euspen_2020_notes/figs
2020-11-20 09:24:39 +01:00
..
acc_components.png Initial Commit 2020-11-20 09:24:39 +01:00
acc_conclusion.png Initial Commit 2020-11-20 09:24:39 +01:00
acc_intro.png Initial Commit 2020-11-20 09:24:39 +01:00
acc_results.png Initial Commit 2020-11-20 09:24:39 +01:00
accuracy_dynamics.png Initial Commit 2020-11-20 09:24:39 +01:00
aliasing_above_nyquist.png Initial Commit 2020-11-20 09:24:39 +01:00
aliasing_below_nyquist.png Initial Commit 2020-11-20 09:24:39 +01:00
aliasing_budget_phase.png Initial Commit 2020-11-20 09:24:39 +01:00
aliasing_budget_table.png Initial Commit 2020-11-20 09:24:39 +01:00
aliasing_conclusion.png Initial Commit 2020-11-20 09:24:39 +01:00
aliasing_equivalent_delay.png Initial Commit 2020-11-20 09:24:39 +01:00
aliasing_filter_example.png Initial Commit 2020-11-20 09:24:39 +01:00
aliasing_filter_order_bode.png Initial Commit 2020-11-20 09:24:39 +01:00
aliasing_filter_order_table.png Initial Commit 2020-11-20 09:24:39 +01:00
aliasing_modeling.png Initial Commit 2020-11-20 09:24:39 +01:00
aliasing_poles.png Initial Commit 2020-11-20 09:24:39 +01:00
aliasing_reduce_phase_lag.png Initial Commit 2020-11-20 09:24:39 +01:00
aliasing_resonances.png Initial Commit 2020-11-20 09:24:39 +01:00
aliasing_sensitivity_effect.png Initial Commit 2020-11-20 09:24:39 +01:00
aliasing_signals.png Initial Commit 2020-11-20 09:24:39 +01:00
aliasing_system.png Initial Commit 2020-11-20 09:24:39 +01:00
alising_filter_introduction.png Initial Commit 2020-11-20 09:24:39 +01:00
alising_much_above_nyquist.png Initial Commit 2020-11-20 09:24:39 +01:00
alising_nature.png Initial Commit 2020-11-20 09:24:39 +01:00
asml_chip_manufacturing_loop.png Initial Commit 2020-11-20 09:24:39 +01:00
asml_conclusion.png Initial Commit 2020-11-20 09:24:39 +01:00
asml_dual_stage_scanners.png Initial Commit 2020-11-20 09:24:39 +01:00
asml_euv.png Initial Commit 2020-11-20 09:24:39 +01:00
asml_hood_system.png Initial Commit 2020-11-20 09:24:39 +01:00
asml_imaging_process.png Initial Commit 2020-11-20 09:24:39 +01:00
asml_immersion.png Initial Commit 2020-11-20 09:24:39 +01:00
asml_machine_layout_bis.png Initial Commit 2020-11-20 09:24:39 +01:00
asml_machine_layout.png Initial Commit 2020-11-20 09:24:39 +01:00
asml_na_euv.png Initial Commit 2020-11-20 09:24:39 +01:00
asml_reflection_angle.png Initial Commit 2020-11-20 09:24:39 +01:00
asml_stepper_to_scanner.png Initial Commit 2020-11-20 09:24:39 +01:00
ball_bearing.png Initial Commit 2020-11-20 09:24:39 +01:00
ball_joint.png Initial Commit 2020-11-20 09:24:39 +01:00
buckling.png Initial Commit 2020-11-20 09:24:39 +01:00
case_1_leaf_springs.png Initial Commit 2020-11-20 09:24:39 +01:00
case_1.png Initial Commit 2020-11-20 09:24:39 +01:00
case_1dof_rotation.png Initial Commit 2020-11-20 09:24:39 +01:00
closed_box.png Initial Commit 2020-11-20 09:24:39 +01:00
compliant_1dof.png Initial Commit 2020-11-20 09:24:39 +01:00
compliant_example_1.png Initial Commit 2020-11-20 09:24:39 +01:00
constraining_dof_conventional.png Initial Commit 2020-11-20 09:24:39 +01:00
flexure_control_concept.png Initial Commit 2020-11-20 09:24:39 +01:00
