696 lines
		
	
	
		
			25 KiB
		
	
	
	
		
			HTML
		
	
	
	
	
	
			
		
		
	
	
			696 lines
		
	
	
		
			25 KiB
		
	
	
	
		
			HTML
		
	
	
	
	
	
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| <div id="content">
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| <h1 class="title">Actuators and Sensors</h1>
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| <div id="table-of-contents">
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| <h2>Table of Contents</h2>
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| <div id="text-table-of-contents">
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| <ul>
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| <li><a href="#org276c4ad">1. Sensors</a>
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| <ul>
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| <li><a href="#org0a80831">1.1. Inertial Sensors</a></li>
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| <li><a href="#org0c068fa">1.2. Bibliography</a></li>
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| </ul>
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| </li>
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| <li><a href="#org593acb0">2. Actuators</a>
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| <ul>
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| <li><a href="#org0b58b1b">2.1. Piezoelectric</a></li>
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| <li><a href="#orge32bc5a">2.2. Voice Coil</a></li>
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| </ul>
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| </li>
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| <li><a href="#org0469370">3. Suppliers</a>
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| <ul>
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| <li><a href="#org0523f3e">3.1. Actuators</a>
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| <ul>
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| <li><a href="#orgcbfd42b">3.1.1. Piezoelectric</a></li>
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| <li><a href="#org8640690">3.1.2. Voice coil</a></li>
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| </ul>
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| </li>
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| <li><a href="#orga4e4e43">3.2. Sensors</a>
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| <ul>
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| <li><a href="#org5b5cf6e">3.2.1. Accelerometers</a></li>
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| <li><a href="#orgbe7fa09">3.2.2. Geophones and Seismometers</a></li>
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| <li><a href="#org70d1162">3.2.3. Force sensor</a></li>
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| <li><a href="#org8d31cb1">3.2.4. Interferometers</a></li>
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| </ul>
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| </li>
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| <li><a href="#org95574ee">3.3. Positioning Systems</a></li>
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| </ul>
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| </li>
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| <li><a href="#org2e0edd4">4. ESRF Equipment</a>
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| <ul>
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| <li><a href="#orga3f5bf1">4.1. Geophones</a>
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| <ul>
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| <li><a href="#orgb7bdbf7">4.1.1. L-28LB</a></li>
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| <li><a href="#org905bbf5">4.1.2. L-4C</a></li>
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| </ul>
