hugo/content/article/butler11_posit_contr_lithog_equip.md

+++ title = "Position control in lithographic equipment" author = ["Dehaeze Thomas"] draft = true +++

Tags

[Multivariable Control]({{< relref "multivariable_control.md" >}}), [Positioning Stations]({{< relref "positioning_stations.md" >}})

Reference

(Butler 2011)

Author(s)

Butler, H.

Year

2011

Bibliography

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Butler, H. 2011. “Position Control in Lithographic Equipment.” IEEE Control Systems 31 (5): 28–47. doi:10.1109/mcs.2011.941882.