flexure_current_control_results.png Initial Commit 2020-11-20 09:24:39 +01:00
flexure_delta_robot_schematic.png Initial Commit 2020-11-20 09:24:39 +01:00
flexure_delta_robot.png Initial Commit 2020-11-20 09:24:39 +01:00
flexure_dynamics_errors.png Initial Commit 2020-11-20 09:24:39 +01:00
flexure_electronics_board.png Initial Commit 2020-11-20 09:24:39 +01:00
flexure_equations.png Initial Commit 2020-11-20 09:24:39 +01:00
flexure_identification_coupling.png Initial Commit 2020-11-20 09:24:39 +01:00
flexure_identification.png Initial Commit 2020-11-20 09:24:39 +01:00
flexure_pivots.png Initial Commit 2020-11-20 09:24:39 +01:00
flexure_results.png Initial Commit 2020-11-20 09:24:39 +01:00
flexure_sensors.png Initial Commit 2020-11-20 09:24:39 +01:00
flexure_steps.png Initial Commit 2020-11-20 09:24:39 +01:00
focus_background.png Initial Commit 2020-11-20 09:24:39 +01:00
focus_conclusion.png Initial Commit 2020-11-20 09:24:39 +01:00
focus_control.png Initial Commit 2020-11-20 09:24:39 +01:00
focus_mechanical_system.png Initial Commit 2020-11-20 09:24:39 +01:00
focus_optical_design.png Initial Commit 2020-11-20 09:24:39 +01:00
focus_results.png Initial Commit 2020-11-20 09:24:39 +01:00
folded_leaf_springs.png Initial Commit 2020-11-20 09:24:39 +01:00
frf_direction_excitation.png Initial Commit 2020-11-20 09:24:39 +01:00
frf_experiment_conclusion.png Initial Commit 2020-11-20 09:24:39 +01:00
frf_experiment_non_optimized.png Initial Commit 2020-11-20 09:24:39 +01:00
frf_experiment_optimized.png Initial Commit 2020-11-20 09:24:39 +01:00
frf_experiment.png Initial Commit 2020-11-20 09:24:39 +01:00
frf_introduction.png Initial Commit 2020-11-20 09:24:39 +01:00
frf_mimo.png Initial Commit 2020-11-20 09:24:39 +01:00
frf_optimization_problem.png Initial Commit 2020-11-20 09:24:39 +01:00
frf_optimization_steps.png Initial Commit 2020-11-20 09:24:39 +01:00
galva_background.png Initial Commit 2020-11-20 09:24:39 +01:00
galva_ff_conclusion.png Initial Commit 2020-11-20 09:24:39 +01:00
galva_ff_control.png Initial Commit 2020-11-20 09:24:39 +01:00
galva_ff_dynamics.png Initial Commit 2020-11-20 09:24:39 +01:00
galva_ff_experiment.png Initial Commit 2020-11-20 09:24:39 +01:00
galva_ff_feedforward_architecture.png Initial Commit 2020-11-20 09:24:39 +01:00
galva_ff_high_tracking.png Initial Commit 2020-11-20 09:24:39 +01:00
galva_ff_low_tracking.png Initial Commit 2020-11-20 09:24:39 +01:00
galva_ff_multi_dof.png Initial Commit 2020-11-20 09:24:39 +01:00
galva_principle.png Initial Commit 2020-11-20 09:24:39 +01:00
galva_prototype.png Initial Commit 2020-11-20 09:24:39 +01:00
galva_schematic.png Initial Commit 2020-11-20 09:24:39 +01:00
isolation_conclusion.png Initial Commit 2020-11-20 09:24:39 +01:00
isolation_disturbances.png Initial Commit 2020-11-20 09:24:39 +01:00
isolation_find_contact.png Initial Commit 2020-11-20 09:24:39 +01:00
isolation_improved.png Initial Commit 2020-11-20 09:24:39 +01:00
isolation_localization_problem.png Initial Commit 2020-11-20 09:24:39 +01:00
isolation_nominal_disturbed_systems.png Initial Commit 2020-11-20 09:24:39 +01:00