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| </li>
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| <li><a href="#org9cdcadd">4.2. Accelerometers</a>
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| <ul>
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| <li><a href="#org46ab727">4.2.1. Pieozoelectric acc. 356b18 - 3 axis</a></li>
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| <li><a href="#org6a4a7ff">4.2.2. Ceramic acc. 393B05 - 1 axis</a></li>
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| </ul>
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| </li>
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| </ul>
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| </li>
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| </ul>
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| </div>
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| </div>
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| 
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| <p>
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| <a href="../index.html">Back to main page</a>.
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| </p>
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| 
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| <div id="outline-container-org276c4ad" class="outline-2">
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| <h2 id="org276c4ad"><span class="section-number-2">1</span> Sensors</h2>
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| <div class="outline-text-2" id="text-1">
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| </div>
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| <div id="outline-container-org0a80831" class="outline-3">
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| <h3 id="org0a80831"><span class="section-number-3">1.1</span> Inertial Sensors</h3>
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| </div>
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| <div id="outline-container-org0c068fa" class="outline-3">
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| <h3 id="org0c068fa"><span class="section-number-3">1.2</span> Bibliography</h3>
 | |
| <div class="outline-text-3" id="text-1-2">
 | |
| <p>
 | |
| [<a href="#collette12_compar">collette12_compar</a>,<a href="#collette12_review">collette12_review</a>,<a href="#fleming13_review_nanom_resol_posit_sensor">fleming13_review_nanom_resol_posit_sensor</a>]</p>
 | |
| </div>
 | |
| </div>
 | |
| </div>
 | |
| 
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| <div id="outline-container-org593acb0" class="outline-2">
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| <h2 id="org593acb0"><span class="section-number-2">2</span> Actuators</h2>
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| <div class="outline-text-2" id="text-2">
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| </div>
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| <div id="outline-container-org0b58b1b" class="outline-3">
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| <h3 id="org0b58b1b"><span class="section-number-3">2.1</span> Piezoelectric</h3>
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| </div>
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| <div id="outline-container-orge32bc5a" class="outline-3">
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| <h3 id="orge32bc5a"><span class="section-number-3">2.2</span> Voice Coil</h3>
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| </div>
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| </div>
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| 
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| <div id="outline-container-org0469370" class="outline-2">
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| <h2 id="org0469370"><span class="section-number-2">3</span> Suppliers</h2>
