782 lines
24 KiB
HTML
782 lines
24 KiB
HTML
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<title>Measurement of the ID31 Micro-Station</title>
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<body>
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<div id="content">
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<h1 class="title">Measurement of the ID31 Micro-Station</h1>
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<div id="table-of-contents">
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<h2>Table of Contents</h2>
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<div id="text-table-of-contents">
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<ul>
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<li><a href="#orgedddafa">1. Measurements of the dynamics of the station</a>
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<ul>
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<li><a href="#orga36da1d">1.1. Measurement 1</a>
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<ul>
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<li><a href="#orge2e9aa5">1.1.1. Notes</a></li>
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<li><a href="#orgbf085fe">1.1.2. Goal</a></li>
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<li><a href="#orgb55b74a">1.1.3. Results</a></li>
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</ul>
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</li>
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<li><a href="#org4cbbced">1.2. Measurement 2</a>
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<ul>
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<li><a href="#org4f66738">1.2.1. Notes</a></li>
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<li><a href="#org35b1dd8">1.2.2. Goal</a></li>
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<li><a href="#org056f3eb">1.2.3. Results</a></li>
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</ul>
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</li>
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<li><a href="#org331b6c4">1.3. Measurement 3</a>
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<ul>
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<li><a href="#org8fff7d6">1.3.1. Notes</a></li>
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<li><a href="#orgd23abf3">1.3.2. Goal</a></li>
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<li><a href="#orgf4d1928">1.3.3. Results</a></li>
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</ul>
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</li>
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</ul>
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</li>
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<li><a href="#orgde6e409">2. Measurements of perturbations</a>
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<ul>
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<li><a href="#org126095c">2.1. Noise coming from the control loop of each stage</a>
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<ul>
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<li><a href="#orgab096ae">2.1.1. Notes</a></li>
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<li><a href="#org47c2d2f">2.1.2. Goal</a></li>
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<li><a href="#org102801f">2.1.3. Results</a></li>
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</ul>
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</li>
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<li><a href="#org923bfac">2.2. Static guiding error estimation</a>
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<ul>
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<li><a href="#orga84faec">2.2.1. Notes</a></li>
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<li><a href="#orgc8a8da3">2.2.2. Goal</a></li>
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<li><a href="#org8326f68">2.2.3. Results</a></li>
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</ul>
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</li>
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<li><a href="#org2a30598">2.3. Ground motion measurements</a>
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<ul>
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<li><a href="#orgc95c429">2.3.1. Notes</a></li>
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<li><a href="#org6c05107">2.3.2. Goal</a></li>
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<li><a href="#org66c202c">2.3.3. Results</a></li>
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</ul>
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</li>
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<li><a href="#org87d61e5">2.4. Spindle Measurements</a>
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<ul>
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<li><a href="#org80d690f">2.4.1. Notes</a></li>
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<li><a href="#orgc12a999">2.4.2. Goal</a></li>
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<li><a href="#org7394e45">2.4.3. Results</a></li>
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</ul>
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</li>
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</ul>
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</li>
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<li><a href="#org459eb97">3. Ressources</a></li>
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<li><a href="#orge49573f">4. Other measurements</a></li>
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</ul>
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</div>
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</div>
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<div id="outline-container-orgedddafa" class="outline-2">
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<h2 id="orgedddafa"><span class="section-number-2">1</span> Measurements of the dynamics of the station</h2>
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<div class="outline-text-2" id="text-1">
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</div>
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<div id="outline-container-orga36da1d" class="outline-3">
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<h3 id="orga36da1d"><span class="section-number-3">1.1</span> Measurement 1</h3>
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<div class="outline-text-3" id="text-1-1">
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<p>
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<a href="2017-11-17 - Marc/index.html">Link to the analysis</a>
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</p>
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</div>
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<div id="outline-container-orge2e9aa5" class="outline-4">
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<h4 id="orge2e9aa5"><span class="section-number-4">1.1.1</span> Notes</h4>
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<div class="outline-text-4" id="text-1-1-1">
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<table border="2" cellspacing="0" cellpadding="6" rules="groups" frame="hsides">
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<col class="org-left" />
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</colgroup>
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<tbody>
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<tr>
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<td class="org-left"><b>Date</b></td>
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<td class="org-left">2017-11-17</td>
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</tr>
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<tr>
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<td class="org-left"><b>Sensors</b></td>
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<td class="org-left">Accelerometers</td>
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</tr>
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<tr>
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<td class="org-left"><b>Excitation</b></td>
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<td class="org-left">Instrumented Hammer</td>
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</tr>
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<tr>
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<td class="org-left"><b>Location</b></td>
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<td class="org-left">Laboratory</td>
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</tr>
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</tbody>
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</table>
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<p>
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Dynamics of the station is evaluated using instrumented hammer and accelerometers fixed on each stage.