isolation_simulation_results.png Initial Commit 2020-11-20 09:24:39 +01:00
isolation_simulation.png Initial Commit 2020-11-20 09:24:39 +01:00
laser_scan_background.png Initial Commit 2020-11-20 09:24:39 +01:00
leaf_springs.png Initial Commit 2020-11-20 09:24:39 +01:00
linear_bearing_leafs.png Initial Commit 2020-11-20 09:24:39 +01:00
machine_background.png Initial Commit 2020-11-20 09:24:39 +01:00
machine_basis_functions.png Initial Commit 2020-11-20 09:24:39 +01:00
machine_conclusion.png Initial Commit 2020-11-20 09:24:39 +01:00
machine_experiment_setup.png Initial Commit 2020-11-20 09:24:39 +01:00
machine_ilc.png Initial Commit 2020-11-20 09:24:39 +01:00
machine_physical_model.png Initial Commit 2020-11-20 09:24:39 +01:00
machine_results_1.png Initial Commit 2020-11-20 09:24:39 +01:00
machine_results_2.png Initial Commit 2020-11-20 09:24:39 +01:00
machine_schematic.png Initial Commit 2020-11-20 09:24:39 +01:00
machine_solution.png Initial Commit 2020-11-20 09:24:39 +01:00
magn_bear_conclusion.png Initial Commit 2020-11-20 09:24:39 +01:00
magn_bear_delay.png Initial Commit 2020-11-20 09:24:39 +01:00
magn_bear_distur.png Initial Commit 2020-11-20 09:24:39 +01:00
magn_bear_intro.png Initial Commit 2020-11-20 09:24:39 +01:00
magn_bear_results.png Initial Commit 2020-11-20 09:24:39 +01:00
magn_bear_setup.png Initial Commit 2020-11-20 09:24:39 +01:00
magn_controller.png Initial Commit 2020-11-20 09:24:39 +01:00
mimo_conclusion.png Initial Commit 2020-11-20 09:24:39 +01:00
mimo_example_bode.png Initial Commit 2020-11-20 09:24:39 +01:00
mimo_example_sensitivity.png Initial Commit 2020-11-20 09:24:39 +01:00
mimo_example_system.png Initial Commit 2020-11-20 09:24:39 +01:00
mimo_flexible_modes_coupling.png Initial Commit 2020-11-20 09:24:39 +01:00
mimo_flexible_modes.png Initial Commit 2020-11-20 09:24:39 +01:00
mimo_results.png Initial Commit 2020-11-20 09:24:39 +01:00
mimo_sensitivity_functions.png Initial Commit 2020-11-20 09:24:39 +01:00
mimo_sensitivity_performance.png Initial Commit 2020-11-20 09:24:39 +01:00
mimoopt_3d_opti.png Initial Commit 2020-11-20 09:24:39 +01:00
mimoopt_6dof_stage.png Initial Commit 2020-11-20 09:24:39 +01:00
mimoopt_case.png Initial Commit 2020-11-20 09:24:39 +01:00
mimoopt_frf_identification.png Initial Commit 2020-11-20 09:24:39 +01:00
mimoopt_performance.png Initial Commit 2020-11-20 09:24:39 +01:00
mimoopt_process.png Initial Commit 2020-11-20 09:24:39 +01:00
open_close_profil_torsion_stiffness.png Initial Commit 2020-11-20 09:24:39 +01:00
parallel_guiding.png Initial Commit 2020-11-20 09:24:39 +01:00
piezo_stepper_actuator.png Initial Commit 2020-11-20 09:24:39 +01:00
play_free_parallel_stage_solution.png Initial Commit 2020-11-20 09:24:39 +01:00
play_free_parallel_stage.png Initial Commit 2020-11-20 09:24:39 +01:00
position_resolution.png Initial Commit 2020-11-20 09:24:39 +01:00
position_stability.png Initial Commit 2020-11-20 09:24:39 +01:00
position_terminology.png Initial Commit 2020-11-20 09:24:39 +01:00
position_uncertainty.png Initial Commit 2020-11-20 09:24:39 +01:00
prec_6dof_abbe.png Initial Commit 2020-11-20 09:24:39 +01:00