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| <div class="outline-text-2" id="text-3">
 | |
| </div>
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| <div id="outline-container-org0523f3e" class="outline-3">
 | |
| <h3 id="org0523f3e"><span class="section-number-3">3.1</span> Actuators</h3>
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| <div class="outline-text-3" id="text-3-1">
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| </div>
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| <div id="outline-container-orgcbfd42b" class="outline-4">
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| <h4 id="orgcbfd42b"><span class="section-number-4">3.1.1</span> Piezoelectric</h4>
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| <div class="outline-text-4" id="text-3-1-1">
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| <ul class="org-ul">
 | |
| <li><a href="http://www.cedrat-technologies.com/">http://www.cedrat-technologies.com/</a></li>
 | |
| <li><a href="https://www.physikinstrumente.com/en/">https://www.physikinstrumente.com/en/</a></li>
 | |
| </ul>
 | |
| </div>
 | |
| </div>
 | |
| 
 | |
| <div id="outline-container-org8640690" class="outline-4">
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| <h4 id="org8640690"><span class="section-number-4">3.1.2</span> Voice coil</h4>
 | |
| <div class="outline-text-4" id="text-3-1-2">
 | |
| <ul class="org-ul">
 | |
| <li><a href="https://www.geeplus.com/">https://www.geeplus.com/</a></li>
 | |
| <li><a href="https://www.maccon.de/en.html">https://www.maccon.de/en.html</a></li>
 | |
| <li><a href="https://www.tds-pp.com/en/">https://www.tds-pp.com/en/</a></li>
 | |
| <li><a href="https://www.h2wtech.com/">https://www.h2wtech.com/</a></li>
 | |
| <li><a href="http://www.pbasystems.com.sg/">http://www.pbasystems.com.sg/</a></li>
 | |
| <li><a href="https://www.celeramotion.com/">https://www.celeramotion.com/</a></li>
 | |
| <li><a href="http://www.beikimco.com/">http://www.beikimco.com/</a></li>
 | |
| <li><a href="https://www.electromate.com/">https://www.electromate.com/</a></li>
 | |
| <li><a href="https://www.magneticinnovations.com/">https://www.magneticinnovations.com/</a></li>
 | |
| </ul>
 | |
| </div>
 | |
| </div>
 | |
| </div>
 | |
| 
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| <div id="outline-container-orga4e4e43" class="outline-3">
 | |
| <h3 id="orga4e4e43"><span class="section-number-3">3.2</span> Sensors</h3>
 | |
| <div class="outline-text-3" id="text-3-2">
 | |
| </div>
 | |
| <div id="outline-container-org5b5cf6e" class="outline-4">
 | |
| <h4 id="org5b5cf6e"><span class="section-number-4">3.2.1</span> Accelerometers</h4>
 | |
| </div>
 | |
| 
 | |
| <div id="outline-container-orgbe7fa09" class="outline-4">
 | |
| <h4 id="orgbe7fa09"><span class="section-number-4">3.2.2</span> Geophones and Seismometers</h4>
 | |
| <div class="outline-text-4" id="text-3-2-2">
 | |
| <ul class="org-ul">
 | |
| <li><a href="http://www.sercel.com/products/Pages/seismometers.aspx">http://www.sercel.com/products/Pages/seismometers.aspx</a></li>
 | |
| </ul>
 | |
| </div>
 | |
| </div>
 | |
| 
 | |
| <div id="outline-container-org70d1162" class="outline-4">
 | |
| <h4 id="org70d1162"><span class="section-number-4">3.2.3</span> Force sensor</h4>
 | |
| </div>
 | |
| 
 | |
| <div id="outline-container-org8d31cb1" class="outline-4">
 | |
| <h4 id="org8d31cb1"><span class="section-number-4">3.2.4</span> Interferometers</h4>
 | |
| <div class="outline-text-4" id="text-3-2-4">
 | |
| <ul class="org-ul">
 | |
| <li><a href="http://www.attocube.com/">http://www.attocube.com/</a></li>
 | |
| </ul>
 | |
| </div>
 | |
| </div>
 | |
| </div>
 | |
| 
 | |
| <div id="outline-container-org95574ee" class="outline-3">
 | |
| <h3 id="org95574ee"><span class="section-number-3">3.3</span> Positioning Systems</h3>