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</p>
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</div>
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</div>
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<div id="outline-container-orgbf085fe" class="outline-4">
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<h4 id="orgbf085fe"><span class="section-number-4">1.1.2</span> Goal</h4>
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<div class="outline-text-4" id="text-1-1-2">
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<ul class="org-ul">
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<li>Obtain a first estimation of resonance frequencies</li>
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</ul>
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</div>
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</div>
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<div id="outline-container-orgb55b74a" class="outline-4">
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<h4 id="orgb55b74a"><span class="section-number-4">1.1.3</span> Results</h4>
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<div class="outline-text-4" id="text-1-1-3">
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<p>
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Resonances have been identified at 45Hz and 75Hz.
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However, the quality of the measurements are bad at low frequency.
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New measurements should be done with Geophones.
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</p>
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</div>
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</div>
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</div>
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<div id="outline-container-org4cbbced" class="outline-3">
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<h3 id="org4cbbced"><span class="section-number-3">1.2</span> Measurement 2</h3>
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<div class="outline-text-3" id="text-1-2">
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<p>
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<a href="2018-01-12 - Marc/index.html">Link to the analysis</a>
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</p>
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</div>
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<div id="outline-container-org4f66738" class="outline-4">
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<h4 id="org4f66738"><span class="section-number-4">1.2.1</span> Notes</h4>
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<div class="outline-text-4" id="text-1-2-1">
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<table border="2" cellspacing="0" cellpadding="6" rules="groups" frame="hsides">
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<td class="org-left"><b>Date</b></td>
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|
<td class="org-left">2018-01-12</td>
|
|
</tr>
|
|
|
|
<tr>
|
|
<td class="org-left"><b>Sensors</b></td>
|
|
<td class="org-left">Geophones</td>
|
|
</tr>
|
|
|
|
<tr>
|
|
<td class="org-left"><b>Excitation</b></td>
|
|
<td class="org-left">Instrumented Hammer</td>
|
|
</tr>
|
|
|
|
<tr>
|
|
<td class="org-left"><b>Location</b></td>
|
|
<td class="org-left">Laboratory</td>
|
|
</tr>
|
|
|
|
<tr>
|
|
<td class="org-left"><b>Notes</b></td>
|
|
<td class="org-left">Unglued Granite</td>
|
|
</tr>
|
|
</tbody>
|
|
</table>
|
|
</div>
|
|
</div>
|
|
|
|
<div id="outline-container-org35b1dd8" class="outline-4">
|
|
<h4 id="org35b1dd8"><span class="section-number-4">1.2.2</span> Goal</h4>
|
|
<div class="outline-text-4" id="text-1-2-2">
|
|
<p>
|
|
Obtain better coherence at low frequency.
|
|
</p>
|
|
</div>
|
|
</div>
|
|
|
|
<div id="outline-container-org056f3eb" class="outline-4">
|
|
<h4 id="org056f3eb"><span class="section-number-4">1.2.3</span> Results</h4>
|
|
<div class="outline-text-4" id="text-1-2-3">
|
|
<p>
|
|
Resonances at 42Hz, 70Hz and 125Hz have been identified.
|
|
The coherence is much better than when using accelerometers.
