral Densities of the signals affecting the system: | ||||||
|   - $S_{dd}$: disturbances, this will be done in Section [[sec:identification_disturbances]] |   - The disturbances $S_{dd}$: this will be done in Section [[sec:identification_disturbances]] | ||||||
|   - $S_{nn}$: sensor noise, this can be estimated from the sensor data-sheet |   - The sensor noise $S_{nn}$: this can be estimated from the sensor data-sheet | ||||||
|   - $S_{rr}$: which is a deterministic signal that we choose. For simple tomography experiment, we can consider that it is equal to $0$ |   - The wanted sample's motion $S_{rr}$: this is a deterministic signal that we choose. | ||||||
|  |     For a simple tomography experiment, we can consider that it is equal to $0$ as we only want to compensate all the sample's vibrations | ||||||
| - The dynamics of the complete system comprising the micro-station and the nano-hexapod: $G$, $G_d$. | - The dynamics of the complete system comprising the micro-station and the nano-hexapod: $G$, $G_d$. | ||||||
|   To do so, we need to identify the dynamics of the micro-station (Section [[sec:micro_station_dynamics]]), include this dynamics in a model (Section [[sec:multi_body_model]]) and add a model of the nano-hexapod to the model (Section [[sec:nano_hexapod_design]]) |   To do so, we need to identify the dynamics of the micro-station (Section [[sec:micro_station_dynamics]]), include this dynamics in a model (Section [[sec:multi_body_model]]) and add a model of the nano-hexapod to the model (Section [[sec:nano_hexapod_design]]) | ||||||
| - The controller $K$ that will be designed in Section [[sec:robust_control_architecture]] | - The controller $K$ that will be designed in Section [[sec:robust_control_architecture]] | ||||||
| @@ -1232,6 +1247,11 @@ A more complete study of the control of the NASS is performed [[https://tdehaeze | |||||||
| ** General Conclusion | ** General Conclusion | ||||||
|  |  | ||||||
|  |  | ||||||
|  | ** Sensor Noise introduced by the Metrology | ||||||
|  | Say that is will introduce noise inside the bandwidth (100Hz) | ||||||
|  | This should not be significant. | ||||||
|  |  | ||||||
|  |  | ||||||
| ** Further Work | ** Further Work | ||||||
|  |  | ||||||
|  |  | ||||||
|   | |||||||
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