 | |
| <div class="outline-text-3" id="text-3-3">
 | |
| <ul class="org-ul">
 | |
| <li><a href="https://www.aerotech.com/">https://www.aerotech.com/</a></li>
 | |
| </ul>
 | |
| </div>
 | |
| </div>
 | |
| </div>
 | |
| 
 | |
| <div id="outline-container-org2e0edd4" class="outline-2">
 | |
| <h2 id="org2e0edd4"><span class="section-number-2">4</span> ESRF Equipment</h2>
 | |
| <div class="outline-text-2" id="text-4">
 | |
| </div>
 | |
| <div id="outline-container-orga3f5bf1" class="outline-3">
 | |
| <h3 id="orga3f5bf1"><span class="section-number-3">4.1</span> Geophones</h3>
 | |
| <div class="outline-text-3" id="text-4-1">
 | |
| </div>
 | |
| <div id="outline-container-orgb7bdbf7" class="outline-4">
 | |
| <h4 id="orgb7bdbf7"><span class="section-number-4">4.1.1</span> L-28LB</h4>
 | |
| <div class="outline-text-4" id="text-4-1-1">
 | |
| <ul class="org-ul">
 | |
| <li><a href="http://www.sercel.com/products/Pages/seismometers.aspx">http://www.sercel.com/products/Pages/seismometers.aspx</a></li>
 | |
| <li><a href="files/Geophones_specifications_Sercel_EN.pdf">Data Sheet</a>.</li>
 | |
| </ul>
 | |
| 
 | |
| 
 | |
| <div id="orga46a9d9" class="figure">
 | |
| <p><img src="./figs/L28LB.png" alt="L28LB.png" />
 | |
| </p>
 | |
| <p><span class="figure-number">Figure 1: </span>Picture of the L-28LB Geophone</p>
 | |
| </div>
 | |
| 
 | |
| 
 | |
| <table id="orgccdbd45" border="2" cellspacing="0" cellpadding="6" rules="groups" frame="hsides">
 | |
| <caption class="t-above"><span class="table-number">Table 1:</span> L-28LB Parameters</caption>
 | |
| 
 | |
| <colgroup>
 | |
| <col  class="org-left" />
 | |
| 
 | |
| <col  class="org-right" />
 | |
| </colgroup>
 | |
| <tbody>
 | |
| <tr>
 | |
| <td class="org-left">Natural Frequency [Hz]</td>
 | |
| <td class="org-right">4.5</td>
 | |
| </tr>
 | |
| 
 | |
| <tr>
 | |
| <td class="org-left">Weight [g]</td>
 | |
| <td class="org-right">140</td>
 | |
| </tr>
 | |
| 
 | |
| <tr>
 | |
| <td class="org-left">Sensitivity [V/(m/s)]</td>
 | |
| <td class="org-right">31.3</td>
 | |
| </tr>
 | |
| </tbody>
 | |
| </table>
 | |
| 
 | |
| <p>
 | |
| We define the parameters of the geophone and we plot its bode plot (figure <a href="#orge63acb0">2</a>).
 | |
| </p>
 | |
| <div class="org-src-container">
 | |
| <pre class="src src-matlab">w0 = <span style="color: #BFEBBF;">4</span>.<span style="color: #BFEBBF;">5</span><span style="color: #7CB8BB;">*</span><span style="color: #BFEBBF;">2</span><span style="color: #7CB8BB;">*</span><span style="color: #BFEBBF;">pi</span>; <span style="color: #7F9F7F;">% [rad/s]</span>
 | |
| ksi = <span style="color: #BFEBBF;">0</span>.<span style="color: #BFEBBF;">38</span>;
 | |
| G0 = <span style="color: #BFEBBF;">31</span>.<span style="color: #BFEBBF;">3</span>; <span style="color: #7F9F7F;">% [V/(m/s)]</span>
 | |
| G = G0<span style="color: #7CB8BB;">*</span><span style="color: #DCDCCC;">(</span>s<span style="color: #7CB8BB;">/</span>w0<span style="color: #DCDCCC;">)</span><span style="color: #7CB8BB;">^</span><span style="color: #BFEBBF;">2</span><span style="color: #7CB8BB;">/</span><span style="color: #DCDCCC;">(</span><span style="color: #BFEBBF;">(</span>s<span style="color: #7CB8BB;">/</span>w0<span style="color: #BFEBBF;">)</span><span style="color: #7CB8BB;">^</span><span style="color: #BFEBBF;">2</span> <span style="color: #7CB8BB;">+</span> <span style="color: #BFEBBF;">2</span><span style="color: #7CB8BB;">*</span>ksi<span style="color: #7CB8BB;">*</span><span style="color: #BFEBBF;">(</span>s<span style="color: #7CB8BB;">/</span>w0<span style="color: #BFEBBF;">)</span> <span style="color: #7CB8BB;">+</span> <span style="color: #BFEBBF;">1</span><span style="color: #DCDCCC;">)</span>;
 | |
| </pre>
 | |
| </div>
 | |
| 
 | |
| 
 | |
| <div id="orge63acb0" class="figure">
