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@@ -373,282 +373,6 @@ The relationship among the external vibration, the microactuator stroke, and the
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The discussion suggests that in addition to the traditional wisdom of just increasing the resonant frequency, adding more stroke to the microactuator will give more freedom to the loop shaping for the control system design.
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## Dual-Stage System Control Considering Secondary Actuator Stroke Limitation {#dual-stage-system-control-considering-secondary-actuator-stroke-limitation}
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### Introduction {#introduction}
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### More Freedom Loop Shaping for Microactuator Controller Design {#more-freedom-loop-shaping-for-microactuator-controller-design}
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### Dual-Stage System Control Design for 5 kHz Bandwidth {#dual-stage-system-control-design-for-5-khz-bandwidth}
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### Evaluation with the Consideration of External Vibration and Microactuator Stroke {#evaluation-with-the-consideration-of-external-vibration-and-microactuator-stroke}
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### Conclusion {#conclusion}
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## Saturation Control for Microactuators in Dual-Stage Actuation Systems {#saturation-control-for-microactuators-in-dual-stage-actuation-systems}
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### Introduction {#introduction}
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### Modeling and Feedback Control {#modeling-and-feedback-control}
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### Anti-Windup Compensation Design {#anti-windup-compensation-design}
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### Simulation and Experimental Results {#simulation-and-experimental-results}
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### Conclusion {#conclusion}
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## Time Delay and Sampling Rate Effect on Control Performance of Dual-Stage Actuation Systems {#time-delay-and-sampling-rate-effect-on-control-performance-of-dual-stage-actuation-systems}
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### Introduction {#introduction}
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### Modeling of Time Delay {#modeling-of-time-delay}
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### Dual-Stage Actuation System Modeling with Time Delay for Controller Design {#dual-stage-actuation-system-modeling-with-time-delay-for-controller-design}
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### Controller Design with Time Delay for the Dual-Stage Actuation Systems {#controller-design-with-time-delay-for-the-dual-stage-actuation-systems}
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### Time Delay Effect on Dual-Stage System Control Performance {#time-delay-effect-on-dual-stage-system-control-performance}
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### Sampling Rate Effect on Dual-Stage System Control Performance {#sampling-rate-effect-on-dual-stage-system-control-performance}
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### Conclusion {#conclusion}
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## PZT Hysteresis Modeling and Compensation {#pzt-hysteresis-modeling-and-compensation}
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### Introduction {#introduction}
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### Modeling of Hysteresis {#modeling-of-hysteresis}
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#### PI Model {#pi-model}
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#### GPI Model {#gpi-model}
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#### Inverse GPI Model {#inverse-gpi-model}
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### Application of GPI Model to a PZT-Actuated Structure {#application-of-gpi-model-to-a-pzt-actuated-structure}
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#### Modeling of the Hysteresis in the PZT-Actuated Structure {#modeling-of-the-hysteresis-in-the-pzt-actuated-structure}
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#### Hysteresis Compensator Design {#hysteresis-compensator-design}
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#### Experimental Verification {#experimental-verification}
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### Conclusion {#conclusion}
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## Seeking Control of Dual-Stage Actuation Systems with Trajectory Optimization {#seeking-control-of-dual-stage-actuation-systems-with-trajectory-optimization}
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### Introduction {#introduction}
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### Current Profile of VCM Primary Actuator {#current-profile-of-vcm-primary-actuator}
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#### PTOS Method {#ptos-method}
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#### A General Form of VCM Current Profiles {#a-general-form-of-vcm-current-profiles}
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### Control System Structure for the Dual-Stage Actuation System {#control-system-structure-for-the-dual-stage-actuation-system}
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### Design of VCM Current Profile a[sub(v)] and Dual-Stage Reference Trajectory r[sub(d)] {#design-of-vcm-current-profile-a-sub--v--and-dual-stage-reference-trajectory-r-sub--d}
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### Seeking within PZT Milliactuator Stroke {#seeking-within-pzt-milliactuator-stroke}
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### Seeking over PZT Milliactuator Stroke {#seeking-over-pzt-milliactuator-stroke}
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### Conclusion {#conclusion}
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## High-Frequency Vibration Control Using PZT Active Damping {#high-frequency-vibration-control-using-pzt-active-damping}
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### Introduction {#introduction}
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### Singular Perturbation Method-Based Controller Design {#singular-perturbation-method-based-controller-design}
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#### Singular Perturbation Control Topology {#singular-perturbation-control-topology}
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#### Identification of Fast Dynamics Using PZT as a Sensor {#identification-of-fast-dynamics-using-pzt-as-a-sensor}
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#### Design of Controllers {#design-of-controllers}
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##### Fast Subsystem Estimator G[sub(v)][sup(\*)] {#fast-subsystem-estimator-g-sub--v--sup}
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##### Fast Controller C[sub(v)] {#fast-controller-c-sub--v}