prec_abbe_compensation.png Initial Commit 2020-11-20 09:24:39 +01:00
prec_abbe_min.png Initial Commit 2020-11-20 09:24:39 +01:00
prec_cmm_nano_cmm.png Initial Commit 2020-11-20 09:24:39 +01:00
prec_cmm.png Initial Commit 2020-11-20 09:24:39 +01:00
prec_comp_guid_bis.png Initial Commit 2020-11-20 09:24:39 +01:00
prec_comp_guid.png Initial Commit 2020-11-20 09:24:39 +01:00
prec_conclusion.png Initial Commit 2020-11-20 09:24:39 +01:00
prec_drive_concept.png Initial Commit 2020-11-20 09:24:39 +01:00
prec_interferometers.png Initial Commit 2020-11-20 09:24:39 +01:00
prec_inverse_kin_scan.png Initial Commit 2020-11-20 09:24:39 +01:00
prec_inverse_kin.png Initial Commit 2020-11-20 09:24:39 +01:00
prec_inverse_meas_head.png Initial Commit 2020-11-20 09:24:39 +01:00
prec_meas_large_mirrors.png Initial Commit 2020-11-20 09:24:39 +01:00
prec_mechanics.png Initial Commit 2020-11-20 09:24:39 +01:00
prec_nano_cmm_concept.png Initial Commit 2020-11-20 09:24:39 +01:00
prec_nano_how_to.png Initial Commit 2020-11-20 09:24:39 +01:00
prec_practical_6dof.png Initial Commit 2020-11-20 09:24:39 +01:00
prec_results_meas.png Initial Commit 2020-11-20 09:24:39 +01:00
prec_results_pico.png Initial Commit 2020-11-20 09:24:39 +01:00
prec_tilt_corection_bis.png Initial Commit 2020-11-20 09:24:39 +01:00
prec_tilt_corection.png Initial Commit 2020-11-20 09:24:39 +01:00
prec_vacuum_cham.png Initial Commit 2020-11-20 09:24:39 +01:00
predictability.png Initial Commit 2020-11-20 09:24:39 +01:00
reinforced_leaf_springs.png Initial Commit 2020-11-20 09:24:39 +01:00
resolution_stability.png Initial Commit 2020-11-20 09:24:39 +01:00
roller_bearing.png Initial Commit 2020-11-20 09:24:39 +01:00
roller_rail_guide.png Initial Commit 2020-11-20 09:24:39 +01:00
rotation_leaf_springs.png Initial Commit 2020-11-20 09:24:39 +01:00
stiffness_friction.png Initial Commit 2020-11-20 09:24:39 +01:00
thin_plate_torsion.png Initial Commit 2020-11-20 09:24:39 +01:00
torsion_stiffness_box_double_triangle.png Initial Commit 2020-11-20 09:24:39 +01:00
twing_fdi.png Initial Commit 2020-11-20 09:24:39 +01:00
twings_fdi_test.png Initial Commit 2020-11-20 09:24:39 +01:00
twins_motivation.png Initial Commit 2020-11-20 09:24:39 +01:00
twins_null_space_fdi.png Initial Commit 2020-11-20 09:24:39 +01:00
twins_objectives.png Initial Commit 2020-11-20 09:24:39 +01:00
twins_predictive_maintenance_bis.png Initial Commit 2020-11-20 09:24:39 +01:00
twins_predictive_maintenance_ter.png Initial Commit 2020-11-20 09:24:39 +01:00
twins_predictive_maintenance.png Initial Commit 2020-11-20 09:24:39 +01:00
twins_results_fdi.png Initial Commit 2020-11-20 09:24:39 +01:00
twins_roadmap_bis.png Initial Commit 2020-11-20 09:24:39 +01:00
twins_roadmap.png Initial Commit 2020-11-20 09:24:39 +01:00
vertical_stage_compliant.png Initial Commit 2020-11-20 09:24:39 +01:00
vertical_stage_leafs.png Initial Commit 2020-11-20 09:24:39 +01:00
x_y_rz_leafs.png Initial Commit 2020-11-20 09:24:39 +01:00
x_y_rz_stage.png Initial Commit 2020-11-20 09:24:39 +01:00
xyRz_positioning_challenge.png Initial Commit 2020-11-20 09:24:39 +01:00
z_stage_triangles.png Initial Commit 2020-11-20 09:24:39 +01:00