 | |
| <p><img src="figs/L28LB_bode_plot.png" alt="L28LB_bode_plot.png" />
 | |
| </p>
 | |
| <p><span class="figure-number">Figure 2: </span>Bode plot of the L-28LB Geophone</p>
 | |
| </div>
 | |
| </div>
 | |
| </div>
 | |
| 
 | |
| <div id="outline-container-org905bbf5" class="outline-4">
 | |
| <h4 id="org905bbf5"><span class="section-number-4">4.1.2</span> L-4C</h4>
 | |
| <div class="outline-text-4" id="text-4-1-2">
 | |
| <ul class="org-ul">
 | |
| <li><a href="http://www.sercel.com/products/Pages/seismometers.aspx">http://www.sercel.com/products/Pages/seismometers.aspx</a></li>
 | |
| <li><a href="files/Geophones_specifications_Sercel_EN.pdf">Data Sheet</a>.</li>
 | |
| </ul>
 | |
| 
 | |
| 
 | |
| <div id="org766cdeb" class="figure">
 | |
| <p><img src="./figs/L4C.png" alt="L4C.png" />
 | |
| </p>
 | |
| <p><span class="figure-number">Figure 3: </span>Picture of the L-4C Geophone</p>
 | |
| </div>
 | |
| 
 | |
| <table id="orgc33bbe7" border="2" cellspacing="0" cellpadding="6" rules="groups" frame="hsides">
 | |
| <caption class="t-above"><span class="table-number">Table 2:</span> L4C Parameters</caption>
 | |
| 
 | |
| <colgroup>
 | |
| <col  class="org-left" />
 | |
| 
 | |
| <col  class="org-right" />
 | |
| </colgroup>
 | |
| <tbody>
 | |
| <tr>
 | |
| <td class="org-left">Natural Frequency [Hz]</td>
 | |
| <td class="org-right">1</td>
 | |
| </tr>
 | |
| 
 | |
| <tr>
 | |
| <td class="org-left">Weight [g]</td>
 | |
| <td class="org-right">2150</td>
 | |
| </tr>
 | |
| 
 | |
| <tr>
 | |
| <td class="org-left">Sensitivity [V/(m/s)]</td>
 | |
| <td class="org-right">276.8</td>
 | |
| </tr>
 | |
| </tbody>
 | |
| </table>
 | |
| 
 | |
| <p>
 | |
| The transfer function from the velocity and the measured voltage is defined below.
 | |
| </p>
 | |
| 
 | |
| <p>
 | |
| Its bode plot is shown on figure <a href="#orgacff881">4</a>.
 | |
| </p>
 | |
| 
 | |
| <div class="org-src-container">
 | |
| <pre class="src src-matlab">w0 = <span style="color: #BFEBBF;">2</span><span style="color: #7CB8BB;">*</span><span style="color: #BFEBBF;">pi</span>; <span style="color: #7F9F7F;">% [rad/s]</span>
 | |
| ksi = <span style="color: #BFEBBF;">0</span>.<span style="color: #BFEBBF;">28</span>;
 | |
| G0 = <span style="color: #BFEBBF;">276</span>.<span style="color: #BFEBBF;">8</span>; <span style="color: #7F9F7F;">% [V/(m/s)]</span>
 | |
| G = G0<span style="color: #7CB8BB;">*</span><span style="color: #DCDCCC;">(</span>s<span style="color: #7CB8BB;">/</span>w0<span style="color: #DCDCCC;">)</span><span style="color: #7CB8BB;">^</span><span style="color: #BFEBBF;">2</span><span style="color: #7CB8BB;">/</span><span style="color: #DCDCCC;">(</span><span style="color: #BFEBBF;">(</span>s<span style="color: #7CB8BB;">/</span>w0<span style="color: #BFEBBF;">)</span><span style="color: #7CB8BB;">^</span><span style="color: #BFEBBF;">2</span> <span style="color: #7CB8BB;">+</span> <span style="color: #BFEBBF;">2</span><span style="color: #7CB8BB;">*</span>ksi<span style="color: #7CB8BB;">*</span><span style="color: #BFEBBF;">(</span>s<span style="color: #7CB8BB;">/</span>w0<span style="color: #BFEBBF;">)</span> <span style="color: #7CB8BB;">+</span> <span style="color: #BFEBBF;">1</span><span style="color: #DCDCCC;">)</span>;
 | |
| </pre>
 | |
| </div>
 | |
| 
 | |
| 
 | |
| <div id="orgacff881" class="figure">
 | |
| <p><img src="figs/L4C_bode_plot.png" alt="L4C_bode_plot.png" />
 | |
| </p>
 | |
| <p><span class="figure-number">Figure 4: </span>Bode plot of the L4C Geophone</p>
 | |
| </div>
 | |
| </div>
 | |
| </div>
 | |
| </div>
 | |
| 
 | |
| <div id="outline-container-org9cdcadd" class="outline-3">
 | |
| <h3 id="org9cdcadd"><span class="section-number-3">4.2</span> Accelerometers</h3>
 | |
| <div class="outline-text-3" id="text-4-2">
 | |
| </div>
 | |
| <div id="outline-container-org46ab727" class="outline-4">