|
|
</p>
|
|
</div>
|
|
</div>
|
|
</div>
|
|
|
|
<div id="outline-container-org331b6c4" class="outline-3">
|
|
<h3 id="org331b6c4"><span class="section-number-3">1.3</span> Measurement 3</h3>
|
|
<div class="outline-text-3" id="text-1-3">
|
|
<p>
|
|
<a href="2018-10-12 - Marc/index.html">Link to the analysis</a>
|
|
</p>
|
|
</div>
|
|
|
|
<div id="outline-container-org8fff7d6" class="outline-4">
|
|
<h4 id="org8fff7d6"><span class="section-number-4">1.3.1</span> Notes</h4>
|
|
<div class="outline-text-4" id="text-1-3-1">
|
|
<table border="2" cellspacing="0" cellpadding="6" rules="groups" frame="hsides">
|
|
|
|
|
|
<colgroup>
|
|
<col class="org-left" />
|
|
|
|
<col class="org-left" />
|
|
</colgroup>
|
|
<tbody>
|
|
<tr>
|
|
<td class="org-left"><b>Date</b></td>
|
|
<td class="org-left">2018-10-12</td>
|
|
</tr>
|
|
|
|
<tr>
|
|
<td class="org-left"><b>Sensors</b></td>
|
|
<td class="org-left">Geophones</td>
|
|
</tr>
|
|
|
|
<tr>
|
|
<td class="org-left"><b>Excitation</b></td>
|
|
<td class="org-left">Instrumented Hammer</td>
|
|
</tr>
|
|
|
|
<tr>
|
|
<td class="org-left"><b>Location</b></td>
|
|
<td class="org-left">Experimental Hutch</td>
|
|
</tr>
|
|
</tbody>
|
|
</table>
|
|
</div>
|
|
</div>
|
|
|
|
<div id="outline-container-orgd23abf3" class="outline-4">
|
|
<h4 id="orgd23abf3"><span class="section-number-4">1.3.2</span> Goal</h4>
|
|
<div class="outline-text-4" id="text-1-3-2">
|
|
<p>
|
|
The station is now installed on the experimental hutch with a glued granite (final location).
|
|
The station is identified again.
|
|
</p>
|
|
</div>
|
|
</div>
|
|
|
|
<div id="outline-container-orgf4d1928" class="outline-4">
|
|
<h4 id="orgf4d1928"><span class="section-number-4">1.3.3</span> Results</h4>
|
|
</div>
|
|
</div>
|
|
</div>
|
|
|
|
<div id="outline-container-orgde6e409" class="outline-2">
|
|
<h2 id="orgde6e409"><span class="section-number-2">2</span> Measurements of perturbations</h2>
|
|
<div class="outline-text-2" id="text-2">
|
|
</div>
|
|
<div id="outline-container-org126095c" class="outline-3">
|
|
<h3 id="org126095c"><span class="section-number-3">2.1</span> Noise coming from the control loop of each stage</h3>
|
|
<div class="outline-text-3" id="text-2-1">
|
|
<p>
|
|
<a href="2018-10-15 - Marc/index.html">Link to the analysis</a>
|
|
</p>
|
|
</div>
|
|
|
|
<div id="outline-container-orgab096ae" class="outline-4">
|
|
<h4 id="orgab096ae"><span class="section-number-4">2.1.1</span> Notes</h4>
|
|
<div class="outline-text-4" id="text-2-1-1">
|
|
<table border="2" cellspacing="0" cellpadding="6" rules="groups" frame="hsides">
|
|
|
|
|
|
<colgroup>
|
|
<col class="org-left" />
|
|
|
|
<col class="org-left" />
|
|
</colgroup>
|
|
<tbody>
|
|
<tr>
|
|
<td class="org-left"><b>Date</b></td>
|
|
<td class="org-left">2018-10-15</td>
|
|
</tr>
|
|
|
|
<tr>
|
|
<td class="org-left"><b>Sensors</b></td>
|
|
<td class="org-left">Geophones</td>
|
|
</tr>
|
|
|
|
<tr>
|
|
<td class="org-left"><b>Location</b></td>
|
|
<td class="org-left">Experimental Hutch</td>
|
|
</tr>
|
|
</tbody>
|
|
</table>
|
|
</div>
|
|
</div>
|
|
|
|
<div id="outline-container-org47c2d2f" class="outline-4">
|
|
<h4 id="org47c2d2f"><span class="section-number-4">2.1.2</span> Goal</h4>
|
|
<div class="outline-text-4" id="text-2-1-2">
|
|
<p>
|
|
The objective is to estimate how much perturbation is injected in the system by the control systems of each stages of the micro station.
|
|
</p>
|
|
|
|
<p>
|
|
Geophones are located on the structure.
|
|
Each stage is turned on and off.
|
|
The signals of the geophones are then compared when the stage is on and off.
