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@@ -75,9 +75,9 @@ which includes the resonance model
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and the resonance \\(P\_{ri}(s)\\) can be represented as one of the following forms
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\begin{align\*}
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P\_{ri}(s) &= \frac{\omega\_i^2}{s^2 + 2 \xi\_i \omega\_i s + \omega\_i^2} \\\\
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P\_{ri}(s) &= \frac{b\_{1i} \omega\_i s + b\_{0i} \omega\_i^2}{s^2 + 2 \xi\_i \omega\_i s + \omega\_i^2} \\\\
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P\_{ri}(s) &= \frac{b\_{2i} s^2 + b\_{1i} \omega\_i s + b\_{0i} \omega\_i^2}{s^2 + 2 \xi\_i \omega\_i s + \omega\_i^2}
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P\_{ri}(s) &= \frac{\omega\_i^2}{s^2 + 2 \zeta\_i \omega\_i s + \omega\_i^2} \\\\
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P\_{ri}(s) &= \frac{b\_{1i} \omega\_i s + b\_{0i} \omega\_i^2}{s^2 + 2 \zeta\_i \omega\_i s + \omega\_i^2} \\\\
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P\_{ri}(s) &= \frac{b\_{2i} s^2 + b\_{1i} \omega\_i s + b\_{0i} \omega\_i^2}{s^2 + 2 \zeta\_i \omega\_i s + \omega\_i^2}
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\end{align\*}
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@@ -98,11 +98,11 @@ There characteristics are shown on [Table 1](#table--tab:microactuator).
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Performance comparison of microactuators
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</div>
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| | Elect. | PZT | Thermal |
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|--------------|-----------------------------------------------|-----------------------------------------------|----------------------------|
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| TF | \\(\frac{K}{s^2 + 2\xi\omega s + \omega^2}\\) | \\(\frac{K}{s^2 + 2\xi\omega s + \omega^2}\\) | \\(\frac{K}{\tau s + 1}\\) |
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| \\(\tau\\) | \\(<\SI{0.1}{ms}\\) | \\(<\SI{0.05}{ms}\\) | \\(>\SI{0.1}{ms}\\) |
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| \\(\omega\\) | \\(1-\SI{2}{kHz}\\) | \\(20-\SI{25}{kHz}\\) | \\(>\SI{15}{kHz}\\) |
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| | Elect. | PZT | Thermal |
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|--------------|-------------------------------------------------|-------------------------------------------------|----------------------------|
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| TF | \\(\frac{K}{s^2 + 2\zeta\omega s + \omega^2}\\) | \\(\frac{K}{s^2 + 2\zeta\omega s + \omega^2}\\) | \\(\frac{K}{\tau s + 1}\\) |
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| \\(\tau\\) | \\(<\SI{0.1}{ms}\\) | \\(<\SI{0.05}{ms}\\) | \\(>\SI{0.1}{ms}\\) |
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| \\(\omega\\) | \\(1-\SI{2}{kHz}\\) | \\(20-\SI{25}{kHz}\\) | \\(>\SI{15}{kHz}\\) |
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### Single-Stage Actuation Systems {#single-stage-actuation-systems}
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@@ -210,10 +210,10 @@ Equation means that \\(S(s)\\) can be shaped similarly to the inverse of the cho
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One form of \\(W(s)\\) is taken as
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\begin{equation}
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W(s) = \frac{\frac{1}{M}s^2 + 2\xi\omega\frac{1}{\sqrt{M}}s + \omega^2}{s^2 + 2\omega\sqrt{\epsilon}s + \omega^2\epsilon}
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W(s) = \frac{\frac{1}{M}s^2 + 2\zeta\omega\frac{1}{\sqrt{M}}s + \omega^2}{s^2 + 2\omega\sqrt{\epsilon}s + \omega^2\epsilon}
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\end{equation}
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where \\(\omega\\) is the desired bandwidth, \\(\epsilon\\) is used to determine the desired low frequency level of sensitivity magnitude and \\(\xi\\) is the damping ratio.
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where \\(\omega\\) is the desired bandwidth, \\(\epsilon\\) is used to determine the desired low frequency level of sensitivity magnitude and \\(\zeta\\) is the damping ratio.
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The controller can then be synthesis using the linear matrix inequality (LMI) approach.
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