 | |
| <h4 id="org46ab727"><span class="section-number-4">4.2.1</span> Pieozoelectric acc. 356b18 - 3 axis</h4>
 | |
| <div class="outline-text-4" id="text-4-2-1">
 | |
| <ul class="org-ul">
 | |
| <li><a href="https://www.pcbpiezotronics.fr/produit/accelerometres/356b18/">https://www.pcbpiezotronics.fr/produit/accelerometres/356b18/</a></li>
 | |
| <li><a href="files/356B18_G.pdf">Data Sheet</a>.</li>
 | |
| </ul>
 | |
| 
 | |
| 
 | |
| <div id="orgb63ba69" class="figure">
 | |
| <p><img src="./figs/356b18.jpg" alt="356b18.jpg" />
 | |
| </p>
 | |
| <p><span class="figure-number">Figure 5: </span>Pieozoelectric acc. 356b18 - 3 axis</p>
 | |
| </div>
 | |
| 
 | |
| 
 | |
| <table id="org01faa21" border="2" cellspacing="0" cellpadding="6" rules="groups" frame="hsides">
 | |
| <caption class="t-above"><span class="table-number">Table 3:</span> 356b18 Parameters</caption>
 | |
| 
 | |
| <colgroup>
 | |
| <col  class="org-left" />
 | |
| 
 | |
| <col  class="org-left" />
 | |
| </colgroup>
 | |
| <tbody>
 | |
| <tr>
 | |
| <td class="org-left">Sensitivity</td>
 | |
| <td class="org-left">0.102 \(V/(m/s^2)\)</td>
 | |
| </tr>
 | |
| 
 | |
| <tr>
 | |
| <td class="org-left">Measurement Range</td>
 | |
| <td class="org-left">4.9 \(m/s^2\) pk</td>
 | |
| </tr>
 | |
| 
 | |
| <tr>
 | |
| <td class="org-left">Frequency Range</td>
 | |
| <td class="org-left">0.5 to 3000 Hz</td>
 | |
| </tr>
 | |
| 
 | |
| <tr>
 | |
| <td class="org-left">resonant frequency</td>
 | |
| <td class="org-left">> 20000 hz</td>
 | |
| </tr>
 | |
| 
 | |
| <tr>
 | |
| <td class="org-left">broadband resolution</td>
 | |
| <td class="org-left">0.0005 \(m/s^2\) rms</td>
 | |
| </tr>
 | |
| </tbody>
 | |
| </table>
 | |
| </div>
 | |
| </div>
 | |
| 
 | |
| <div id="outline-container-org6a4a7ff" class="outline-4">
 | |
| <h4 id="org6a4a7ff"><span class="section-number-4">4.2.2</span> Ceramic acc. 393B05 - 1 axis</h4>
 | |
| <div class="outline-text-4" id="text-4-2-2">
 | |
| <ul class="org-ul">
 | |
| <li><a href="http://www.pcb.com/products.aspx?m=393B05">http://www.pcb.com/products.aspx?m=393B05</a></li>
 | |
| <li><a href="files/393B05_K.pdf">Data Sheet</a>.</li>
 | |
| </ul>
 | |
| 
 | |
| 
 | |
| <div id="org05fd303" class="figure">
 | |
| <p><img src="./figs/393b05.jpg" alt="393b05.jpg" />
 | |
| </p>
 | |
| <p><span class="figure-number">Figure 6: </span>Ceramic acc. 393B05 - 1 axis</p>
 | |
| </div>
 | |
| 
 | |
| 
 | |
| <table id="org57ce92c" border="2" cellspacing="0" cellpadding="6" rules="groups" frame="hsides">
 | |
| <caption class="t-above"><span class="table-number">Table 4:</span> 393B05 Parameters</caption>
 | |
| 
 | |
| <colgroup>
 | |
| <col  class="org-left" />
 | |
| 
 | |
| <col  class="org-left" />
 | |
| </colgroup>
 | |
| <tbody>
 | |
| <tr>
 | |
| <td class="org-left">Sensitivity (±10 %)</td>
 | |
| <td class="org-left">1.02 \(V/(m/s^2)\)</td>
 | |
| </tr>
 | |
| 
 | |
| <tr>
 | |
| <td class="org-left">Measurement Range</td>
 | |
| <td class="org-left">4.9 \(m/s^2\) pk</td>
 | |
| </tr>
 | |
| 
 | |
| <tr>
 | |
| <td class="org-left">Frequency Range (±5 %)</td>
 | |
| <td class="org-left">0.7 to 450 Hz</td>
 | |
| </tr>
 | |
| 
 | |
| <tr>
 | |
| <td class="org-left">resonant frequency</td>
 | |
| <td class="org-left">> 2500 hz</td>
 | |
| </tr>
 | |
| 
 | |
| <tr>
 | |
| <td class="org-left">broadband resolution</td>
 | |
| <td class="org-left">0.00004 \(m/s^2\) rms</td>
 | |
| </tr>
 | |
| </tbody>
 | |
| </table>
 | |
| </div>
 | |
| </div>
 | |
| </div>
 | |
| </div>
 | |
| </div>
 | |
| <div id="postamble" class="status">
 | |
| <p class="author">Author: Thomas Dehaeze</p>
 | |
| <p class="date">Created: 2019-03-15 ven. 17:13</p>
 | |
| <p class="validation"><a href="http://validator.w3.org/check?uri=referer">Validate</a></p>
 | |
| </div>
 | |
| </body>
 | |
| </html>
 |