|
|
</p>
|
|
</div>
|
|
</div>
|
|
|
|
<div id="outline-container-org102801f" class="outline-4">
|
|
<h4 id="org102801f"><span class="section-number-4">2.1.3</span> Results</h4>
|
|
<div class="outline-text-4" id="text-2-1-3">
|
|
<ul class="org-ul">
|
|
<li>The translation stage seems to have effect on the tilt stage at 20Hz.</li>
|
|
<li>The Tilt stage and the Hexapod control systems have no effect on the motion of the other stages.</li>
|
|
<li>The spindle stage control system seems to induce a motion of the Hexapod on the Z direction around 20Hz.</li>
|
|
</ul>
|
|
</div>
|
|
</div>
|
|
</div>
|
|
|
|
<div id="outline-container-org923bfac" class="outline-3">
|
|
<h3 id="org923bfac"><span class="section-number-3">2.2</span> Static guiding error estimation</h3>
|
|
<div class="outline-text-3" id="text-2-2">
|
|
<p>
|
|
<a href="Static/index.html">Link to the analysis</a>
|
|
</p>
|
|
</div>
|
|
|
|
<div id="outline-container-orga84faec" class="outline-4">
|
|
<h4 id="orga84faec"><span class="section-number-4">2.2.1</span> Notes</h4>
|
|
<div class="outline-text-4" id="text-2-2-1">
|
|
<table border="2" cellspacing="0" cellpadding="6" rules="groups" frame="hsides">
|
|
|
|
|
|
<colgroup>
|
|
<col class="org-left" />
|
|
|
|
<col class="org-left" />
|
|
</colgroup>
|
|
<tbody>
|
|
<tr>
|
|
<td class="org-left"><b>Date</b></td>
|
|
<td class="org-left">2019-01-09</td>
|
|
</tr>
|
|
|
|
<tr>
|
|
<td class="org-left"><b>Sensors</b></td>
|
|
<td class="org-left">Interferometer</td>
|
|
</tr>
|
|
|
|
<tr>
|
|
<td class="org-left"><b>Location</b></td>
|
|
<td class="org-left">Experimental Hutch</td>
|
|
</tr>
|
|
</tbody>
|
|
</table>
|
|
|
|
<p>
|
|
Each stage is statically moved of all its stroke on after the other.
|
|
A metrology element is located at the sample position and its motion is measured in translations and rotations.
|
|
For each small displacement, the stage is stopped and the motion of the sample is recorded and averaged.
|
|
</p>
|
|
</div>
|
|
</div>
|
|
|
|
<div id="outline-container-orgc8a8da3" class="outline-4">
|
|
<h4 id="orgc8a8da3"><span class="section-number-4">2.2.2</span> Goal</h4>
|
|
<div class="outline-text-4" id="text-2-2-2">
|
|
<p>
|
|
The goal is to estimate the guiding errors of each stage.
|
|
</p>
|
|
</div>
|
|
</div>
|
|
|
|
<div id="outline-container-org8326f68" class="outline-4">
|
|
<h4 id="org8326f68"><span class="section-number-4">2.2.3</span> Results</h4>
|
|
</div>
|
|
</div>
|
|
|
|
<div id="outline-container-org2a30598" class="outline-3">
|
|
<h3 id="org2a30598"><span class="section-number-3">2.3</span> Ground motion measurements</h3>
|
|
<div class="outline-text-3" id="text-2-3">
|
|
<p>
|
|
<a href="Ground Motion/index.html">Link to the analysis</a>
|
|
</p>
|
|
</div>
|
|
|
|
<div id="outline-container-orgc95c429" class="outline-4">
|
|
<h4 id="orgc95c429"><span class="section-number-4">2.3.1</span> Notes</h4>
|
|
<div class="outline-text-4" id="text-2-3-1">
|
|
<table border="2" cellspacing="0" cellpadding="6" rules="groups" frame="hsides">
|
|
|
|
|
|
<colgroup>
|
|
<col class="org-left" />
|
|
|
|
<col class="org-left" />
|
|
</colgroup>
|
|
<tbody>
|
|
<tr>
|
|
<td class="org-left"><b>Date</b></td>
|
|
<td class="org-left">2014-10</td>
|
|
</tr>
|
|
|
|
<tr>
|
|
<td class="org-left"><b>Sensors</b></td>
|
|
<td class="org-left">Geophone</td>
|
|
</tr>
|
|
|
|
<tr>
|
|
<td class="org-left"><b>Location</b></td>
|
|
<td class="org-left">ID31 Floor</td>
|
|
</tr>
|
|
</tbody>
|
|
</table>
|
|
</div>
|
|
</div>
|
|
|
|
<div id="outline-container-org6c05107" class="outline-4">
|
|
<h4 id="org6c05107"><span class="section-number-4">2.3.2</span> Goal</h4>
|
|
<div class="outline-text-4" id="text-2-3-2">
|
|
<p>
|
|
The objective is to obtain the Power Spectral Density of the ground motion at the ID31 floor.