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##### Slow Controller C[sub(v)] {#slow-controller-c-sub--v}
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#### Simulation and Experimental Results {#simulation-and-experimental-results}
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##### Frequency Responses {#frequency-responses}
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##### Time Responses {#time-responses}
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### H[sub(2)] Controller Design {#h-sub--2--controller-design}
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### Design of C[sub(d)](z) with H[sub(2)] Method and Notch Filters {#design-of-c-sub--d----z--with-h-sub--2--method-and-notch-filters}
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### Design of Mixed H[sub(2)]/H[sub(∞)] Controller C[sub(d)](z) {#design-of-mixed-h-sub--2--h-sub-----controller-c-sub--d----z}
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### Application Results {#application-results}
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#### System Modeling {#system-modeling}
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#### H[sub(2)] Active Damping Control {#h-sub--2--active-damping-control}
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#### Mixed H[sub(2)]/H[sub(∞)] Active Damping Control {#mixed-h-sub--2--h-sub-----active-damping-control}
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#### Experimental Results {#experimental-results}
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### Conclusion {#conclusion}
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## Self-Sensing Actuation of Dual-Stage Systems {#self-sensing-actuation-of-dual-stage-systems}
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### Introduction {#introduction}
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### Estimation of PZT Secondary Actuator’s Displacement y[sub(p)][sup(\*)] {#estimation-of-pzt-secondary-actuator-s-displacement-y-sub--p--sup}
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#### Self-Sensing Actuation and Bridge Circuit {#self-sensing-actuation-and-bridge-circuit}
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#### PZT Displacement Estimation Circuit H[sub(B)] {#pzt-displacement-estimation-circuit-h-sub--b}
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### Design of Controllers {#design-of-controllers}
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#### VCM Controller and Controller C[sub(D)] {#vcm-controller-and-controller-c-sub--d}
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#### PZT Controller {#pzt-controller}
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### Performance Evaluation {#performance-evaluation}
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#### Effectiveness of C[sub(D)] {#effectiveness-of-c-sub--d}
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#### Position Errors {#position-errors}
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### Conclusion {#conclusion}
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## Modeling and Control of a MEMS Micro X–Y Stage Media Platform {#modeling-and-control-of-a-mems-micro-x-y-stage-media-platform}
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### Introduction {#introduction}
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### MEMS Micro X–Y Stage {#mems-micro-x-y-stage}
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#### Design and Simulation of Micro X–Y Stage {#design-and-simulation-of-micro-x-y-stage}
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##### Static {#static}
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##### Dynamic {#dynamic}
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#### Modeling of Micro X–Y Stage {#modeling-of-micro-x-y-stage}
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#### Fabrication of the MEMS Micro X–Y Stage {#fabrication-of-the-mems-micro-x-y-stage}
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### Capacitive Self-Sensing Actuation {#capacitive-self-sensing-actuation}
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#### Design of CSSA Bridge Circuit {#design-of-cssa-bridge-circuit}
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#### Experimental Verification {#experimental-verification}
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### Robust Decoupling Controller Design {#robust-decoupling-controller-design}
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#### Choice of Pre-Shaping Filters {#choice-of-pre-shaping-filters}
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#### Controller Synthesis {#controller-synthesis}
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#### Frequency Responses {#frequency-responses}
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#### Time Responses {#time-responses}
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#### Robustness Analysis {#robustness-analysis}
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### Conclusion {#conclusion}
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## Conclusions {#conclusions}
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Many secondary actuators have been developed in addition to primary actuators in the field of mechanical actuation systems.
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@@ -6,11 +6,20 @@ keywords = ["Multivariable Control", "Robust Control"]
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draft = false
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+++
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- Tags :: [[id:d63e4d2d-f212-4d7e-b929-aa5133b5a694][Reference Books]], [[id:8d545c04-d04b-46da-8cd2-dafa020a94b3][Multivariable Control]]
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- Reference :: cite:skogestad05_multiv_feedb_contr
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- Author(s) :: Skogestad, S., & Postlethwaite, I.
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- Year :: 2005
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- PDF version :: [[file:pdfs/skogestad05_multiv_feedb_contr.pdf][link]]
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Tags
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: [Reference Books]({{< relref "reference_books.md" >}}), [Multivariable Control]({{< relref "multivariable_control.md" >}})
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Reference
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: (<a href="#citeproc_bib_item_2">Skogestad and Postlethwaite 2007</a>)
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Author(s)
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: Skogestad, S., & Postlethwaite, I.
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Year
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: 2007
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PDF version
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: [link](/ox-hugo/skogestad05_multiv_feedb_contr.pdf)
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<div style="display: none;">
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\(
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Reference in new issue
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