|
|
</p>
|
|
</div>
|
|
</div>
|
|
|
|
<div id="outline-container-org66c202c" class="outline-4">
|
|
<h4 id="org66c202c"><span class="section-number-4">2.3.3</span> Results</h4>
|
|
</div>
|
|
</div>
|
|
|
|
<div id="outline-container-org87d61e5" class="outline-3">
|
|
<h3 id="org87d61e5"><span class="section-number-3">2.4</span> Spindle Measurements</h3>
|
|
<div class="outline-text-3" id="text-2-4">
|
|
<p>
|
|
<a href="Spindle/index.html">Link to the analysis</a>
|
|
</p>
|
|
</div>
|
|
|
|
<div id="outline-container-org80d690f" class="outline-4">
|
|
<h4 id="org80d690f"><span class="section-number-4">2.4.1</span> Notes</h4>
|
|
<div class="outline-text-4" id="text-2-4-1">
|
|
<table border="2" cellspacing="0" cellpadding="6" rules="groups" frame="hsides">
|
|
|
|
|
|
<colgroup>
|
|
<col class="org-left" />
|
|
|
|
<col class="org-right" />
|
|
</colgroup>
|
|
<tbody>
|
|
<tr>
|
|
<td class="org-left"><b>Date</b></td>
|
|
<td class="org-right">2017-04-25</td>
|
|
</tr>
|
|
|
|
<tr>
|
|
<td class="org-left"><b>Location</b></td>
|
|
<td class="org-right">PEL Lab</td>
|
|
</tr>
|
|
</tbody>
|
|
</table>
|
|
</div>
|
|
</div>
|
|
|
|
<div id="outline-container-orgc12a999" class="outline-4">
|
|
<h4 id="orgc12a999"><span class="section-number-4">2.4.2</span> Goal</h4>
|
|
<div class="outline-text-4" id="text-2-4-2">
|
|
<p>
|
|
The goal is to estimate all the error motions induced by the Spindle
|
|
</p>
|
|
</div>
|
|
</div>
|
|
|
|
<div id="outline-container-org7394e45" class="outline-4">
|
|
<h4 id="org7394e45"><span class="section-number-4">2.4.3</span> Results</h4>
|
|
</div>
|
|
</div>
|
|
</div>
|
|
|
|
<div id="outline-container-org459eb97" class="outline-2">
|
|
<h2 id="org459eb97"><span class="section-number-2">3</span> Ressources</h2>
|
|
<div class="outline-text-2" id="text-3">
|
|
<p>
|
|
<a href="actuators-sensors/index.html">Actuators and Sensors</a>
|
|
</p>
|
|
</div>
|
|
</div>
|
|
|
|
<div id="outline-container-orge49573f" class="outline-2">
|
|
<h2 id="orge49573f"><span class="section-number-2">4</span> Other measurements</h2>
|
|
<div class="outline-text-2" id="text-4">
|
|
<ul class="org-ul">
|
|
<li><a href="huddle-test-geophones/index.html">Huddle Test - Geophones</a></li>
|
|
<li><a href="disturbance-measurement/index.html">Disturbance Measurement</a></li>
|
|
<li><a href="slip-ring-test/index.html">Slip Ring - Noise measurement</a></li>
|
|
<li><a href="static-measurements/index.html">Control System Measurement</a></li>
|
|
<li><a href="equipment/equipment.html">Equipment used for the measurements</a></li>
|
|
</ul>
|
|
</div>
|
|
</div>
|
|
</div>
|
|
<div id="postamble" class="status">
|
|
<p class="author">Author: Thomas Dehaeze</p>
|
|
<p class="date">Created: 2019-05-10 ven. 09:12</p>
|
|
<p class="validation"><a href="http://validator.w3.org/check?uri=referer">Validate</a></p>
|
|
</div>
|
|
</body>
|
|
</html>
|